MONOLITHIC INTEGRATION OF HYBRID PEROVSKITE SINGLE CRYSTALS WITH SILICON FOR HIGHLY SENSITIVE X-RAY DETECTORS
20220281214 · 2022-09-08
Inventors
Cpc classification
G21K4/00
PHYSICS
H10K30/20
ELECTRICITY
H10K85/1135
ELECTRICITY
C09K2211/188
CHEMISTRY; METALLURGY
Y02E10/549
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
Abstract
Perovskite single crystal X-ray radiation detector devices including an X-ray wavelength-responsive active layer including an organolead trihalide perovskite single crystal, a substrate layer comprising an oxide, and a binding layer disposed between the active layer and the substrate layer. The binding layer including a binding molecule having a first functional group that bonds to the organolead trihalide perovskite single crystal and a second functional group that bonds with the oxide. Inclusion of the binding layer advantageously reduces device noise while retaining signal intensity.
Claims
1. A method of fabricating a perovskite single crystal device structure, the method comprising: coating a substrate layer with a binding material layer to create a modified substrate surface, the binding material layer including a first functional group that bonds to an organolead trihalide perovskite structure and a second functional group that bonds with an oxide; and growing an organolead trihalide perovskite single crystal structure on the modified substrate surface.
2. The method of claim 1, wherein growing includes providing an organolead trihalide perovskite seed structure on the modified substrate and growing the seed structure in a PbBr.sub.2:MABr precursor solution.
3. The method of claim 2, wherein the precursor solution has a ratio of PbBr.sub.2:MABr of about 0.6 to about 1.5.
4. The method of claim 1, wherein the substrate layer includes SiO.sub.2.
5. The method of claim 1, wherein the substrate layer includes iO.sub.2, ZnO, ITO, or other hydroxyl-rich oxide or metal
6. The method of claim 1, wherein the binding material layer comprises brominated (3-aminopropyl)triethoxysilane (APTES).
7. The method of claim 1, wherein the organolead trihalide perovskite single crystal structure includes a perovskite single crystal having a structure of APbX.sub.3, wherein A is methylammonium (CH.sub.3NH.sub.3.sup.+), Cs.sup.+, Ru.sup.+, or formamidinum (H.sub.2NCH═NH.sub.2.sup.+), and X is a halide anion, thiocyanate (SCN—) or a mixture thereof.
8. The method of claim 1, the organolead trihalide perovskite single crystal structure includes a perovskite single crystal having a structure of MAPbBr.sub.3, wherein MA is methylammonium (CH.sub.3NH.sub.3+).
9. The method of claim 1, wherein the organolead trihalide perovskite single crystal is grown to a thickness of between about 0.001 mm and about 100 mm.
10. The method of claim 1, further including roughening a surface of the substrate prior to the coating.
11. A method of fabricating a perovskite single crystal device structure, the method comprising: coating a silicon substrate layer with a binding material layer to create a modified substrate surface, the binding material layer including brominated (3-aminopropyl)triethoxysilane (APTES) or PEDOT:PSS or molecules that contain one of sulfonic acid groups, phosphate and carboxylate; and growing an organolead trihalide perovskite single crystal structure on the modified substrate surface, the organolead trihalide perovskite single crystal structure having a composition of MAPbBr.sub.3, wherein MA is methylammonium (CH.sub.3NH.sub.3.sup.+).
12. The method of claim 11, wherein the molecules have a formula R—X where R includes aliphatic or aromatic groups, and X includes one of —NH.sub.2 group, sulfonic acid groups, phosphate and carboxylate.
13. The method of claim 12, wherein R includes one of —(CH.sub.2).sub.nCH.sub.3, —(CH.sub.2).sub.nNH.sub.2, —(CH.sub.2).sub.nSi(OC.sub.2H.sub.5).sub.3, —(CH.sub.2).sub.nSi(OCH.sub.3).sub.3, or —(CH.sub.2).sub.nCF.sub.3.
14. The method of claim 11, wherein the silicon substrate layer includes SiO.sub.2.
15. The method of claim 11, wherein the organolead trihalide perovskite single crystal structure is grown to a thickness of between about 0.001 mm and about 100 mm.
16. The method of claim 11, further including roughening a surface of the silicon substrate layer prior to the coating.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING(S)
[0010] The detailed description is described with reference to the accompanying Figures. The use of the same reference numbers in different instances in the description and the Figures may indicate similar or identical items.
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DETAILED DESCRIPTION
[0040] Integrating MAPbBr.sub.3 SCs onto a Si Wafer
[0041] The mechanical adhesion of MAPbBr.sub.3 SCs to a Si wafer is very weak if the MAPbBr.sub.3 SCs are directly grown on Si, due to weak bonds, such as hydrogen bonds, and van der Waals interactions. To address this issue, in certain embodiments, a layer including a binding molecule is added to connect the perovskite and the substrate by forming primary chemical bonds. In certain embodiments, a binding layer is disposed between the active layer and the substrate layer, where the binding layer includes a first functional group that bonds to the perovskite single crystal and a second functional group that bonds with oxide in the substrate. For example, in one specific embodiment, a layer including brominated (3-aminopropyl)triethoxysilane (APTES), whose chemical structure is shown in
[0042] A modified reverse-solubility method may be used to grow MAPbBr.sub.3 SCs on a Si wafer as described in Saidaminov, M. I. et al. High-quality bulk hybrid perovskite single crystals within minutes by inverse temperature crystallization. Nat Commun. 6, 7586 (2015). A pre-seeded MAPbBr.sub.3 SC with a size of <300 μm was placed onto the NH.sub.3Br-terminated molecules modified wafer and grown to a thickness of 2-3 mm, which is thick enough to absorb most of the X-ray energy below 50 keV, by keeping the Si wafer in the MAPbBr.sub.3/DMF solution at 70° C. for 6-8 hours.
[0043] Due to the chemical bonds formed at the interface, the single crystals grown on the functionalized Si wafers have a solid mechanical and electrical connection between Si and the perovskite crystals.
[0044] Of note is the automatic transition of MAPbBr.sub.3 material growth from the amorphous to crystalline phases despite the absence of a lattice match between Si and MAPbBr.sub.3. This can be explained by the small critical thickness in the perovskite layer to relaxation of the strain caused by the lattice mismatch and at least one order of magnitude smaller Young's modulus of the hybrid perovskite than those of most regular inorganic semiconductors, such as GaN, Si, GaAs et al. The results indicate that the perovskite crystals can be eventually grown on any substrate that can bond to APTES molecules. To verify this, MAPbBr.sub.3 SCs were grown on many surfaces that are needed for different types of device integration, such as indium tin oxide (ITO) or other types of oxides, metals, and even glass, as shown by the images in
Devices and Optoelectronic Properties of the Perovskite/Si Interfaces
[0045] In certain embodiments, photoactive devices have a structure as shown in
[0046] In certain embodiments, the perovskite-SC includes a perovskite single crystal having a structure of ABX3, wherein A is methylammonium (CH.sub.3NH.sub.3.sup.+), Cs.sup.+, formamidinum (H.sub.2NCHNH.sub.2.sup.+), Rb.sup.+ or a mixture thereof, B is Pb.sup.2+ which can be partially or completely replaced by other ions such as Bi.sup.3+, Sb.sup.3+, Sn.sup.2+ or a mixture thereof. The A, B and X ions are not limited to those above mentioned ions, but rather may comprise any ions whose ionic radius are suitable to form a stable perovskite structure. Methylammonium (CH.sub.3NH.sub.3+) may also be referred to herein as “MA”. One specific example is or MAPbBr.sub.3. Other material layers such as hole accepting/transport material layers and/or electron accepting/transport material layers may be included between the electrode layers and the active layer (e.g., perovskite-SC) as desired.
[0047] Useful cathode materials (and/or anode materials) include any transparent or semi-transparent conductive or semi-conductive material, such as metals or metal films, conductive polymers, carbon nanotubes, graphene, organic or inorganic transparent conducting films (TCFs), transparent conducting oxides (TCOs), etc. Specific examples of cathode materials include gallium (Ga), gold (Au), silver (Ag), tin titanium (Ti), indium tin oxide (ITO), indium (In), copper (Cu), carbon nanotubes, graphene, aluminum (Al), chromium (Cr), lead (Pb), platinum (Pt), and PEDOT.PSS. The dimensions of the cathode layer may be varied depending on the material used. For example, the cathode may have a thickness of between about 10 nm and about 100 nm or greater (e.g., less than about 200 nm, or less than about 1000 nm, or less than about 1 μm, or less than about 1 mm, or less than about 1 cm), depending on the conductivity of the materials used. Known deposition or thermal evaporation techniques may be used to form the cathode layer. A substrate, upon which an anode layer or a cathode layer may be formed, may be used to provide structural stability and may include glass, polymer, semiconductor materials, etc.
[0048] One specific device structure embodiment as shown in
[0049] The dipole layer with a large energy barrier for electron injection but small energy barrier for hole extraction yielded a small dark current and a large photocurrent of the Si-integrated MAPbBr.sub.3 SC device. The dark current density (J.sub.d) was 3-30 times lower than the control device (Au-anode MAPbBr.sub.3 SC device) under the same reverse bias (
[0050] The small dark current and large photocurrent of the Si-integrated device enabled sensitive light and X-ray detection. The visible light detection properties of the Si-integrated MAPbBr.sub.3 SC devices were evaluated. The external quantum efficiency (EQE) measurement in
[0051] The transport properties of MAPbBr.sub.3 SCs grown on Si were essentially the same as those grown in solution, as evidenced by the same carrier mobility of 201 cm2 V.sup.−1 s.sub.−1 measured by time of flight (ToF) (
Si-Integrated MAPbBr.SUB.3 .SC X-Ray Detectors
[0052] The mobility-lifetime (μτ) product of the MAPbBr.sub.3 SC was comparable to those best grown in solution without Si integration, as confirmed by the photoconductivity measurement shown in
[0053] Si-integrated SC, e.g., MAPbBr.sub.3 SC, devices prepared via a low-temperature solution-processed molecular bonding method with an inserted layer of brominated APTES molecules resulted in a significant reduction of dark current at higher bias, which is impressive for the Si-integrated SC detectors to sense a very low X-ray dose rate of 4.0 nGy.sub.air s.sup.−1 with high sensitivity of 2890 μC G.sub.air.sup.−1 cm.sup.−2. These performances were several orders of magnitude better than the state-of-the-art commercial (—Se X-ray detectors, paving the way for the commercialization of perovskite X-ray detectors for medical and security check applications, so that the X-rays to patients and passengers can be dramatically reduced. The relative low bias of −1 V allows the operation of such detectors to be powered by portable batteries. The methods described herein are low-cost, scalable, and enable integration of X-ray detectors with readout silicon circuits. In addition, these methods provide a facile way to integrate the perovskite SCs, e.g., MAPbBr.sub.3 SCs, onto various generally used substrates at low temperatures in solution, which opens a new avenue for the application of perovskite materials in much broader fields.
[0054] Organic functional groups (sulfonate, phosphate, carboxylate, et. al) have strong adhesion or bonding to heavy metal ions (i.e., Pb, Hg, Cd, et. al). In certain embodiments, hybrid perovskite single crystals can be integrated onto a sulfonate groups modified substrate (such as silicon, indium tin oxide (ITO) or other type of oxides, metals, and even glass) through a facile, low-temperature, solution process. The sulfonate groups-rich modified substrates show excellent absorption of Pb ions in the perovskite single crystal (see, e.g.,
[0055] The MAPbBr.sub.3 SC on substrate can be further processed into the device by depositing the upper electrode. As shown in
Examples
[0056] Materials. Methylamine bromine (MABr) (synthesized in the lab according to (see, U.S. Provisional Application Ser. No. 62/311,291, filed Mar. 21, 2016, titled “Sensitive X-Ray Detector Devices Including Organolead Trihalide Perovskite Single Crystals”), lead bromide (PbBr.sub.2) (>98%, Sigma-Aldrich), hydrobromic acid (HBr) (48% w/w aq. soln., Alfa Aesar), (3-Aminopropyl)triethoxysilane (APTES) (>99%, Sigma-Aldrich), N,N-Dimethylformamide (DMF) (>99.8%, Alfa Aesar), 1,2-dichlorobenzene (DCB) (>99%, Sigma-Aldrich), 2-propanol (IPA) (>99.5%, Sigma-Aldrich), C.sub.60 (>99.5%, Nano-C), BCP (>96%, Sigma-Aldrich).
[0057] Preparation of NH.sub.3Br-terminated molecule functionalized Si substrate. Sandpaper polished and precleaned Si(p-type) wafer was placed into a mixture of DCB and APTES solvent (20:1) for 12 hours at 50° C. and ultrasonically rinsed with IPA to obtain NH.sub.2-terminated molecules on the surface. Then the wafer was treated with HBr (aq) to convert the amino groups into —NH.sub.3Br groups.
[0058] Growth of Si-integrated MAPbBr.sub.3 SC. PbBr.sub.2 (2.31 g) and 0.67 g MABr (the molar ratio of PbBr.sub.2 to MABr is 1.05) were dissolved in 6 ml DMF to form a clear solution and then filtered into a 50 ml beaker. A small droplet of the solution was dropped onto a glass coverslip by bringing the pipette tip into contact with the coverslip. Then the slip was placed on the top of the beaker with the droplet side face down. After the DMF solvent evaporated at room temperature, the MAPbBr.sub.3 SC seed with a size of ˜300 μm was generated on the coverslip. Subsequently, the NH.sub.3Br-terminated molecule functionalized Si-wafer was put into the beaker, and the prepared seed was placed onto the wafer. Then the solution was heated to 70° C. and kept at temperature for 6-8 hours for the growth of the single crystal.
[0059] Device fabrication. The electron-transporting layers (20 nm C.sub.60 and 8 nm BCP) and semi-transparent cathode (25 nm Au) were sequentially deposited on the top surface of the MAPbBr.sub.3 SC through thermal evaporation.
[0060] Preparation of sulfonate groups functionalized substrate. The PEDOT:PSS polymers can be coated on the pre-cleaned substrates (such as ITO, Si) by spin-coating, and then the solvent removed by annealing 100-120° C. for several minutes. The PEDOT:PSS ratio is adjustable in order to change the content of sulfonate groups. Furthermore, the PSS can also be replaced by other molecules or polymers that contain high absorption groups (such as phosphate, carboxylate) for heavy metal ions (Pb).
[0061] Preparation of MAPbBr.sub.3/DMF solution for the growth of single crystals. Lead bromide (PbBr.sub.2) and Methylamine bromine (MABr) (the molar ratio of PbBr.sub.2 to MABr is 1-1.05) were dissolved in dimethylformamide (DMF) to form a clear solution, the concentration is in the range of 0.7-1.6 M, and then filtered into a beaker.
[0062] Growth of MAPbBr.sub.3 SC on functionalized substrate. The functionalized substrate was put into the beaker contained filtered MAPbBr.sub.3/DMF solution with the modification side up, and the prepared seed was placed onto the substrate. Then the solution was heated to 25-70° C. and kept at temperature for 6-48 hours for the growth of the single crystal. The growth temperature and time depends on the concentration of the MAPbBr.sub.3/DMF solution, high concentrated solution requires low temperature and long time for the growth. Correspondingly, low concentrated solution requires high temperature and short time for the growth. For example, if the MAPbBr.sub.3/DMF solution is 1.6 M, the single crystal can be obtained after 48 h growth at 27° C., while the MAPbBr.sub.3/DMF solution is 0.8 M, the single crystal can be obtained after 8 h growth at 75° C. The MAPbBr.sub.3 SC on substrate can be further processing into the device by deposing the upper electrode.
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[0064] Concerning the area of the X-ray beam and the detector, the dose rate was calculated with the correction factor derived as below:
[0065]
Characterization.
[0066] Morphology: The morphology of silicon-integrated MAPbBr.sub.3 SC was performed by scanning electron microscope (Quanta 200 FEG ESEM) and high resolution transmission electron microscopy (FEI OSIRIS, the cross-sectional samples were prepared by using focused-ion-beam equipment (FEI Helios 660)).
[0067] The two-dimensional XRD: The two-dimensional XRD pattern was measured with a Bruker-AXS D8 Discover Diffractometer.
[0068] Current density-voltage (J-V): The J-V curves were measured with a source-meter (Keithley 2400).
[0069] Workfunction of surfaces: The work function of surfaces was observed by Kelvin probe force microscopy (KPFM). A commercial AFM system (MFP-3D, Asylum Research, USA) and Pt/Ir-coated conductive probes (PPP-EFM, Nanosensors, Switzerland) were used to perform the KPFM measurement. A two-pass technique was employed. The first pass was used to acquire the topographic height; and then the conductive probe was lifted with respect to the specimen surface with a constant separation of 40 nm, approximately, and scanned to acquire the potential offset between the tip and the sample. An AC bias of 2 V amplitude at the first contact resonance frequency and a DC bias of 1 V were applied to the conductive probe.
[0070] External quantum efficiency (EQE): EQE was obtained with the Newport QE measurement kit by focusing a monochromatic beam of 35 Hz light onto the devices (optical power density was around 1 μW/cm.sup.2, light intensity was calibrated with Si a diode).
[0071] Response time: The response time was measured by using a 532 nm laser with an intensity similar to the monochromatic light from the EQE instrument which was on the order of several microwatts per square centimeter (μW cm.sup.−2). The light was modulated by a chopper, and the photocurrent signal was recorded with an oscilloscope. The response time under bias was derived from the decay process of the curve.
[0072] Mobility and transit time: The nobility of silicon-integrated MAPbBr.sub.3 SC was measured by the time-of-flight (ToF) method. The devices were illuminated by 337 nm laser pulses (SRS N2 laser with 4 ns width) from the Au electrode. The pulse laser generating weak photocurrent was first amplified by a SR-570 current preamplifier, which had a bandwidth of 1 MHz, and then recorded using an Agilent 1 GHz digital oscilloscope (Agilent DSO-X 3104A). The hole mobility was calculated from Equation (s1).
[0073] where d is the thickness of the single crystals, V is the applied voltage bias, p is the charge carrier mobility, and τ is the transit time of the charge carriers. The built-in potential in the device is as follows.
[0074] Trap density: Trap density was measured by thermal admittance spectroscopy (TAS). The experiments were performed by using an Agilent E4980A Precision LCR Meter with frequencies between 0.1 and 1000 kHz. The device was kept under one sun illumination during the entire measurement time with the incident light coming from the ITO side. The energy profile of trap density of states (tDOS) was derived from the angular frequency dependent capacitance with Equation (s2).
[0075] where C is the capacitance, ω the angular frequency, q is the elementary charge, kB is the Boltzmann constant, and T is the temperature. V.sub.bi and W are the built-in potential and depletion width, respectively, which were extracted from the Mott-Schottky analysis. The applied angular frequency ω defined an energetic demarcation:
where ω.sub.0 is the attempt-to-escape frequency.
[0076] PL lifetime: The experiments were performed by using a DeltaPro™ filter-based lifetime system with a 404 nm laser excitation source without attenuation. The emitted fluorescence of the MAPbBr.sub.3 SC was detected.
[0077] Noise, noise equivalent power (NEP), and specific detectivity (D)*: Noise current was measured at a different frequency by a Fast Fourier Transform (FFT) signal analyzer (Agilent 35670A) with a low noise current preamplifier. Specific detectivity was calculated according to Equation (s3).
[0078] where A is the device area, B is the bandwidth, and NEP is the noise equivalent power calculated from IQE and noise current.
[0079] Shot noise limit: The shot noise (i.sub.n,s) was calculated by:
i.sub.n,s=√{square root over (2eI.sub.dB)} (s4)
[0080] where Id is the dark current, e is the elementary charge, and B is the bandwidth.
[0081] Photoconductivity: Photoconductivity measurement was carried out on the MAPbBr.sub.3 SC device with a thickness of 2 mm and a device area of 32 mm.sup.2. Excitation light from a 390 nm LED, modulated at 35 Hz by a function generator, was illuminated on the Au cathode of the device. Different reverse biases were supplied by a Keithley 2400 source meter, and photocurrent was recorded by a SR-830 lock-in amplifier. A fitting of the observed photocurrent versus reversed bias voltage using modified Hecht equations yields both pi product and the surface charge recombination rate s.
[0082] All references, including publications, patent applications, and patents, cited herein are hereby incorporated by reference to the same extent as if each reference were individually and specifically indicated to be incorporated by reference and were set forth in its entirety herein.
[0083] The use of the terms “a” and “an” and “the” and “at least one” and similar referents in the context of describing the disclosed subject matter (especially in the context of the following claims) are to be construed to cover both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. The use of the term “at least one” followed by a list of one or more items (for example, “at least one of A and B”) is to be construed to mean one item selected from the listed items (A or B) or any combination of two or more of the listed items (A and B), unless otherwise indicated herein or clearly contradicted by context. The terms “comprising,” “having,” “including,” and “containing” are to be construed as open-ended terms (i.e., meaning “including, but not limited to,”) unless otherwise noted. Recitation of ranges of values herein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein, and each separate value is incorporated into the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The use of any and all examples, or example language (e.g., “such as”) provided herein, is intended merely to better illuminate the disclosed subject matter and does not pose a limitation on the scope of the invention unless otherwise claimed. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the invention.
[0084] Certain embodiments are described herein. Variations of those embodiments may become apparent to those of ordinary skill in the art upon reading the foregoing description. The inventors expect skilled artisans to employ such variations as appropriate, and the inventors intend for the embodiments to be practiced otherwise than as specifically described herein. Accordingly, this disclosure includes all modifications and equivalents of the subject matter recited in the claims appended hereto as permitted by applicable law. Moreover, any combination of the above-described elements in all possible variations thereof is encompassed by the disclosure unless otherwise indicated herein or otherwise clearly contradicted by context.