Flow rate regulating valve and fluid control apparatus using the same

Abstract

To provide a flow rate regulating valve capable of detecting a state where a flow path is fully closed even when there is no lead wire or the like for detecting the state where the flow path is fully closed. A flow rate regulating valve is a fluid regulating valve including a valve body for opening and closing fluid flow paths provided in a body and includes an actuator unit for moving the valve body, and the actuator unit includes a drive motor, a slider moved by a rotation of the motor, a cylindrical body mounted on the slider, and a shaft interlocked with the cylindrical body and provided with the valve body fixed to a distal end thereof. The motor is a stepping servomotor, and has a pressing control function for moving the valve body in the closing direction at a continuous rated torque.

Claims

1. A flow rate regulating valve comprising: a valve body for opening and closing a fluid flow path provided in a body; an actuator unit configured to move the valve body, wherein the actuator unit includes: a drive motor; a slider moved by a rotation of the motor; a cylindrical body attached to the slider; and a shaft interlocked with the cylindrical body and fixed to the valve body at a distal end thereof, and a spring which is arranged on a lower surface of the slider and presses the shaft downward, wherein the motor is a stepping servomotor, and can move the valve body in a closing direction at a continuous rated torque or below until a torque value becomes equal to or higher than a set value by a closed loop based on a signal of an encoder, and a closed position of the valve body can be detected, and, wherein the slider and the cylindrical body are unitized.

2. The flow rate regulating valve according to claim 1, wherein the motor performs a detection of the closed position of the valve body and the setting of a predetermined opening degree by means of a detection of an abnormal torque value.

3. The flow rate regulating valve according to claim 1, wherein the motor can control a position of the valve body by the closed loop based on the signal of the encoder, and can control a rotating speed of a rotary shaft of the motor, and setting of a predetermined opening is performed by control of the position of the valve body and the speed of the rotary shaft.

4. The flow rate regulating valve according to claim 3, wherein the motor performs a detection of the closed position of the valve body and the setting of the predetermined opening degree by means of a detection of an abnormal torque value.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a vertical cross-sectional view illustrating an embodiment of a flow rate regulating valve of the present invention.

(2) FIG. 2 is an enlarged view of a portion A of FIG. 1.

(3) FIG. 3 is an enlarged view of a portion B of FIG. 1.

(4) FIG. 4 is a drawing showing an example of a fluid control apparatus to which the flow rate regulating valve according to the present invention is applied.

(5) FIG. 5A corresponds to FIG. 1 in Patent Literature 1, and FIG. 5B corresponds to FIG. 2 in Patent Literature 1.

DESCRIPTION OF EMBODIMENT

(6) Referring to the drawings, a preferred example of the present invention will be described below in detail. However, dimensions, materials, shapes, relative arrangement and the like, and various manufacturing conditions of the components described in this example are not intended to limit the scope of the present invention unless otherwise specified, and are merely illustrative. In addition, although the directions of members and the like may sometimes be referred to as upper, lower, left and right depending of the directions in the drawings for the sake of convenience, they are not intended to limit the direction of members and the like when embodying or using in the present invention.

(7) As shown in FIG. 1 to FIG. 3, a flow rate regulating valve (1) according to the present invention is a flow rate regulating valve (1) including a body (60) provided with a fluid flow paths (61) and (62), a valve unit (2) having a valve body (49) for opening and closing the fluid flow path (61) and (62), and an actuator unit (3) for moving the valve body, the actuator unit (3) includes a drive motor (10); a slider (30) moved by a rotation of the motor rotary shaft (11); a cylindrical body (40) having a bottom and projecting downward from the slider (30), a shaft (47) interlocked with the cylindrical body (40) and fixed at a distal end thereof to the valve body (49), and a spring (43) which is disposed between an upper surface of a bottom plate (40a) of the cylindrical body (40) and a lower surface of the slider (30) to urge the valve body (49) toward a closed position. The motor (10) is a stepping servomotor, and has a pressing control function for moving the valve body toward the closed position at a continuous rated torque or below until a torque value becomes equal to or higher than a set value by a closed loop based on a signal of an encoder, and detection of the closed position is performed by means of the pressing control function.

(8) The motor (10) is fixed to the motor base (15) provided on an upper part of the flow rate regulating valve (1) by a bolt (14), the motor (10) is covered by a motor cover (17), and the motor cover (17) is fixed to the motor base (15) by means of a bolt (16).

(9) A handle (12) fixed to a motor rotary shaft (11) is mounted on an upper part of the motor (10), and the handle (12) is covered with a handle cover (13). The handle (12) is used for opening and closing operation without energization in the maintenance operation. Depending on a structure of the motor and the valve, there may be no handle (12) and no handle cover (13).

(10) A cable (70) for controlling the motor (10) is attached to a right side surface of the motor cover (17) via a cable plug (71) and an angle plug (72).

(11) The motor rotary shaft (11) and a coupling (20) are fixed by a stop screw (21), and the motor base (15) and the coupling (20) can be fixed by means of a setscrew (22). The setscrew (22) is provided to prevent foreign matters such as moisture and dust from entering into the interior.

(12) A bearing retainer (25) is attached to a lower surface of the motor base (15) by a bolt (26), and a lower surface of a bearing (24) for rotation of the motor rotary shaft (11) is in contact with the bearing retainer (25) and an upper surface thereof is fixed by a nut (23).

(13) A ball screw (32) is provided on a lower part of the motor base (15) on an extension of the motor rotary shaft (11), and rotary movement of the motor rotary shaft (11) is converted into axial movement by the ball screw (32).

(14) A stop ring (33) is fixed above the ball screw (32) by a bolt (34), and upward movement of the slider (30) is restricted by the stop ring (33).

(15) A cylindrical upper cover (38) covering the slider (30) is fixed to the lower part of the motor base (15) by a bolt (27), and a cylindrical guide (31) for guiding vertical movement of the slider (30) is provided on an inner surface of the upper cover (38).

(16) A cylindrical body (40) projecting downward from the slider (30) and having a through-hole (40b) at a center of a bottom surface is formed, and a shaft support (44) to be inserted into the through-hole (40b) for fixing a shaft (47) having a valve body (49) at a distal end thereof is fixed to a bottom plate (40a) of the cylindrical body (40) having a bottom.

(17) The cylindrical body (40) and the slider (30) are fixed by a bolt (45), and a spring seat (42) is provided on an upper surface of the shaft support (44). A spring (43) is provided between the spring seat (42) and a recess (41) provided on the lower surface of the slider (30), and with the presence of the spring (43), the shaft (47) does not move downward but only the slider (30) moves downward until motor torque reaches a certain value after the valve body (49) is brought into contact with a valve seat (63), that is, until the rotation of the motor (10) is stopped, so that an overload is prevented from being applied to an interface between the valve body (49) and the valve seat (63). In the case where an overload to be applied to the interface is allowed to some extent or when the overload can be prevented from applied to the interface by configuring an immediate stop is possible when the motor torque reaches a certain value, it is also possible not to provide the spring (43) and the shaft (47) or the shaft support (44) is fixed directly to the cylindrical body (40) or the slider (30).

(18) A roller adapter (35) and a cam follower (36) are attached to a lower left side of the upper cover (38), and the roller adapter (35) and the cam follower (36) are covered by a cover (37). The roller adapter (35) and the cam follower (36) are used for preventing the rotation of the slider (30) and for accurately converting the rotation of a motor shaft to the opening and closing operation of the valve.

(19) A valve stem (48) is connected to the distal end of the shaft (47), and the valve body (49) is formed at a front end of the valve stem (48).

(20) The body (60) includes a fluid inflow path (61), a fluid outflow path (62) and the valve seat (49) inside, and a bonnet (65) in which the valve stem (48) fits is fixed to an upper part of the body (60) by a fixing bolt (64).

(21) A bottomed cylindrical lower cover (57) is connected to a lower end of the upper cover (38), a through-hole to which an upper part of the bonnet (65) is fixed is formed at a center of a lower surface of the lower cover (57), and at a uppermost portion of the bonnet (65), a fixing bolt (56) having a through-hole through which the shaft (47) is inserted is screwed to a female screw formed at the uppermost portion of the bonnet (65).

(22) FIG. 4 shows an example of a fluid control apparatus (80) equipped with the flow rate regulating valve (1).

(23) The fluid control apparatus (80) includes the flow rate regulating valve (1) and a mass flow meter (81) provided on an upstream side thereof for eight lines, and supplies a fluid having a predetermined flow rate to a semiconductor manufacturing apparatus such as an epitaxial apparatus disposed on a downstream side of the fluid control apparatus (80) via each of the flow rate regulating valves (1).

(24) The fluid control apparatus (80) further includes a control box (82) connected to eight lines of the flow rate regulating valve (1) and the mass flow meter (81), a personal computer (monitoring apparatus) (83), and a PATLITE (registered trademark) (84) serving as an alarm output device.

(25) The control box (82) houses a Programmable Logic controller (PLC) connected to each of the flow rate regulating valves (1) and each mass flow meter, a power supply, a radio transmitter/receiver, a motor drive substrate, and the like.

(26) The PATLITE (registered trademark) (84) turns on a green lamp during normal operation, turns on both green and red when any of the motors (10) mounted on the each of the flow rate regulating valves (1) becomes abnormal, and turns off both green and red at the time of PLC failure and when the power is turned off.

(27) The control box (82) and each of the flow rate regulating valves (1) are connected by eight valve cables (85) in total, the control box (82) and each of the mass flow meter (81) are connected by an MFM cable (86) with eight L-shaped connectors (86a) in total, the control box (82) and the personal computer (83) are connected by a LAN cable (87), and the control box (82) and the PATLITE (registered trademark) (84) are connected by an alarm cable (88). The length of each cable (85) (86) (87) (88) is, for example, approximately 5 m.

(28) The personal computer (83) can perform setting of the opening and flow rate monitoring for all the flow rate regulating valves (1).

(29) According to the fluid control apparatus (80), the opening of each of the flow rate regulating valves (1) can be managed at a time. Further, by storing data such as torque in the personal computer (83), it becomes possible to compare initial data with current data, and evaluation of a deterioration state of the flow rate regulating valve (1) is enabled. Further, it becomes possible to reuse the stored opening value or the like, thereby making it easy to set the opening.

(30) In the above, the personal computer (83) may be replaced by an appropriate terminal (monitoring apparatus) such as a tablet or a smartphone, and the monitoring apparatus may be remotely operated from a position away from the location where the fluid control apparatus (80) is installed.

(31) In addition to the function of measuring torque, various sensors may also be incorporated in each of the flow rate regulating valves (1). For example, by incorporating an MEMS microphone, it is possible to remotely grasp the driving operation of the flow rate regulating valve (1), and to judge the abnormality in driving of the flow rate regulating valve (1) together with the torque signal. Further, by incorporating an MEMS humidity sensor, it is possible to determine whether or not a humidity around the motor (11) is normal. Further, by incorporating an MEMS temperature sensor, it is possible to determine whether or not a temperature around the motor (11) is normal. Further, by incorporating an MEMS acceleration sensor, it is possible to determine whether or not a vibration of the motor (11) itself is normal.

REFERENCE SIGNS LIST

(32) 1: flow rate regulating valve 2: valve unit 3: actuator unit 10: motor 11: motor rotary shaft 30: slider 40: cylindrical body 40a: bottom plate 47: shaft 49: valve body 60: body 61: fluid inflow path (fluid flow path) 62: fluid outflow path (fluid flow path) 80: fluid control apparatus 83: monitoring apparatus (personal computer)