OPTICAL SYSTEM, HEATING ARRANGEMENT, AND METHOD FOR HEATING AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM

Abstract

An optical system includes at least one optical element which has an optically effective surface and which is designed for an operating wavelength of less than 30 nm. The optical system also includes a heating arrangement for heating this optical element and comprising a plurality of IR emitters for irradiating the optically effective surface with IR radiation. The IR emitters are activatable and deactivatable independently of each other to variably set different heating profiles in the optical element. The optical system further includes at least one beam shaping unit for shaping the beam of the IR radiation steered onto the optically effective surface by the IR emitters. The optical system also includes a multi-fiber head comprising a multi-fiber connector for connecting optical fibers. IR radiation from a respective one of the IR emitters is suppliable by way of each of these optical fibers.

Claims

1. An optical system, comprising: an optical element comprising an optically effective surface configured to operate at an operating wavelength of less than 30 nm; a plurality of IR emitters configured to emit IR radiation; a plurality of optical fibers; a multi-fiber connector; and a beam shaping unit, wherein: for each IR emitter, the IR emitter has a corresponding optical fiber so that IR radiation emitted by the IR emitter is coupled into its corresponding optical fiber; the multi-fiber connector is connected to the optical fibers so that, for each IR emitter, the corresponding optical fiber supplies the IR radiation emitted by the IR emitter to the multi-fiber connector; the beam shaping unit is configured to shape a beam of the IR radiation emitted by the multi-fiber connector onto the optically effective surface of the optical element; and for each IR emitter, the IR emitter is activatable and deactivatable independently from the other IR emitters to variably set different heating profiles in the optical element.

2. The optical system of claim 1, wherein the beam shaping unit comprises a microstructured element.

3. The optical system of claim 1, wherein the beam shaping unit comprises a diffractive optical element.

4. The optical system of claim 1, wherein the beam shaping unit comprises a refractive optical element.

5. The optical system of claim 1, wherein the beam shaping unit comprises a plurality of beam shaping segments configured to irradiate different segments of the optically effective surface of the optical element with IR radiation.

6. The optical system of claim 5, wherein, for each IR emitter, the IR emitter has a corresponding beam shaping segment so that IR radiation emitted by the IR emitter is coupled into its corresponding beam shaping segment.

7. The optical system of claim 1, wherein the shaping unit is integral with the multi-fiber head.

8. The optical system of claim 1, further comprising a beam deflection unit between the beam shaping unit and the optical element along a path of the IR radiation through the optical system.

9. The optical system of claim 6, wherein the beam deflection unit is integral with a multi-fiber head, and the multi-fiber head comprises the multi-fiber connector.

10. The optical system of claim 6, wherein the beam deflection unit comprises an optical telescope.

11. The optical system of claim 1, wherein a beam path through the optical system for radiation at the operating wavelength is different from a beam path of the IR radiation through the optical system.

12. The optical system of claim 1, wherein a beam path through the optical system for radiation at the operating wavelength is outside of a beam path of the IR radiation through the optical system.

13. The optical system of claim 1, further comprising a unit configured to cool the IR emitters.

14. The optical system of claim 1, wherein the optical element comprises a mirror.

15. The optical system of claim 1, wherein the operating wavelength is less than 15 nm.

16. A method, comprising: emitting IR radiation from a plurality of IR emitters; for each of a plurality of IR emitters, coupling IR radiation emitted by the IR emitter into an optical fiber; for each optical fiber, coupling the IR radiation by its corresponding IR emitter into a multi-fiber connector; emitting the radiation from the multi-fiber connector and onto a beam shaping unit; emitting the radiation from the beam shaping unit and onto an optically effective surface of an optical element; and for each IR emitter, activating and/or deactivating the IR emitter independently from the other IR emitters to variably set different heating profiles in the optical element.

17. The method of claim 16, further comprising selectively heating the optical element based on an illumination setting used in the optical system.

18. The method of claim 16, further comprising heating the optical element to reduce a spatial and/or temporal variation of a temperature distribution in the optical element.

19. The method of claim 16, wherein the optical element comprises a mirror.

20. The method of claim 16, wherein the optical element has an operating wavelength of less than 30 nm.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In the figures:

[0046] FIG. 1 shows a schematic illustration of a possible structure of a heating arrangement according to the disclosure for heating an optical element in an optical system;

[0047] FIGS. 2A-2D show schematic illustrations for elucidating possible embodiments of a diffractive optical element used in a heating arrangement according to the disclosure;

[0048] FIG. 3 shows a schematic illustration for elucidating possible heating profiles that are able to be set on the optically effective surface of an optical element using a heating arrangement according to the disclosure;

[0049] FIG. 4 shows a schematic illustration of the possible structure of a heating arrangement for heating an optical element in an optical system in a further embodiment; and

[0050] FIG. 5 shows a schematic illustration of the possible structure of a microlithographic projection exposure apparatus designed for operation in the EUV.

DETAILED DESCRIPTION

[0051] FIG. 5 firstly shows a schematic representation of a projection exposure apparatus 500 which is designed for operation in the EUV and in which the disclosure is able to be realized in an exemplary manner.

[0052] According to FIG. 5, an illumination device of the projection exposure apparatus 500 comprises a field facet mirror 503 and a pupil facet mirror 504. The light from a light source unit comprising an EUV light source (plasma light source) 501 and a collector mirror 502 in the example is directed onto the field facet mirror 503. A first telescope mirror 505 and a second telescope mirror 506 are arranged in the light path downstream of the pupil facet mirror 504. A deflection mirror 507 is arranged downstream in the light path, the deflection mirror steering the radiation that is incident thereon at an object field in the object plane of a projection lens comprising six mirrors 521-526. At the location of the object field, a reflective structure-bearing mask 531 is arranged on a mask stage 530, the mask being imaged with the aid of the projection lens into an image plane in which a substrate 541 coated with a light-sensitive layer (photoresist) is situated on a wafer stage 540.

[0053] During operation of the optical system or microlithographic projection exposure apparatus, the electromagnetic radiation incident on the optically effective surface of the mirrors is partly absorbed and, as explained in the introduction, results in heating and an associated thermal expansion or deformation, which can in turn result in an impairment of the imaging properties of the optical system. The heating arrangement according to the disclosure or the method for heating an optical element can be applied for example to any desired mirror of the microlithographic projection exposure apparatus of FIG. 5.

[0054] FIG. 1 shows a schematic illustration for elucidating the possible structure of an arrangement according to the disclosure for heating an optical element in a first embodiment.

[0055] According to FIG. 1, the heating arrangement according to the disclosure comprises a plurality of IR emitters 101, 102, 103, 104 for example, which may also be present in greater or smaller number. By way of example, the IR emitters 101, 102, 103, 104 can be embodied as IR lasers or as IR LEDs. According to FIG. 1, the IR radiation generated by the IR emitters 101-104 strikes a beam shaping unit denoted by “130” via a microlens array 120—optionally provided to generate a collimated beam path—and, from the beam shaping unit, the IR radiation strikes the optically effective surface of an optical element or mirror (not depicted in FIG. 1).

[0056] The beam shaping unit 130 comprises at least one microstructured element, for example at least one diffractive optical element (DOE) or at least one refractive optical element (ROE). The beam shaping unit 130 can comprise a plurality of beam shaping segments, with each of these beam shaping segments being assigned to one of the IR emitters 101-104 in each case. These beam shaping segments bring about both beam shaping and a beam deflection in respect of the IR radiation to be steered to the optically effective surface of the optical element to be heated and can, once again, be realized as different regions on one and the same microstructured element or DOE, as is depicted purely schematically in FIGS. 2A-2D for different embodiments of beam shaping units 231-234. In further embodiments, corresponding beam shaping segments may also be realized on separate microstructured elements or DOEs.

[0057] According to FIG. 1, the optical system further comprises a multi-fiber head 110 comprising a multi-fiber connector 115 for connecting optical fibers, IR radiation from a respective one of the IR emitters 101, 102, 103, 104 being suppliable by way of each of these optical fibers. According to FIG. 1, the microlens array 120 and the beam shaping unit 130 are also integrated in the multi-fiber head 110.

[0058] Inter alia, the embodiment with the multi-fiber head 110 is desirable because a comparatively simple adjustment is facilitated, with the observance of allowed mechanical tolerances in respect of the optical fibers used for the radiation input coupling being able to be ensured at the same time.

[0059] FIG. 3 shows a schematic illustration for elucidating possible heating profiles which are able to be generated on the respective optical element or mirror using the heating arrangement according to the disclosure of FIG. 1. In this case, one beam shaping segment in the beam shaping unit of the heating arrangement is in each case typically assigned to each of the segments of the relevant heating profile such that activating or deactivating the IR emitter assigned to the respective beam shaping segment defines whether or not the relevant heating segment is actively heated in the currently set heating profile.

[0060] FIG. 4 shows a schematic diagram for elucidating the structure of a heating arrangement according to the disclosure in a further embodiment, with components that are analogous or substantially functionally identical in comparison with FIG. 1 being designated by reference numerals increased by “300”.

[0061] The heating arrangement according to FIG. 4 differs from that of FIG. 1 in that a beam deflection unit, for example in the form of an optical telescope 440 (a Galilean telescope in the exemplary embodiment), is additionally provided in the beam path downstream of the beam shaping unit 430 (whereas the entire beam deflection is provided by the beam shaping unit 130 according to FIG. 1). As indicated in FIG. 4, the effect of the beam deflection unit or optical telescope 440 is an increase in the deflection angles obtained overall by the heating arrangement, with the consequence that the beam shaping unit 430 is unburdened in this respect and can be restricted in terms of its optical effect to the region of relatively small deflection angles, for which a diffractive optical element (DOE), for instance, has a greater diffraction efficiency. In this case, the relevant deflection angle can typically be increased multiple times (e.g., by a factor of 5) by the additional effect of the beam deflection unit or telescope 440.

[0062] In embodiments, further provision can be made of a cooling unit for cooling the heating arrangement according to FIG. 1 or FIG. 4 (which possibly has high power densities).

[0063] Even though the disclosure has been described on the basis of specific embodiments, numerous variations and alternative embodiments will be apparent to a person skilled in the art, for example through combination and/or exchange of features of individual embodiments. Accordingly, it will be apparent to a person skilled in the art that such variations and alternative embodiments are also encompassed by the present disclosure, and the scope of the disclosure is restricted only within the scope of the appended patent claims and the equivalents thereof.