APPARATUS AND METHOD FOR EXPOSURE OF RELIEF PRECURSORS
20220276568 · 2022-09-01
Assignee
Inventors
Cpc classification
G03F7/7005
PHYSICS
International classification
Abstract
An apparatus for exposure of a relief precursor (P) which comprises a substrate layer and at least one photosensitive layer. The apparatus includes a carrying structure for carrying a relief precursor and an LED array configured to illuminate a photosensitive layer of the relief precursor carried by the carrying structure. The LED array is configured to illuminate simultaneously a predetermined surface area of at least 900 cm.sup.2. The LED array includes a plurality of subsets of one or more LEDs, each subset being individually controllable. The apparatus also includes a control unit to control the plurality of subsets individually, and such that an irradiation intensity difference in the predetermined surface area is within a predetermined range.
Claims
1. An apparatus for exposure of a relief precursor (P) which comprises a substrate layer and at least one photosensitive layer, said apparatus comprising: a carrying structure for carrying a relief precursor; a LED array configured to illuminate a photosensitive layer of the relief precursor carried by the carrying structure, said LED array being configured to illuminate simultaneously a predetermined surface area of at least 900 cm.sup.2, said LED array comprising a plurality of subsets of one or more LEDs, each subset being individually controllable; and a control unit to control the plurality of subsets individually, and such that an irradiation intensity difference in the predetermined surface area is within a predetermined range.
2. The apparatus of claim 1, wherein the substrate layer is a transparent substrate layer and wherein the LED array is arranged to illuminate the photosensitive layer of the relief precursor through the substrate layer of the relief precursor.
3. An apparatus for exposure of a relief precursor which comprises at least one photosensitive layer, said apparatus comprising: a carrying structure for carrying a relief precursor; a LED array configured to illuminate a photosensitive layer of the relief precursor carried by the carrying structure, said LED array comprising a plurality of subsets of one or more LEDs, each subset being individually controllable; at least one sensor configured to measure in a plurality of locations of a predetermined surface area illuminated by the LED array, a value representative for the irradiation intensity; and a control unit to control the plurality of subsets individually based on the values measured by the at least one sensor.
4. The apparatus according to claim 3, further comprising a moving means configured to move the at least one sensor in order to perform measurements in the plurality of locations.
5. The apparatus according to claim 4, wherein the moving means comprises a drive configured to move the at least one sensor in a surface parallel to the relief precursor carried by the carrying structure.
6. The apparatus according to claim 3, wherein the control unit is configured to control the LEDs based on the measurement values by the at least one sensor in the plurality of locations, so that the difference in irradiation intensity in the plurality of locations is within a predetermined range.
7. The apparatus according to claim 3, wherein the number of the plurality of locations is equal to or higher than the number of the plurality of subsets.
8. The apparatus according to claim 1, further comprising a distance adjustment means configured to adjust the distance (d) between the carrying structure and the LED array.
9. The apparatus according to claim 1, wherein the LEDs of the LED array are configured to emit electromagnetic radiation with a wavelength in the region of 200 to 2000 nm.
10. The apparatus according to claim 1, wherein the irradiation intensity delivered by the LEDs in the predetermined surface area is in the range of 0.1 to 2000 mW/cm.sup.2 for back-exposure and between 30 and 500 mW/cm.sup.2 for front-exposure.
11. The apparatus according to claim 1, wherein a distance (ds) between the predetermined surface area (S) and the LED array 20 is at least 35 mm.
12. The apparatus according to claim 1, wherein for any predetermined surface area which is at a distance of the LED array between a first distance and a second distance, the irradiation intensity variation in the predetermined surface area is within the predetermined range, wherein the difference between the second and the first distance is at least 1 mm.
13. The apparatus according to claim 1, wherein the distance between individual LEDs of the LED array is at least 5 mm.
14. The apparatus according to claim 1, further comprising cooling means configured to cool the LED array.
15. The apparatus according to claim 1, further comprising a drive means configured for driving the LED array, by pulse width modulation signals.
16. The apparatus according to claim 1, wherein the carrying structure comprises a support structure which is at least partially transparent for the light generated by the LED array.
17-18. (canceled)
19. A calibration method for calibrating an exposure apparatus comprising a LED array, said method comprising: using the LED array to emit radiation in a predetermined surface area; said LED array comprising a plurality of subsets of one or more LEDs, each subset being individually controllable; measuring in a plurality of locations of the predetermined surface area, a value representative for the irradiation intensity; and determining a control scheme for controlling the plurality of subsets based on the measured values to obtain a desired irradiation pattern in the predetermined surface area.
20. The calibration method of claim 19, wherein the desired irradiation pattern is a substantially homogeneous irradiation pattern.
21. The calibration method of claim 19, wherein the measuring in a plurality of locations is done by moving at least one sensor such that the at least one sensor performs measurements in the plurality of locations.
22. The calibration method of claim 19, wherein the measuring and controlling comprises: positioning at least one sensor at a first position in a plane parallel to the plane of LED array, said first position being associated with one or more first neighboring LEDs of the LED array; measuring the irradiation intensity at a first location associated with the first position of the at least one sensor; positioning the at least one sensor at a further position in said plane, said further position being associated with one or more further neighboring LEDs of the LED array; measuring the irradiation intensity at a further location associated with the further position of the at least one sensor; and adjusting the irradiation intensity of one or more of the first and/or further neighboring LEDs such that the difference between irradiation intensity in the first location and in the further location is reduced; wherein the steps above are repeated for the same and/or for other locations.
23-27. (canceled)
Description
BRIEF DESCRIPTION OF THE FIGURES
[0100] The accompanying drawings are used to illustrate presently preferred non limiting exemplary embodiments of the apparatus and method of the present invention. The above and other advantages of the features and objects of the invention will become more apparent and the invention will be better understood from the following detailed description when read in conjunction with the accompanying drawings, in which:
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DETAILED DESCRIPTION OF EMBODIMENTS
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[0112] The carrying structure 10 provides for a horizontal support of the relief precursor, and may be e.g. a transparent plate. However, in other embodiments the carrying structure 10 could be configured for providing an inclined support or for hanging the relief precursor vertically or for tensioning the relief precursor such that the relief precursor extends in a plane. The carrying structure 10 is arranged such that a relief precursor carried by the carrying structure extends substantially parallel to a plane in which the LED array 20 is arranged.
[0113] The LED array 20 is configured to illuminate simultaneously a predetermined surface area S of at least 900 cm2, see also
[0114] The LED array 20 is arranged to illuminate the photosensitive layer Lp of the relief precursor P through the substrate layer Ls of the relief precursor P, i.e. the apparatus is intended for back-exposure. However, as shown in the schematic view of
[0115] The control unit 40 is configured to control the plurality of subsets 25 individually, and such that an irradiation intensity variation in the predetermined surface area is within a predetermined range. The predetermined surface area may correspond e.g. with a support plane of the relief precursor or with a plane at a small distance above said support plane. Ideally the predetermined surface area corresponds with a plane in which the photosensitive layer Lp to be irradiated is located.
[0116] The LED array 20 with individually controllable subsets 25 of LEDs 21 allows to adjust the irradiation intensity of the subsets 21 to obtain a controlled irradiation, and in particular more or less homogeneous illumination of the predetermined surface area S to be illuminated. In that manner, a floor with a controlled thickness, and in particular a floor with a substantially constant thickness, can be achieved. Further, when a LED 21 fails, by having a control unit 40 configured to individually control the subsets 21, the subsets 21 may be controlled to compensate for the failing LED, so that the homogeneity is not significantly influenced.
[0117] As illustrated in
[0118] The at least one sensor 50 is configured to measure in a plurality of locations L1, L2, L3, L1′, L2′, L3′, etc. (see
[0119] The control unit 40 may be configured to control the LEDs 21 based on the measurement values by the at least one sensor 50 in the plurality of locations, so that the difference in irradiation intensity in the plurality of locations is within a predetermined range, when it is desirable to obtain a substantially homogeneous irradiation and thus a substantially constant layer thickness of the polymerized photosensitive layer Lp.
[0120] Optionally, the apparatus further comprises a distance adjustment means (not shown) configured to adjust the distance d between the carrying structure 10 and the LED array 20. In that manner the distance d can be optimized so that the irradiation is maximal in the area to be exposed.
[0121] Preferably, the LEDs 21 of the LED array 20 are configured to emit electromagnetic radiation with a wavelength in the region from 270 to 410 nm. Preferably, the LEDs 21 emit UV light. Preferably, the irradiation intensity delivered by the LEDs in the predetermined surface area is in the range of 1 to 200 mW/cm2, and/or the dose of radiation delivered by the LEDs 21 is between 1 and 100 J/cm2. The distance d1 between individual LEDs 21 of the LED array 20, see
[0122] The apparatus further comprises cooling means 60 configured to cool the LED array 20. The cooling means 60 may be configured to send an air flow underneath the LED array 20, and in particular underneath the one or more LED PCBs on which the LEDs 21 are mounted.
[0123] The drive means 30 is configured for driving the LED array 20, preferably by pulse width modulation signals. The drive means 30 may comprise one or more driver PCBs onto which the driver circuitry is mounted. The driver PCBs may be positioned in a plane parallel to the LED PCBs, underneath the LED PCBs.
[0124] By using a LED array with individually controllable subsets of LEDs, the irradiation intensity of the subsets can be adjusted to obtain a more or less homogeneous illumination of the surface area to be illuminated. In that manner a floor with a substantially constant thickness can be achieved. Further, when a LED fails, by having a control unit configured to individually control the subsets, the subsets may be controlled to compensate for the failing LEDs, so that the homogeneity is not significantly influenced, whilst the failing LED may not need to be replaced.
[0125] Also, by having a LED array which covers a large area, the apparatus may be designed such that the relief precursor can be submitted to a back exposure in a single step by activating the LED array. It is noted that an apparatus may be designed for the largest relief precursors, and that when smaller relief precursors have to be exposed, e.g. back-exposed, only a portion of the LEDs (sufficient to cover the size of the smaller plate) of the LED array may be activated. Although the apparatus is preferably intended for back-exposure through a transparent substrate layer of the relief precursor, embodiments of the invention also cover apparatus where the LED array is used for front exposure.
[0126] By performing the controlling such that an irradiation intensity variation in the predetermined surface area is within a certain range, it can be achieved that the thickness variation of the floor is accurately controlled.
[0127] Further, compared to existing solutions for back exposure using e.g. UV light tubes, the energy consumption and the cost of embodiments of the invention can be lower by using a LED array. Also, the process can be faster since there is no need for pre-heating, as for UV light tubes. Also, because the subsets of the LED array can be individually activated in function of the size of the relief precursor, the energy consumption for smaller plates will be smaller compared to existing solutions where all the UV light tubes are activated regardless of the size.
[0128] According to an exemplary embodiment, the apparatus of
[0129] Before using the apparatus, the apparatus may be calibrated using any one of the following methods. According to a first possible embodiment, the calibration method comprises using the LED array 20 to emit radiation in a predetermined surface area; measuring in a plurality of locations L1, L2, L3, etc. of the predetermined surface area, a value representative for the irradiation intensity, using the at least one sensor 50; determining a control scheme for controlling the plurality of subsets 21 based on the measured values to obtain a desired irradiation pattern in the predetermined surface area. The desired irradiation pattern may be a substantially homogeneous irradiation pattern in order to obtain a floor with a substantially constant thickness, but may also be a pattern with different irradiation zones in order to obtain different floor thicknesses.
[0130] The measuring in a plurality of locations L1, L2, L3, etc. may be done by moving at the least one sensor 50 such that the at least one sensor performs measurements in the plurality of locations. For example, the measuring and controlling may comprise: [0131] positioning at least one sensor 50 at a first position in a plane parallel to the plane of LED array, said first position being associated with one or more first neighboring LEDs of the LED array; [0132] measuring the irradiation intensity at a first location L1 associated with the first position of the at least one sensor 50; [0133] positioning the at least one sensor 50 at a further position in said plane, said further position being associated with one or more further neighboring LEDs of the LED array; [0134] measuring the irradiation intensity at a further location L2 associated with the further position of the at least one sensor; [0135] adjusting the irradiation intensity of one or more of the first and/or further neighboring LEDs such that the difference between irradiation intensity in the first location L1 and in the further location L2 is reduced;
[0136] The steps above may be repeated for the same locations L1, L2, and/or for other locations L3, etc, until the desired irradiation pattern is achieved.
[0137] According to another possible embodiment, the calibration method comprises: [0138] using the LED array 20 to emit radiation in a predetermined area of a photosensitive layer of the relief precursor, such that said predetermined area cures; [0139] removing the uncured portion of the relief precursor; [0140] measuring thickness variations of the cured area; [0141] determining a control scheme for controlling the plurality of subsets based on the measured thickness variations to obtain a desired irradiation pattern in the predetermined area.
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[0144] The upper housing portion 130 houses a plurality of main UV tubes 112 for front-exposure of the relief precursor P in a manner known to the skilled person.
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[0146] The methods explained above in connection with the previous embodiments can also be performed with the apparatus of
[0147] In non-illustrated embodiments, a post-treatment may be provided to perform a post-treatment on the relief precursor, e.g. washing, drying, post-exposure, heating, cooling, removing of material, etc. Further, in non-illustrated embodiments, a pre-treatment may be provided to perform a pre-treatment on the relief precursor, said pre-treatment being selected from the group comprising: cutting, ablation, exposure to electromagnetic radiation, and combinations thereof.
[0148] A relief precursor generally comprises a support layer and at least one photosensitive layer. The support layer may be a flexible metal, a natural or artificial polymer, paper or combinations thereof. Preferably the support layer is a flexible metal or polymer film or sheet. In case of a flexible metal, the support layer could comprise a thin film, a sieve like structure, a mesh like structure, a woven or non-woven structure or a combination thereof. Steel, copper, nickel or aluminium sheets are preferred and may be about 50 to 1000 μm thick. In case of a polymer film, the film is dimensionally stable but bendable and may be made for example from polyalkylenes, polyesters, polyethylene terephthalate, polybutylene terephthalate, polyamides and polycarbonates, polymers reinforced with woven, nonwoven or layered fibres (e.g. glass fibres, Carbon fibres, polymer fibres) or combinations thereof. Preferably polyethylene and polyester foils are used and their thickness may be in the range of about 100 to 300 μm, preferably in the range of 100 to 200 μm.
[0149] In addition to the photosensitive layer and the support layer, the relief precursor may comprise one or more further additional layers. For example, the further additional layer may be any one of the following: a direct engravable layer (e.g. by laser), a solvent or water developable layer, a thermally developable layer, a mask layer, a cover layer, a barrier layer, etc. Between the different layers described above one or more adhesion layers may be located which ensure proper adhesion of the different layers.
[0150] Whilst the principles of the invention have been set out above in connection with specific embodiments, it is to be understood that this description is merely made by way of example and not as a limitation of the scope of protection which is determined by the appended claims.