Can-roller for vacuum processing apparatus

Abstract

In a vacuum processing apparatus for performing a predetermined vacuum processing on a surface of a sheet-like base material while keeping the base material to travel inside the vacuum chamber, the can-roller of this invention disposed to lie opposite to a vacuum processing unit has an axial body; an inner cylindrical body to be inserted onto an outside of the axial body; an outer cylindrical body enclosing an outer cylindrical surface of the inner cylindrical body with a gap therebetween, and cover bodies for respectively closing axial both ends of the inner cylindrical body. Each of the cover bodies has a plurality of flow passages. A cross-section of each of the fluid passages overlaps a cross-section of the cover body. A cross-sectional area of the gap between the inner cylindrical body and the outer cylindrical body is set to a size that can obtain a predetermined flow velocity.

Claims

1. A can-roller for a vacuum processing apparatus which performs a predetermined vacuum processing inside a vacuum chamber on a surface of a sheet-like base material while keeping the base material travelling, the can-roller being disposed to lie opposite to a processing unit which performs the vacuum processing, the can-roller being rotatable and around which the sheet-like base material being wound, the can-roller comprising: an axial body; an inner cylindrical body to be inserted onto an outside of the axial body; an outer cylindrical body enclosing an outer cylindrical surface of the inner cylindrical body with a gap therebetween; and cover bodies for respectively closing axially each end of the inner cylindrical body and the outer cylindrical body, wherein each of the cover bodies has a plurality of flow passages located inside of each of the cover bodies; a cross-section of each of the flow passages in the axial direction overlaps a cross-section of each of the cover bodies; and a cross-sectional area of the gap between the inner cylindrical body and the outer cylindrical body, the gap being in communication with the respective flow passages, is set to a size that can obtain a predetermined flow velocity.

2. The can-roller for use in a vacuum processing apparatus according to claim 1, wherein each of the flow passages is arranged at an equal distance from one another in the circumferential direction and extends in the radial direction.

3. The can-roller for use in a vacuum processing apparatus according to claim 1, wherein each of outer peripheral side portions of the cover bodies body has formed, over an entire circumferential direction, dents which are recessed radially inward in a larger depth than the depth of the gap, and wherein each of the flow passages and the gap are brought into communication with each other through the dents.

4. The can-roller for use in a vacuum processing apparatus according to claim 2, wherein a splitting body extending in the axial direction is disposed in a position between respectively adjacent flow passages.

5. The can-roller for use in a vacuum processing apparatus according to claim 1, wherein each of the flow passages is in a shape of a straight pipe.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a schematic sectional view showing a vacuum processing apparatus provided with a can-roller of this embodiment.

(2) FIG. 2 is a sectional view showing the construction of the can-roller.

(3) FIG. 3 is a perspective view showing the construction of the can-roller in a partially exploded manner.

(4) FIG. 4 is a sectional view showing by enlarging part of FIG. 2.

(5) FIG. 5(a) and FIG. 5(b) are partially enlarged sectional views of the can-roller relating to a modified example.

MODES FOR CARRYING OUT THE INVENTION

(6) With reference to the accompanying drawings a description will now be made of an embodiment of a can-roller CR for use in a vacuum processing apparatus of this invention by citing an example in which a predetermined thin film is deposited (film formation), with a processing unit serving as a source of deposition, on a sheet-like base material Sw that is wound around a can-roller CR. In the following, the description is made provided: that the can-roller CR is housed inside the vacuum chamber Vc in a posture in which the axial line of the can-roller CR coincides with the horizontal direction; that the axial direction is defined as X-axis direction, that the direction perpendicular to the X-axis direction on the same horizontal plane is defined as Y-axis direction, and the vertical direction perpendicular to the X-axis and the Y-axis directions is defined as Z-axis direction; and that the directions such as “up” and “down” shall be based on FIG. 1.

(7) With reference to FIG. 1, the vacuum processing apparatus Dm provided with a can-roller CR according to this embodiment has a vacuum chamber Vc. The vacuum chamber Vc has connected thereto, through an exhaust pipe Ep, a vacuum pump unit Pu which is made up of a turbo-molecular pump, rotary pump, and the like so that a vacuum atmosphere (e. g., 10.sup.−5 Pa) can be formed in the vacuum chamber Vc. In addition, the vacuum chamber Vc is divided into two chambers of an upper chamber and a lower chamber by means of a separating plate Sp. In that one (vapor deposition chamber Vs) of the chambers which is positioned on the lower side in FIG. 1, a vapor deposition source Es as a processing unit is disposed. As the vapor deposition source Es, there is utilized one having: a crucible Ev for containing therein vapor deposition material Em; and a heating means Eh, such as a sheath heater, for heating the vapor deposition material Em contained inside the crucible Ev. By means of heating the vapor deposition material Em contained inside the crucible Ev is sublimated or vaporized. The sublimated or vaporized evaporation particles are caused to be adhered and deposited on that part of the sheet-like base material Sw which is wound around a can-roller CR, thereby performing vapor deposition (film formation) of those particles. It is to be noted that the vapor deposition source Es is not limited to the above, but those of sputtering method or the CVD method may be used as well. Since known art may be utilized as those of sputtering method or the CVD method, further detailed description will be omitted.

(8) In FIG. 1, the other chamber (transportation chamber Ts) that is positioned on the upper side has disposed therein: a feed roller Rr around which is wound the sheet-like base material Sw and which is driven for rotation by means of a motor (not illustrated) so as to feed the sheet-like base material Sw at a constant travel (transport) speed; and a take-up roller Ru which takes up the sheet-like base material Sw on which film deposition has been finished. On the inside of an opening So formed in a partition plate Sp, the can-roller CR of this embodiment, around which is wound the sheet-like base material Sw, is disposed in a manner to lie opposite to the vapor deposition source Es. In FIG. 1, the reference mark Gr denotes guide rollers.

(9) With reference to FIGS. 2 through 4, the can-roller CR is made up of an axial body 1; an inner cylindrical body 2 which is inserted onto an outside of the axial body 1; an outer cylindrical body 3 which encloses an outer cylindrical surface of the inner cylindrical body 2 with a gap Ds therebetween; and each of the first and second cover bodies 4.sub.1, 4.sub.2 which closes both ends, in the X-axis direction, of the inner cylindrical body 2 and the outer cylindrical body 3, respectively. A hollow axial body 5 whose one end is respectively fixed to each of the cover bodies 4.sub.1, 4.sub.2 is inserted onto that portion of the axial body 1 which protrudes outward from each of the cover bodies 4.sub.1, 4.sub.2. The axial body 5 is thus rotatably supported, through bearings 51, by a supporting body (not illustrated) disposed on a wall surface of the vacuum chamber Vc or inside the vacuum chamber Vc. When the axial bodies 1, 5 are rotated by a motor (not illustrated), the inner cylindrical body 2, the outer cylindrical body 3, and each of the cover bodies 4.sub.1, 4.sub.2 are arranged to be rotated for driving integrally at a predetermined speed. By the way, the method of mounting the axial bodies 1, 5 onto the vacuum chamber Vc in a rotatable manner can be used from a known one which utilizes a rotary joint and the like, and therefore no further details are given here.

(10) Inside the axial body 1: there is formed an inner passage 11 as an inflow passage extending in the X-axis direction; one end (right side in FIG. 2) of the inner passage 11 is connected to a suction pipe (not illustrated) communicating to a chiller unit (not illustrated); and it is so arranged that there is supplied a fluid such as cooling water adequately selected depending on the vacuum processing to be performed inside the vacuum chamber Vc. In addition, the space between the outer cylindrical surface of the axial body 1 that is protruded outward from the second cover body 4.sub.2 on axially one side (right side in FIG. 2), and the inner cylindrical surface of the hollow axial body 5 constitutes an outlet passage 52 of the fluid as described hereinbelow. It is thus so arranged that the fluid to flow through each of the flow passages 42.sub.2 of the second cover body 4.sub.2 is discharged into the outlet passage 52 of the fluid and returns to the chiller unit (not illustrated). By the way, since the chiller unit itself is known, its detailed description will be omitted here.

(11) The inner cylindrical body 2 and the outer cylindrical body 3 which are disposed in a manner concentric with each other are made of metal such as stainless steel. It is so dimensioned that the length of the generating line (X-axis direction) of the inner cylindrical body 2 is shorter than the outer cylindrical body 3. On the other hand, each of the first and the second cover bodies 4.sub.1, 4.sub.2 is made of metal such as stainless steel and is made of a solid disc-like member having a plate thickness corresponding to half the difference in length between the generating lines of the inner cylindrical body 2 and of the outer cylindrical body 3. The following arrangement is made: that the outside diameter of the portion that is positioned on the inner side in the Z-axis direction of each of the cover bodies 4.sub.1, 4.sub.2 coincides with the inside diameter of the inner cylindrical body 2; that the outside diameter of the portion that is positioned on the outer side in the Z-axis direction of each of the cover bodies 4.sub.1, 4.sub.2 is formed so as to coincide with the inside diameter of the outer cylindrical body 3; and that, by respectively fixedly fitting each of the cover bodies 4.sub.1, 4.sub.2 from both sides in the X-axis direction in a state in which the inner cylindrical body 2 and the outer cylindrical body 3 are concentrically disposed, both ends in the X-axis direction of each of the inner cylindrical body 2 and the outer cylindrical body 3 are respectively closed.

(12) Further, each of the first and the second cover bodies 4.sub.1, 4.sub.2 is provided with a plurality of flow passages which are in communication with the central opening 41 through which the axial body 1 is inserted, and with a plurality of flow passages which are in communication with the central opening 41 (hereinafter each of the flow passages in the first cover body 4.sub.1 is referred to as “the first flow passage 42.sub.1”, and each of the flow passages in the second cover body 4.sub.2 is referred to as “the second flow passage 42.sub.2”). As shown in FIGS. 2 and 3, the cross-sections of each of the flow passages 42.sub.1, 42.sub.2 along the axial direction are arranged to respectively overlap the cross-sections of the cover bodies 4.sub.1, 4.sub.2, respectively, i.e., are so arranged that the cross-sections of the flow passages 42.sub.1, 42.sub.2 are present on the inside, as seen in cross-section, of the cover bodies 4.sub.1, 4.sub.2. In addition, each of the flow passages 42.sub.1, 42.sub.2 is so arranged as to be respectively extended over the entire length of the diameter at a predetermined distance in the circumferential direction (at a spacing of 45 degrees in this embodiment). In this case, the cross-section of each of the flow passages 42.sub.1, 42.sub.2 is circular and its cross-sectional area is set as described below. Namely, the fluid to flow from each of the flow passages 42.sub.1, 42.sub.2 once strikes against the inner wall positioned in the axially end part of the outer cylindrical body 3, and the fluid is then dispersed in the circumferential direction. The cross-sectional area in question is set as small as possible within a range in which, relative to the gap Ds, there can be secured a flow rate enough to cause the fluid to flow therein from the entire circumference. By the way, the above arrangement can materialize a constitution in which, because the cross-sectional area of each of the flow passages 42.sub.1, 42.sub.2 is circular in cross section and is in the shape of a straight pipe, the specific surface area can be minimized, and also the constitution of bringing about the minimization of the pipe line resistance is materialized.

(13) Further, in a state in which the can-roller CR has been assembled, there will be formed communication holes 12 to communicate between the inner passage 11 and the first flow passages 42.sub.1, respectively. The phase of each of the flow passages 42.sub.1, 42.sub.2 is so arranged as to coincide with one another among each of the cover bodies 4.sub.1, 4.sub.2. In addition, along an entire circumference of the outside surface of the cover bodies 4.sub.1, 4.sub.2, there are formed, e.g., by counterboring processing dents (recessed parts) 43 which are dented radially inward at a depth Dp which is larger than the gap Ds. In this case, the depth Dp from the outer peripheral surface of the inner cylindrical body 2 may be appropriately set depending on the number of the branched flow passages 42.sub.1, 42.sub.2 to be formed, e.g., on the cover bodies 4.sub.1, 4.sub.2. Setting is made above two times, preferably four times, the gap Ds.

(14) In the above-mentioned can-roller CR, when a fluid at a predetermined temperature is supplied to the inner passage 11 through a feed water pipe by means of a chiller unit (not illustrated), the fluid will be supplied to each of the first flow passages 42.sub.1 of the first cover body 4.sub.1. In this case, because each of the first flow passages 42.sub.1 is disposed in a plurality of pieces at equal distance from one another in the circumferential direction, and the dents 43 are present along the outer surface of the first cover body 4.sub.1, the fluid from each of the first flow passages 42.sub.1 flows into the gap Ds between the inner cylindrical body 2 and the outer cylindrical body 3 substantially equally. Then, the fluid flows through the gap Ds into the dents 43 of the second cover body 4.sub.2 and flows from each of the second flow passages 42.sub.2 toward the outlet passage 52 and returns to the chiller unit. In other words, the dents 43 serve the purpose of fluid reservoirs; in the first cover body 4.sub.1 the fluid that flows from each of the first flow passages 42.sub.1 once strikes against the inner wall that is positioned at an axial end part of the outer cylindrical body 3 and is then circumferentially dispersed (in other words, the fluid wraps around the portion positioned in the intermediate of the first flow passages 42.sub.1 that are adjacent to each other); the fluid flows into the gap Ds from substantially entire circumferential direction; on the other hand, in the second cover body 4.sub.2 the fluid that has uniformly flown through the gap Ds will once be accepted and thereafter comes to be discharged into each of the second flow passages 42.sub.2.

(15) By the way, in case the can-roller CR or the sheet-like base material Sw receives heat input at the time of vapor deposition, it is necessary to restrain the temperature distribution in the longitudinal direction and in the lateral direction from getting generated in the sheet-like base material Sw. A can-roller was manufactured (comparative product 1) in the following manner: i.e., a spiral protrusion was formed at a pitch of 15 mm on an outer cylindrical surface of the inner cylindrical body of a total length of 3300 mm; an outer cylindrical body was externally inserted such that the gap (corresponding to Ds in this invention) between the inner cylindrical body and the outer cylindrical body was 25 mm; and cover bodies having a branched flow passage leading to a flow inlet and a flow outlet of the fluid flow passage between the inner cylindrical body and the outer cylindrical body that were partitioned by the protrusion was screwed in, thereby manufacturing a can-roller. Then, under conditions in which the can-roller was heated, a fluid of 288K in temperature was caused to flow from axially one end to the opposite end from the branched flow passage to a fluid flow passage from an axial one end toward the opposite end thereof. The temperature difference between the inlet and the outlet in the flow passage was measured and the difference thereof was found to be 2K and the flow velocity at that time was about 0.8 m/sec. Then, an inner cylindrical body having no spiral protrusion was prepared and a can-roller was manufactured in the same manner as in the comparative product 1 (comparative product 2). Then, under the same conditions as in the above-mentioned case, a fluid at 288K was caused to flow from one axial end toward the opposite end of the fluid flow passage between the inner cylindrical body and the outer cylindrical body. The temperature difference between the inlet and the outlet in the flow passage was then measured and the difference thereof was found to be 40K. It has thus been confirmed that the temperature distribution of the fluid became large.

(16) Then, in the embodiment of this invention, in order to make the fluid flow velocity that flows through the gap Ds to be equivalent to that of the comparative product 1, the outer cylindrical body 3 was inserted onto the outside of the inner cylindrical body 2 so that the gap Ds between the inner cylindrical body 2 without protrusion and the outer cylindrical body 3 becomes 5 mm. At the same time, there was manufactured a can-roller CR (this invention product) in which the first flow passage 42.sub.1 and the second flow passage 42.sub.2 were respectively formed at an interval of 30 degrees on the cover bodies 4.sub.1, 4.sub.2. Then, under the same conditions as in the above-mentioned case, a fluid at 288K was caused to flow from one axial end toward the opposite end of the gap Ds serving as the flow passage between the inner cylindrical body 2 and the outer cylindrical body 3 on the same conditions as above. The temperature difference between the inlet and the outlet of the gap Ds in the flow passage was then measured. The difference between the inlet and the outlet was confirmed to be about 1K, which was equivalent to that of the comparative product 1. In this invention product, on the outlet side of the gap Ds, there occurred a temperature distribution in which a relatively higher temperature portion and a relatively lower temperature portion in the circumferential direction reciprocally repeated. Therefore, this invention product was formed in each of the cover bodies 4.sub.1, 4.sub.2 with dents 43 having four times the depth as compared with that of the gap Ds. It was then confirmed that there disappeared the temperature distribution in which the relatively higher temperature portion and the relatively lower temperature portion alternately repeated in the circumferential direction.

(17) According to the above-mentioned embodiments, because the axial cross-section of each of the flow passages 42.sub.1, 42.sub.2 overlaps the cross-section of the cover bodies 4.sub.1, 4.sub.2, in other words, because the cross-section of the flow passages 42.sub.1, 42.sub.2 is present on the inside of the cover bodies 4.sub.1, 4.sub.2 as seen in the cross-section, there can be prevented enlargement of the can-roller CR itself caused by axial enlargement of the cover bodies 4.sub.1, 4.sub.2 inclusive of the flow passages 42.sub.1, 42.sub.2. In addition, since the flow passages 42.sub.1, 42.sub.2 are constituted by dividing them into a plurality of pieces, the specific surface area of the respective flow passages can be made smaller, and the total volume of the cooling water that flows through the cover bodies 4.sub.1, 4.sub.2 can be made smaller. In addition, the area of heat absorption or heat radiation in each of the flow passages 42.sub.1, 42.sub.2 is made smaller and, therefore, lowering in the effectiveness of heat exchanging with the sheet-like base material Sw through the outer cylindrical body 3 can be restrained to the extent possible. In addition, without spirally disposing the protrusion on the outer cylindrical surface of the inner cylindrical body 2, the temperature distribution in the axial direction and in the radial direction of the fluid that flows through the gap Ds (i.e., the temperature difference between the fluid flowing into the gap Ds and the fluid flowing out of the gap Ds) can be restrained smaller. The possibility of giving rise to the temperature distribution in the longitudinal direction and in the lateral direction of the sheet-like base material Sw can be restrained to the extent possible.

(18) Descriptions have so far been made of the embodiments of this invention, but this invention shall not be limited to the above-mentioned embodiments. As far as the substance of this invention is not departed from, various modifications are available. In the above-mentioned embodiments, a description was made of a film-forming processing as an example of the vacuum processing. This invention can, however, be applicable to other vacuum processing such as heat treatment, etching processing and the like. In addition, description was made of cooling water as the coolant, but this invention shall not be limited to the above. Instead, this invention can be applied to a case in which, during the time when hot water heated to a predetermined temperature is caused to flow so as to perform a predetermined vacuum processing, the sheet-like base material Sw is controlled in temperature to a predetermined temperature.

(19) In addition, in the above-mentioned embodiment, description has been made of an example in which there was no member or element in the gap Ds between the inner cylindrical body 2 and the outer cylindrical body 3, but this invention shall not be limited to the above. For example, as shown in FIG. 5(a) and FIG. 5(b), splitting bodies 6 may be disposed in the gap Ds in a manner to axially extend in a position between the branched flow passages 42.sub.1, 42.sub.2. The splitting bodies 6 may be constituted by a plate material having a predetermined plate thickness or wire material which is to be adhered to the outer cylindrical surface, e.g., of the inner cylindrical body 2. According to this arrangement, the fluid flowing from each of the axially opposite first branched flow passages 42.sub.1 into the gap Ds can be secured to flow uniformly toward axially one direction without getting mixed. As a result, the temperature distribution, in the axial direction and in the circumferential direction, of the fluid to flow through the gap Ds can be restrained all the more small.

(20) Furthermore, in the above-mentioned embodiment, description was made of an example in which each of the cover bodies 4.sub.1, 4.sub.2 is constituted by a circular disk-shaped member and in which each of the cover bodies 4.sub.1, 4.sub.2 has formed therein each of the flow passages 42.sub.1, 42.sub.2 so as to extend respectively over the entire radial direction in the circumferential direction at a predetermined distance from one another. However, as far as the cross-section of each of the flow passages 42.sub.1, 42.sub.2 respectively overlaps the cross-section of the cover bodies 4.sub.1, 4.sub.2, there is no reason for restricting this invention to the above. Although not described by particularly illustrating, it may be so arranged that two pieces of plate materials are adhered together by means of a columnar structural member (for example, fabricated into a honey-comb structure and a part thereof is left open as a flow passage), it can also be made into a matrix type of flow passage structure.

DESCRIPTION OF REFERENCE MARKS

(21) CR can-roller Dm vacuum processing apparatus Es vapor deposition source (processing unit) Sw sheet-like base material Vc vacuum chamber 1, 5 shaft body 2 inner cylindrical body 3 outer cylindrical body Ds gap between inner cylindrical body 2 and outer cylindrical body 3 4.sub.1, 4.sub.2 cover body 42.sub.1, 42.sub.2 branched flow passage 43 dent 6 splitting body