SINGLE-BEAM THREE-DEGREE-OF-FREEDOM HOMODYNE LASER INTERFEROMETER BASED ON ARRAY DETECTOR

Abstract

A single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector. A single-frequency laser beam is input to a Michelson interference structure, the measurement beam and the reference beam perform non-coaxial interference and form a single-beam homodyne interference signal by setting the angle of a reference plane mirror, the array detector is selected to effectively receive the single-beam homodyne interference signal, and finally, three-degree-of-freedom signal linear decoupling on the single-beam homodyne interference signal is achieved through a three-degree-of-freedom decoupling method based on Lissajous ellipse fitting. The laser interferometer does is free of angle decoupling nonlinearity, the period nonlinear error is remarkably reduced, compared with other existing three-degree-of-freedom laser interferometers, the laser interferometer has the advantages of being simple in structure, large in angle measurement range and easy to integrate, and the high-precision requirement of the three-degree-of-freedom laser interferometer for displacement and angle measurement is met.

Claims

1. A single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector, comprising a first input beam with a single frequency, a Michelson interference structure and an array detection and signal decoupling module; wherein the Michelson interference structure comprises a fixed reference plane mirror and a movable target plane mirror; the first input beam is split into a first measurement beam and a first reference beam after entering the Michelson interference structure; the first measurement beam is reflected at least once by the target plane mirror, and the first reference beam is reflected at least once by the reference plane mirror; and at least a part of the first measurement beam and at least a part of the first reference beam coincide in an output travel path to form a first single-beam homodyne interference signal.

2. The single-beam three-degree-of-freedom homodyne laser interferometer according to claim 1, wherein the reflective surface of the fixed reference plane mirror is non-perpendicular to the first reference beam so that the first measurement beam and the first reference beam are transmitted non-coaxially in the output travel path.

3. The single-beam three-degree-of-freedom homodyne laser interferometer according to claim 1, wherein the array detection and signal decoupling module comprises an array detector with detection channels distributed in m*n, wherein m is the longitudinal distribution number of the detection channels, n is the transverse distribution number of the detection units, the transverse distribution intervals of the detection channels are not equal, the longitudinal distribution number of the detection channels m and the transverse distribution number of the detection units n are both larger than or equal to 2, and the product of the longitudinal distribution number of the detection channels and the transverse distribution number of the detection units is larger than or equal to 4; and the detection channels of the array detector is used for detecting the first single-beam homodyne interference signal formed by the first measurement beam and the first reference beam on the output path.

4. The single-beam three-degree-of-freedom homodyne laser interferometer according to claim 5, wherein the three-degree-of-freedom decoupling method comprises: receiving the first single-beam homodyne interference signal and converting the first single-beam homodyne interference signal into a first single-beam homodyne interference light intensity signal by each detection channel of the array detector, wherein a specified light intensity signal I (x, y) is a first single-beam homodyne interference light intensity signal component detected by the detection channel located in the x-th row and the y-th column; adopting a Lissajous ellipse fitting method, taking any light intensity signal I (x, y) as a horizontal axis reference of Lissajous ellipse fitting, simultaneously performing Lissajous ellipse fitting with the rest of all light intensity signals and calculation to obtain all Lissajous ellipse parameters, wherein the Lissajous ellipse parameters comprise the major axis radius and the minor axis radius of the Lissajous ellipse, the transverse axis coordinate of the center of the ellipse, the longitudinal axis coordinate of the center of the ellipse and the rotation angle of the ellipse; performing Lissajous ellipse fitting calculation on the light intensity signal I (x, y) and light intensity signals detected by other detection channels located in the same row to obtain Lissajous ellipse parameters, and calculating the yaw angle of the target plane mirror relative to the reference plane mirror; performing Lissajous ellipse fitting calculation on the light intensity signal I (x, y) and light intensity signals detected by all detection channels located in the other rows to obtain Lissajous ellipse parameters, and calculating the pitch angle of the target plane mirror relative to the reference plane mirror; and performing Lissajous ellipse fitting calculation on the light intensity signal I (x, y) and light intensity signals detected by the rest of all detection channels to obtain Lissajous ellipse parameters, and calculating the displacement of the target plane mirror relative to the reference plane mirror.

5. The single-beam three-degree-of-freedom homodyne laser according to claim 3, wherein the array detection and signal decoupling module further comprises an upper computer; and the upper computer is used for achieving three-degree-of-freedom signal linear decoupling on the first single-beam homodyne interference signal through a three-degree-of-freedom decoupling method, and the yaw angle, pitch angle and displacement information of the target plane mirror relative to the reference plane mirror are obtained.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0024] To describe technical solutions in embodiments of the present disclosure more clearly, the following briefly describes the attached FIGURES required for describing the embodiments.

[0025] FIG. 1 is a structural schematic diagram of a laser interferometer measuring system in the present disclosure.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] The following clearly and completely describes the technical scheme in the embodiments of the present disclosure with reference to the attached FIGURES in the embodiments of the present disclosure. Apparently, the described embodiments are merely a part rather than all of the embodiments of the present disclosure. Based on the embodiment in the present disclosure, all other embodiments obtained by the ordinary technical staff in the art under the premise of without contributing creative labor belong to the scope protected by the present disclosure.

[0027] The present disclosure aims to provide a single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector, so that the measurement accuracy and the angle range of the three-degree-of-freedom homodyne laser interferometer are comprehensively improved.

[0028] To make the foregoing objective, features and advantages of the present disclosure clearer and more comprehensible, the present disclosure is further described in detail below with reference to the attached FIGURES and specific embodiments.

[0029] As shown in FIG. 1, a single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector includes a laser light source 1, an upper computer 2, an array detector 3, a fixed reference plane mirror 4, a first beam splitting surface 5 plated with an unpolarized beam splitting film (not shown) and a movable target plane mirror 6.

[0030] The laser light source 1 provides a first input beam. The fixed reference plane mirror 4, the first beam splitting surface 5 and the movable target plane mirror 6 form a Michelson interference structure. The upper computer 2 and the array detector 3 form an array detection and signal decoupling module.

[0031] The reflective surface of the fixed reference plane mirror 4 is non-perpendicular to a first reference beam, so that a first measurement beam and the first reference beam are transmitted non-coaxially in an output travel path, and the reflective surface and the dotted line reference surface as shown in FIG. 1 form a slight included angle which is usually in the magnitude of milliradians,

[0032] The distribution of detection channels of the array detector 3 is 2*4, 2 is the longitudinal distribution number of the detection channels, namely the row number, 4 is the transverse distribution number of the detection units, namely the column number, and the transverse distribution distances of the detection channels are not equal; the detection channels of the array detector 3 can effectively detect a first single-beam homodyne interference signal formed by the first measurement beam and the first reference beam on the output path.

[0033] The working principle of the laser interferometer is as follows: after the first input beam is incident to the first beam splitting surface 5, the reflected beam forms the first measurement beam, and the transmitted beam forms the first reference beam; wherein the first measurement beam is reflected after being in contact with the movable target plane mirror 6 and is transmitted and output after passing through the first beam splitting surface 5; meanwhile, the first reference beam is in contact with the fixed reference plane mirror 4 to be reflected and is reflected and output after passing through the first beam splitting surface 5; at least a part of the output first measurement beam and at least a part of the output second reference beam coincide in the output travel path to form a first single-beam homodyne interference signal. The upper computer 2 can achieve three-degree-of-freedom signal linear decoupling on the first single-beam homodyne interference signal through a three-degree-of-freedom decoupling method, and the yaw angle, pitch angle and displacement information of the target plane mirror 6 relative to the reference plane mirror 4 are obtained.

[0034] The three-degree-of-freedom decoupling method includes the following steps:

[0035] Step one, receiving the first single-beam homodyne interference signal and converting the first single-beam homodyne interference signal into a first single-beam homodyne interference light intensity signal by each detection channel of the array detector 3, wherein a specified light intensity signal I (x, y) is a first single-beam homodyne interference light intensity signal component detected by the detection channel located in the x-th row and the y-th column.

[0036] Step two, adopting a Lissajous ellipse fitting method, taking the light intensity signal I (1, 1) as a horizontal axis reference of Lissajous ellipse fitting, simultaneously performing Lissajous ellipse fitting with the rest of all light intensity signals and calculation to obtain all Lissajous ellipse parameters, wherein the parameters include the major axis radius and the minor axis radius of the Lissajous ellipse, the transverse axis coordinate of the center of the ellipse, the longitudinal axis coordinate of the center of the ellipse and the rotation angle of the ellipse.

[0037] Step three, performing Lissajous ellipse fitting calculation on the light intensity signal I (1, 1) and light intensity signals detected by other detection channels located in the same row to obtain Lissajous ellipse parameters, and calculating the yaw angle of the target plane mirror 6 relative to the reference plane mirror 4.

[0038] Step four, performing Lissajous ellipse fitting calculation on the light intensity signal I (1, 1) and light intensity signals detected by all detection channels located in the other rows to obtain Lissajous ellipse parameters, and calculating the pitch angle of the target plane mirror 6 relative to the reference plane mirror 4.

[0039] Step five, performing Lissajous ellipse fitting calculation on the light intensity signal I (1, 1) and light intensity signals detected by the rest of all detection channels to obtain Lissajous ellipse parameters, and calculating the displacement of the target plane mirror 6 relative to the reference plane mirror 4.

[0040] Several examples are used for illustration of the principles and implementation methods of the present disclosure. The description of the embodiments is used to help illustrate the method and the core principles of the present disclosure; and meanwhile, those skilled in the art can make various modifications in terms of specific embodiments and scope of application in accordance with the teachings of the present disclosure. In conclusion, the content of this specification shall not be construed as a limitation to the present disclosure.