PROJECTION DEVICE AND METHOD FOR DIRECTING A LIGHT BEAM TO A TARGET

Abstract

A control unit (130) is provided for controlling a projection device (100) for directing a light beam (101) to a target (140). The projection device (100) comprises a light beam deflection unit (120) for two-dimensionally deflecting a light beam (101) in a first direction (x) with a first deflection frequency and in a second direction (y) with a second deflection frequency substantially equal to the first deflection frequency. The control unit (130) is configured to control the deflection unit (120) in such a way that a light spot (141) generated by the light beam (101) on the target (140) moves along a nearly circular path (144) changing its radius (R) over time.

Claims

1. A control unit for controlling a projection device for directing a light beam to a target, the projection device comprising a first light beam deflection unit for two-dimensionally deflecting a light beam in a first direction with a first deflection frequency and in a second direction with a second deflection frequency, wherein the control unit is configured to control the deflection unit in such a way that a light spot generated by the light beam on the target moves along a nearly circular path changing its radius over time.

2. The control unit according to claim 1, wherein the first light beam deflection unit is controlled by a first alternating current voltage to deflect the light beam in the first direction, the second light beam deflection unit is controlled by a second alternating current voltage to deflect the light beam in the second direction.

3. The control unit according to claim 2, wherein the control unit is configured to control the deflection unit in such a way that an amplitude of the alternating current voltages is repeatedly increased from zero to a maximum amplitude within a first time span and thereafter decreased again to zero within a second time span shorter than the first time span, or the control unit is configured to control the deflection unit in such a way that an amplitude of the alternating current voltages is repeatedly decreased from a maximum amplitude to zero within a first time span and thereafter increased again to the maximum amplitude within a second time span shorter than the first time span.

4. The control unit according to claim 2, wherein the control unit is configured to control the deflection unit in such a way that an amplitude of the alternating current voltages is repeatedly increased from zero to a maximum amplitude within a first time span and thereafter decreased again to zero within a second time span equal to the first time span.

5. The control unit according to claim 1, wherein the control unit further is configured to control the deflection unit in such a way that a radial distance between subsequent windings of the path is constant.

6. The control unit according to claim 1, wherein the control unit further is configured to control a light beam generation unit to generate the incoming light beam as a sequence of light pulses, wherein a pulse repetition frequency of the incoming light beam is modified depending on an instantaneous radius of the path.

7. The control unit according to claim 2, wherein the control unit further is configured to control the light beam generation unit to turn on or off and/or to change the intensity of the light beam (101) so that the light spots (141) along the spiral path (144) form a desired arbitrary irradiation pattern.

8. A projection device for directing a light beam to a target, comprising: a first light beam deflection unit for two-dimensionally deflecting a light beam in a first direction with a first deflection frequency and in a second direction with a second deflection frequency substantially equal to the first deflection frequency, and a control unit according to claim 1 for controlling the first light beam deflection unit.

9. The projection device according to claim 8, wherein the first light beam deflection unit comprises a first deflection element for deflecting the incoming light beam in the first direction and generating a one-dimensionally deflected light beam, and a second deflection element for deflecting the one-dimensionally deflected light beam in the second direction and generating the two-dimensionally deflected light beam.

10. The projection device according to claim 8, further comprising a light beam generation unit for generating the incoming light beam.

11. The projection device according to claim 10, wherein the light sources is configured to emit a light beam comprising light pulses having a constant amplitude and variable time distance and the intensity modulation element is configured to selectively modify an amplitude of each of the light pulses, and/or the light source is configured to emit a light beam comprising light pulses having a constant amplitude and constant pulse repetition frequency and the intensity modulation element is configured to blank out individual light pulses and to selectively modify an amplitude of each of the remaining light pulses, and/or the light source is configured to emit a continuous wave light beam having a constant amplitude and the intensity modulation element is configured to form individual light pulses from the continuous wave light beam and to selectively modify an amplitude of each of the formed light pulses.

12. The projection device according to claim 8, further comprising a second light beam deflection unit for two-dimensionally deflecting the deflected beam emitted by the first light beam deflection unit and directing the twice two-dimensionally deflected light beam to the target.

13. The projection device according to claim 12, wherein the first light beam deflection unit is a resonantly enhanced deflection unit exhibiting a small maximum deflection, and the second light beam deflection unit is a not resonantly enhanced deflection unit comprising movable parts and exhibiting a large maximum deflection.

14. A method for controlling a projection device for directing a light beam to a target, the projection device comprising a light beam deflection unit for two-dimensionally deflecting a light beam in a first direction with a first deflection frequency and in a second direction with a second deflection frequency substantially equal to the first deflection frequency, wherein the method comprises controlling the deflection unit in such a way that a light spot generated by the light beam on the target moves along a nearly circular path changing its radius over time.

15. A method for directing a light beam to a target, comprising: two-dimensionally deflecting an incoming light beam in a first direction with a first deflection frequency and in a second direction with a second deflection frequency substantially equal to the first deflection frequency, and controlling the deflection in such a way that a light spot generated by the light beam on the target moves along a nearly circular path changing its radius over time.

16. The control unit according to claim 2, wherein an amplitude of the alternating current voltages is synchronously increased or decreased so that a light spot generated by the light beam on the target moves along a spiral.

17. The control unit according to claim 4, wherein the control unit is configured to maintain the amplitude of the alternating current voltages at the maximum amplitude for a third time span shorter than the first and second time spans and/or the control unit is configured to achieve a phase jump of 180° in a waveform of at least one of the alternating current voltages at the time the amplitude reaches the value of zero.

18. The control unit according to claim 6, wherein the control unit is configured to control the light beam generation unit so that the pulse repetition frequency of the incoming light beam is set or varied in such a way that a distance between the center points of adjacent light spots is constant.

19. The projection device according to claim 9, wherein the first and/or second deflection element comprises or comprise an electro-optic deflector or micro-opto-electromechanical mirror, and/or the first and/or second deflection element is/are resonantly enhanced for internally generating a signal having an amplitude increased over the amplitude of the alternating current voltages.

20. The projection device according to claim 10, wherein the light beam generation unit comprises a light source for generating an unmodulated light beam, and/or the light beam generation unit further comprises an intensity modulation element for modulating an intensity of the unmodulated light beam.

21. The projection device according to claim 13, wherein the control unit further is configured to control the second light beam deflection unit in such a way that a center of the spiral generated by the first light beam deflection unit is slowly or stepwise moved along a path on the target.

Description

[0040] Further features and useful aspects of the invention can be found in the description of exemplary embodiments with reference to the attached drawings.

[0041] FIG. 1 shows a schematic perspective view of a two-dimensional projection device according to a first embodiment of the present invention.

[0042] FIG. 2 shows positions of light spots of a deflected light beam on a target.

[0043] FIG. 3 shows a time diagram illustrating examples for a relation between pulse repetition frequencies and resonant frequencies in order to obtain a specific pattern of light spots.

[0044] FIG. 4 shows a trajectory followed by the deflected light beam on the target.

[0045] FIG. 5 shows a distribution of the light spots on the target.

[0046] FIG. 6 shows a schematic perspective view of a two-dimensional projection device according to a second embodiment of the present invention.

[0047] FIGS. 7a to 7d show a first example of schematic time diagrams of signals for achieving a desired trajectory on the target.

[0048] FIG. 8 shows the trajectory followed by the center of the deflected light beam on the target when the set signal shown in FIG. 7a is used.

[0049] FIGS. 9a to 9d show a second example of schematic time diagrams of signals for achieving a desired trajectory on the target.

[0050] FIG. 10 shows the trajectory followed by the center of the deflected light beam on the target when the set signal shown in FIG. 9a is used.

[0051] FIGS. 11a to 11d show a third example of schematic time diagrams of signals for achieving a desired trajectory on the target.

[0052] FIGS. 12a to 12d show trajectories followed by the center of the deflected light beam on the target when the set signal shown in FIG. 11a is used.

[0053] FIGS. 13a to 13c show schematic time diagrams illustrating the generation of light pulses.

[0054] FIGS. 14a and 14b show examples for patterns generated by the projection device.

[0055] In the following, embodiments of the invention are described with reference to the enclosed drawings.

[0056] FIG. 1 shows a schematic perspective view of a two-dimensional projection device according to a first embodiment of the present invention.

[0057] The projection device 100 comprises a light beam generation unit 110, a light beam deflection unit 120, and a control unit 130 for controlling and driving the light beam generation unit 110 and the light beam deflection unit 120.

[0058] The light beam generation unit 110 comprises a light source 111, for example a laser, emitting a light beam 101. The light source might also be an end of an optical fiber from which the light beam 101 is coupled out. Within the projection device, the light beam is modified with regard to its amplitude and direction, but it always stays the same light beam and therefore is indicated in all the figures by the reference sign 101. The light beam generation unit 110 optionally may further comprise an intensity modulation element 112 for modulating an intensity of the light beam 101 emitted by the light source 111. The intensity modulation element 112 may for example comprise an electro-optic modulator or an acousto-optic modulator. The intensity modulation element 112 emits a light beam 101 which may be modulated in its intensity.

[0059] The light beam deflection unit 120 serves for deflecting the light beam 101. In order to achieve a two-dimensional deflection, the light beam deflection unit 120 comprises two one-dimensional deflection elements 121, 122. The deflection elements 121, 122 may for example be resonantly-enhanced deflection elements such as electro-optic deflectors which are controlled by alternating current voltages. The first deflection element 121 deflects the light beam 101 in a first direction, for example a horizontal direction or x-direction, based on a first alternating current voltage V.sub.x received from the control unit 130, and emits a one-dimensionally deflected light beam 101. The second deflection element 122 deflects the light beam 101 in a second direction, for example a vertical direction or y-direction, based on a second alternating current voltage V.sub.y received from the control unit 130, and emits a two-dimensionally deflected light beam 101. The two deflection elements 121, 122 are arranged in such a way that their respective deflection directions are oblique to each other, preferably perpendicular to each other. Instead of the transmitting deflection elements shown in the figure, reflecting deflection elements, for example resonantly enhanced micro-opto-electromechanical mirrors, may also be used.

[0060] Further optical elements such as mirrors or lenses may optionally be arranged in the optical path for further forming, focusing or deflecting the light beam. As (non-limiting) examples, the figure shows in dashed lines relay optics 131 between the two deflection elements 121, 122, for example a lens system for imaging the x and y deflection planes into each other, and focusing optics 132 downstream of the second deflection element 122, for example planar field optics, f-theta lenses and so on, depending on the application.

[0061] In operation, a light beam 101 having a desired waveform (intensity over time) is generated by the light beam generation unit 110 and two-dimensionally deflected by the light beam deflection unit 120 according to control signals V.sub.x, V.sub.y applied to the first and second deflection elements 121, 122. The two-dimensionally deflected light beam 101 finally hits a target 140, for example a screen onto which an image is to be projected or a piece of a material that is to be treated by the beam.

[0062] The operation is controlled by the control unit which calculates the timing required, sends and/or receives control signals to/from the light source 111, controls and drives the intensity modulation element 112 and controls and drives the first and second deflection elements 121, 122.

[0063] The maximum image area that may be irradiated by the light beam 101 is a rectangle, or, if the maximum deflection by the two deflection elements 121, 122 is the same, a square which is indicated in the figure by a solid line.

[0064] In the present embodiment, the two deflection elements 121, 122 are resonantly enhanced. Resonantly enhanced means that they comprise resonant elements for internally generating a signal having an amplitude increased over the amplitude of the alternating current voltages (V.sub.x, V.sub.y) supplied from the outside. Due to the resonance characteristics, the deflection elements 121, 122 are operated with an approximately sinusoidal signal. If the two alternating current voltages (V.sub.x, V.sub.y) are controlled to have a phase difference of 90°, the maximum image area that may be irradiated by the light beam with the maximum available amplitude is a circle 143 which is indicated in the figure by a dashed line on the target 140.

[0065] FIG. 2 shows a case in which the two resonantly enhanced deflection elements 121, 122 are operated with control signals at the resonance frequency f res having the same amplitude and a phase difference of 90°. Further, it is assumed that the two deflection elements 121, 122 have the same deflecting characteristics and that their deflecting directions are perpendicular to each other. That means that a maximum deflection amplitude is the same for both the deflecting directions and that a light spot 141 formed by the light beam 101 on the target 140 moves along a circular trajectory at a fixed radius R which is the maximum deflection radius.

[0066] The light spot 141 has a diameter d.sub.spot that may for example be defined as the diameter at which the intensity of the light beam focused on the target is reduced to 1/e.sup.2 or any fraction or multiple thereof, depending on the eventually desired beam overlap for the application. Any other commonly used definition for the beam diameter may be used instead.

[0067] As indicated above, a center point 142 of the light spot 141 moves along a circle 143 having a radius R that depends on the amplitude of the control signals. The angle φ of the light spot on the target in the xy-coordinate system over time evolves as

φ(t)=2πf.sub.rest,

the speed of the light spot is

v(t)=2πR f.sub.res,

and the length l of a circular path travelled by the light spot is

l(t)=2πR f.sub.rest.

[0068] If the light is pulsed, i.e. repeatedly switched completely on and off, individual light spots 141 are formed on the target 140. Preferably, the pulse on-time is very short compared to 1/f.sub.res so that the spots are not smeared out by the motion. If the pulse repetition frequency PRF is kept constant, a distance d.sub.L between the center points of adjacent spots is given by

d.sub.L=2πR f.sub.res/PRF,

and the total number of spots around the circle is given by

n=PRF/f.sub.res.

[0069] For example, if PRF=100 f.sub.res, 100 light spots are generated on the entire circle, and adjacent spots are spaced by an angle difference Δφ of 3.6° from each other.

[0070] FIG. 3 shows a time diagram illustrating examples for a relation between the pulse repetition frequency PRF of the light beam 101 and the resonance frequency f.sub.res. As shown in the figure, the angle φ of the light spot 141 on the target 140 linearly increases over time with a time period that is the reciprocal value of the control signal frequency which preferably is chosen to be the resonance frequency f.sub.res. After one period of the control signal is completed, the angle φ reaches the value 2π which corresponds to the same position of the light spot 141 as for an angle of θ. The curve therefore jumps from 2π to 0 and starts over again.

[0071] Here, the light pulses occur with a predetermined pulse repetition frequency PRF at specific time points. In order to achieve a predetermined angle difference Δφ between the light spots 141 of subsequent light pulses, and thus a number of n=2π/Δφ light spots along the circumference of the circle 143, the control signal frequency f res and the pulse repetition frequency PRF are selected to fulfill the condition

f.sub.res/PRF=i+Δφ/2π

wherein i is an integer ≥0 and corresponds to the amount of full extra turns (which may also be called dark turns, idle turns or waiting turns) around the circle between light pulses.

[0072] The figure shows an example in which 10 light spots 141 are generated with a phase difference of Δφ=2π/10=36° on the circumference of the circle 143 on the target 140. The figure shows the cases in which f.sub.res/PRF is selected to be 0.1 (small unfilled circles in the figure, no idle turns between the light spots), 1.1 (small filled circles, one idle turn between the light spots), and 4.1 (small crossed circles, four idle turns between the light spots).

[0073] In order to achieve the effect that the light spots 141 are not only generated on the circumference of the circle 143, but anywhere in the entire area within the circle 143, evenly filling it, the present invention suggests to change the amplitude of the control signal over time.

[0074] FIG. 4 shows a trajectory followed by the center of the deflected light beam on the target, and FIG. 5 shows a distribution of the light spots on the target. As in FIG. 1, the maximum square image 140 is indicated in the figures by a solid line, and the maximum circular image area 143 by a dashed line.

[0075] As can best be seen from FIG. 4, the center point 142 of the light spot 141 does no longer move along a circular path as in the example described above with reference to FIG. 2, but along a spiral path 144. Such a spiral may be achieved by synchronously increasing or decreasing the amplitude of the two control signals for the first and second deflection elements 111, 112. Therein, the case is still considered in which both the control signals are the resonance frequency f.sub.res and have the same amplitude and a phase difference of 90°.

[0076] As an example, if the amplitude of both the control signals and thus the amount of both the deflections is linearly increased over time, an arithmetic spiral (also known as Archimedean spiral) is generated beginning at the center point 145 in which the radius r(t) of the spiral is proportional to the time and to the phase angle φ(t) of the light spot 141:

r(t)=φ(t)d.sub.r/2π=d.sub.rf.sub.rest,

wherein d.sub.r is the distance between adjacent spiral windings in the radial direction. The radial distance is preferably set to the value of the spot diameter d.sub.spot.

[0077] As can best be seen from FIG. 5, the light spots 141 are densely packed along the spiral trajectory by generating a pulse every time the light spot 141 has advanced by a path length d.sub.L along the spiral. Preferably, a spot distance d.sub.L is selected as d.sub.L=d.sub.r=d.sub.spot. Since the speed v(t) of the light spot increases with the radius r(t) and thus with the phase φ(t), the pulse repetition frequency PRF also has to be increased over time to achieve a constant distance d.sub.L between adjacent light spots. The light spots thus may be evenly distributed within the circular image area except for a small region around the origin, i.e. the first revolution of the spiral 144 around its center point 145, where the first few spots overlap slightly.

[0078] For projecting an image to the circular imaging area, the intensity of the individual light pulses may be suitably changed to achieve a desired pattern. Examples of patterns are described below with reference to FIGS. 14a and 14b. As an alternative to the use of pulses, a continuous light beam which is intensity modulated may be used for projecting the image.

[0079] The embodiment described above has the effect that an imaging area filled with pixels (picture elements where a light spot may be generated) can also be generated in a system using deflection elements which are resonantly enhanced and therefore do not support a scanning of the image area row by row. Instead of being aligned along straight rows, the pixels of this image area are aligned on a single row which is rolled up into a spiral.

[0080] If the operating parameters are suitably selected, a distance between a center point of adjacent pixels may be set to the diameter of the light spot (=the pixel size) in the radial direction as well as in the tangential direction so that the entire imaging area may completely be irradiated. An equal distance between adjacent pixels along the spiral path can thus be realized over a wide area of a target imaging area, and also a distance between the pixels on adjacent spiral windings is approximately the same.

[0081] The present invention thus is able to combine the advantage of a resonantly enhanced deflection system, i.e. that a voltage to be supplied to the deflection elements is significantly reduced, with the advantage of a deflection system which is not resonantly enhanced, i.e. that an imaging area can completely be scanned within one frame period. The size of the area that can be scanned with an approximately constant pixel distance is the interior of a circle having a diameter determined by the maximum deflection. This is π/4=78% of the size of a square having the same maximum deflection. Compared to the earlier described method using Lissajous figures, where about 36% of the maximum area can be scanned with an almost constant pixel distance, the usable area in the present invention is more than doubled for a given maximum deflection range or angle.

[0082] FIG. 6 shows a schematic perspective view of a two-dimensional projection device according to a second embodiment of the present invention.

[0083] The projection device 200 mainly comprises the same elements as the projection device 100 and is operated in a similar way. In the following, only the differences from the projection device 100 are therefore described.

[0084] In addition to a first light beam deflection unit 120 which corresponds to the light beam deflection unit 120 of the first embodiment and therefore is designated by the same reference sign, the projection device 200 also comprises a second light beam deflection unit 150. While the first light beam deflection unit 120 comprises two one-dimensional resonantly enhanced deflection elements 121, 122, the second light beam deflection unit 150 comprises two one-dimensional deflection elements 151, 152 which may for example be DC controlled. The deflection elements 151, 152 may, for example, be realized as galvanometer mirrors. The deflection elements 151, 152 have a higher deflection range than the resonantly enhanced deflection elements 121, 122, but are slower and have a much higher inertia against changes of velocity and direction.

[0085] In a similar way as between the two deflection elements 121, 122, relay optics 153 (shown in the figure in dashed lines) may be arranged between the deflection elements 151, 152 and/or between the first and second deflection units 120, 150. Further focusing optics (not shown in the figure) may be arranged downstream of the second deflection unit 150.

[0086] By combining the first and second light beam deflection units 120, 150, an area that can be reached by the light beam 101 is significantly increased. The target plane 160 in the present embodiment is subdivided into individual target areas 161. Since the imaging area of the first light beam deflection unit 120 is a circle, the target areas 161 preferably have a hexagonal shape fitting into the circle. Further, they preferably are arranged adjacent to each other. However, the present invention is not restricted to this specific example.

[0087] In operation, the second light beam deflection unit 150 is controlled so that a light beam 101 not deflected by the first light beam deflection unit 120 hits the center point 162 of a target area. Then, an irradiation along the spiral is carried out as described in the first embodiment. Then, the second light beam deflection unit 150 jumps to the center point 162 of the next hexagon 161. Again, an irradiation along the spiral is carried out and so on. The pattern illuminated during each step may be restricted to the area of the spiral lying within the hexagon to avoid an overlap.

[0088] As an alternative, if only specific areas of the target have to be irradiated, such as for example when cutting holes into a metal sheet, the second light beam deflection unit 150 needs not to scan the entire surface of the target 160, but may directly jump between the specific areas, e.g. the hole center positions, in case the hole is small enough to fit into the circular image region scanned by the first light beam deflection unit 120.

[0089] Next, different examples for generating a spiral trajectory similar to the spiral 144 shown in FIG. 4 using resonantly-enhanced deflector elements are described.

[0090] In order to achieve a desired change of an amplitude over time, a set signal V.sub.set(t) is prepared. FIG. 7a shows a first example of a waveform of a set signal V.sub.set(t). In a first time span T1, the set signal V.sub.set(t) has a linear ramp upwards from zero to a maximum value. In a second time span T2, the set signal V.sub.set(t) has a ramp downwards from the maximum value to zero. The waveform is repeated with a period of T=T1+T2.

[0091] In a resonant system, the amplitude of an alternating current voltage signal does not immediately follow the set signal, but has a response time τ. If the amplitude shall be forced to follow the set signal V.sub.set(t), a feedforward term has to be added. Therefore, for achieving an amplitude following the waveform of V.sub.set(t), on resonance, a drive signal of the form

[00001]$V_{\mathrm{drive}}\left(t\right)=\left(1+\tau \frac{\partial }{\partial t}\right)V_{\mathrm{set}}\left(t\right)$

has to be generated. The drive signal V.sub.drive(t) for achieving an amplitude following the set signal V.sub.set(t) of FIG. 7a is shown in FIG. 7b. An alternating current signal having a frequency f res and a fixed amplitude is multiplied with this drive signal V.sub.drive(t) in order to obtain the alternating current voltages V.sub.x(t) and V.sub.y(t) which are supplied to the deflection elements 121, 122. The resulting deflections D.sub.x(t) in the x-direction and D.sub.y(t) in the y-direction are shown in FIGS. 7c and 7d, respectively. It can be seen that due to the feedforward term included in the drive signal V.sub.drive(t), the deflection amplitude envelope follows V.sub.set(t) exactly.

[0092] FIG. 8 shows the trajectory followed by the center of the deflected light beam on the target when the set signal V.sub.set(t) of FIG. 7a is applied. During the time span T1, the spiral grows from its center point to the maximum radius as shown by a solid line. During the time span T2, the spiral shrinks from its maximum radius back to zero as shown by a dashed line.

[0093] Since T2 is shorter than T1, the downwards ramp is steeper than the upwards ramp. Therefore, the downwards spiral has less windings than the upwards spiral. In other words, the radial distance between adjacent windings is greater. Preferably, the time span T1 is used for the irradiation of the target as described in the above embodiments, and the time span T2 is not used for the irradiation of the target. During this time, for example, the second light beam deflection unit 150 shown in FIG. 6 may be actuated in order to move the imaging area to the next destination.

[0094] In the example shown in FIG. 8, the upwards ramp has 15 windings, and the downwards ramp has 5 windings. At a typical resonance frequency f.sub.res of 300 kHz, the time period T is approximately 67 μs, and the frame repetition frequency 1/T is 15 kHz.

[0095] The time scheme may also be inverted so that T1 is shorter than T2. In this case, the downwards spiral generated during the time span T2 may be used for the irradiation of the target.

[0096] If the period T in which the set signal V.sub.set(t) is repeated is an integer multiple of 1/f res, the spiral of the second period (and each further period) is congruent to the one of the previous period, thus achieving a reproducible pattern. Otherwise, the spiral of each period is rotated by a predetermined phase compared to the one of the previous period. This applies also to the following examples.

[0097] FIG. 9a shows a second example of a waveform of a set signal V.sub.set(t). FIG. 9b shows the waveform of a corresponding drive signal V.sub.drive(t). FIGS. 9c and 9d show the resulting deflections D.sub.x(t) in the x-direction and D.sub.y(t) in the y-direction, respectively.

[0098] In this second example, a first time span T1 for the upwards ramp and a third time span T3 for the downwards ramp are made equal. During an (optional) second time span T2 between the first and third time spans T1, T3, the amplitude is held constant at its maximum value. The waveform is repeated with a period of T=T1+T2+T3.

[0099] FIG. 10 shows the trajectory followed by the center of the deflected light beam on the target when the set signal V.sub.set(t) of FIG. 9a is applied. During the time span T1, the spiral grows from its center point to the maximum radius as shown by a solid line in the same way as in the example shown in FIGS. 7 and 8. During the time span T2, the amplitude and thus the radius remains constant and the center points of the light spots move on a circle as shown by a dotted line. This might be for example be used to ensure that a drilled hole or in general a projected pattern is actually circular. During the time span T3, the spiral shrinks from its maximum radius to zero as shown by a dashed line.

[0100] Since T1 and T3 are equal, both the upwards spiral and the downwards spiral have the same number of windings and the same radial distance d.sub.r. They therefore may be used both for the irradiation of the target. Due to the inverse timing, however, the two spirals are mirror symmetric to each other. In the figure, they are mirrored on the x-axis, i.e. they have an inverted y-axis. Thus, the spots of the downwards spiral on the y-axis lie halfway in between the spots of the upwards spiral whereby the resolution of the projection on the y-axis is doubled.

[0101] FIG. 11a shows a third example of a waveform of a set signal V.sub.set(t). FIG. 11b shows the waveform of a corresponding drive signal V.sub.drive(t). FIGS. 11c and 11d show the resulting deflections D.sub.x(t) in the x-direction and D.sub.y(t) in the y-direction, respectively.

[0102] The third example differs from the second example in that the waveform of the set signal V.sub.set(t) during time spans T1, T2, T3 is repeated during T4, T5, T6 with an inverted sign. The waveform is repeated with a period of T=T1+T2+T3+T4+T5+T6. In the present example, the time spans are selected to be T1=T3=T4=T6 and T2=T5.

[0103] Compared to the example shown in FIG. 9, an advantage of this drive scheme is that the number of steps in the drive signal V.sub.drive(t) is reduced. They can further be minimized if the holds at the maximum amplitude are omitted.

[0104] The inversion of the sign of the set signal V.sub.set(t) at the zero transitions causes a phase jump of 180° in the deflections D.sub.x(t), D.sub.y(t), resulting in a phase difference of 180° between the deflections D.sub.x(t), D.sub.y(t) during the time spans T4, T5, T6 compared to those during the time spans T1, T2, T3.

[0105] FIGS. 12a to 12d show the trajectories followed by the center of the deflected light beam on the target when the set signal V.sub.set(t) of FIG. 11a is applied. During the time span T1, the spiral grows from its center point to the maximum radius as shown by a solid line. During the time span T2, the amplitude and thus the radius remains constant and the center point of the deflected light spot moves on a circle (not shown in the figure). During the time span T3, the spiral shrinks from its maximum radius to zero as shown by a dashed line in FIGS. 12b and 12d. During the time span T4, the spiral grows again from its center point to the maximum radius, but with an inverted phase, as shown by a dot-dashed line in FIG. 12a. During the time span T5, the amplitude and thus the radius again remains constant. During the time span T6, the spiral shrinks from its maximum radius to zero, as shown by a dotted line in FIGS. 12c and 12d.

[0106] All the four spirals may be used for the irradiation of the target. As indicated above with reference to FIG. 10 (and FIG. 12b), the spiral during the time span T3 has the y-axis inverted compared to the spiral during the time span T1. In a similar way, the spiral during the time span T4 has both the x-axis and the y-axis inverted, and the spiral during the time span T6 only the x-axis (FIG. 12c). This results in the two upwards spirals during the time spans T1 and T4 being point symmetrical to each other around the origin as shown in FIG. 12a as are the two downwards spirals during the time spans T3 and T6 as shown in FIG. 12d. When both the spirals are used, a doubled spatial resolution in a radial direction may be achieved over the entire imaging area. Similar as shown above in FIG. 10, adjacent upwards and downwards spirals are mirror symmetrical to each other, which is shown in FIG. 12b for the spirals during the time spans T1, T3 and in FIG. 12c for the spirals during the time spans T1, T6.

[0107] In a further example, a set signal V.sub.set(t) as shown in FIG. 9a may be used for one of the deflecting elements, while a set signal V.sub.set(t) as shown in FIG. 11a may be used for the other deflecting element.

[0108] While examples for achieving a spiral as a trajectory followed by the center of the deflected light beam on the target are described above, the present invention is not restricted thereto. For example, a stepwise increasing set signal may be provided instead of a ramp so that concentric circles are generated as a trajectory on the target.

[0109] Next, different examples for generating light pulses suitable for the present invention are described with reference to FIG. 13. Therein, A designates a timing diagram of the light beam 101 at the position (A) shown in FIG. 1, 112 designates a time dependent transfer function of the intensity modulation element 112, and B designates a timing diagram of the light beam 101 at the position (B) shown in FIG. 1.

[0110] FIG. 13a shows schematic time diagrams for a light beam generation unit that supports true pulse-on-demand operation. The light source 111 emits a light beam 101 comprising light pulses having identical duration and energy. The timing of the light pulses (the time points at which the light pulses occur) may arbitrarily be triggered by the control unit 130 as required. Such a triggering may be achieved for example by using the method described by Andreas Oehler et al. which is indicated above. The (optional) intensity modulator 112 may be used to individually vary the light intensity of the pulses, for example by multiplying them with a time dependent transfer function, to obtain a light beam 101 comprising light pulses having light intensities differing from each other. This may for example be used for an anti-aliasing/gray scale image projection, or to compensate for deflection-dependent attenuation through the deflection system to ensure a constant fluence across the whole field, e.g. for ps-laser machining applications which exhibit a fluence-dependent ablation spot diameter.

[0111] FIG. 13b shows schematic time diagrams for a light beam generation unit having a fixed pulse rate source with gating or pulse-picking which is a very common type of source for ps and fs pulses. The light source 111 emits a light beam 101 comprising light pulses having identical duration and energy at a pulse rate which is essentially fixed. By the intensity modulator 112, the pulses closest to the ideal timings are transmitted, the remaining pulses are suppressed. This method is called gating or pulse-picking and also sometimes referred to as “pulse-on-demand”, even if the pulse does not directly follow the trigger signal but may be delayed by one pulse period at the maximum. As above, the intensity modulator 112 may also be used to individually vary the light intensity of the pulses.

[0112] FIG. 13c shows schematic time diagrams for a light beam generation unit having a continuous wave light source. The light source 111 emits a continuous light beam 101 having a constant amplitude. The pulse forming (or pulse carving) is then carried out by the intensity modulator 112 which transmits or suppresses the light beam according to a given scheme. As above, the intensity modulator 112 may also be used to individually vary the light intensity of the generated pulses. For this case, the intensity modulator has to be fast enough to cut out pulses short enough to not be smeared out due to the high path velocity on the outer windings of the spiral. It should also allow for a high enough pulse repetition rate.

[0113] FIGS. 14a and 14b show examples for patterns that may be generated by the projection device 100.

[0114] FIG. 14a shows the representation of an uppercase letter Q. The conversion of the desired pattern into a spiral bitmap can be done using the known methods for image processing. Thereby, grayscale values for each pixel are achieved. The control unit 130 controls the light beam deflection unit 120 to generate a spiral pattern as shown in FIG. 5. It also controls the intensity modulation element 112 to change the intensity of the light beam 101 so that the desired pattern is achieved by the light spots 141. In the figure, a black filling represents maximum intensity, a white filling represents zero intensity. Alternatively, when working with fixed intensity light pulses, gray-scale pixel values may be realized by repeating the pattern several times and turning on a spot only in a fraction of the number of repetitions depending on its gray scale value.

[0115] FIG. 14b shows the representation of a logo. The extent of the logo is smaller than the circle 143 indicating the maximum deflection. Further, there is an empty region inside the logo. Therefore, it is not required to generate a ramp over the entire amplitude range from zero to the maximum, but only between the values corresponding to the light points 141a and 141b. Thereby, the frame repetition rate can be increased. For the specific example shown, only half the number of revolutions are necessary, resulting in a speed up by a factor of two. This might be useful for example for micro-texturing applications, where the same pattern has to be repeated many times.

[0116] The spiral trajectory achieved by the present invention may also be advantageous for the micro-machining of circular structures, such as disks, rings, cones or holes, as long as the structure fits into the circular field. For disks and holes, a full spiral pattern may be used and all the light spots may be turned on. For rings, a radially truncated spiral pattern as in FIG. 14b may be used and all the light spots may be turned on, or a full pattern as in FIG. 14a may be used and the central light spots may be left off. Conical structures may be made of rings where the diameters vary with the layer depth. As mentioned earlier, one or more revolutions at the minimum and/or maximum deflection radii may be included to ensure proper circularity.

[0117] Applications for the projection device and method according to the invention include, for example, image projection, irradiation of light-sensitive materials (for example printing, lithography, photosensitive etching, 3D printing, etc.), scanning of objects (e.g. LIDAR, microscopy, etc.), or material processing by means of laser ablation.