AN OPTICAL DEVICE FOR MODULATING INCIDENT LIGHT
20220252909 · 2022-08-11
Inventors
Cpc classification
G03H1/2294
PHYSICS
G02F2203/15
PHYSICS
G03H1/02
PHYSICS
International classification
G02F1/01
PHYSICS
G03H1/02
PHYSICS
Abstract
According to an aspect of the present inventive concept there is provided an optical device (1) for modulating incident light (L), comprising a resonance defining layer structure (110) comprising an optical state change material (112), and an electrode layer (120) comprising at least two spaced-apart electrode elements (121, 122, 123). The electrode elements are individually addressable and arranged to cause an optical state change of a portion of the optical state change material between a first state and a second state, wherein the portion forms a geometric structure (131, 132, 133, 134, 135, 136) defined by the arrangement of the at least two spaced-apart electrode elements. The optical state change material is configured to alter an optical response of the optical device upon the optical state change between the first state and the second state, thereby determining the modulation of the incident light.
Claims
1. An optical device for modulating incident light, comprising: a resonance defining layer structure comprising an optical state change material; an electrode layer comprising at least two spaced-apart electrode elements; wherein said electrode elements are individually addressable and arranged to cause an optical state change of a portion of the optical state change material between a first state and a second state; wherein said portion forms a geometric structure defined by the arrangement of the at least two spaced-apart electrode elements, wherein the optical state change material is configured to alter an optical response of the optical device upon the optical state change between the first state and the second state, said optical response determining the modulation of the incident light.
2. An optical device according to claim 1, wherein the optical state change material is a phase change material, said phase change material preferably being formed of a compound comprising germanium-antimony-tellurium, GST, and wherein an optical state change is a phase change of the phase change material.
3. An optical device according to claim 1, wherein said electrode elements are further configured to repeatedly cause an optical state change of the portion of the optical state change material between the first state and the second state.
4. An optical device according to claim 1, wherein the resonance defining layer structure further comprises an electrically conducting and/or an electrically insulating layer.
5. An optical device according to claim 1, wherein the electrode elements are configured to induce a current into at least one layer of the resonance defining layer structure so as to cause the optical state change of the portion of the optical state change material.
6. An optical device according to claim 1 comprising at least three electrode elements, arranged to define at least two different geometric structures in the optical state change material.
7. An optical device according to claim 6, wherein the at least two different geometric structures together form a V-shape and/or a L-shape, when seen in a direction perpendicular to the surface of the resonance defining layer structure.
8. An optical device according to claim 1, wherein the optical device is configured to modulate incident light having a wavelength in the range from 100 nm to 2000 nm, preferably from 300 nm to 750 nm.
9. An optical device according to claim 1, wherein the device is configured to modulate polarized light.
10. An optical device according to claim 1, wherein the optical state change material is arranged in layer having a thickness smaller than a minimum wavelength of the incident light to be modulated.
11. An optical device according to claim 1, wherein the first state of the optical state change material is a dominantly crystalline state, and wherein the second state of the optical state change material is a dominantly amorphous state.
12. An optical device according to claim-1, wherein the resonance defining layer structure and the electrode layer is arranged in a stack structure, and wherein the electrode layer is arranged above and/or below the resonance defining layer structure when seen in a direction perpendicular to the surface of the resonance defining layer structure.
13. A method of modulating light incident to an optical device according to claim 1, comprising the steps of: applying a first voltage difference to a pair of the at least two electrode elements of the optical device so as to cause an optical state change of the portion of optical state change material from a first state to a second state, and applying a second voltage difference to the pair of electrode elements, so as to cause an optical state change of the optical state change material from the second state to the first state.
14. A method according to claim 13, wherein the second voltage difference is lower than the first voltage difference and/or applied for a longer period of time than the first voltage difference.
15. A method according to claim 13, wherein the electrode layer comprises at least three electrode elements, the method further comprising the steps of: applying the first voltage difference to a second pair of electrode elements so as to cause an optical state change of a further portion of the optical state change material from the first state to the second state, and applying the second voltage difference to the second pair of electrode elements so as to cause an optical state change of the further portion of the optical state change material from the second state to the first state.
16. An array of optical devices, wherein each optical device in the array is an optical device according to claim 1 and wherein each optical device forms a unit cell, wherein each optical device in the array is individually controllable by controlling the electrode elements of the respective optical device.
17. The array according to claim 16, wherein each of the optical devices comprises a set of electrode elements.
18. The array according to claim 17, wherein the set of electrode elements of a first optical device differs from the set of electrode elements of a second optical device.
19. The array according to claim 16, wherein the array comprises a single resonance defining layer common to all unit cells in the array.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0067] The above, as well as additional objects, features and advantages of the present inventive concept, will be better understood through the following illustrative and non-limiting detailed description, with reference to the appended drawings. In the drawings like reference numerals will be used for like elements unless stated otherwise.
[0068]
[0069]
[0070]
[0071]
[0072]
DETAILED DESCRIPTION
[0073] Referring now to
[0074] The electrode elements 121, 122, 123 may be individually addressable via for example the substrate 140, in which conductive paths may be provided for supplying electrical power to the electrode elements 121, 122, 123. Thus, the electrode layer may be arranged to enable an electrical control of the optical state change material 112, which may be configured switch between at least a first and a second optical state when exposed to for example a current, a current field, a magnetic field or a heat provided by the electrode layer. Examples of these mechanisms will be discussed in connection with the following figures.
[0075] The electrode layer may for example be formed of an electrically conducing layer, for example of a metal, that may be patterned into at least two electrode elements 121, 122, 123 that are laterally separated from each other in the main plane of extension of the substrate 140. Put differently, the electrode elements may form electrically addressable points or regions of electrical contact on the resonance defining layer structure 110. The separation and/or extension of the contact points between at least two electrode elements 121, 122, 123 and the resonance defining layer structure 110 may define a geometric structure (not shown) that can be formed in the optical state change material 112 upon an optical state change in a portion of the optical state change material 112. Examples of such geometrical structures will be discussed in connection with for example
[0076] The optical state change material 112 may be provided as a substantially uniform layer forming a surface onto which the light to be modulated can be brought to impinge. The geometric structures, which can be used for affecting the modulation of the incident light L, may therefore be defined by the patterning of the electrode layer 120 (or the arrangement of the at least two electrical elements of the electrode layer) rather than by a direct patterning of the optical state material 112 itself.
[0077] The optical state change material 112 may for example be a phase change material, PCM, such as for example a transition metal oxide or a chalcogenide glass. Examples of transition metal oxides include VO.sub.2, V.sub.2O.sub.3, EuO, MnO, CoO, CoO.sub.2, LiCoO.sub.2, Ca.sub.2RuO.sub.4, SrLrO.sub.4, Ti.sub.2O.sub.3, LaCoO.sub.3, PrNiO.sub.3, Cd.sub.2OsO.sub.7, NdNiO.sub.3, Tl.sub.2Ru.sub.2O.sub.7, Ca.sub.1−ySr.sub.yVO.sub.3, Fe.sub.3O.sub.4, La.sub.1−yCa.sub.yMnO.sub.3, La.sub.2−2ySr.sub.1+2uMn.sub.2O.sub.7, Ti.sub.4O.sub.7 and La.sub.2NiO.sub.4. Examples of chalcogenide glasses, and other phase change materials, include NiS.sub.2−ySe.sub.y, NiS, BaCo.sub.1−yNi.sub.yS.sub.2, PrRu.sub.4P.sub.12, BaVS.sub.3, EuB.sub.6, CuCl and compounds comprising GeSbTe, also referred to as GST. The PCM may be configured to switch from a crystalline state to an amorphous state when exposed to a high-power electrical pulse, and to return to the crystalline state when exposed to a series of low-power electrical pulses. Depending on the arrangement of the electrode elements 121, 122, 123, the resulting geometrical structure in the PCM may affect the optical response and thus the modulation of the incident light L.
[0078] The change of a state change material from one state to another may be determined by both the voltage amplitude and the duration of the electrical pulse. This can be exemplified by a PCM, in which the different phases may correspond to different percentages of crystallinity. Current and generated Joule heat may be used to switch the atoms of the PCM from being orderly packed (crystalline phase) to randomly packed (amorphous phase) and vice versa.
[0079] If the current injected in the PCM is high enough to melt the material, the atoms may go to a liquid phase. It the current, and thus the heat, is then promptly taken away, the atoms have no remaining energy to travel back to their preferred crystalline lattice position. They may hence be locked in the amorphous state. However, when the current, and thus the heat, is only gradually taken away, the atoms may have sufficient energy to travel to their preferred crystalline position. The resulting state may then be crystalline.
[0080] If the injected current is not high enough to melt the PCM material, it can still provide heat and thus energy to the atoms that is sufficient to allow them to move closer to their desired crystalline lattice location. The more energy provided, the more percentage of the atoms may be in a crystalline state.
[0081] Thus, it is appreciated that the state change may be effected by the amplitude of the applied voltage pulse alone, by the duration of the pulse alone or by a combination of both.
[0082] The electrode elements 121, 122, 123 may be arranged to cause an optical state change of a portion forming a subwavelength-scaled geometric structure in the plane of the resonance defining layer 110 and with reference to the wavelength of the of the incident to be modulated. The optical device 1 as shown in the present figure may form a unit cell of an array of a plurality of unit cells, wherein each unit cell may be individually controlled in terms of optical response to control a wave front of incident electromagnetic waves by imparting local phase shifts to the incoming waves.
[0083] The optical device 1 may for example be formed in an additive process, in which the electrode layer 120 is deposited and patterned to form the electrode elements 121, 122, 123. In a following step, the resonance defining layer 110 may be provided by first depositing for example an intermediate layer 114, such as an electrically conducting layer 114, above the electrode layer 120, and then the optical state change material 112 above the intermediate layer 114.
[0084]
[0085] In
[0086] In
[0087] In
[0088] It will be appreciated that the above operation schemes of the optical device 1 are examples illustrating the embodiments of the inventive concept. Thus, different numbers of electrode elements and arrangements of the same may be employed to achieve the desired geometrical structures of phased changed regions in the phase change material 122. Further, a current may be passed between three or more electrode elements as well. An example of is shown in
[0089] In the embodiment shown in
[0090]
[0091]
[0092] In the present example, the first electrode element 121 may be arranged above a layer of the optical state change material 122 (as seen in a stacking direction from a surface of the substrate, not shown in
[0093] One or several electrode element pair may be provided so as to allow the formation of other geometric structures. In
[0094] A further example of an optical state change mechanism is disclosed in
[0095] As shown in the illustrating examples of the above figures, several mechanisms may be employed to form a geometric structure in the optical state change material, wherein the state change mechanism, as well as the extension and form of the resulting geometrical structure are determined by the arrangement and electrical operation of the electrode elements. Depending on the shape and orientation of the geometrical structure, different optical responses may be provided to achieve a modulation of light impinging on the optical device.
[0096]
[0097] For illustrative purposes only, each of the unit cells may be considered to have a resonance defining layer with a shape conforming to a quadrilateral and an electrode element arranged in each corner (or, in the case of a configuration similar to the ones in
[0098]
[0099] In the above the inventive concept has mainly been described with reference to a limited number of examples. However, as is readily appreciated by a person skilled in the art, other examples than the ones disclosed above are equally possible within the scope of the inventive concept, as defined by the appended claims.