TEST PROBE MODULE

Abstract

A test probe module is provided. The test probe module includes a circuit substrate, an interposer and a probe assembly. The interposer is coupled to the circuit substrate, and includes a plurality of through holes. The probe assembly is coupled to the interposer. The probe assembly includes a plurality of probes. A first terminal of each of the probes passes through a corresponding through hole and is electrically connected to the circuit substrate. A second terminal of each of the probes is in contact with a test object. The interposer has the same material properties as the test object.

Claims

1. A test probe module, comprising: a circuit substrate; an interposer coupled to the circuit substrate, the interposer having a plurality of through holes; and a probe assembly including a plurality of probes, the probe assembly being coupled to the interposer, a first terminal of each of the probes passing through a corresponding through hole and being electrically connected to the circuit substrate, a second terminal of each of the probes being in contact with a test object, wherein the interposer has the same material properties as the test object; wherein an outer diameter of the first terminal of the probe is greater than an outer diameter of the second terminal of the probe, and a quantity of the plurality of through holes is equal to a quantity of the plurality of probes.

2. The test probe module according to claim 1, wherein the probe assembly includes a cantilever probe.

3. The test probe module according to claim 1, wherein the probe assembly includes a vertical probe.

4. The test probe module according to claim 1, wherein the material property includes a hardness, a ductility, an electrical conductivity or a coefficient of thermal expansion.

5. The test probe module according to claim 1, wherein the interposer is made of silicon nitride, aluminum nitride, silicon carbide, zinc oxide, gallium nitride or gallium arsenide.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The described embodiments may be better understood by reference to the following description and the accompanying drawings, in which:

[0016] FIG. 1 is a schematic view of a test probe module according to a first embodiment of the present disclosure; and

[0017] FIG. 2 is a schematic view of a test probe module according to a second embodiment of the present disclosure.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

[0018] The present disclosure is more particularly described in the following examples that are intended as illustrative only since numerous modifications and variations therein will be apparent to those skilled in the art. Like numbers in the drawings indicate like components throughout the views. As used in the description herein and throughout the claims that follow, unless the context clearly dictates otherwise, the meaning of “a”, “an”, and “the” includes plural reference, and the meaning of “in” includes “in” and “on”. Titles or subtitles can be used herein for the convenience of a reader, which shall have no influence on the scope of the present disclosure.

[0019] The terms used herein generally have their ordinary meanings in the art. In the case of conflict, the present document, including any definitions given herein, will prevail. The same thing can be expressed in more than one way. Alternative language and synonyms can be used for any term(s) discussed herein, and no special significance is to be placed upon whether a term is elaborated or discussed herein. A recital of one or more synonyms does not exclude the use of other synonyms. The use of examples anywhere in this specification including examples of any terms is illustrative only, and in no way limits the scope and meaning of the present disclosure or of any exemplified term. Likewise, the present disclosure is not limited to various embodiments given herein. Numbering terms such as “first”, “second” or “third” can be used to describe various components, signals or the like, which are for distinguishing one component/signal from another one only, and are not intended to, nor should be construed to impose any substantive limitations on the components, signals or the like.

First Embodiment

[0020] Referring to FIG. 1, a first embodiment of the present disclosure provides a test probe module Z1 that includes a circuit substrate 1, an interposer 2 and a probe assembly 3. The interposer 2 is coupled to the circuit substrate 1, and includes a plurality of through holes 20. The probe assembly 3 is coupled to the interposer 2. The probe assembly 3 includes a plurality of probes 31. A first terminal 311 of each of the probes 31 passes through a corresponding through hole 20 and is electrically connected to the circuit substrate 1. A second terminal 312 of each of the probes 31 is in contact with a test object 4. The interposer 2 has the same material properties as the test object 4. The material property includes, but not limited to, a hardness, a ductility, an electrical conductivity or a coefficient of thermal expansion.

[0021] Specifically speaking, the test probe module Z1 in the present embodiment is a probe card detection device including a cantilever probe. The interposer 2 is made of silicon nitride, aluminum nitride, silicon carbide, zinc oxide, gallium nitride or gallium arsenide. For example, if the test object 4 is a wafer to be tested and is made of a silicon nitride substrate, the interposer 2 can be made of the same silicon nitride substrate as the wafer to be tested. Since the plurality of probes 31 of the probe assembly 3 are directly implanted on the interposer 2, which has the same material properties as the wafer to be tested, the wafer to be tested has the same thermal expansion effect as the interposer 2. Accordingly, a shift of a position to be tested on a surface of the wafer to be tested due to a thermal expansion is the same as a shift of the plurality of probes 31 due to the thermal expansion, thereby improving an alignment precision of the test probe module Z1 to the test object 4. However, the present disclosure in not limited to the example described above.

Second Embodiment

[0022] Referring to FIG. 2, a second embodiment of the present disclosure provides a test probe module Z2 that includes a circuit substrate 1, an interposer 2 and a probe assembly 3. The circuit substrate 1 is a printed circuit board. The interposer 2 is coupled to the circuit substrate 1, and includes a plurality of through holes 20. The probe assembly 3 is coupled to the interposer 2. The probe assembly 3 includes a plurality of probes 31. A first terminal 311 of each of the probes 31 passes through a corresponding through hole 20 and is electrically connected to the circuit substrate 1. A second terminal 312 of each of the probes 31 is in contact with a test object 4. The interposer 2 has the same material properties as the test object 4. The material property includes, but not limited to, a hardness, a ductility, an electrical conductivity or a coefficient of thermal expansion. An outer diameter of the first terminal 311 of the probe 31 is greater than an outer diameter of the second terminal 312 of the probe 31. A quantity of the plurality of through holes 20 is equal to a quantity of the plurality of probes 31.

[0023] Specifically speaking, the test probe module Z2 in the present embodiment is a probe card detection device including a vertical probe. The interposer 2 is made of silicon nitride, aluminum nitride, silicon carbide, zinc oxide, gallium nitride or gallium arsenide. For example, if the test object 4 is a wafer to be tested and is made of a silicon nitride substrate, the interposer 2 can be made of the same silicon nitride substrate as the wafer to be tested. Since the plurality of probes 31 of the probe assembly 3 are directly implanted on the interposer 2, which has the same material properties as the wafer to be tested, the wafer to be tested has the same thermal expansion effect as the interposer 2. Accordingly, a shift of a position to be tested on a surface of the wafer to be tested due to a thermal expansion is the same as a shift of the plurality of probes 31 due to the thermal expansion, thereby improving an alignment precision of the test probe module Z2 to the test object 4. However, the present disclosure in not limited to the example described above.

Beneficial Effects of the Embodiments

[0024] In conclusion, one of the beneficial effects of the present disclosure is that, in the test probe module provided by the present disclosure, the interposer 2 has the same thermal expansion effect as the test object 4, so as to improve the alignment precision of the probe 31 to the test object 4 by virtue of “the interposer 2 having the same material properties as the test object 4”.

[0025] Furthermore, the test probe module provided by the present disclosure can be applied to the cantilever probe as well as the vertical probe, that is, the present disclosure is not limited to configurations of the probe.

[0026] The foregoing description of the exemplary embodiments of the disclosure has been presented only for the purposes of illustration and description and is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching.

[0027] The embodiments were chosen and described in order to explain the principles of the disclosure and their practical application so as to enable others skilled in the art to utilize the disclosure and various embodiments and with various modifications as are suited to the particular use contemplated. Alternative embodiments will become apparent to those skilled in the art to which the present disclosure pertains without departing from its spirit and scope.