Method and System utilizing absolute velocity to improve the performance of electromagnetic devices

Abstract

The method and system utilized the measurement of the “absolute” velocities or equivalent parameters of the electromagnetic devices and objects, which are defined as the velocities relative to the real origin of the electromagnetic wave, to accurately picture their impacts on the propagation and measurement of the electromagnetic wave and compensate for these impacts correspondingly. The comprehensive information of the “absolute” velocities, including both the measured values and the calculated right timings, is utilized to calibrate and control the electromagnetic device and calculate the results to improve performance and accuracy. The method and system include the absolute velocity measurement, the calibration and control of the device, and the computation of the right timings and results.

Claims

1. A system utilizing the comprehensive information of absolute velocity to improve the capability and accuracy of the electromagnetic device comprising: a. one or more modules for the absolute velocity measurement; b. one or more modules for the electromagnetic measurement, calibration, and control; c. one or more modules for the computing of results; d. one or more communication channels for each module.

2. A module for the absolute velocity measurement as in claim 1, further comprising: a. one or more electromagnetic emission sources; b. one or more electromagnetic detectors; c. one or more clocks for recording the timestamps of the measurement; d. optionally, one or more devices for the amplification of the measured parameters.

3. A module for the electromagnetic measurement, calibration, and control as in claim 1, further comprising: a. one or more units for electromagnetic measurement, detection, and positioning; b. one or more units that calibrate the settings of the device; c. one or more units that control the device to the desired settings.

4. A module for the computing as in claim 1, further comprising: a. one or more units for storing the measured data, including the time-series value of measured absolute velocities and/or equivalents, either real-time or offline; b. one or more units for processing the measured data, either real-time or offline; c. one or more units for computing the results using the comprehensive information of the absolute velocities and/or equivalents, either real-time or offline.

5. A method of improving the performance of electromagnetic measurement, detection, and positioning using the comprehensive information of the absolute velocities and/or equivalents comprising: a. measuring the absolute velocities and/or equivalents; b. generating the comprehensive information of the absolute velocities and/or equivalents; c. calibrating the optimal settings and controlling the electromagnetic device states to the desired settings based on the comprehensive information of absolute velocities and/or equivalents to optimize the system performance; d. calculating the results based on the comprehensive information of the absolute velocities and/or equivalents to improve the accuracy.

6. The method of claim 5 wherein said the absolute velocity is the velocity of an object relative to the origin of the electromagnetic wave.

7. The method of claim 5 wherein said measuring the absolute velocities and/or equivalents by changing one or more of the settings of the light sources, detectors, and other objects and devices that have an impact on the propagation and measurement of the electromagnetic wave, including but not limited to, direction, timing, velocity, position, distance, angle, energy, frequency, and wavelength.

8. The method of claim 7 wherein said determining the absolute velocities and/or equivalents by measuring one or more of the parameters of the electromagnetic wave, including but not limited to, time, position, velocity, displacement, angle, energy, frequency, and wavelength.

9. The method of claim 7 wherein said recording the timestamps of the measurement of the absolute velocities and/or equivalents.

10. The method of claim 7 wherein said using instruments, including but not limited to reflections, to amplify the parameters for the absolute velocity measurement.

11. The method of claim 7 wherein said measuring the absolute velocities and/or equivalents either directly in the device and the objects or indirectly in a reference frame.

12. The method of claim 7 wherein said measuring the absolute velocities and/or equivalents either real-time or offline.

13. The method of claim 7 wherein said measuring the absolute velocities and/or equivalents in at least three independent directions.

14. The method of claim 5 wherein said the comprehensive information of the absolute velocities and/or equivalents include the absolute velocities and/or equivalents of all the related devices and objects.

15. The method of claim 5 wherein said the comprehensive information of the absolute velocities and/or equivalents include both the measured values and the right timings.

16. The method of claim 15 wherein said storing the time-series of measured absolute velocities and/or equivalents, including measured values and timestamps, in the memory.

17. The method of claim 15 wherein said measuring or calculating the right timings of the absolute velocities and/or equivalents based on the propagation of the electromagnetic wave.

18. The method of claim 15 wherein said retrieving the comprehensive absolute velocity information from the memory using calculated right timings.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0008] FIG. 1 shows an example of potential positioning error for an optical mask aligner assumed “at rest” under previous art

[0009] FIG. 2 shows the architecture design of the system for electromagnetic-based measurement, detection, and positioning using the absolute velocity or equivalents

[0010] FIG. 3 shows the design of the absolute velocity measurement module

[0011] FIG. 4 shows examples of different methods of measuring the absolute velocity. FIG. 4(a) uses the travel time. FIG. 4(b) uses the angle and position. FIG. 4(c) compares different directions.

[0012] FIG. 5 shows examples of methods of amplifying the absolute velocity measurement.

[0013] FIG. 5(a) uses flat reflections. FIG. 5(b) uses curved reflections.

[0014] FIG. 6 shows the design of the measurement, detection, and positioning module

[0015] FIG. 7 shows the design of the computing module

DETAILED DESCRIPTION OF THE INVENTION

[0016] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, or uses. It should be understood that throughout the drawings, corresponding reference numerals indicate like or corresponding parts and features. As used herein, the term module refers to one or more application-specific integrated circuit (ASIC), electronic circuits, processors (shared, dedicated, or group), and memory that executes one or more software or firmware programs, combinational logic circuits, electromagnetic sources, detectors, electrical circuits, movement units, and/or other suitable components that provide the described functionality.

[0017] This invention presents a method and system design that enables the users of utilizing the comprehensive “absolute” velocity information to improve the performance and accuracy of any device using electromagnetic measurement, detection, and positioning. The system design includes modules for the absolute velocity measurement, the calibration and control of the device, and the computation of results respectively. The method includes various techniques to measure the absolute velocity or its equivalent parameters and additional techniques to improve the measurement accuracy. The method generates the comprehensive absolute velocity information by recording the timings of the measured absolute velocities, storing the time-series, and calculating the right timings. This information is utilized to calibrate and control the device and improve the accuracy of calculated results.

[0018] FIG. 2 shows the architecture design of the system, comprising at least one or more modules for the absolute velocity measurement 1; one or more modules for the electromagnetic measurement, calibration, and control 2; and one or more modules for the computing of the results with the comprehensive information of the measured absolute velocities 3. These modules are connected with communication channels 4, 5, 6. The information of measured absolute velocities or equivalents from 1 is sent through channel 4 to the measurement, calibration, and control module 2 for utilization. The measured information from both module 1 and module 2 is sent through channels 4 and 5 to the computing module 3 to calculate the results. Furthermore, the calculated results from the computing module 3, for example, the calculated timings, can be sent out or fed back to modules 1 and 2 for utilization through channel 6.

[0019] FIG. 3 shows the design of the absolute velocity measurement module, which includes at least one or more light sources 7 and one or more detectors 8 for measuring one or more parameters directly related to the absolute velocity, including but not limited to time, position, displacement, angle, velocity, frequency, energy, and wavelength. The timing of the measurement will also be recorded with one or more clocks 9. Optionally, additional units, such as a reflection device amplifying these measured parameters, see FIG. 5, may be included. In order to get a complete picture of the absolute velocity, the absolute velocity should be measured in at least 3 independent directions, for example, the x,y,z as shown in FIG. 3.

[0020] Since the absolute velocity is the velocity of the object relative to the real origin of the electromagnetic wave which doesn't always coincide with a physical position, its measurement is not straightforward. The principle of measuring the absolute velocity is to measure its effects on the propagation of the electromagnetic wave, which may be represented in the differences of key parameters, for example, velocity, time, angle, position, displacement, frequency, energy, and wavelength. The absolute velocity can be explicitly calculated from one or more of these measured parameters. Alternatively, because these measured parameters are equivalent to the absolute velocity as to their effects on the propagation of the electromagnetic wave, we can instead directly use them as equivalent information of absolute velocity to improve system performance. Hence, these measured parameters are also called the “equivalents” of the absolute velocity.

[0021] FIG. 4 shows examples of different methods of measuring the absolute velocity with some of the key parameters. As one example in FIG. 4(a), we can use various existing methods to measure the light velocity between the emission source 10 and the receiving detector 11, denoted as c.sub.m. Assuming the absolute velocity of the module is ν, then c.sub.m=c−ν, where c=299792 km/s is the constant light speed. The absolute velocity ν can be calculated as:

ν=c−c.sub.m

[0022] Another example in FIG. 4(a) is to use the measured time. Assume that the distance between the source 10 and detector 11 is d. We measure the time t taken for detector 11 to receive the electromagnetic wave, which should be t=d/(c−ν). Therefore, the absolute velocity ν is:

ν=c−d/t

[0023] The third example in FIG. 4(b) is to measure the angular displacement due to the absolute velocity of the module ν. Assume we want to measure the absolute velocity ν which is perpendicular to the direction from the light source 12 to the detector 13 at the time of emission. The movement constitutes an angle of α in the receiving end with the detector at position 14 at the time of detection, the value of the absolute velocity ν is:

ν=c*sin(α)

[0024] The fourth example in FIG. 4(b) is to measure the position displacement due to the absolute velocity of the module ν. Assume we want to measure the absolute velocity ν which is perpendicular to the direction from the light source 12 to the detector 13 at the time of emission. The distance from the light source 12 to the detector 13 at the time of emission is d.sub.1 and to the detector 14 at the time of detection is d.sub.2. The value of the absolute velocity ν is:

ν=c*d.sub.1/√{square root over (d.sub.1.sup.2+d.sub.2.sup.2)}

[0025] FIG. 4(c) shows a further improvement to measure the light velocity of the module in different directions and use the difference of the light velocity to calculate the absolute velocity.

[0026] This method will cancel out the constant light speed c and provide better accuracy. For example, if we measure the light velocities from the emission source 15 towards detectors 16 and 17 in opposite directions, the measured light velocities as to detectors 16 and 17 are c.sub.m+=c+ν and c.sub.m−=c−ν respectively. Then the value of the absolute velocity ν is:

ν=(c.sub.m+−c.sub.m−)/2

[0027] Similarly, we can also measure the time difference for light traveling in different directions and then use the difference of time to calculate the absolute velocity. For example in FIG. 4 (c), if the measured travel time from the emission source 15 towards detectors 16 and 17, which have the same distance d but in opposite directions, are t.sub.+ and t.sub.− respectively, the value of the absolute velocity ν is:

[00003]$v=\left(\frac{d}{t_{+}}-\frac{d}{t_{-}}\right)/2$

[0028] We can also measure the frequency variation of the detector by varying the velocity of the detector relative to the light source. For example, assuming the transmitted frequency is f.sub.s, the received frequencies are f.sub.0 and f.sub.1 when the relative velocities of the detector are ν.sub.0 and ν.sub.1 respectively. The absolute velocity ν can be determined as

[00004]$v=c-\frac{f_s}{\left(f_0-f_1\right)\left(v_0-v_1\right)}$

Since the frequency is directly related to the wavelength and energy of the light, therefore, it is equivalent to measure the wavelength and energy of the light instead of the frequency.

[0029] In order to make the above measurements of absolute velocity easier and more accurate, it is beneficial to have methods that will amplify the measured difference of parameters, for example, position and angle. FIG. 5 shows some examples of the methods by reflection. FIG. 5(a) shows the method of amplifying the measured angle and distance through multiple reflections of the light. The light emitted from the light source 18 will be reflected by several mirrors, for example, 20 and 21, before reaching the detector at 22. For the same distance of d.sub.2 between the light source 18 and the original position of the detector at 19, the displacement d.sub.1 caused by the absolute velocity is amplified by n+1 times compared to that without reflection, where n is the total number of reflections. The value of the absolute velocity ν is:

ν=c*d.sub.1/√{square root over (d.sub.1.sup.2+(n+1)*d.sub.2.sup.2)}

The angle α is also amplified by the reflections. The value of the absolute velocity ν is:

ν=c/√{square root over (1+(n+1)*cot(a).sup.2)}

[0030] Instead of using a flat reflection device, another example is using a curved or angled reflection device to amply the measured difference of position and/or angle caused by the absolute velocity. FIG. 5(b) shows that the light emitted from the light source 23 is reflected by a curved or angled reflection 24 before reaching detector 26. As FIG. 5(b) shows, the displacement is amplified to d.sub.1 and the angle is amplified to α. The exact amplification factor will be determined by the curvature or angle of reflection 24. There are different options to measure the absolute velocity of a device or object. One option is to use the module to measure the absolute velocity of the device or object directly, which is more accurate but the implementation may be more challenging. The other option is to first measure the absolute velocity of a reference inertia system, by simply fixing the absolute velocity measurement module in the reference inertia system. Then the absolute velocity of a device or object can be calculated by adding its relative velocity to this reference system. The absolute velocities and equivalents can be measured either real-time or offline and stored for usage later.

[0031] This invention utilizes the comprehensive absolute velocity information to accurately picture the actual effect of the movements of the device and object on the propagation and measurement of the electromagnetic waves. First, all available absolute velocities or equivalents of the emission source, the receiving end, and the objects will be measured or calculated. Furthermore, this comprehensive information includes not only the values but also the right timings of the absolute velocities. For example, to use the correct Dopler effect formula, this invention utilizes the absolute velocity of the emission source at t.sub.s, ν.sub.s(t.sub.s), and the absolute velocity of the receiving end at t.sub.o, ν.sub.o(t.sub.o), where t.sub.s is the time the electromagnetic wave is emitted and t.sub.o is the time it is received. FIG. 6 shows the design of the electromagnetic measurement, calibration, and control module 2. The module includes at least one or more electromagnetic measurement, detection, and positioning units 29, which may further include one or more electromagnetic transmitters 30 and receivers 31. The module also includes one or more setting units 27 that will determine and calibrate the settings of the device. Furthermore, the module includes one or more control units 28 that will control the device to the desired settings, for example, the position, angle, velocity, timing, frequency, and power. The inputs to the module include all the measured absolute velocities or equivalents, and the calculated results fed back from the computing module. The outputs from the module include the device settings and states and the measured signals from 29.

[0032] Setting Units 27 use the comprehensive absolute velocity information to determine and calibrate the settings of the device, for example, the transmitting and receiving frequency and timing, the angle/position/velocity of the emitting sources and/or receiving ends, to optimize the performance of, for example, measurement, detection, and positioning. For example, the angle between the transmitted electromagnetic wave and the object will greatly impact the performance. The right angle for optimal performance can only be accurately calculated with the comprehensive absolute velocity information.

[0033] Control Units 28 use the comprehensive absolute velocity information to control the device to the desired settings. For example, there is a time delay between the measured position or velocity of the object and the actual position or velocity. This delay can be accurately calculated with the comprehensive absolute velocity information. Unit 28 can use this calculated delay to predict the movement of the object so that it can control the electromagnetic wave to better follow the object.

[0034] FIG. 7 shows the design of the computing module 3, which includes at least one or more data memory units 32, data processing units 33, and calculation units 34. The inputs to the module include all the time series of the measured absolute velocities or equivalents from module 1; the settings and states of the device and the measured signals from the measurement, calibration, and control module 2. The outputs from the module include all the calculated results, which will also be fed back to modules 1 and 2 for utilization.

[0035] To utilize the comprehensive absolute velocity information to accurately calculate the results, the computing module will first store all the time-series of the measured absolute velocities or equivalents in the data memory units 32. Then, units 34 will calculate the right timings, such as t.sub.s and t.sub.o, with the measured signals and the absolute velocities of the system and the object. With the info of right timing, the data processing units 33 will retrieve the correct data of the absolute velocities or equivalents from the data memory units 32 and send them to the calculation units 34 for result calculation. As an example, if the goal is to measure the absolute velocity of an object, the measured time-series values of the transmission and receiving frequencies of f.sub.s(t) and f.sub.o(t), and the absolute velocity ν.sub.s(t) will be stored in the memory units 32. Then the right timing of t.sub.s and t.sub.o will be calculated. Finally, calculation units 34 can accurately calculate the result with the comprehensive absolute velocity information retrieved by the data processing units 33 as:

[00005]$v_o\left(t_o\right)=c-\frac{f_0\left(t_o\right)\left(c-v_s\left(t_s\right)\right)}{f_s\left(t_s\right)}$

Furthermore, all the calculated results from computing module 3, such as the timings t.sub.s and t.sub.o in this example, can be feedback to modules 1 and 2 for utilization.

[0036] Those skilled in the art can now appreciate from the foregoing description that the broad teachings of the present disclosure can be implemented in a variety of forms. Therefore, while this disclosure has been described in connection with particular examples thereof, the true scope of the disclosure should not be so limited since other modifications will become apparent to the skilled practitioner upon a study of the drawings, specification, and the following claims.