VERTICAL FURNACE REACTOR ASSEMBLY, METHOD OF ALIGNING ANNULAR FLANGE UNITS, AND USE

Abstract

Vertical furnace reactor assembly, comprising: a reactor housing defining a processing chamber configured for processing substrates therein, the processing chamber having an opening for moving substrates into and out of the processing chamber along a main loading axis, the opening being surrounded by a stack of annular flange units including at least two of a housing flange, a gas divided ring unit, a liner suspension ring unit, a scavenger ring unit and a clamp ring unit, wherein at least two of the annular flange units are provided with mutually cooperating centering structures for centering the respective at least two flange units with respect to each other, wherein the mutually cooperating centering structures comprise a plurality of slots and a corresponding plurality of pins, wherein the slots each extend along a respective main slot axis, wherein the slot axes are directed to mutually intersect centrally with respect to the stack.

Claims

1. A vertical furnace reactor assembly for processing substrates, comprising a reactor housing defining a processing chamber configured for processing substrates therein, the processing chamber having an opening for moving substrates into and out of the processing chamber along a main loading axis, the opening being surrounded by a stack of annular flange units including at least two of a housing flange, a gas divided ring unit, a liner suspension ring unit, a scavenger ring unit and a clamp ring unit, wherein at least two of the annular flange units are provided with mutually cooperating centering structures for centering the respective at least two flange units with respect to each other, wherein the mutually cooperating centering structures comprise a plurality of slots and a corresponding plurality of pins, wherein the slots each extend along a respective main slot axis, wherein the slot axes are directed to mutually intersect centrally with respect to the stack of annular flange units, wherein the slots are each configured to receive a respective one of the pins therein in a direction substantially parallel to the main loading axis such that the received pin is movable in the slot along the respective main slot axis and substantially immovable in the slot along a direction perpendicular to the main slot axis and the main loading axis.

2. The reactor assembly according to claim 1, wherein the plurality of slots comprises at least three slots and the corresponding number of pins correspondingly comprises at least three pins.

3. The reactor assembly according to claim 2, wherein the corresponding pluralities of slots and pins are substantially evenly distributed along respective circumferences of the respective annular flange units.

4. The reactor assembly according to claim 3, wherein respective main slot directions of each pair of slots of the at least three slots mutually include an angle of about 120 degrees in a plane which is transversal to the main loading axis.

5. The reactor assembly according to claim 1, wherein the pins each extend along a main pin direction which is substantially parallel to the main loading axis.

6. The reactor assembly according to claim 1, wherein the mutually cooperating centering structures are configured to provide at least one of a kinematic coupling and a non-kinematic coupling between the respective annular flange units.

7. The reactor assembly according to claim 1, wherein the stack of annular flange units comprises at least three, preferably at least four, annular flange units.

8. The reactor assembly according to claim 1, further comprising a plurality of leveling pins which are configured to adjust a mutual leveling of respective ones of the annular flange units.

9. The reactor assembly according to claim 1, wherein a joint circumferential shape of the annular flange units is a circular shape having its center at the main loading axis.

10. A method of aligning annular flange units of a vertical furnace reactor assembly with respect to each other in a stack, comprising: providing a vertical furnace reactor assembly according claim 1; and causing pins of the plurality of pins to be inserted into corresponding slots of the plurality of slots, thereby centering the at least two annular flange units with respect to each other.

11. Use of a vertical furnace reactor assembly according claim 1 for processing substrates therein.

Description

BRIEF DESCRIPTION OF THE FIGURES

[0022] While the specification concludes with claims particularly pointing out and distinctly claiming what are regarded as embodiments of the invention, the advantages of embodiments of the disclosure may be more readily ascertained from the description of certain examples of the embodiments of the disclosure when read in conjunction with the accompanying drawings, in which:

[0023] FIG. 1 shows a cross sectional side view of an exemplary vertical furnace reactor assembly according to a first embodiment;

[0024] FIG. 2 shows a cross sectional side view of an exemplary vertical furnace reactor assembly according to a second embodiment;

[0025] FIG. 3 shows a top view of exemplary mutually cooperating centering structures;

[0026] FIG. 4 shows an isometric view of an exemplary stack of annular flange units;

[0027] FIG. 5 shows an isometric view of an exemplary scavenger ring;

[0028] FIG. 6 shows an isometric view of a further exemplary scavenger ring; and

[0029] FIG. 7 shows an isometric view of an exemplary clamp ring.

DETAILED DESCRIPTION

[0030] In this application similar or corresponding features are denoted by similar or corresponding reference signs. The description of the various embodiments is not limited to the example shown in the figures and the reference numbers used in the detailed description and the claims are not intended to limit the description of the embodiments, but are included to elucidate the embodiments

[0031] Although certain embodiments and examples are disclosed below, it will be understood by those in the art that the invention extends beyond the specifically disclosed embodiments and/or uses of the invention and obvious modifications and equivalents thereof. Thus, it is intended that the scope of the invention disclosed should not be limited by the particular disclosed embodiments described below. The illustrations presented herein are not meant to be actual views of any particular material, structure, or device, but are merely idealized representations that are used to describe embodiments of the disclosure.

[0032] As used herein, the term “wafer” may refer to any underlying material or materials that may be used, or upon which, a device, a circuit, or a film may be formed.

[0033] FIGS. 1 and 2 show examples of a vertical furnace reactor assembly 2; 102 which can be used for processing substrates 4 therein.

[0034] The reactor assembly 2; 102 may comprise a reactor housing 6 defining a processing chamber 8 which may be configured for processing substrates 4 therein. The processing chamber 8 may have an opening 10, here at a bottom side of the chamber 8, for moving substrates 4 into and out of the processing chamber 8 along a main loading axis L. The opening 10 may be surrounded by a stack of annular flange units. The annular flange units may include at least two of a housing flange 12, 26, a gas divided ring unit 14, a liner suspension ring unit 16, a scavenger ring unit 18 and a clamp ring unit 20.

[0035] In the example of FIG. 1, the stack shown therein includes a housing flange 12 of the reactor housing 6, a gas divided ring unit 14, a liner suspension ring unit 16, and a further housing flange 26. Since the housing 6 defines the processing chamber 8, the housing flange 12 may also be called processing chamber flange 12. In the example of FIG. 2, the stack shown therein includes a housing flange 12 of the reactor housing 6, a liner suspension ring unit 16, a scavenger ring unit 18, a clamp ring unit 20, and a further housing flange 26. One or more (further) clamp ring units (not indicated in the drawings) may be provided in any one or more of the shown examples, in particular between the liner suspension ring unit 16 and the housing flange 12, and/or between the scavenger ring unit 18 and the liner suspension ring unit 16.

[0036] The further housing flange 26 may be associated with a wafer boat handling device 28 which may be configured to move batches of substrates 4 into and out of the chamber 8 for processing therein. The liner suspension ring unit 16 may be associated with a liner 30 of the reactor assembly 2.

[0037] In the example of FIG. 4, the stack shown therein includes a clamp ring unit 20, a liner suspension unit 16 and a gas divided ring unit 14. In the example of FIG. 4, a housing flange which is not shown may be positioned below the gas divided ring unit 14. Pins 24 of said housing flange are nevertheless shown, as will be explained further.

[0038] It will be appreciated that the shown stack compositions merely represent examples and that such stacks may be composed differently, for example from different sets of annular flange units, in different orders, and/or with one or more additional annular flange units.

[0039] As shown for example in FIG. 2, flange units may be stacked such that one flange unit partially or fully surrounds another flange unit.

[0040] At least two of the annular flange units 12, 14, 16, 18, 20, 26 may be provided with mutually cooperating centering structures 22, 24 (see e.g. FIG. 3, not explicitly shown in FIGS. 1 and 2) for centering the respective at least two flange units 12, 14, 16, 18, 20, 26 with respect to each other.

[0041] The mutually cooperating centering structures 22, 24 may comprise a plurality of slots 22 and a corresponding plurality of pins 24. The slots 22 may each extend along a respective main slot axis S, wherein the slot axes S may be directed to mutually intersect centrally with respect to the stack of annular flange units 12, 14, 16, 18, 20, 26. The slot axes S may intersect with the main loading axis L, i.e. at a center line of the stack and/or the reactor assembly 2; 102. Alternatively, some or all of the slot axes S may intersect with at least one other of the slot axes S at a small distance from the main loading axis L, in particular a small distance compared to a distance between said intersection point and the respective slots 22.

[0042] The slots 22 may each be configured to receive a respective one of the pins 24 therein in a direction substantially parallel to the main loading axis L such that the received pin 24 may be movable in the slot 22 along the respective main slot axis S and may be substantially immovable in the slot 22 along a direction perpendicular to the main slot axis S and the main loading axis L.

[0043] In the example of FIG. 3, the slots 22 are closed at both of their axial ends. Alternatively, for example, one or more of the slots 22 may be open ended, for example at one or two of the axial ends. An example thereof can be seen in FIG. 4.

[0044] FIG. 4 shows several sets of mutually cooperating centering structures, in particular slots 22 and pins 24, in a stack of annular flange units 20, 16, 14. Pins 24 of the housing flange (itself not shown) below the gas divided ring unit 14 are shown as received in slots 22 of the gas divided ring unit 14. Pins 24 of the gas divided ring unit 14 are shown as received in slots 22 of the liner suspension ring unit 16.

[0045] FIG. 5 shows pins 24 of a housing flange (itself not shown) which are received in an exemplary scavenger ring unit 18.

[0046] FIG. 6 shows an exemplary scavenger ring unit 18 with pins 24 which may be received in slots 22 of an exemplary clamp ring unit 20 shown in FIG. 7.

[0047] In an embodiment, the plurality of slots 22 may comprise at least three slots 22 and the corresponding number of pins 24 correspondingly may comprise at least three pins 24. It will be appreciated that the numbers of slots 22 and pins 24 are here defined per centering structure, i.e. for example per annular flange unit.

[0048] Thus, when for example two annular flange units are provided with mutually cooperating centering structures, one of said flange units may be provided with at least three slots 22 while another of said flange units may be provided with at least three pins 24. In a less preferred yet possible alternative, one of said flange units may be provided with e.g. two slots 22 and one pin 24, while another of said flange units may be provided with one slot 22 and two pins 24. It will be appreciated that many further variations and combinations may thus be possible.

[0049] By providing at least three slots 22 and at least three pins 24, good centering behavior may be obtained while positioning the pins 24 in the slots 22 may be relatively easy.

[0050] In an embodiment, the corresponding pluralities of slots 22 and pins 24 may be substantially evenly distributed along respective circumferences of the respective annular flange units 12, 14, 16, 18, 20, 26.

[0051] The centering behavior may be further improved thereby.

[0052] In an embodiment, the respective main slot directions S of each pair of slots 22 of the at least three slots 22 may mutually include an angle of about 120 degrees in a plane which may be transversal to the main loading axis L. Alternatively, one or more pairs of slots may include a different angle, for example substantially larger or smaller than 120 degrees.

[0053] In an embodiment, the pins 24 may each extend along a main pin direction which may be substantially parallel to the main loading axis L.

[0054] The pins 24 may thus be inserted into the slots 22 in the direction of the main loading axis L, while movement of the received pins 24 in one or more directions transverse to said main loading axis L may be limited by the slots 22.

[0055] In an embodiment, the mutually cooperating centering structures 22, 24 may be configured to provide at least one of a kinematic coupling and a non-kinematic coupling between the respective annular flange units 12, 14, 16; 18, 20, 26.

[0056] In an embodiment, the stack of annular flange units 12, 14, 16, 26; 12, 18, 20, 26 may comprise at least three, preferably at least four, annular flange units 12, 14, 16, 26; 12, 18, 20, 26.

[0057] In an embodiment, the reactor assembly 2; 102 may comprise a plurality of, e.g. three, leveling pins 24a (see FIG. 4) which may be configured to adjust a mutual leveling of respective ones of the annular flange units 12, 14, 16, 18, 20, 26, in particular including the gas divided ring unit 14.

[0058] In an embodiment, a joint circumferential shape of the annular flange units 12, 14, 16; 18, 20, 26 may be a circular shape having its center at the main loading axis L.

[0059] Relatively strong flange units can thus be provided, in particular with a relatively large opening therein relative to their circumference. Such a circular flange shape may be matched to a circular shape of the opening 10 and/or the reactor housing 6.

[0060] With reference to the drawings as illustration, a method of aligning annular flange units 12, 14, 16, 18, 20, 26 of a vertical furnace reactor assembly 2; 102 with respect to each other in a stack may comprise:

[0061] providing a vertical furnace reactor assembly 2 as described herein; and

[0062] causing pins 24 of the plurality of pins 24 to be inserted into corresponding slots 22 of the plurality of slots 22, thereby centering the at least two annular flange units 12, 14, 16, 18, 20, 26 with respect to each other.

[0063] Although illustrative embodiments of the present invention have been described above, in part with reference to the accompanying drawings, it is to be understood that the invention is not limited to these embodiments. Variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing the claimed invention, from a study of the drawings, the disclosure, and the appended claims.

[0064] For example, a stack of annular flange units may comprise one or more annular flange units which do not comprise pins and/or slots for centering with respect to another flange unit. Further examples have been provided throughout the description.

[0065] Reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases “in one embodiment” or “in an embodiment” in various places throughout this description are not necessarily all referring to the same embodiment.

[0066] Furthermore, it is noted that particular features, structures, or characteristics of one or more of the various embodiments which are described above may be used implemented independently from one another and may be combined in any suitable manner to form new, not explicitly described embodiments. The reference numbers used in the detailed description and the claims do not limit the description of the embodiments, nor do they limit the claims. The reference numbers are solely used to clarify.