SEMICONDUCTOR LASERS
20220302678 · 2022-09-22
Assignee
Inventors
- Yifan Jiang (Newfield, NY, US)
- Malcolm R. Green (Lansing, NY, US)
- Wolfgang Parz (Ithaca, NY, US)
- Lihua Hu (Ithaca, NY, US)
Cpc classification
H01S2301/02
ELECTRICITY
International classification
Abstract
Semiconductors lasers are disclosed having an active region having a longitudinal axis, a first facet end, and a second facet end. The second facet end emitting the main output beam of light from of the respective semiconductor laser. The first facet end may have a low-reflection coating. The first facet end may be non-perpendicular to the longitudinal axis of the active region. The semiconductor lasers may be distributed feedback (DFB) lasers having a plurality of diffraction gratings along the longitudinal axis of the active region. The plurality of diffraction grating may include a first diffraction grating positioned proximate the first end of the active region, a second diffraction grating positioned proximate the second end of the active region, and a third diffraction grating positioned between the first diffraction grating and the second diffraction grating. The first diffraction grating may be spaced apart from the third diffraction grating along the longitudinal axis of the active region by a first distance. The second diffraction grating may be spaced apart from the third diffraction grating along the longitudinal axis of the active region by a second distance. Each of the first distance and the second distance being greater than zero.
Claims
1. A semiconductor laser, comprising: an active region having a longitudinal axis, a first facet end and a second facet end, the second facet end emitting an output beam of light from the semiconductor laser; a first low-reflection coating provided on the first facet end of the active region; a second low-reflection coating provided on the second facet end of the active region; a plurality of diffraction gratings positioned along the longitudinal axis of the active region, the plurality of diffraction grating including a first diffraction grating positioned proximate the first facet end of the active region, a second diffraction grating positioned proximate the second facet end of the active region, and a third diffraction grating positioned between the first diffraction grating and the second diffraction grating, the first diffraction grating being spaced apart from the third diffraction grating along the longitudinal axis of the active region by a first distance and the second diffraction grating being spaced apart from the third diffraction grating along the longitudinal axis of the active region by a second distance, each of the first distance and the second distance being greater than zero.
2. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating along the longitudinal axis of the active region is positioned closer to the second facet end of the active region than the first facet end of the active region.
3. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region in a range of about 30% to about 70% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
4. The semiconductor laser of claim 2, wherein the mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at about 60% of a length of the active region from the first facet end.
5. The semiconductor laser of claim 2, wherein the third diffraction grating includes a first end and a second end spaced apart along the longitudinal axis of the active region, the second end of the third diffraction grating is positioned along the longitudinal axis of the active region more than two times farther from the second facet end of the active region than the first end of the third diffraction grating from the second facet end of the active region.
6. The semiconductor laser of claim 2, wherein the mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 40% of a separation from the first facet end to the overall length from the first facet end to the second facet end.
7. The semiconductor laser of claim 1, wherein the third diffraction grating includes a first end and a second end spaced apart along the longitudinal axis of the active region, the second end of the third diffraction grating is positioned along the longitudinal axis of the active region more than two times farther from the second facet end of the active region than the first end of the third diffraction grating from the second facet end of the active region.
8. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 40% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
9. The semiconductor laser of claim 1, wherein each of the first diffraction grating has a first constant pitch and the second diffraction grating has a second constant pitch.
10. The semiconductor laser of claim 9, wherein the first constant pitch is equal to the second constant pitch.
11. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 47% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
12. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 53% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
13. The semiconductor laser of claim 1, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 60% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
14. The semiconductor laser of claim 1, wherein the third diffraction grating is a corrugation-pitch-modulated diffraction grating.
15. The semiconductor laser of claim 1, wherein the third diffraction grating is a quarter wave shifting grating structure.
16. A semiconductor laser, comprising: an active region having a longitudinal axis, a first facet end and a second facet end, the first facet end being non-perpendicular to the longitudinal axis and the second facet end emitting an output beam of the semiconductor laser; a first low-reflection coating provided on the second facet end of the active region; a plurality of diffraction gratings positioned along the longitudinal axis of the active region, the plurality of diffraction grating including a first diffraction grating positioned proximate the first end of the active region, a second diffraction grating positioned proximate the second end of the active region, and a third diffraction grating positioned between the first diffraction grating and the second diffraction grating, the first diffraction grating being spaced apart from the third diffraction grating along the longitudinal axis of the active region by a first distance and the second diffraction grating being spaced apart from the third diffraction grating along the longitudinal axis of the active region by a second distance, each of the first distance and the second distance being greater than zero.
17. The semiconductor laser of claim 16, wherein a mid-point of the third diffraction grating along the longitudinal axis of the active region is positioned closer to the second facet end of the active region than the first facet end of the active region.
18. The semiconductor laser of claim 16, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region in a range of about 30% to about 70% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
19. The semiconductor laser of claim 17, wherein the mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at about 60% of a length of the active region from the first facet end.
20. The semiconductor laser of claim 17, wherein the third diffraction grating includes a first end and a second end spaced apart along the longitudinal axis of the active region, the second end of the third diffraction grating is positioned along the longitudinal axis of the active region more than two times farther from the second facet end of the active region than the first end of the third diffraction grating from the second facet end of the active region.
21. The semiconductor laser of claim 17, the mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 40% of a separation from the first facet end to the overall length from the first facet end to the second facet end.
22. The semiconductor laser of claim 16, wherein the third diffraction grating includes a first end and a second end spaced apart along the longitudinal axis of the active region, the second end of the third diffraction grating is positioned along the longitudinal axis of the active region more than two times farther from the second facet end of the active region than the first end of the third diffraction grating from the second facet end of the active region.
23. The semiconductor laser of claim 16, a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 40% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
24. The semiconductor laser of claim 16, wherein each of the first diffraction grating has a first constant pitch and the second diffraction grating has a second constant pitch.
25. The semiconductor laser of claim 24, wherein the first constant pitch is equal to the second constant pitch.
26. The semiconductor laser of claim 16, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 47% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
27. The semiconductor laser of claim 16, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 53% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
28. The semiconductor laser of claim 16, wherein a mid-point of the third diffraction grating is positioned along the longitudinal axis of the active region at least 60% of a separation from the first facet end to an overall length from the first facet end to the second facet end.
29. The semiconductor laser of claim 16, further comprising a second low-reflection coating provided on the first facet end of the active region.
30. The semiconductor laser of claim 16, wherein the third diffraction grating is a corrugation-pitch-modulated diffraction grating.
31. The semiconductor laser of claim 16, wherein the third diffraction grating is a quarter wave shifting grating structure.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0029] The above-mentioned and other features and advantages of this disclosure, and the manner of attaining them, will become more apparent and will be better understood by reference to the following description of exemplary embodiments taken in conjunction with the accompanying drawings, wherein:
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[0044] Corresponding reference characters indicate corresponding parts throughout the several views. The exemplification set out herein illustrates an exemplary embodiment of the invention and such exemplification is not to be construed as limiting the scope of the invention in any manner.
DETAILED DESCRIPTION OF THE DRAWINGS
[0045] For the purposes of promoting an understanding of the principles of the present disclosure, reference is now made to the embodiments illustrated in the drawings, which are described below. The embodiments disclosed herein are not intended to be exhaustive or limit the present disclosure to the precise form disclosed in the following detailed description. Rather, the embodiments are chosen and described so that others skilled in the art may utilize their teachings. Therefore, no limitation of the scope of the present disclosure is thereby intended. Corresponding reference characters indicate corresponding parts throughout the several views.
[0046] The terms “couples”, “coupled”, “coupler” and variations thereof are used to include both arrangements wherein the two or more components are in direct physical contact and arrangements wherein the two or more components are not in direct contact with each other (e.g., the components are “coupled” via at least a third component), but yet still cooperate or interact with each other.
[0047] Unless otherwise indicated, all numbers expressing feature sizes, amounts, and physical properties used in the specification and claims are to be understood as being modified in all instances by the term “about.” Accordingly, unless indicated to the contrary, the numerical parameters set forth in the foregoing specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by those skilled in the art utilizing the teachings disclosed herein.
[0048] In some instances throughout this disclosure and in the claims, numeric terminology, such as first, second, third, and fourth, is used in reference to various components or features. Such use is not intended to denote an ordering of the components or features. Rather, numeric terminology is used to assist the reader in identifying the component or features being referenced and should not be narrowly interpreted as providing a specific order of components or features.
[0049] Referring to
[0050] Front facet 132 has a low-reflectivity coating provided thereon. Exemplary low-reflectivity coatings reflect up to about 5% of incident light. In the embodiment shown in
[0051] Returning to
[0052] Rear standard diffraction grating 140 and grating 148 are separated by region 152 and front standard diffraction grating 144 and grating 148 are separated by region 154. Each of regions 152 and 154 do not include any grating structure. For example, each of regions 152 and 154 may be comprised of the p-type cladding layer material and be void of any grating structure. In another example, each of regions 152 and 154 may include a block of material different than the p-type cladding layer material and also void of any grating structure. As such, rear standard diffraction grating 140 and grating 148 are non-contiguous and grating 148 and front standard diffraction grating 144 are non-contiguous. In the illustrated embodiments, grating 148 is a corrugation-pitch-modulated (CPM) diffraction grating.
[0053] In embodiments, grating 148 is a quarter wave shifting (QWS) grating structure. The quarter wave shifting grating structure includes a first grating region and a second grating region, each having a constant grating pitch and depth. The first grating region and the second grating region are joined with a phase jump of n at the interface between the first grating structure and the second grating structure. In embodiments, with the quarter wave shifting grating structure instead of the CPM structure of grating 148, region 152 and region 154 may be eliminated. In embodiments, region 152 and region 154 are maintained with the quarter wave shifting grating structure instead of the CPM structure of grating 148.
[0054] Semiconductor laser 100 may have a ridge waveguide structure, such as shown in
[0055] Referring to
[0056] Turning to
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[0058] Referring to
[0059] Referring to
[0060] Referring to
[0061] Referring to
[0062] Referring to
[0063] The corresponding values of longitudinal length 142, longitudinal length 146, and longitudinal length 150 of the examples provided in
TABLE-US-00001 TABLE 1 Grating Length (μm) Longitudinal Longitudinal Longitudinal Length 142 Length 150 Length 146 FIG. 9 65 50 35 FIG. 10 55 50 45 FIG. 11 45 50 55 FIG. 12 35 50 65 FIG. 13 25 50 75
TABLE-US-00002 TABLE 2 Percentage of Active Region Length Longitudinal Longitudinal Longitudinal Length 142 Length 150 Length 146 FIG. 9 43% 33% 23% FIG. 10 37% 33% 30% FIG. 11 30% 33% 37% FIG. 12 23% 33% 43% FIG. 13 17% 33% 50%
TABLE-US-00003 TABLE 3 Percentage of Cavity Length for ACPM Section from the Rear Facet of Laser Back Edge 160 Mid-Point Front Edge 162 of grating 148 of grating 148 of grating 148 FIG. 9 43% 60% 77% FIG. 10 37% 53% 70% FIG. 11 30% 47% 63% FIG. 12 23% 40% 57% FIG. 13 17% 33% 50%
[0064] In embodiments, a mid-point of grating 148 along longitudinal axis 120 of active region 114 is positioned closer to facet end 132 of active region 114 than facet end 130 of active region 114. In embodiments, the mid-point of grating 148 may be positioned along longitudinal axis 120 of active region 114 from the rear facet 130 in the range of about 30% to about 70%. In embodiments, the mid-point of grating 148 may be positioned along longitudinal axis 120 of active region 114 from the rear facet 130 in the range of about 33% to about 60%.
[0065] In embodiments, a back end 160 of grating 148 may be positioned along longitudinal axis 120 of active region 114 more than two times farther from facet end 132 of active region 114 than a front end 162 of grating 148 from facet end 132 of active region 114. In embodiments, front end 162 of grating 148 may be positioned along longitudinal axis 120 of active region 114 at up to about 37% of an overall longitudinal length of active region 114 from facet end 132.
[0066] Referring to
[0067] The laser slope for the device of
[0068] By replacing the high reflective coating of laser 10 with the low reflectivity coating of laser 100 and/or the angled rear facet of laser 100, it is possible to achieve a near 100% SMSR yield, higher front facet power output, and/or improved high-speed modulation performance based on grating characteristics.
[0069] While this invention has been described as having exemplary designs, the present invention can be further modified within the spirit and scope of this disclosure. This application is therefore intended to cover any variations, uses, or adaptations of the invention using its general principles. Further, this application is intended to cover such departures from the present disclosure as come within known or customary practice in the art to which this invention pertains.