NANO-TWINNED COPPER LAYER WITH DOPED METAL ELEMENT, SUBSTRATE COMPRISING THE SAME AND METHOD FOR PREPARING THE SAME

Abstract

A nano-twinned copper layer with a doped metal element is disclosed, wherein the nano-twinned copper is doped with at least one metal element selected from the group consisting of Ag, Ni, Al, Au, Pt, Mg, Ti, Zn, Pd, Mn and Cd in a region from a surface of the nano-twinned copper layer to a depth being 0.3 μm, and a content of the metal element in the region is ranged from 0.5 at % to 20 at %. In addition, at least 50% in volume of the nano-twinned copper layer includes plural twinned grains. Furthermore, a substrate including the aforesaid nano-twinned copper layer and a method for preparing the aforesaid nano-twinned copper layer are also disclosed.

Claims

1. A nano-twinned copper layer with a doped metal element, wherein the nano-twinned copper is doped with at least one metal element selected from the group consisting of Ag, Ni, Al, Au, Pt, Mg, Ti, Zn, Pd, Mn and Cd in a region from a surface of the nano-twinned copper layer to a depth being 0.3 μm, and a content of the metal element in the region is ranged from 0.5 at % to 20 at %; wherein at least 50% in volume of the nano-twinned copper layer comprises plural twinned grains.

2. The nano-twinned copper layer of claim 1, wherein the metal element is Ag, Ni, Al, Pt, or Zn.

3. The nano-twinned copper layer of claim 1, wherein at least 50% of an area of the surface of the nano-twinned copper layer expose a (111) surface of the plural twinned grains.

4. The nano-twinned copper layer of claim 1, wherein a thickness of the nano-twinned copper layer is ranged from 0.1 μm to 500 μm.

5. The nano-twinned copper layer of claim 1, wherein diameters of the plural twinned grains are respectively ranged from 0.1 μm to 50 μm.

6. The nano-twinned copper layer of claim 1, wherein thicknesses of the plural twinned grains are respectively ranged from 0.1 μm to 500 μm.

7. The nano-twinned copper layer of claim 1, wherein a metal film is further formed on the surface of the nano-twinned copper layer, and the metal film comprises the metal element.

8. The nano-twinned copper layer of claim 7, wherein the metal film comprises Ag, Ni, Al, Pt, or Zn.

9. The nano-twinned copper layer of claim 1, wherein a concentration of the metal element gradually decreases from the surface to the depth of 0.3 μm in the region from the surface of the nano-twinned copper layer to the depth being 0.3 μm.

10. The nano-twinned copper layer of claim 1, wherein the plural twinned grains are connected with each other, and each of the plural twinned grains are formed by stacking plural nano-twinned grains along a [111] crystal axis.

11. A substrate having a nano-twinned copper layer, comprising: a substrate; and a nano-twinned copper layer with a doped metal element disposed on the substrate or embedded into the substrate, wherein the nano-twinned copper is doped with at least one metal element selected from the group consisting of Ag, Ni, Al, Au, Pt, Mg, Ti, Zn, Pd, Mn and Cd in a region from a surface of the nano-twinned copper layer to a depth being 0.3 μm, and a content of the metal element in the region is ranged from 0.5 at % to 20 at %; wherein at least 50% in volume of the nano-twinned copper layer comprises plural twinned grains.

12. A method for preparing a nano-twinned copper layer with a doped metal element, comprising the following steps: providing a nano-twinned copper layer, wherein 50% or more in volume of the nano-twinned copper layer comprises plural twinned grains; forming a metal film on a surface of the nano-twinned copper layer, wherein the metal film comprises at least one metal element selected from the group consisting of Ag, Ni, Al, Au, Pt, Mg, Ti, Zn, Pd, Mn and Cd; and annealing the nano-twinned copper layer provided with the metal film at 50° C. to 250° C. to form a nano-twinned copper layer with a doped metal element, wherein the nano-twinned copper layer is doped with the metal element in a region from a surface of the nano-twinned copper layer to a depth being 0.3 μm, and a content of the metal element in the region is ranged from 0.5 at % to 20 at %.

13. The method of claim 12, wherein the metal element is Ag, Ni, Al, Pt, or Zn.

14. The method of claim 12, wherein at least 50% of an area of the surface of the nano-twinned copper layer expose a (111) surface of the plural twinned grains.

15. The method of claim 12, wherein a thickness of the nano-twinned copper layer is ranged from 0.1 μm to 500 μm.

16. The method of claim 12, wherein diameters of the plural twinned grains are respectively ranged from 0.1 μm to 50 μm.

17. The method of claim 12, wherein thicknesses of the plural twinned grains are respectively ranged from 0.1 μm to 500 μm.

18. The method of claim 12, wherein the metal film is formed on the nano-twinned copper layer by vapor-deposition or sputtering.

19. The method of claim 12, wherein a thickness of the metal film is ranged from 50 nm to 500 nm.

20. The method of claim 12, wherein a concentration of the metal element gradually decreases from the surface to the depth of 0.3 μm in the region from the surface of the nano-twinned copper layer to the depth being 0.3 μm.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0035] FIG. 1 is an EBSD photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment I of the present disclosure.

[0036] FIG. 2 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment 1 of the present disclosure.

[0037] FIG. 3 is an EBSD photo of a silver-plated nano-twinned copper layer after annealing according to Embodiment 1 of the present disclosure.

[0038] FIG. 4 is a FIB photo of a silver-plated nano-twinned copper layer after annealing according to Embodiment 1 of the present disclosure.

[0039] FIG. 5 is an X-ray photoelectron spectrum of the silver-plated nano-twinned copper layer after annealing according to Embodiment 1 of the present disclosure.

[0040] FIG. 6 is a TEM photo of the silver-plated nano-twinned copper layer after annealing according to Embodiment 1 of the present disclosure.

[0041] FIG. 7 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment 6 of the present disclosure.

[0042] FIG. 8 is an EBSD photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment 9 of the present disclosure.

[0043] FIG. 9 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment 9 of the present disclosure.

[0044] FIG. 10 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to Embodiment 14 of the present disclosure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0045] Different embodiments of the present disclosure are provided in the following description. These embodiments are meant to explain the technical content of the present disclosure, but not meant to limit the scope of the present disclosure. A feature described in an embodiment may be applied to other embodiments by suitable modification, substitution, combination, or separation.

[0046] It should be noted that, in the present specification, when a component is described to have an element, it means that the component may have one or more of the elements, and it does not mean that the component has only one of the element, except otherwise specified.

[0047] In the present specification, except otherwise specified, the feature A “or” or “and/or” the feature B means the existence of the feature A, the existence of the feature B, or the existence of both the features A and B. The feature A “and” the feature B means the existence of both the features A and B. The term “comprise(s)”, “comprising”, “include(s)”, “including”, “have”, “has” and “having” means “comprise(s)/comprising but is/are/being not limited to”.

[0048] Moreover, in the present specification, when an element is described to be arranged “on” another element, it does not essentially means that the elements contact the other element, except otherwise specified. Such interpretation is applied to other cases similar to the case of “on”.

[0049] Moreover, in the present specification, a value may be interpreted to cover a range within ±10% of the value, and in particular, a range within ±5% of the value, except otherwise specified; a range may be interpreted to be composed of a plurality of subranges defined by a smaller endpoint, a smaller quartile, a median, a greater quartile, and a greater endpoint, except otherwise specified.

Embodiment 1

[0050] A 12-inch silicon wafer coated with 100 nm Ti/200 nm Cu was broken into 2 cm×3 cm specimens (as a cathode). The specimen was washed with citric acid to remove oxides, and the electrodeposition region was defined with the acid alkaline resistant tape. The area of the total electrodeposition region was 2 cm×2 cm.

[0051] The plating solution used in the present embodiment was formulated by CuSO.sub.4.5H.sub.2O. The total amount of 196.54 g of CuSO.sub.4.5H.sub.2O (including 50 g/L of copper ion) was provided, added with additive (1.5 ml), and then 100 g of H.sub.2SO.sub.4 (96%) was added into the plating solution, followed by adding 0.1 ml of hydrochloric acid (12 N). The plating solution was stirred with a stir bar until CuSO.sub.4.5H.sub.2O was dissolved into the solution (1 L) well, and the rotation speed was 1200 rpm per minute to maintain the homogeneity of the plating solution. The electrodeposition was performed at room temperature, 1 atm. The hydrochloric acid added in the electroplating solution let the copper target (as an anode) dissolve in the electroplating bath normally to balance the concentration of copper ion. Herein, the power supply (Keithley 2400) was controlled by the computer, the electrodeposition was performed with the direct current electrodeposition, and the forward current density was set to 6 ASD (A/dm.sup.2). After electroplating for about 20 minutes, a nano-twinned copper layer with a thickness of about 20 μm was obtained.

[0052] The obtained specimen was polished by electropolishing, wherein the solution for the electropolishing comprised 100 ml of H.sub.3PO.sub.4, 1 ml of acetic acid and 1 ml of glycerol. The specimen to be polished was placed onto the anode, and the electropolishing was performed under 1.75 V for 10 min The specimen after the electropolishing had a thickness of about 19 μm. By electropolishing, it could level the surface of the nano-twinned copper layer, and facilitate the silver ion attaching to the surface of the nano-twinned copper layer in the subsequent vapor deposition process.

[0053] The surface preferred direction and the micro-structure of the specimen after the electropolishing was analyzed with electron backscatter diffraction (EBSD) and focus ion beam (FIB), and the hardness of the specimen after the electropolishing was measured with Vickers hardness tester.

[0054] FIG. 1 is an EBSD photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment. FIG. 2 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment.

[0055] As shown in FIG. 1, the results of the EBSD show that almost all in the volumes (more than 95% of the volume) of the nano-twinned copper layer prepared in the present embodiment are columnar twinned grains being connected with each other, and the diameters of the columnar twinned grains are in a range from about 0.5 μm to 3 μm. In addition, the twinned grains are formed by stacking nano twins along a [111] crystal axis. The twin boundaries of the nano twins are substantially parallel to the cathode surface (i.e. the lamination direction of the nano twins is substantially parallel to the thickness direction of the nano-twinned copper layer), so almost all the surface of the nano-twinned copper layer (more than 95% of the area) expose the (111) surface of the nano twins, which represents the nano-twinned copper layer of the present embodiment has a preferred direction of (111).

[0056] As shown in FIG. 2, the result obtained by the FIB measurement indicates that most of the grains in the nano-twinned copper layer are twins with high density. 95% or more in volume of the twinned copper layer comprises twinned grains. The included angles between the twin direction (indicated by the arrow) of 95% or more of the twinned grains and the thickness direction of the nano-twinned copper layer are about 0 degree; the included angles between the twin direction (indicated by the arrow) of 95% or more of the twinned grains and the surface of the substrate are about 90 degrees; and, it indicates that the twin boundaries of the twinned grains are substantially parallel to the surface of the substrate. In addition, 95% or more of the twinned grains in the nano-twinned copper layer have the thickness ranging from about 1 μm to about 20 μm.

[0057] Then, the electropolished specimen obtained above was cleaned with a citric acid solution, the water droplets thereon were then removed with a nitrogen gun, and then plated with a silver film using E-beam evaporator. Herein, the thickness of the silver film was 100 nm, the deposition temperature was 85° C., the rate was 1 A/S, and the time was 25 minutes.

[0058] The non-silver-plated specimen and the silver-plated specimen were placed into the furnace to perform the annealing process (heat treatment). The vacuum pressure was 10.sup.−3 torr, the annealing temperature were 100° C., 150° C., 200° C. and 250° C., and the annealing time was 1 hr. The surface preferred direction and the structure of the silver-plated and non-silver-plated specimens after the annealing were analyzed with EBSD and FIB, and the hardness thereof was measured with Vickers hardness tester. The hardness load was 0.005 kg (49.03 mN), and the probe depth was ranged from 750 nm to 1000 nm.

[0059] FIG. 3 is an EBSD photo of a silver-plated nano-twinned copper layer after annealing at 100° C. for 1 hr according to the present embodiment. FIG. 4 is a FIB photo of a silver-plated nano-twinned copper layer after annealing at 100° C. for 1 hour according to the present embodiment.

[0060] As shown in FIG. 3 and FIG. 4, the silver-plated nano-twinned copper layer of the present embodiment still maintains the structure of the nano-twinned grains similar to that of FIG. 1 and FIG. 2.

[0061] In addition, the hardness of the non-silver-plated and the silver-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 1 below.

TABLE-US-00001 TABLE 1 Average Average hardness of the hardness of the Percentage non-silver-plated silver-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before annealing 213.8 ± 8.5 217.6 ± 4.9 1.8% (n = 5) (n = 5) Annealing at 211.2 ± 2.4 221.8 ± 9.0 5.0% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 228.2 ± 5.2 270.8 ± 3.6 19.0%  100° C. for 1 hr (n = 5) (n = 5) Annealing at 208.8 ± 4.5 238.2 ± 5.6  14% 125° C. for 1 hr (n = 5) (n = 5) Annealing at 192.0 ± 3.7 222.6 ± 5.8  16% 150° C. for 1 hr (n = 5) (n = 5)

[0062] As shown in Table 1, compared with the non-silver-plated nano-twinned copper layer, the hardness of the silver-plated nano-twinned copper layer is significantly enhanced regardless of the annealing temperature. In particular, the hardness of the non-silver-plated nano-twinned copper layer is decreased after annealing. However, the hardness of the silver-plated nano-twinned copper layer increases by about 20% after annealing for 1 hr.

[0063] In addition, after annealing at 100° C., the hardness of the silver-plated nano-twinned copper layer being annealed is not only higher than that of the non-silver-plated nano-twinned copper layer, but also higher than the silver-plated nano-twinned copper layer being unannealed. As shown in the results listed in Table 1, the hardness of the silver-plated nano-twinned copper layer reaches 270.8 HV after annealing at 100° C. for one hour, and it is increased by 27% compared with the non-silver-plated specimens being unannealed. This result indicates that silver plated on the nano-twinned copper layer diffuses into the nano-twinned copper layer after annealing to obtain a nano-twinned copper layer with doped silver having high strength.

[0064] The silver-plated nano-twinned copper layer being performed with annealing at 100° C. for one hour of the present embodiment was analyzed by depth-profiling with X-ray photoelectron spectroscopy (XPS), the etch depth was set to 500 nm, and the interdiffusion of silver and copper was analyzed. The results are shown in FIG. 5. In addition, the silver-plated nano-twinned copper layer being annealed at 100° C. for one hour of the present embodiment was analyzed by transmission electron microscope (TEM). The results are shown in FIG. 6. In FIG. 6, a silver layer 12 is formed on the surface of the nano-twinned copper layer 13, a platinum layer 11 for TEM analysis is formed on the silver layer 12, and the nano-twinned copper layer 13 further comprises a diffusion layer 13a.

[0065] The diffusion of silver and copper can be found from the XPS diagram of FIG. 5, and it can be observed that the atomic concentration of silver decreases from the silver layer to the nano-twinned copper layer. In addition, it can be found from the TEM photo of FIG. 6 that the thickness of the diffusion layer 13a is ranged from about 100 nm to 150 nm, which represents that the silver diffuses in the area (i.e., the diffusion layer 13a) from the surface of the nano-twinned copper layer 13 to the depth of about 100 nm to150 nm, thereby doping the diffusion layer 13a with silver element. The foregoing results show that the diffusion of silver into the nano-twinned copper layer can increase the hardness of the nano-twinned copper layer; and the solid solution strengthening of silver and copper can enhance the hardness of the nano-twinned copper layer.

[0066] Generally, the lattice of the copper element in the nano-twinned copper layer is arranged in a regular manner to obtain an excellent lattice direction. Therefore, the nano-twinned copper layer itself has high strength, and it is difficult to enhance the strength. However, through the method provided in the present disclosure, the nano-twinned copper layer doped with silver can be obtained by performing annealing right after a simple cleaning. The hardness of the nano-twinned copper metal layer can be directly enhanced without additional work of hardening. In particular, the method provided in the present disclosure enhances the hardness of the nano-twinned copper layer by annealing at low temperature (50° C. to 250° C.) in a short period of time. Compared with annealing at high-temperature (for example, 400° C.), the preparation process of the present disclosure is simple and in favor of industrial production. Since the preparation method of the present disclosure dose not perform annealing at high temperature, the problem of decreasing the strength of the copper layer, due to the disappearance or reduction of the twinned structure after annealing, will not happen.

[0067] In the aforementioned embodiments of the present disclosure, the nano-twinned copper layer has a preferred (111) surface with high degree of regularity, which is the closet packing surface of a face centered cubic (FCC), so that the silver diffuses into the nano-twinned copper layer rapidly. In addition, silver is a metal with high-conductivity, and it is the substance with the highest electrical and thermal conductivity among all metals. As shown in FIG. 1 to FIG. 6, the the silver-copper alloy does not have eutectoid reactions, so it can reduce the occurrence of electromigration effect without having impacts on the electrical properties, thereby improving the reliability of the device. In addition, results of the hardness test show that the hardness of the silver-plated compared with the non-silver-plated nano-twinned copper layers can be increased by 27% after annealing. Therefore, the obtained nano-twinned copper layer with doped silver has an improved hardness and mechanical strength, thereby becoming a conductor with high strength, high electrical conductivity and high thermal conductivity, and it has potential for being applied to various electronic components.

Embodiment 2

[0068] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 1, except that the silver film is replaced by a platinum film. Herein, the thickness of the platinum film was 100 nm, the deposition temperature was 100° C., the rate was 1 Å/S, and the time was 25 minutes. The hardness of the non-platinum-plated specimens and the platinum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 2 below.

TABLE-US-00002 TABLE 2 Average Average hardness of the hardness of the Percentage non-platinum-plated platinum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 229.8 ± 6.3 301.6 ± 8.5 31.2% annealing (n = 5) (n = 5) Annealing at 229.4 ± 4.5 301.4 ± 5.4 31.3% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 248.8 ± 3.9 316.8 ± 4.4 27.3% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 214.8 ± 2.4 255.2 ± 3.9 18.8% 150° C. for 1 hr (n = 5) (n = 5)

[0069] As shown in Table 2, the hardness of the platinum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 316.8 HV, which is higher than that of the non-platinum-plated specimens being unannealed by 37.9%.

Embodiment 3

[0070] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 1, except that the silver film is replaced by an aluminum film. Herein, the thickness of the aluminum film was 100 nm, the deposition temperature was 75° C., the rate was 1 Å/S, and the time was 25 minutes. The hardness of the non-aluminum-plated specimens and the aluminum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 3 below.

TABLE-US-00003 TABLE 3 Average Average hardness of the hardness of the Percentage non-aluminum-plated aluminum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 229.8 ± 6.3 247.2 ± 3.9 7.6% annealing (n = 5) (n = 5) Annealing at 229.4 ± 4.5 247.2 ± 3.9 7.8% 50° C. (n = 5) (n = 5) for 1 hr Annealing at 248.8 ± 3.9 303.6 ± 8.8 22.0% 100° C. (n = 5) (n = 5) for 1 hr Annealing at 214.8 ± 2.4 247.2 ± 3.9 15.1% 150° C. (n = 5) (n = 5) for 1 hr

[0071] As shown in Table 3, the hardness of the aluminum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 303.6 HV, which is higher than that of the non-aluminum-plated specimens being unannealed by 32.1%.

Embodiment 4

[0072] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 1, except that the silver film is replaced by a zinc film. Herein, the thickness of the zinc film was 100 nm, the deposition temperature was 75° C., the rate was 1 Å/S, and the time was 25 minutes. The hardness of the non-zinc-plated specimens and the zinc-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 4 below.

TABLE-US-00004 TABLE 4 Average Average hardness of the hardness of the Percentage non-zinc-plated zinc-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 229.8 ± 6.3 260.2 ± 5.4 13.2% annealing (n = 5) (n = 5) Annealing at 229.4 ± 4.5 314.6 ± 5.4 37.1% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 248.8 ± 3.9 314.6 ± 8.8 26.4% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 214.8 ± 2.4 260.2 ± 5.4 21.1% 150° C. for 1 hr (n = 5) (n = 5)

[0073] As shown in Table 4 the hardness of the zinc-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 314.6 HV, which is higher than that of the non-zinc-plated specimens being unannealed by 36.9%.

Embodiment 5

[0074] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 1, except that the silver film is replaced by a nickel film. Herein, the thickness of the nickel film was 100 nm, the deposition temperature was 75° C., the rate was 1 Å/S, and the time was 25 minutes. The hardness of the non-nickel-plated specimens and the nickel-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 5 below.

TABLE-US-00005 TABLE 5 Average Average hardness of the hardness of the Percentage non-nickel-plated nickel-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before annealing 229.8 ± 6.3 293 ± 4.9 27.5% (n = 5) (n = 5) Annealing at 229.4 ± 4.5 293.2 ± 8.4 27.8% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 248.8 ± 3.9 299.6 ± 12.4 20.4% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 214.8 ± 2.4 238.2 ± 5.6 10.9% 150° C. for 1 hr (n = 5) (n = 5)

[0075] As shown in Table 5, the hardness of the nickel-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 299.6 HV, which is higher than that of the non-zinc-plated specimens being unannealed by 30.4%.

[0076] For the non-metal-plated specimens being unannealed and the metal-plated specimens being annealed at 100° C. for one hour, the average hardness and the percentage of enhanced hardness are summarized in the following Table 6.

TABLE-US-00006 TABLE 6 Average Average Average Average Average hardness hardness hardness hardness hardness of the of the of the of the of the platinum- aluminum- silver- zinc- nickel- plated plated plated plated plated specimens specimens specimens specimens specimens (HV) (HV) (HV) (HV) (HV) Non- 229.8 ± 6.3 229.8 ± 6.3 213.8 ± 8.5 229.8 ± 6.3 229.8 ± 6.3 metal- (n = 5) (n = 5) (n = 5) (n = 5) (n = 5) plated specimens being unannealed Metal- 316.8 ± 4.4 303.6 ± 8.8 270.8 ± 3.6 314.6 ± 8.8 299.6 ± 12.4 plated (n = 5) (n = 5) (n = 5) (n = 5) (n = 5) specimens being annealed Percentage of 37.9% 32.1% 27% 36.9% 30.4% enhanced hardness (%)

Embodiment 6

[0077] The nano-twinned copper layer and the method for manufacturing the same are similar to those in Embodiment 1, except for the following differences.

[0078] The plating solution used in the present embodiment comprises CuSO.sub.4.5H.sub.2O (including 50 g/L of copper ion), 100 g of H.sub.2SO.sub.4, hydrochloric acid (containing 50 ppm of chloride ion), and additive (2 ml/L). Furthermore, the stirring rate was 510 rpm, the current density was 36 ASD, and the electroplating time was 378.79 seconds. Thereby, a nano-twinned copper layer with a thickness of about 20 μm can be obtained.

[0079] FIG. 7 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment. As shown in

[0080] FIG. 7, most of the grains in the nano-twinned copper layer are twins with high density, the differences between such nano-twinned copper layer and the nano-twinned copper layer of Embodiment 1 are that the included angles between the twin direction (indicated by the arrow) of parts of the twinned grains and the thickness direction of the nano-twinned copper layer are about 10-20 degrees, and the included angles between the twin direction (indicated by the arrow) of parts of the twinned grains and the surface of the substrate are about 70-80 degrees; and, it represents the twinned grains is not vertical to the substrate.

[0081] Herein, a silver film was formed on the nano-twinned copper layer by the same method as in Embodiment 1, and tested under the same annealing conditions as in Embodiment 1. Furthermore, the hardness test method was the same as that of Embodiment 1. The results are shown in Table 7 below.

TABLE-US-00007 TABLE 7 Average Average hardness of the hardness of the Percentage non-silver-plated silver-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 258.6 ± 6.3 255.2 ± 3.9  −1% annealing (n = 5) (n = 5) Annealing at 267.2 ± 3.6 270.8 ± 6.7 1.3% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 274.4 ± 4.4 281.6 ± 4.4 2.6% 100° C. for 1 hr (n = 5) (n = 5)

[0082] As shown in Table 7, the hardness of the silver-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 281.6 HV, which is higher than that of the non-silver-plated specimens being unannealed by 8.9%.

Embodiment 7

[0083] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 6, except that the silver film is replaced by a platinum film. Herein, the thickness and the preparation conditions of the platinum film are the same as those in Embodiment 2. The hardness of the non-platinum-plated specimens and the platinum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 8 below.

TABLE-US-00008 TABLE 8 Average Average hardness of the hardness of the Percentage non-platinum-plated platinum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 258.6 ± 6.3 272.6 ± 4.4 5.4% annealing (n = 5) (n = 5) Annealing at 267.2 ± 3.6 293 ± 4.9 9.7% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 274.4 ± 4.4 321.2 ± 8.2 17.1% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 241.2 ± 3.4 279.8 ± 3.6 16.0% 150° C. for 1 hr (n = 5) (n = 5)

[0084] As shown in Table 8, the hardness of the platinum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 321.2 HV, which is higher than that of the non-platinum-plated specimens being unannealed by 24.2%.

Embodiment 8

[0085] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 6, except that the silver film is replaced by an aluminum film. Herein, the thickness and the preparation conditions of the aluminum film are the same as those in Embodiment 3. The hardness of the non-aluminum-plated specimens and the aluminum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 9 below.

TABLE-US-00009 TABLE 9 Average Average hardness of the hardness of the Percentage non-aluminum-plated aluminum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 258.6 ± 6.3 255.2 ± 3.9  −1% annealing (n = 5) (n = 5) Annealing at 274.4 ± 4.4 281.6 ± 4.4 2.6% 100° C. (n = 5) (n = 5) for 1 hr

[0086] As shown in Table 9, the hardness of the aluminum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 281.6 HV, which is higher than that of the non-aluminum-plated specimens being unannealed by 8.9%.

[0087] For the non-metal-plated specimens being unannealed and the metal-plated specimens being annealed at 100° C. for one hour, the average hardness and the percentage of enhanced hardness are summarized in the following Table 10.

TABLE-US-00010 TABLE 10 Average Average Average hardness of the hardness of the hardness of the platinum-plated aluminum-plated silver-plated specimens (HV) specimens (HV) specimens (HV) Non-metal- 258.6 ± 6.3 258.6 ± 6.3 258.6 ± 6.3 plated (n = 5) (n = 5) (n = 5) specimens being unannealed Metal-plated 321.2 ± 8.2 281.6 ± 4.4 281.6 ± 4.4 specimens (n = 5) (n = 5) (n = 5) being annealed Percentage 24.2% 8.9% 8.9% of enhanced hardness (%)

Embodiment 9

[0088] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 1, except that the forward current density was set to 20 ASD (A/dm.sup.2).

[0089] FIG. 8 is an EBSD photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment. FIG. 9 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment. The main difference between the nano-twinned copper layer of Embodiment 1 and that of the present embodiment is that 70% or more of the area of the surface of the nano-twinned copper layer expose the (111) surface of the nano twins.

[0090] The hardness of the non-silver-plated specimens and the silver-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 11 below.

TABLE-US-00011 TABLE 11 Average Average hardness of the hardness of the Percentage non-silver-plated silver-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 253.6 ± 6 281.6 ± 4.4 .sup. 11% annealing (n = 5) (n = 5) Annealing at 263.6 ± 4.4 291 ± 4.9 10.4% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 270.8 ± 3.6 310.2 ± 4.4 14.5% 100° C. for 1 hr (n = 5) (n = 5)

[0091] As shown in Table 11, the hardness of the silver-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 310.2 HV, which is higher than that of the non-silver-plated specimens being unannealed by 22.3%.

Embodiment 10

[0092] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 9, except that the silver film is replaced by a platinum film. Herein, the thickness and the preparation conditions of the platinum film are the same as those in Embodiment 2. The hardness of the non-platinum-plated specimens and the platinum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 12 below.

TABLE-US-00012 TABLE 12 Average Average hardness of the hardness of the Percentage non-platinum-plated platinum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 253.6 ± 6 303.6 ± 5.4 19.7% annealing (n = 5) (n = 5) Annealing at 263.6 ± 4.4 301.4 ± 5.4 14.3% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 270.8 ± 3.6 327.8 ± 4.4 21.1% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 250.4 ± 3.2 265.4 ± 4.4 6.1% 150° C. for 1 hr (n = 5) (n = 5)

[0093] As shown in Table 12, the hardness of the platinum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 327.8 HV, which is higher than that of the non-platinum-plated specimens being unannealed by 29.3%.

Embodiment 11

[0094] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 9, except that the silver film is replaced by an aluminum film. Herein, the thickness and the preparation conditions of the aluminum film are the same as those in Embodiment 3. The hardness of the non-aluminum-plated specimens and the aluminum-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 13 below.

TABLE-US-00013 TABLE 13 Average Average hardness of the hardness of the Percentage non-aluminum-plated aluminum-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 253.6 ± 6 253.6 ± 6 .sup. 0% annealing (n = 5) (n = 5) Annealing at 263.6 ± 4.4 279.8 ± 6.7 6.1% 50° C. (n = 5) (n = 5) for 1 hr Annealing at 270.8 ± 3.6 301.4 ± 5.4 11.3%  100° C. (n = 5) (n = 5) for 1 hr Annealing at 250.4 ± 3.2 261.8 ± 3.6 4.6% 150° C. (n = 5) (n = 5) for 1 hr

[0095] As shown in Table 13, the hardness of the aluminum-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 301.4 HV, which is higher than that of the non-aluminum-plated specimens being unannealed by 18.8%.

Embodiment 12

[0096] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 9, except that the silver film is replaced by a zinc film. Herein, the thickness and the preparation conditions of the zinc film are the same as those in Embodiment 4. The hardness of the non-zinc-plated specimens and the zinc-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 14 below.

TABLE-US-00014 TABLE 14 Average Average hardness of the hardness of the Percentage non-zinc-plated zinc-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 253.6 ± 6 276.2 ± 8.8 8.9% annealing (n = 5) (n = 5) Annealing at 263.6 ± 4.4 314.6 ± 5.4 19.3% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 270.8 ± 3.6 312.4 ± 5.4 15.4% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 250.4 ± 3.2 263.6 ± 4.4 5.3% 150° C. for 1 hr (n = 5) (n = 5)

[0097] As shown in Table 14, the hardness of the zinc-plated nano-twinned copper layer being annealed at 50° C. for one hour reaches 314.6 HV, which is higher than that of the non-zinc-plated specimens being unannealed by 18.8%.

Embodiment 13

[0098] The nano-twinned copper layer and the method for manufacturing the same, the annealing conditions and the hardness test method of the present embodiment are all the same as those in Embodiment 9, except that the silver film is replaced by a nickel film. Herein, the thickness and the preparation conditions of the nickel film are the same as those in Embodiment 5. The hardness of the non-nickel-plated specimens and the nickel-plated specimens obtained before annealing or after annealing at various temperatures for 1 hr are shown in Table 15 below.

TABLE-US-00015 TABLE 15 Average Average hardness of the hardness of the Percentage non-nickel-plated nickel-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 253.6 ± 6 267.2 ± 3.6 5.4% annealing (n = 5) (n = 5) Annealing at 263.6 ± 4.4 293 ± 4.9 11.2% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 270.8 ± 3.6 312.4 ± 5.4 15.3% 100° C. for 1 hr (n = 5) (n = 5) Annealing at 250.4 ± 3.2 281.6 ± 4.4 12.5% 150° C. for 1 hr (n = 5) (n = 5)

[0099] As shown in Table 15, the hardness of the nickel-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 312.4 HV, which is higher than that of the non-nickel-plated specimens being unannealed by 23.1%.

[0100] For the non-metal-plated specimens being unannealed and the metal-plated specimens being annealed at 100° C. for one hour, the average hardness and the percentage of enhanced hardness are summarized in the following Table 16.

TABLE-US-00016 TABLE 16 Average Average Average Average Average hardness hardness hardness hardness hardness of the of the of the of the of the platinum- aluminum- silver- zinc- nickel- plated plated plated plated plated specimens specimens specimens specimens specimens (HV) (HV) (HV) (HV) (HV) Non-metal- 253.6 ± 6 253.6 ± 6 253.6 ± 6 253.6 ± 6 253.6 ± 6 plated (n = 5) (n = 5) (n = 5) (n = 5) (n = 5) specimens being unannealed Metal-plated 327.8 ± 4.4 301.4 ± 5.4 310.2 ± 4.4 312.4 ± 5.4 312.4 ± 5.4 specimens (n = 5) (n = 5) (n = 5) (n = 5) (n = 5) being annealed Percentage 29.3% 18.8% 22.3% 24.1% 23.1% of entranced hardness (%)

Embodiment 14

[0101] The nano-twinned copper layer and the method for manufacturing the same are similar to those in Embodiment 1, except for the following differences.

[0102] The plating solution used in the present embodiment comprises CuSO.sub.4.5H.sub.2O (including 50 g/L of copper ion), 100 g of H.sub.2SO.sub.4, hydrochloric acid (containing 50 ppm of chloride ion), and additive (9 ml/L). Furthermore, the stirring rate was1200 rpm, and the current density was 15 ASD. Thereby, a nano-twinned copper layer with a thickness of about 20 μm can be obtained.

[0103] FIG. 10 is a FIB photo of a non-silver-plated nano-twinned copper layer before annealing according to the present embodiment. As shown in FIG. 10, the nano-twinned copper layer is formed by many fine twinned grains without a preferred direction, and the diameter (i.e., grain size) of the fine twinned grains is ranged from about 100 nm to 500 nm.

[0104] Herein, a silver film was formed on the nano-twinned copper layer by the same method as in Embodiment 1, and tested under the same annealing conditions as in Embodiment 1. Furthermore, the hardness test method was the same as that of Embodiment 1. The results are shown in Table 17 below.

TABLE-US-00017 TABLE 17 Average Average hardness of the hardness of the Percentage non-silver-plated silver-plated of enhanced specimens (HV) specimens (HV) hardness (%) Before 239.8 ± 3.4 247.2 ± 3.9 3.1% annealing (n = 5) (n = 5) Annealing at 242.6 ± 2.8 248.8 ± 3.9 2.6% 50° C. for 1 hr (n = 5) (n = 5) Annealing at 265.4 ± 7.2 301.4 ± 5.4 13.6% 100° C. for 1 hr (n = 5) (n = 5)

[0105] As shown in Table 17, the hardness of the silver-plated nano-twinned copper layer being annealed at 100° C. for one hour reaches 301.4 HV, which is higher than that of the non-silver-plated specimens being unannealed by 25.7%.

[0106] As shown in Embodiments 1 to 14 above, whether it is a nano-twinned copper layer with a preferred direction formed by columnar twinned grains or a nano-twinned copper layer without a preferred direction formed by fine grains, the metal elements other than copper can diffuse into the nano-twinned copper layer through a process of plating a metal film other than a copper film on the nano-twinned copper and then annealing at the proper temperature, thereby significantly enhancing the hardness of the obtained nano-twinned copper layer with a doped metal element. Therefore, the nano-twinned copper layer with a doped metal element provided by the present disclosure retains the high electrical conductivity and high thermal conductivity of the nano-twinned copper layer. In particular, it has high strength and can be applied to various electronic components.

[0107] Although the present invention has been explained in relation to its preferred embodiment, it is to be understood that many other possible modifications and variations can be made without departing from the spirit and scope of the invention as hereinafter claimed.