Semiconductor package including a package substrate including staggered bond fingers
11444052 · 2022-09-13
Assignee
Inventors
Cpc classification
H01L2924/00012
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/48106
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2224/06155
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/04042
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/06135
ELECTRICITY
H01L23/49816
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L24/73
ELECTRICITY
International classification
H01L23/498
ELECTRICITY
Abstract
A semiconductor package includes a package substrate including: first and second bond finger arrays, each of the first and second finger arrays arranged in a first direction on a surface of the package substrate; a first semiconductor chip disposed on the surface of the package substrate and including a first chip pad array corresponding to the first bond finger array; a second semiconductor chip disposed on the surface of the package substrate and including a second chip pad array corresponding to the second bond finger array; first bonding wires connecting bond fingers of the first bond finger array to chip pads of the first chip pad array; and second bonding wires connecting bond fingers of the second bond finger array to chip pads of the second chip pad array.
Claims
1. A semiconductor package comprising: a package substrate including first and second bond finger arrays, each of the first and second bond finger arrays arranged in a first direction on a surface of the package substrate; a first semiconductor chip disposed on the surface of the package substrate and including a first chip pad array corresponding to the first bond finger array; a second semiconductor chip disposed on the surface of the package substrate and including a second chip pad array corresponding to the second bond finger array; first bonding wires connecting bond fingers of the first bond finger array to chip pads of the first chip pad array; and second bonding wires connecting bond fingers of the second bond finger array to chip pads of the second chip pad array, wherein the bond fingers of the first bond finger array and the bond fingers of the second bond finger array at least partially overlap with each other along the first direction, wherein each of the bond fingers of the first and second bond finger arrays comprises: a finger body portion having a substantially uniform width along a second direction perpendicular to the first direction; and a finger edge portion having a width that decreases along the second direction.
2. The semiconductor package of claim 1, wherein the bond fingers of the first bond finger array and the bond fingers of the second bond finger array at least partially overlap with each other along a second direction perpendicular to the first direction.
3. The semiconductor package of claim 1, wherein each of the bond fingers of the first and second bond finger arrays has a minimum width at an end of the finger edge portion farthest from the finger body portion.
4. The semiconductor package of claim 1, wherein each of the bond fingers of the first and second bond finger arrays has a hexagonal planar shape on the surface of the package substrate.
5. The semiconductor package of claim 1, wherein the finger edge portions of the first bond finger array and the finger edge portions of the second bond finger array overlap with each other along the first direction.
6. The semiconductor package of claim 1, wherein the finger edge portions of the first bond finger array are disposed to face the chip pads of the first chip pad array, and wherein the finger edge portions of the second bond finger array are disposed to face the chip pads of the second chip pad array.
7. The semiconductor package of claim 1, further comprising: first trace patterns extending from the bond fingers of the first bond finger array on the surface of the package substrate, the first trace patterns electrically connected to first wirings of the package substrate; and second trace patterns extending from the bond fingers of the second bond finger array on the surface of the package substrate, the second trace patterns electrically connected to second wirings of the package substrate on the surface.
8. The semiconductor package of claim 1, wherein the first semiconductor chip is disposed closer to the second bond finger array than the first bond finger array, and wherein the second semiconductor chip is disposed closer to the first bond finger array than the second bond finger array.
9. The semiconductor package of claim 1, wherein the bond fingers of the first bond finger array are spaced apart from the second semiconductor chip, and wherein the bond fingers of the second bond finger array are spaced apart from the first semiconductor chip.
10. The semiconductor package of claim 1, wherein first extension lines passing through central axes of the bond fingers of the first bond finger array and extending in the second direction perpendicular to the first direction are disposed to meet chip pads in the first chip pad array of the first semiconductor chip, wherein second extension lines passing through central axes of the bond fingers of the second bond finger array and extending in the second direction are disposed to meet chip pads in the second chip pad array of the second semiconductor chip, and wherein the first extension lines and the second extension lines are parallel to each other.
11. The semiconductor package of claim 7, wherein the first trace patterns extend from the finger body portions of the first bond finger array toward the second semiconductor chip, and wherein the second trace patterns extend from the finger body portions of the second bond finger array toward the first semiconductor chip.
12. The semiconductor package of claim 7, wherein the first trace patterns extend from the finger edge portions of the first bond finger array toward the first semiconductor chip, and the second trace patterns extend from the finger edge portions of the second bond finger array toward the second semiconductor chip.
13. A semiconductor package comprising: a package substrate including first and second bond finger arrays, the first and second bond finger arrays arranged along first and second lines, respectively, in a first direction on a surface of the package substrate; a first semiconductor chip including a first chip pad array corresponding to the first bond finger array and disposed, on the surface of the package substrate, closer to the second bond finger array than the first bond finger array; a second semiconductor chip including a second chip pad array corresponding to the second bond finger array and disposed, on the surface of the package substrate, closer to the first bond finger array than the second bond finger array, and; first bonding wires connecting bond fingers of the first bond finger array to chip pads of the first chip pad array; second bonding wires connecting bond fingers of the second bond finger array to chip pads of the second chip pad array; first trace patterns extending from the bond fingers of the first bond finger array on the substrate, the first trace patterns electrically connecting the bond fingers of the first bond finger array to first wirings of the package substrate; and second trace patterns extending from the bond fingers of the second bond finger array on the substrate, the second trace patterns electrically connecting the bond fingers of the second bond finger array to second wirings of the package substrate, wherein the bond fingers of the first bond finger array and the bond fingers of the second bond finger array are staggered along the first direction, wherein each of the bond fingers of the first and second bond finger arrays comprises: a finger body portion having a substantially uniform width along a second direction perpendicular to the first direction; and a finger edge portion having a width that decreases along the second direction.
14. The semiconductor package of claim 13, wherein the finger edge portions of the first bond finger array are disposed to face the chip pads of the first chip pad array, and wherein the finger edge portions of the second bond finger array are disposed to face the chip pads of the second chip pad array.
15. The semiconductor package of claim 13, wherein the first trace patterns extend from the finger body portions of the first bond finger array toward the second semiconductor chip, and wherein the second trace patterns extend from the finger body portions of the second bond finger array toward the first semiconductor chip.
16. The semiconductor package of claim 13, wherein the bond fingers of the first bond finger array are spaced apart from the second semiconductor chip, and wherein the bond fingers of the second bond finger array are spaced apart from the first semiconductor chip.
17. The semiconductor package of claim 13, wherein first extension lines passing through central axes of the bond fingers of the first bond finger array and extending in the second direction perpendicular to the first direction are disposed to meet chip pads in the first chip pad array of the first semiconductor chip, wherein second extension lines passing through the central axes of the bond fingers of the second bond finger array and extending in the second direction are disposed to meet chip pads in the second chip pad array of the second semiconductor chip, and wherein the first extension lines and the second extension lines are parallel to each other.
18. The semiconductor package of claim 14, wherein the finger edge portions of the first and second bond finger arrays overlap with each other along the first direction.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
DETAILED DESCRIPTION
(5) The terms used herein may correspond to words selected in consideration of their functions in presented embodiments, and the meanings of the terms may be construed to be different according to those of ordinary skill in the art to which the embodiments belong. If defined in detail, the terms may be construed according to the definitions. Unless otherwise defined, the terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the embodiments belong. In the description of the embodiments of the present disclosure, descriptions such as “first” and “second,” “upper” and “lower,” and “left” and “right” are for distinguishing members, and are not used to limit the members themselves or to mean a specific order.
(6) The semiconductor chips described herein may include a form in which a semiconductor substrate into which an electronic circuit is integrated is cut into a die. The semiconductor chips may correspond to memory chips, logic chips (including application-specific integrated circuits (ASIC) chips), or system-on-chips (SoC). The memory chips may include dynamic random access memory (DRAM) circuits, static random access memory (SRAM) circuits, NAND-type flash memory circuits, NOR-type flash memory circuits, magnetic random access memory (MRAM) circuits, resistive random access memory (ReRAM) circuits, ferroelectric random access memory (FeRAM) circuits, or phase change random access memory (PcRAM) circuits which are integrated on the semiconductor substrate. The logic chips may include logic circuits which are integrated on the semiconductor substrate. The semiconductor chips may be referred to as semiconductor dies according to their shape after the die sawing process.
(7) In this specification, a semiconductor package may include a package substrate on which a semiconductor chip is mounted. The package substrate may include at least one layer of integrated circuit patterns and may be referred to as a printed circuit board (PCB) in the present specification. The semiconductor package may include a plurality of semiconductor chips stacked on the package substrate.
(8) The semiconductor package may be employed in various communication systems such as mobile phones, electronic systems associated with biotechnology or health care, or wearable electronic systems.
(9) Same reference numerals may refer to same elements throughout the specification. Even though a reference numeral is not mentioned or described with reference to a drawing, the reference numeral may be mentioned or described with reference to another drawing. In addition, even though a reference numeral is not shown in a drawing, it may be mentioned or described with reference to another drawing.
(10) In this specification, a semiconductor package is illustrated using a Cartesian coordinate system with x-y-z axes being perpendicular to each other. In this case, the X-direction may mean a direction parallel to the X-axis. Similarly, the Y-direction and the Z-direction may mean a direction parallel to the Y-axis and a direction parallel to the Z-axis, respectively.
(11)
(12) The package substrate 100 may include a substrate body portion 110. The substrate body portion 110 may include an upper surface 110S1 and a lower surface 110S2 opposite to the upper surface 110S1, A first bond finger array 120 and a second bond finger array 130 may be disposed, respectively, in a line along a first direction (i.e., the Y-direction) between the first semiconductor chip 200 and the second semiconductor chip 300 on the upper surface 110S1 of the substrate body portion 110. That is, the first bond finger array 120 may be arranged along a first line in the Y-direction and the second bond finger array 130 may be arranged along a second line in the Y-direction on the upper surface 110S1 of the substrate body portion 110. Although not illustrated, each of the first and second bond finger arrays 120 and 130 may include a plurality of bond fingers. As described later in connection with
(13) Referring to
(14) The first semiconductor chip 200 may be disposed adjacent to the second bond finger array 130 on the upper surface 110S1. The first semiconductor chip 200 may include a first chip body portion 210. The first chip body portion 210 may include a plurality of active elements and passive elements for the operation of the first semiconductor chip 200. As an example, the active element may include at least a field effect transistor. As an example, the passive element may include at least a capacitor or a resistor. The active elements and the passive elements may be disposed in an inner region adjacent to the upper surface 210S1 of the first chip body portion 210. The active elements and the passive elements may be connected to each other by wirings to form a semiconductor integrated circuit. Meanwhile, the first chip body portion 210 may be bonded to the upper surface 110S1 of the substrate body portion 110 by a first adhesion layer 410.
(15) A first chip pad array 220 including a plurality of chip pads may be disposed on an upper surface 210S1 of the first chip body portion 210. The first chip pad array 220 may be disposed at a side portion of the upper surface 210S1 and may be disposed in a line along the first direction (i.e., the Y-direction), corresponding to the first bond finger array 120. The specific configuration of the first chip pad array 220 will be described below with reference to
(16) Meanwhile, the second semiconductor chip 300 may be disposed adjacent to the first bond finger array 120 on the upper surface 110S1. The second semiconductor chip 300 may include a second chip body portion 310. The second chip body portion 310 may include a plurality of active elements and passive elements for the operation of the second semiconductor chip 300. The active elements and the passive elements may be disposed in an inner region adjacent to an upper surface 310S1 of the second chip body portion 310. The second chip body portion 310 may be bonded to the upper surface 110S1 of the substrate body portion 110 by a second adhesion layer 420.
(17) A second chip pad array 320 including a plurality of chip pads may be disposed on the upper surface 310S1 of the second chip body portion 310. The second chip pad array 320 may be disposed on one side of the upper surface 310S1 and may be arranged in a line along the first direction (i.e., the Y-direction), corresponding to the second bond finger array 130. The specific configuration of the second chip pad array 320 will be described below with reference to
(18) Referring to
(19) Meanwhile, connection pads 160 may be disposed near the lower surface 110S2 of the substrate body portion 110. As illustrated in
(20)
(21) Referring to
(22) In an embodiment, each of the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 may be one of a signal finger, a power finger, and a ground finger. The bond fingers corresponding to the signal finger among the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f may be electrically separated from each other. On the other hand, the bond fingers corresponding to the power finger among the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f may be electrically connected to each other. Although not illustrated in
(23) In addition, each of the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 may be one of a signal finger, a power finger, and a ground finger, respectively. The bond fingers corresponding to the signal finger among the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f may be electrically separated from each other. On the other hand, the bond fingers corresponding to the power finger among the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f may be electrically connected to each other. Similarly, the bond fingers corresponding to the ground finger among the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f may be electrically connected to each other.
(24) Referring to
(25) In an embodiment, the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 and the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 may be arranged to at least partially overlap each other along the first direction (i.e., the Y-direction). Referring to
(26) As described above, the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 and the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 are arranged to have the overlapping regions along the first direction (i.e., the Y-direction), so that the integration density of the first and second bond finger arrays 120 and 130 with respect to the second direction (i.e., the X-direction) can be improved. That is, the first and second bond finger arrays 120 and 130 are disposed in a denser shape with respect to the second direction (i.e., the X-direction), so that it is possible to save the space for arrangement of the bond fingers of the first and second bond finger arrays 120 and 130 on the upper surface 110S1 of the substrate body portion 110.
(27) In addition, the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 and the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 may be arranged to partially overlap each other along the second direction (i.e., the X-direction) perpendicular to the first direction. Referring to
(28) As described above, the first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 and the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 are arranged to at least partially overlap with each other along the second direction (i.e., the X-direction), so that the integration density of the first and second bond finger arrays 120 and 130 with respect to the first direction (i.e., the V-direction) can be improved. That is, the first and second bond finger arrays 120 and 130 are disposed in a denser form with respect to the first direction (i.e., the V-direction), so that it is possible to save the space for arrangement of the bond fingers on the upper surface 110S1 of the substrate body portion 110.
(29) For some embodiments, as described above with reference to
(30) Referring to
(31) Similarly, each of the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 may include a finger body portion B and a finger edge portion E. Each of the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f may have a substantially uniform width W1 in the finger body portion B. Each of the first to sixth bond fingers 130a, 130b, 130e, 130d, 130e, and 130f may have a width that decreases along the second direction (i.e., the X-direction) in the finger edge portion E, Each of the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f may have a minimum width W2 at an end Ea of the finger edge portion E farthest from the finger body portion B. As an example, as illustrated in
(32) Referring to
(33) Referring to
(34) As an example, a first extension line C1 passes through the central axis of the first bond finger 120a of the first bond finger array 120 and extends in the second direction (i.e., the X-direction). The first extension line C1 may meet the first chip pad 220a of the first chip pad array 220. Although not illustrated in
(35) As another example, a second extension line C2 passes through the central axis of the first bond finger 130a of the second bond finger array 130 and extends in the second direction (i.e., the X-direction). The second extension line C2 may meet the first chip pad 320a of the second chip pad array 320. Although not illustrated in
(36) Meanwhile, the first extension line C1 and the second extension line C2 may be parallel to each other. Therefore, the plurality of extension lines parallel to the first extension line C1, and the plurality of extension lines parallel to the second extension line C2 may be parallel to each other. Accordingly, as illustrated in
(37) In addition, when the first extension line C1, the second extension line C2 and other extension lines are formed parallel to each other, defects occurring in the process of connecting the chip pads and the bond fingers with bonding wires can be mitigated or suppressed. Specifically, the wire bonding may be formed using a wire bonding capillary. The shape of the wire bonding or connection path may be adjusted using the movement of the wire bonding capillary. When the bonding wires connecting the chip pad and the bond fingers are parallel to each other, the movement paths of the wire bonding capillaries for connecting the bonding wires may be maintained parallel to each other. Accordingly, connection process can be made without the wire bonding capillary contacting other adjacent bonding wires. In other words, it is possible to mitigate or prevent deformation or damage to adjacent bonding wires due to the movement of the wire bonding capillary in the wire bonding process.
(38) Referring to
(39) Similarly, the second trace patterns 132 may extend in a direction of the first semiconductor chip 200 from the finger body portions B of the first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f. The width W3 of the second trace patterns 132 in
(40) Referring to
(41) Referring to
(42) The first to sixth chip pads 220a, 220b, 220c, 220d, 220e, and 220f of the first semiconductor chip 200 may be connected to the corresponding first to sixth bond fingers 120a, 120b, 120c, 120d, 120e, and 120f of the first bond finger array 120 by the first bonding wires 701. The first bond finger array 120 is located farther from the first semiconductor chip 200 than the second bond finger array 130. In addition, the first to sixth chip pads 320a, 320b, 320c, 320d, 320e, and 320f of the second semiconductor chip 300 may be connected to the corresponding first to sixth bond fingers 130a, 130b, 130c, 130d, 130e, and 130f of the second bond finger array 130 by the second bonding wires 702. The second bond finger array 130 is located farther from the second semiconductor chip 300 than the first bond finger array 120.
(43) In an embodiment, the first and second bonding wires 701 and 702 may be formed as follows with reference to
(44) Meanwhile, as described above with reference to
(45)
(46) Referring to
(47) Similarly, the second trace patterns 134 may extend from the finger edge portions E of the bond fingers of the second bond finger array 130 toward the second semiconductor chip 300. The second trace patterns 134 may extend to the lower portion of the second semiconductor chip 300 and may be electrically connected to the second wirings of the package substrate 100. The second trace patterns 134 may be electrically connected to the corresponding connection pads 160 of the package substrate 100 illustrated in
(48) As described above, semiconductor packages according to some embodiments of the present disclosure include first and second bond finger arrays wire-bonded with different semiconductor chips on a package substrate, respectively. The first and second bond finger arrays may be respectively arranged in a line along the first direction. The bond fingers of the first bond finger array and the bond fingers of the second bond finger array are disposed to overlap at least partially with each other along the first direction and a second direction perpendicular to the first direction. Therefore, the integration degree of the bond fingers in the first direction and the second direction on the package substrate can be improved. As a result, efficient arrangement of the first and second bond finger arrays on the package substrate is possible. In addition, by saving the arrangement space of the first and second bond finger arrays, the degree of freedom of design for various other patterns implemented on the package substrate can be improved.
(49) Embodiments of the present disclosure have been disclosed for illustrative purposes. Those skilled in the art will appreciate that various modifications, additions, and substitutions are possible, without departing from the scope and spirit of the present disclosure and the accompanying claims.