Plasmonic nanoparticles, methods of making plasmonic nanoparticles and sensors made therefrom
11275089 · 2022-03-15
Inventors
- Ravinder Jain (Albuquerque, NM)
- Abhaya K. Datye (Albuquerque, NM, US)
- Ying-Bing Jiang (Albuquerque, NM, US)
Cpc classification
Y10S977/891
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/81
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
B82Y20/00
PERFORMING OPERATIONS; TRANSPORTING
C23C16/4417
CHEMISTRY; METALLURGY
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
Y10S977/824
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
C23C16/01
CHEMISTRY; METALLURGY
B82Y5/00
PERFORMING OPERATIONS; TRANSPORTING
A61K41/008
HUMAN NECESSITIES
A61P35/00
HUMAN NECESSITIES
Y10S977/774
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
C23C16/455
CHEMISTRY; METALLURGY
A61K41/00
HUMAN NECESSITIES
A61P35/00
HUMAN NECESSITIES
Abstract
A method of making free-standing ALD-coated plasmonic nanoparticles. The method comprises providing a plurality of semiconductor quantum dots. One or more conformal layers of dielectric material are deposited over the quantum dots to form dielectric-coated quantum dots. A conformal metallic nanoshell is deposited over the dielectric-coated quantum dots to form plasmonic nanoparticles. At least one layer chosen from i) the conformal layers of dielectric material and ii) the conformal metallic nanoshell is deposited using a vapor phase atomic layer deposition (ALD) process. Plasmonic nanoparticles and systems employing the nanoparticles are also disclosed.
Claims
1. A method of making free-standing ALD-coated plasmonic nanoparticles comprising: providing a plurality of semiconductor quantum dots; depositing one or more conformal layers of dielectric material over the quantum dots to form dielectric-coated quantum dots; and depositing a conformal metallic nanoshell over the dielectric-coated quantum dots to form plasmonic nanoparticles, wherein at least one layer chosen from i) the conformal layers of dielectric material and ii) the conformal metallic nanoshell is deposited using a vapor phase atomic layer deposition (ALD) process, and wherein the plasmonic nanoparticles are free-standing.
2. The method of claim 1, further comprising dispersing the semiconductor quantum dots on a support comprising sacrificial material prior to the depositing the one or more conformal layers of dielectric material; and removing the sacrificial support after the depositing the conformal metallic nanoshell to form the free-standing ALD-coated plasmonic nanoparticles.
3. The method of claim 2, wherein removing the sacrificial support comprises burning out or vaporizing the sacrificial material.
4. The method of claim 1, wherein the ALD process comprises: a) placing the semiconductor quantum dots on a sacrificial support under vacuum at a temperature in the range of 80° C. to 250° C.; b) forming a chemisorbed monolayer of a first reactant on at least a portion of a surface of the semiconductor quantum dots; c) forming an atomic layer of a material over the semiconductor quantum dots by reacting a second reactant with the chemisorbed monolayer of the first reactant; d) repeating steps b) and c) to achieve a desired layer thickness, wherein between each step a), b), c) and d), vacuum is applied to remove an excess of first reactant, second reactant, and reaction byproducts, and any weakly bonded physi-sorption layer on the surface of the quantum dot.
5. The method of claim 4 further comprising adding a third reactant and optionally a fourth reactant to form a coating with ternary or quaternary compositions, respectively.
6. The method of claim 4, wherein the dielectric material is alumina, Al.sub.2O.sub.3; the first reactant is trimethyl aluminum (TMAl) and the second reactant is water.
7. The method of claim 4, wherein the dielectric material is titania, TiO.sub.2; the first reactant is titanium tetrachloride (TCl.sub.4) and the second reactant is water.
8. The method of claim 4, wherein the conformal metallic nanoshell comprises palladium and is formed by the ALD process employing Pd(hfac).sub.2 as the first reactant and hydrogen as the second reactant.
9. The method of claim 1, further comprising, prior to the depositing the one or more conformal layers of dielectric material, coating the semiconductor quantum dots with silica using a liquid phase sol-gel method to form silica-coated quantum dots having a size suitable for vapor phase atomic layer deposition (ALD).
10. The method of claim 1, wherein the plurality of semiconductor quantum dots have diameters of less than 6 nm.
11. The method of claim 10, wherein the semiconductor quantum dot comprises at least one material selected from the compositions of CdSe/ZnS, CdSe/CdS and ZnSe/ZnS.
12. The method of claim 10, wherein the semiconductor quantum dot is a fluorophore, the plasmonic nanoparticle further comprising a second fluorophore selected from the group consisting of semiconductor nanoparticles or organic dyes such as fluorescein and rhodamine.
13. The method of claim 10, wherein the metallic nanoshell comprises one or more metals selected from gold, silver, platinum, palladium, aluminum, copper, and nickel.
14. The method of claim 1, wherein the metallic nanoshell comprises an array of metallic dots, the metallic dots having a diameter of less than 3 nm.
15. The method of claim 1, wherein the metallic nanoshell comprises a non-uniform metallic layer having a thickness in the range of 0.2 nm to 6 nm.
16. The method of claim 1, wherein the metallic nanoshell is a multilayered metallic nanoshell, wherein each layer has a unique composition.
17. The method of claim 1, wherein the one or more conformal layers of dielectric material comprise a material chosen from the compounds of silica, titania and alumina.
18. The method of claim 1, wherein the semiconductor quantum dot comprises at least one material selected from the compositions of CdSe/ZnS, CdSe/CdS and ZnSe/ZnS.
19. The method of claim 18, wherein the semiconductor quantum dot is a fluorophore, the plasmonic nanoparticle further comprising a second fluorophore selected from the group consisting of semiconductor nanoparticles or organic dyes such as fluorescein and rhodamine.
20. The method of claim 18, wherein the metallic nanoshell comprises one or more metals selected from gold, silver, platinum, palladium, aluminum, copper, and nickel.
21. The method of claim 18, wherein the metallic nanoshell comprises an array of metallic dots, the metallic dots having a diameter of less than 3 nm.
22. The method of claim 18, wherein the metallic nanoshell comprises a non-uniform metallic layer having a thickness in the range of 0.2 nm to 6 nm.
23. The method of claim 18, wherein the metallic nanoshell is a multilayered metallic nanoshell, wherein each layer has a unique composition.
24. The method of claim 23, wherein the one or more conformal layers of dielectric material comprise a material chosen from the compounds of silica, titania and alumina.
25. The method of claim 24, wherein the plurality of semiconductor quantum dots have diameters of less than 6 nm.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present teachings and together with the description, serve to explain the principles of the present teachings.
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(20) It should be noted that some details of the figure have been simplified and are drawn to facilitate understanding of the embodiments rather than to maintain strict structural accuracy, detail, and scale.
DESCRIPTION OF THE EMBODIMENTS
(21) Reference will now be made in detail to embodiments of the present teachings, examples of which are illustrated in the accompanying drawings. In the drawings, like reference numerals have been used throughout to designate identical elements. In the following description, reference is made to the accompanying drawing that forms a part thereof, and in which is shown by way of illustration a specific exemplary embodiment in which the present teachings may be practiced. The following description is, therefore, merely exemplary.
(22) An embodiment of the present disclosure is directed to a method of making free-standing ALD-coated plasmonic nanoparticles. Referring to
(23) In an embodiment, the semiconductor quantum dots are optionally dispersed on a support 18 comprising a sacrificial material 20, as illustrated in
(24) ALD can be employed to provide highly conformal dielectric and metal coatings of the QDs. The ALD technique is particularly beneficial for forming the plasmonic particles of the present disclosure because it allows the thickness of the coating to be precisely controlled by varying the number of ALD cycles. In addition, the ALD can allow for a variety of materials to be used as coatings that may not otherwise be easily coated onto the QDs. For example, titania has a higher refractive index than silica, which is desirable for plasmonic nanoparticles of the present disclosure. However sol-gel synthesis of titania is more difficult due to the higher reactivity of the alkoxide precursor. According to an embodiment of this disclosure, ALD is used to provide the desired conformal dielectric coatings, such as titania, over the QDs.
(25) The ALD process comprises: a) optionally placing the semiconductor quantum dots on a sacrificial support under vacuum at a temperature in the range of 80° C. to 250° C.; b) forming a chemisorbed monolayer of a first reactant on at least a portion of a surface of the semiconductor quantum dots; c) forming an atomic layer of a material over the semiconductor quantum dots by reacting a second reactant with the chemisorbed monolayer of the first reactant; and d) repeating steps b) and c) to achieve a desired layer thickness. Between each step a), b), c) and d), a vacuum may be applied and optionally an inert gas can be pumped through the ALD vacuum chamber to remove an excess of first reactant, second reactant, and reaction byproducts, and any weakly bonded physi-sorption layer on the surface of the quantum dot.
(26) Any suitable number or type of reactant gases can be employed depending on the desired composition of the layer to be deposited by the ALD process. For example, the process can include adding a third reactant and optionally a fourth reactant to form a coating with ternary or quaternary compositions, respectively. If the dielectric material to be deposited is alumina, (Al.sub.2O.sub.3), the first reactant in the ALD process can be trimethyl aluminum (TMAl) and the second reactant can be water. In another example where the dielectric material is titania (TiO.sub.2) the first reactant is titanium tetrachloride (TCl.sub.4) and the second reactant is water. In and example where the layer(s) to be deposited by ALD include the conformal metallic nanoshell, the nanoshell can comprise palladium, the first reactant is Pd(hfac).sub.2 and the second reactant is hydrogen. Various other films and known ALD precursors for making the films are shown in Table 1 below. The vapor phase (ALD) techniques will not only allow a larger choice of high quality ultrathin (<10 nm thickness) dielectric (such as titania) and metal films, but also enable the possibility of getting unprecedented film uniformity and thickness control for both the dielectric and metal film layers.
(27) TABLE-US-00001 TABLE 1 ALD product ALD precursors References Al.sub.2O.sub.3 TMAl + H.sub.2O [George, 2010.sup.1; Bent, 2014.sup.2] TiO.sub.2 TiCl.sub.4 + H.sub.2O [George, 2010.sup.1; Bent, 2014.sup.2] SiO.sub.2 TMOS + H.sub.2O [George, 2010.sup.1; Bent, 2014.sup.2] ZnO DMZ + H.sub.2O [George, 2010.sup.1; Bent, 2014.sup.2] Pt MeCpPtMe.sub.3 + O.sub.2 or H.sub.2 at [Aaltonen, 2005].sup.3 200-350° C. Pd Pd(hfac).sub.2 + H.sub.2 at [Aaltonen, 2005].sup.3 80-130° C. Ru RuCp.sub.2 + O.sub.2 at 225-275° C. [Aaltonen, 2005].sup.3 Ir Ir(acac).sub.3 + O.sub.2 225-400° C. [Aaltonen, 2005].sup.3 Au Au Iminopyrrolidinates, [Coyle, 2014].sup.4 plasma ALD Ag Ag Iminopyrrolidinates, [Coyle, 2014.sup.4; Hämäläinen, 2014].sup.5 plasma ALD .sup.1George, Steven M., Chem. Rev. 2010, 110, 111-131, the disclosure of which is incorporated herein by reference in its entirety. .sup.2Bent, Stacey F. et al., Materials Today Volume 17, Number 5 June 2014, the disclosure of which is incorporated herein by reference in its entirety. .sup.3Aaltonen, Titta, “Atomic Layer Deposition of Noble Metal Thin Films,” Academic Dissertation, Dept. of Chemistry, University of Helsinki, 2005, the disclosure of which is incorporated herein by reference in its entirety. .sup.4Coyle, Jason P. et al., Chem. Mater. 2013, 25, 1132-1138, the disclosure of which is incorporated herein by reference in its entirety. .sup.5Hämäläinen, J. et al., Chem. Mater. 2014, 26, 786-801, the disclosure of which is incorporated herein by reference in its entirety.
(28) The ALD technique is very flexible, but a major challenge involves the handling of QD nanoparticles, which are generally less than 6 nm in diameter, such as less than 3 nm in diameter, during the ALD coating process. According to an embodiment of the present disclosure, a two-step approach can be employed to allow ALD coating of QDs. In step one, the method includes coating the semiconductor dots prior to depositing the one or more conformal layers of dielectric material. For example, the semiconductor quantum dots can be coated with silica using a liquid phase sol-gel method to form silica-coated quantum dots having a size suitable for vapor phase atomic layer deposition (ALD). Such liquid phase techniques are generally well known for depositing silica and can preserve the fluorescence of the QDs after the silica coating. The liquid phase coated QD structures are of a size that allows handling via ALD. For example, the liquid phase coated particles can have a diameter ranging from about 10 nm to about 200 nm, such as about 15 nm to about 150 nm, such as about 20 nm to about 100 nm. In step two, the ALD dielectric and/or metal nanoshell layers can be deposited over free flowing silica-coated quantum dots using the above described vapor phase ALD process.
(29) Following the deposition of the dielectric and/or the metallic nanoshell, the resulting coated QDs can be separated from the sacrificial support, such as by etching or dissolving the sacrificial material 20 of the support, as shown in
(30) An embodiment of the present disclosure is also directed to plasmonic nanoparticles. The nanoparticles comprise a semiconductor quantum dot 10, as shown in
(31) Any suitable semiconductor quantum dots can be employed in the plasmonic nanoparticles of the present disclosure. For example, the semiconductor quantum dots can comprise at least one material selected from the compositions of CdSe/ZnS, CdSe/CdS and ZnSe/ZnS.
(32) In an embodiment, the semiconductor quantum dot is a fluorophore and the plasmonic nanoparticle further comprising a second fluorophore. For instance, the second fluorophore can be selected from the group consisting of semiconductor nanoparticles, such as any of the quantum dots described herein, or organic dyes such as fluorescein or rhodamine.
(33) The layer of dielectric material 12 (sometimes referred to herein as the “dielectric layer”) can comprise any suitable material that has the desired permittivity and that can be formed in a suitably conformal layer that does not inhibit the function of the plasmonic nanoparticle. In an embodiment, the at least one dielectric insulating layer comprises at least one material chosen from the compounds of silica, titania and alumina. The dielectric layer 12 can be deposited to be sufficiently thick so as to minimize nonradiative decay and improve the plasmonic resonant enhancement of the plasmonic nanoparticle. The total thickness of the dielectric layer 12 (including the combined thickness of the ALD deposited dielectric and any optional dielectric deposited by liquid phase techniques) can range, for example, from about 3 nm to about 100 nm, such as about 5 nm to about 50 nm, such as about 10 nm to about 20 nm.
(34) The metallic nanoshell can comprise any suitable metals. In an embodiment, the metallic nanoshell comprises one or more metals selected from gold, silver, platinum, palladium, aluminum, copper, and nickel. In general, the thickness of the metal nanoshell 14 can range, for example, from about 0.1 nm to about 15 nm, such as about 0.2 to about 8 nm, such as about 0.2 to about 6 nm or about 1 nm to about 5 nm.
(35) In an embodiment, the metallic nanoshell is a multilayered metallic nanoshell, wherein each layer has a unique composition. For example, the metallic nanoshell can include two or more layers chosen from gold, silver, platinum, palladium, aluminum, copper, and nickel.
(36) The metallic nanoshell can be a highly conformal, continuous layer so as to uniformly encapsulate all or a portion of the particle. Alternatively, the metallic nanoshell can be non-conformal and/or discontinuous. For example, the metallic nanoshell can comprises a dense array of metallic dots 30, as illustrated in
(37) Referring to
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(39) In appropriately-designed PQD structures, as elaborated further herein, the proposed dielectric and multi-layered metallic nanoshell layers will not only help enhance the electric fields in the center of the nanostructure, thus increasing the brightness of the nanoparticles, but will also chemically isolate the QDs from human tissue and significantly reduce the toxicity of such TPAF nanoparticles if used in biological applications.
(40) In an embodiment, the plasmonic nanoparticles of the present disclosure can exhibit significant fluorescence intensity changes due to relatively sharp resonance peaks. Further, the absorption and emission properties can optionally be chosen to be optimal for wavelengths and intensities that are readily achievable from, for example, relatively standard commercial Ti-sapphire laser systems. It has been found that at a “nominal” intensity of, for example, 8 GW/cm.sup.2, the TPAF signals from “bare” ultrasmall CdSe QDs at excitation wavelengths near 780 nm were observed to be ˜8 times larger than those at 850 nm and ˜68 times larger than those at 900 nm (See Wang, L. et al., “Maximization of nonlinear fluorescence from ultrasmall (≤2 nm) semiconductor quantum dots to be used for deep tissue imaging,” Journal of the Optical Society of America B 26, 2161 (2009)), indicating that such a choice of QDs should be highly relevant for use in the optimization of the proposed PQDs.
(41) In an embodiment, the particles of the present disclosure can be tuned to maximize the output signals for their effective use in biological imaging and luminescent marker applications. This can be done by: (a) using semiconductor materials with relatively high intrinsic quantum efficiencies, (b) optimizing the size of such quantum dots to obtain emission wavelengths that coincide with the availability of efficient photomultiplier or photodetector systems, (c) enhancing the TPAF signals via use of the best designs for plasmonic electric field enhancement (EFE) in the PQD structures, and (d) optimizing the choice of the excitation wavelengths for QDs chosen in accordance with the first two factors.
(42) In an embodiment, the plasmonic nanoparticles of the present disclosure can be configured for two-photon absorption-induced fluorescence (TPAF) imaging. This can be accomplished by the addition of one or more Surface Enhanced Raman Specroscopy (SERS) active molecules adsorbed on an outer surface of the metallic nanoshell. As shown in
(43) In particular, the illustration of
(44) As stated above, a modality with which we will use this nanoparticle is by using 2-photon absorption enabled luminescence that occurs simultaneously in the PQD while using the same near-infrared excitation for near-infrared SERS spectroscopy on the surface of the PQD to measure analyte concentrations. One advantage of the PQD nanoparticle over conventional fluorescent quantum dots is the fact that enclosing the quantum dot inside the metallic nanoshell both provides a high enhancement of the local field within the shell, enabling high luminescence efficiency, as well as complete isolation of the quantum dot from the external environment, alleviating problems related to quantum dot toxicity and fluorescence blinking. The outer surface plasmonic enhancement in the proposed PQD will also cause significant enhancements of the SERS signals while enabling spatial information of the location of the measured analyte via the ultrabright TPAF luminescence.
(45) In general, organic acids and bases serve effectively as pH sensitive ligands. The organic acids and bases are chosen based on their relative dissociation constants (Kds), stabilities, and measurable change in SERS signature on protonation/deprotonation. As implied in
(46) The sensors of the present disclosure can be employed in a variety of applications. For example, as mentioned above, the sensors can be used in methods for bio-sensing applications, pH sensing or Calcium ion sensing. The plasmonic particles can also be employed in methods for treating cancer. One such method comprises employing the plasmonic nanoparticle for enhancing light intensity for generation of reactive oxygen species (ROS) in light-induced destruction of malignant cancer cells. Such a method can comprise introducing a plurality of the plasmonic nanoparticles of the present disclosure into a patient to be treated for cancer and exciting the plasmonic particles with an illumination source so as to generate reactive ion species in the presence of cancer cells in the patient.
(47) The plasmonic nanoparticles of the present disclosure can be employed as nanosensors for use in nanosensor systems. Referring to
(48) Detection device 104 can include imaging components and/or any other components suitable for detecting light generated by the plasmonic nanoparticles. Such components can include filters to separate light generated by the plasmonic nanoparticle in response to excitation light from an appropriate illumination source 102 from any light from the illumination source 102 that is reflected from entity 108 and the plasmonic nanoparticle. In addition, filters can be used to separate a number of signals that are generated by the plasmonic nanoparticle or the plasmonic nanoparticle in combination with other elements for measuring characteristics of entity 108. Detection device 104 can include data collection equipment such as imaging camera or various types of spectrographic equipment.
EXAMPLES
Example 1
(49) The following examples are based on calculations performed using the Mie scattering theory with a vector spherical harmonic (VSH) model, as reported in Ru, E. L. et al., “Principles of Surface-Enhanced Raman Spectroscopy: and related plasmonic effects,” (Elsevier Science: 2008). The calculations were made based on bulk dielectric constants for Ag and Au at several wavelengths corresponding to optimal TPAF excitation of a PQD containing a 6 nm CdSe QD as a function of the noble metal film thicknesses and the dielectric permittivity of the spacer dielectrics (with silica and titania—with relative permittivities of 2.3 and 6.2—as the most promising candidates as practical dielectrics).
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Example 2
(51) Because nanoshells of thicknesses <3 nm may be difficult to fabricate reliably, alternate multilayered and multishelled nanostructures were explored with larger metal film thicknesses and relatively high EFEs. As shown in the preliminary calculations of
Example 3
(52) Another representative example of a composite nanoparticle, as illustrated in
Example 4
(53) Modelling as described in Example 1 was employed to estimate EFEs for plasmonic nanoparticles having various material combinations and the results are shown in Table 1. It is useful to point out that EFE's of over 5 were also obtained with several other metal-insulator combinations, including Pt, Pd, Ni, and Cu with appropriately chosen metal film and insulator thicknesses, permitting several choices of materials combinations for the proposed plasmonic quantum dots, although Au and titania are the preferred metal and insulator choices.
(54) TABLE-US-00002 TABLE 1 EFE's estimated for the highly uniform PQD structures corresponding to the simple near-ideal PQDs of FIG. 4A High Uniformity EFE @ Dielectric Metal Required λ = 800 nm EFE @ λ = 950 nm SiO.sub.2 Ag yes 8 5.5 SiO.sub.2 Au yes 7 4.5 TiO.sub.2 Ag yes 23 18
Example 5
(55) CdSe/ZnS QDs having a size variation of better than 5% were obtained commercially from Ocean Nanotech. These quantum dots were coated with silica using a coating technique described generally in the literature. The approach including using a reverse microemulsion where the QD, tetraethylorthosilicate (TEOS) and ammonia were localized within reverse micelles resulting in the growth of a silica layer on the QD. A TEM image of the silica-coated QDs from the inventors preliminary work is shown in
(56) All of the published documents recited in this disclosure are incorporated herein by reference in their entireties. If there is a conflict between any definition of a term recited in any of the incorporated documents and a term recited in this disclosure, the meaning of the term as determined by the text of this disclosure absent the incorporations by reference is controlling.
(57) Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the disclosure are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors necessarily resulting from the standard deviation found in their respective testing measurements. Moreover, all ranges disclosed herein are to be understood to encompass any and all sub-ranges subsumed therein.
(58) While the present teachings have been illustrated with respect to one or more implementations, alterations and/or modifications can be made to the illustrated examples without departing from the spirit and scope of the appended claims. In addition, while a particular feature of the present teachings may have been disclosed with respect to only one of several implementations, such feature may be combined with one or more other features of the other implementations as may be desired and advantageous for any given or particular function. Furthermore, to the extent that the terms “including,” “includes,” “having,” “has,” “with,” or variants thereof are used in either the detailed description and the claims, such terms are intended to be inclusive in a manner similar to the term “comprising.” Further, in the discussion and claims herein, the term “about” indicates that the value listed may be somewhat altered, as long as the alteration does not result in nonconformance of the process or structure to the illustrated embodiment. Finally, “exemplary” indicates the description is used as an example, rather than implying that it is an ideal.
(59) It will be appreciated that variants of the above-disclosed and other features and functions, or alternatives thereof, may be combined into many other different systems or applications. Various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompasses by the following claims.