MULTI-LAYER SUBSTRATE STRUCTURE WHICH CAN BE PEELED OFF PRECISELY AND A METHOD FOR MANUFACTURING THE SAME

Abstract

A multi-layer substrate structure which can be peeled off precisely includes: a substrate; a first flexible dielectric layer formed on the substrate; a peel-off layer formed on the first flexible dielectric layer; and a unit to be peeled off formed on the peel-off layer; wherein an adhesive force between the peel-off layer and the first flexible dielectric layer is smaller than an adhesive force between the first flexible dielectric layer and the substrate, and the substrate, the first flexible dielectric layer, the peel-off layer, and the unit to be peeled off together form the multi-layer substrate structure. A method for manufacturing a multi-layer substrate structure which can be peeled off precisely is also provided.

Claims

1. A multi-layer substrate structure which can be peeled off precisely, comprising: a substrate; a first flexible dielectric layer formed on the substrate; a peel-off layer formed on the first flexible dielectric layer; and a unit to be peeled off formed on the peel-off layer; wherein an adhesive force between the peel-off layer and the first flexible dielectric layer is smaller than an adhesive force between the first flexible dielectric layer and the substrate, and the substrate, the first flexible dielectric layer, the peel-off layer, and the unit to be peeled off together form the multi-layer substrate structure.

2. The multi-layer substrate structure according to claim 1, wherein the substrate is a single-layer substrate or a multi-layer substrate.

3. The multi-layer substrate structure according to claim 1, wherein the substrate is selected from the group consisting of a circuit board, a glass substrate, and a ceramic substrate.

4. The multi-layer substrate structure according to claim 1, wherein the substrate comprises at least one dielectric layer and at least one metal layer which are alternately stacked.

5. The multi-layer substrate structure according to claim 4, wherein the at least one metal layer is selected from the group consisting of a metal wiring layer, a power supply layer, and a ground layer.

6. The multi-layer substrate structure according to claim 4, wherein a material of the at least one dielectric layer of the substrate is polyimide.

7. The multi-layer substrate structure according to claim 1, wherein the unit to be peeled off comprises at least one flexible multi-layer substrate.

8. The multi-layer substrate structure according to claim 7, wherein the at least one flexible multi-layer substrate comprises at least one dielectric layer and at least one metal layer which are alternately stacked.

9. The multi-layer substrate structure according to claim 8, wherein the at least one metal layer is selected from the group consisting of a metal wiring layer, a power supply layer, and a ground layer.

10. The multi-layer substrate structure according to claim 1, wherein the unit to be peeled off comprises at least one second flexible dielectric layer.

11. The multi-layer substrate structure to claim 1, wherein a material of the first flexible dielectric layer is polyimide.

12. A method for manufacturing a multi-layer substrate structure which can be peeled off precisely, comprising: providing a substrate; forming a first flexible dielectric layer on the substrate; forming a peel-off layer on the first flexible dielectric layer, wherein an adhesive force between the peel-off layer and the first flexible dielectric layer is smaller than an adhesive force between the first flexible dielectric layer and the substrate; and forming a unit to be peeled off on the peel-off layer.

13. The method according to claim 12, wherein the substrate is selected from the group consisting of a circuit board, a glass substrate, and a ceramic substrate.

14. The method according to claim 12, wherein the substrate comprises at least one dielectric layer and at least one metal layer which are alternately stacked.

15. The method according to claim 14, wherein the at least one metal layer is selected from the group consisting of a metal wiring layer, a power supply layer, and a ground layer.

16. The method according to claim 14, wherein a material of the at least one dielectric layer of the substrate is polyimide.

17. The method according to claim 12, wherein the unit to be peeled off comprises at least one flexible multi-layer substrate.

18. The method according to claim 17, wherein the at least one flexible multi-layer substrate comprises at least one dielectric layer and at least one metal layer which are alternately stacked.

19. The method according to claim 18, wherein the at least one metal layer is selected from the group consisting of a metal wiring layer, a power supply layer, and a ground layer.

20. The method according to claim 12, wherein the unit to be peeled off comprises at least one second flexible dielectric layer.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0012] FIG. 1 illustrates that a flexible dielectric layer in a right portion is not removed in the prior art.

[0013] FIG. 2 illustrates that the flexible dielectric layer in the right portion is removed in the prior art.

[0014] FIG. 3 illustrates that a second flexible dielectric layer is not removed in the prior art.

[0015] FIG. 4 illustrates that the second flexible dielectric layer is removed in the prior art.

[0016] FIG. 5 illustrates a section diagram of a multi-layer substrate structure which can be peeled off precisely in accordance with an embodiment of the present disclosure.

[0017] FIG. 6 illustrates a flow chart of a method for manufacturing a multi-layer substrate structure which can be peeled off precisely in accordance with an embodiment of the present disclosure.

[0018] FIG. 7A to FIG. 7E illustrate a detailed flow chart of the method for manufacturing the multi-layer substrate structure in FIG. 5.

DETAILED DESCRIPTION OF DISCLOSURE

[0019] To make the objectives, technical schemes, and technical effects of the present disclosure clearer and more definitely, the present disclosure will be described in detail below by using embodiments in conjunction with the appending drawings. It should be understood that the specific embodiments described herein are merely for explaining the present disclosure, and as used herein, the term “embodiment” refers to an instance, an example, or an illustration but is not intended to limit the present disclosure. In addition, the articles “a” and “an” as used in the specification and the appended claims should generally be construed to mean “one or more” unless specified otherwise or clear from the context to be directed to a singular form. Also, in the appending drawings, the components having similar or the same structure or function are indicated by the same reference number.

[0020] Please refer to FIG. 5. FIG. 5 illustrates a section diagram of a multi-layer substrate structure which can be peeled off precisely in accordance with an embodiment of the present disclosure.

[0021] As shown in FIG. 5, the multi-layer substrate structure includes a substrate 500, a first flexible dielectric layer 502, a peel-off layer 504, and a unit 506 to be peeled off. The substrate 500, the first flexible dielectric layer 502, the peel-off layer 504, and the unit 506 to be peeled off together form the multi-layer substrate structure.

[0022] The substrate 500 can be a single-layer substrate or a multi-layer substrate. The substrate 500 can be selected from the group consisting of a circuit board, a glass substrate, and a ceramic substrate. A material of the substrate 500 is an organic material or an inorganic material.

[0023] The substrate 500 includes at least one dielectric layer and at least one metal layer which are alternately stacked. The at least one metal layer can be selected from the group consisting of a metal wiring layer (i.e., a signal layer), a power supply layer, and a ground layer. A material of the at least one dielectric layer of the substrate can be polyimide (PI).

[0024] The first flexible dielectric layer 502 is formed on the substrate 500. A material of the first flexible dielectric layer 502 can be polyimide.

[0025] The peel-off layer 504 is formed on the first flexible dielectric layer 502. An adhesive force between the peel-off layer 504 and the first flexible dielectric layer 502 is smaller than an adhesive force between the first flexible dielectric layer 502 and the substrate 500, so that at least one film layer on the peel-off layer 504 can be easily removed by tearing the peel-off layer 504. In detail, the at least one film layer on the peel-off layer 504 can be totally or partially and precisely removed by peeling off the peel-off layer 504.

[0026] The unit 506 to be peeled off is formed on the peel-off layer 504. A right portion A in the unit 506 to be peeled off is a portion required to be removed. A left portion B in the unit 506 to be peeled off is a portion required to be reserved. A dashed line C is a dividing line between the right portion A and the left portion B.

[0027] In one embodiment, the unit 506 to be peeled off includes at least one flexible multi-layer substrate. The at least one flexible multi-layer substrate includes at least one dielectric layer and at least one metal layer which are alternately stacked. The at least one metal layer can be selected from the group consisting of a metal wiring layer (i.e., a signal layer), a power supply layer, and a ground layer. A material of the at least one dielectric layer of the substrate can be polyimide (PI).

[0028] In another embodiment, the unit 506 to be peeled off includes at least one second flexible dielectric layer. A material of the at least one second flexible dielectric layer can be polyimide (PI).

[0029] In the multi-layer substrate structure shown in FIG. 5, when the unit 506 to be peeled off in the right portion A is required to be removed, the peel-off layer 504 is torn from a position between the peel-off layer 504 and the first flexible dielectric layer 502 to the dashed line C. Then, the peel-off layer 504 and the unit 506 to be peeled off in the right portion A are cut away along the dashed line C by a mechanical method or other methods. As such, an objective of precisely peeling off the peel-off layer 504 and the unit 506 to be peeled off in the right portion A can be achieved.

[0030] When the first flexible dielectric layer 502 in the right portion A is required to be removed, the first flexible dielectric layer 502 can be formed to be thin in advance. Then, the first flexible dielectric layer 502 is removed by a conventional dry etching method or a wet etching method.

[0031] Please refer to FIG. 6. FIG. 6 illustrates a flow chart of a method for manufacturing a multi-layer substrate structure which can be peeled off precisely in accordance with an embodiment of the present disclosure.

[0032] In step S60, a substrate is provided.

[0033] In step S62, a first flexible dielectric layer is formed on the substrate.

[0034] In step S64, a peel-off layer is formed on the first flexible dielectric layer, wherein an adhesive force between the peel-off layer and the first flexible dielectric layer is smaller than an adhesive force between the first flexible dielectric layer and the substrate.

[0035] In step S66, a unit to be peeled off is formed on the peel-off layer.

[0036] Please refer to FIG. 7A to FIG. 7E. FIG. 7A to FIG. 7E illustrate a detailed flow chart of the method for manufacturing the multi-layer substrate structure in FIG. 5.

[0037] In FIG. 7A, a substrate 700 is provided.

[0038] The substrate 700 can be a single-layer substrate or a multi-layer substrate. The substrate 700 can be selected from the group consisting of a circuit board, a glass substrate, and a ceramic substrate. A material of the substrate 700 is an organic material or an inorganic material.

[0039] The substrate 700 includes at least one dielectric layer and at least one metal layer which are alternately stacked. The at least one metal layer can be selected from the group consisting of a metal wiring layer (i.e., a signal layer), a power supply layer, and a ground layer. A material of the at least one dielectric layer of the substrate can be polyimide (PI).

[0040] In FIG. 7B, a first flexible dielectric layer 702 is formed on the substrate 700.

[0041] A material of the first flexible dielectric layer 702 can be polyimide.

[0042] In FIG. 7C, a peel-off layer 704 is formed on the first flexible dielectric layer 702.

[0043] An adhesive force between the peel-off layer 704 and the first flexible dielectric layer 702 is smaller than an adhesive force between the first flexible dielectric layer 702 and the substrate 700, so that at least one film layer on the peel-off layer 704 can be easily removed by tearing the peel-off layer 704. In detail, the at least one film layer on the peel-off layer 704 can be totally or partially and precisely removed by peeling off the peel-off layer 704.

[0044] In FIG. 7D, a unit 706 to be peeled off is formed on the peel-off layer 704.

[0045] In one embodiment, the unit 706 to be peeled off includes at least one flexible multi-layer substrate. The at least one flexible multi-layer substrate includes at least one dielectric layer and at least one metal layer which are alternately stacked. The at least one metal layer can be selected from the group consisting of a metal wiring layer (i.e., a signal layer), a power supply layer, and a ground layer. A material of the at least one dielectric layer of the substrate can be polyimide (PI).

[0046] In another embodiment, the unit 706 to be peeled off includes at least one second flexible dielectric layer. A material of the at least one second flexible dielectric layer can be polyimide (PI).

[0047] In FIG. 7E, the unit 706 to be peeled off in a right portion A is removed, and the unit 706 to be peeled off in a left portion B is reserved. A dashed line C is a dividing line between the right portion A and the left portion B.

[0048] In FIG. 7E, the peel-off layer 704 in the right portion A is torn from a position between the peel-off layer 704 and the first flexible dielectric layer 702. Then, the peel-off layer 704 and the unit 706 to be peeled off in the right portion A are cut away along the dashed line C by a mechanical method or other methods. As such, an objective of precisely peeling off the peel-off layer 704 and the unit 706 to be peeled off in the right portion A can be achieved.

[0049] When the first flexible dielectric layer 702 in the right portion A is required to be removed, the first flexible dielectric layer 702 can be formed to be thin in advance. Then, the first flexible dielectric layer 702 is removed by a conventional dry etching method or a wet etching method.

[0050] In the multi-layer substrate structure which can be peeled off precisely and the method for manufacturing the same, since the adhesive force between the peel-off layer and the first flexible dielectric layer is smaller than the adhesive force between the first flexible dielectric layer and the substrate, the at least one film layer on the peel-off layer can be totally or partially and precisely removed by peeling off the peel-off layer.

[0051] While the preferred embodiments of the present disclosure have been illustrated and described in detail, various modifications and alterations can be made by persons skilled in this art. The embodiment of the present disclosure is therefore described in an illustrative but not restrictive sense. It is intended that the present disclosure should not be limited to the particular forms as illustrated, and that all modifications and alterations which maintain the spirit and realm of the present disclosure are within the scope as defined in the appended claims.