DOUBLE-SIDE OR ONE-SIDE MACHINING MACHINE

Abstract

A machining machine comprises a first support disk, a first working disk coupled to the first support disk, and a counter bearing element positioned to define a working gap between the first working disk and the counter bearing element. The first working disk and the counter bearing element are configured to rotate relative to each other to machine at least one side of a flat workpiece. A pressure volume is positioned between the first support disk and the first working disk and is configured to hold a pressure fluid, which generates a pressure configured to deform the first working disk. One or more temperature-controlling channels are positioned within the first working disk and configured to hold a temperature-controlling fluid that is configured to control a temperature of the first working disk, wherein the one or more temperature-controlling channels are fluidly separate from the pressure volume.

Claims

1. A machining machine comprising: a first support disk; a first working disk coupled to the first support disk; a counter bearing element positioned to define a working gap between the first working disk and the counter bearing element, wherein the first working disk and the counter bearing element are configured to rotate relative to each other to machine at least one side of a flat workpiece; a pressure volume positioned between the first support disk and the first working disk, the pressure volume configured to hold a pressure fluid, wherein the pressure fluid generates a pressure configured to deform the first working disk; and one or more temperature-controlling channels positioned within the first working disk and configured to hold a temperature-controlling fluid that is configured to control a temperature of the first working disk, wherein the one or more temperature-controlling channels are arranged closer to the working gap than the pressure volume and are fluidly separate from the pressure volume.

2. The machining machine according to claim 1, wherein the counter bearing element is formed by a second working disk, wherein the first and second working disks are arranged coaxially to each other, and wherein the working gap is defined between the first and a second working disk.

3. The machining machine according to claim 1, wherein the first working disk is formed from two annular disks that are connected to each other, wherein the one or more temperature-controlling channels are formed between the two annular disks of the first working disk, and wherein one of the two annular disks borders the working gap.

4. The machining machine according to claim 1, wherein the one or more temperature-controlling channels form a channel labyrinth in the first working disk.

5. The machining machine according to claim 1, wherein at least one of: (1) the pressure fluid is supplied through a drive shaft connected to the first support disk; and (2) the one or more temperature-controlling channels receive and discharge temperature-controlling fluid through a drive shaft connected to the first support disk.

6. The machining machine according to claim 1, further comprising a distance measuring apparatus configured to determine at least one of: (1) a thickness of the working gap; and (2) a deformation of at least one of the first and the second working disk.

7. The machining machine according to claim 6, wherein the distance measuring apparatus comprises at least one distance measuring sensor configured to measure a distance between the first working disk and the first support disk in at least one place within the working gap.

8. The machining machine according to claim 6, wherein the distance measuring apparatus comprises at least two distance measuring sensors configured to measure a distance between the first working disk and the counter bearing element, wherein the distance is measured at least at two radially spaced points in the working gap.

9. The machining machine according to claim 8, wherein the distance measuring apparatus comprises at least one distance measuring sensor arranged in the first support disk that is configured to measure a distance to a top side of the pressure volume.

10. The machining machine according to claim 9, further comprising a regulation apparatus configured to control the pressure fluid delivered to the pressure volume depending on measurement data received by the distance measuring apparatus to create a predetermined geometry of the first working disk.

11. The machining machine according to claim 1, when the counter bearing element is configured for a global deformation.

12. The machining machine according to claim 10, wherein the regulation apparatus is configured to control the global deformation of the counter bearing element.

13. The machining machine according to claim 11, wherein the counter bearing element is a second working disk fastened to a second support disk, wherein the second support disk is suspended from a support ring that is configured to deform the second working disk.

14. The machining machine according to claim 13, wherein a control element is positioned between the support ring and a ring section of the second support disk lying radially to an outside of the support ring, wherein a radial force is applied over a perimeter of the support ring to the second support disk using a force generator, and wherein the regulation apparatus is configured to adjust the radial force applied by the force generator depending on one of (1) the distance values measured by the distance measuring apparatus, and (2) the pressure values measured by a measuring apparatus.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Exemplary embodiments of the invention are explained in greater detail below based on figures. Schematically:

[0039] FIG. 1 illustrates a sectional view of a portion of an embodiment of a double-side machining machine;

[0040] FIG. 2 illustrates a sectional view of a portion of another embodiment of a double-side machining machine; and

[0041] FIG. 3 illustrates a sectional view of a portion of still another embodiment of a double-side machining machine.

[0042] The same reference numbers refer to the same objects in the figures unless indicated otherwise.

DETAILED DESCRIPTION OF THE INVENTION

[0043] The double-side machining machine depicted merely as an example in FIG. 1 has an annular first, bottom support disk 12 and a second, top support disk 10 that is also annular. An annular first, bottom working disk 16 is fastened to the bottom support disk 12, and a second, top working disk 14 that is also annular is fastened to the top support disk 10. Between the annular working disks 14, 16, an annular working gap 18 is formed in which flat workpieces such as wafers are machined on both sides during operation. The double-side machining machine can for example be a polishing machine, lapping machine, or a grinding machine.

[0044] The top support disk 10, and with it the top working disk 14, and/or the bottom support disk 12 and with it the bottom working disk 16, can be rotatably driven relative to each other by a suitable drive apparatus comprising for example a top drive shaft, and/or a bottom drive shaft, as well as at least one drive motor. The drive apparatus is known per se and will not be described further for reasons of clarity. In a manner which is also known per se, the workpieces to be machined can be held to float in rotor disks in the working gap 18. By suitable kinematics, for example planetary kinematics, it can be ensured that the rotor disks also rotate through the working gap 18 during the relative rotation of the support disks 10, 12, or respectively working disks 14, 16. A control and/or regulation apparatus 20 controls, or respectively regulates the operation of the double-side machining machine. Moreover, three distance measuring sensors illustrated by arrows 22, 24, 26 are provided in the portrayed example that measure the distance between the working disks 14, 16 at three radially spaced points of the working gap 18. The measurement data from the distance measuring sensors 22, 24, 26 are provided to the control and/or regulation apparatus 20 that uses this measurement data to control, or respectively regulate the double-side machining machine.

[0045] In the example shown in FIG. 1, labyrinth-like temperature-controlling channels 28 are provided within the bottom working disk 16. The temperature-controlling channels 28 are connected by a feed 30 and a discharge 32, for example via a drive shaft driving the bottom support disk 12 and the bottom working disk 16, to a temperature-controlling fluid supply. By means of the control and/or regulation apparatus 20, for example a predetermined temperature value of the temperature-controlling fluid can be regulated at the inlet and/or at the outlet of the temperature-controlling channels, or a predetermined temperature difference can be regulated between the temperature present at the inlet and that at the outlet of the temperature-controlling channels by correspondingly adjusting the temperature of the temperature-controlling fluid. In the shown example, labyrinthine temperature-controlling channels 34 are also formed in the top working disk 14 that are also connected to a temperature-controlling fluid supply via a feed and discharge (not shown). In an embodiment, the feed and discharge are similar to that shown in the bottom working disk 16. This temperature-controlling fluid supply is also controlled by the control and/or regulation apparatus 20. By supplying the temperature-controlling channels 28, or respectively 34 with a temperature-controlling fluid, for example a coolant such as water, heating of the working disks 14, 16 and transfer of heat into the support disks 10, 12 can be effectively counteracted so that corresponding changes in geometry are reduced.

[0046] Moreover, a pressure volume 36 that is annular in the shown example is formed between the bottom support disk 12 and the bottom working disk 16 and is connected via a feed 38, for example also via a drive shaft driving the bottom support disk 12 and the bottom working disk 16, to a pressure fluid supply. In addition, an additional distance measuring sensor 27 is arranged in the bottom support disk 10 that measures the distance to the top side of the pressure volume 36. The measurement data from this distance measuring sensor 27 are also applied to the control and/or regulation apparatus 20. The pressure fluid supply is also actuated by the control and/or regulation apparatus 20. By correspondingly introducing pressure fluid into the pressure volume 28, a local deformation of the bottom working disk 16 can be created, in particular a local concave or convex deformation as described in principle in DE 10 2016 102 223 A1.

[0047] As can be seen in FIG. 1, the temperature-controlling channels 28 are arranged closer to the working gap 18 than the pressure volume 36. Moreover, the duct systems of the pressure volume 36 and the temperature-controlling channels 28 are not connected to each other, but are instead separately controllable, or respectively regulatable.

[0048] The exemplary embodiment shown in FIG. 2 largely corresponds to the exemplary embodiment shown in FIG. 1. It only differs in terms of the configuration of the bottom working disk 16′ that, in the example shown in FIG. 2, is formed from two annular disks 40, 42 that are fastened to each other. The temperature-controlling channels 28 are configured in the manner of a sandwich construction between the disks 40, 42. In this manner, the temperature of the bottom working disk 16′ can be controlled very effectively.

[0049] The exemplary embodiment shown in FIG. 3 also largely corresponds to the exemplary embodiment shown in FIG. 2, wherein in contrast to the exemplary embodiment according to FIG. 2, another bottom support disk 12′ is arranged between the bottom support disk 12 and the bottom working disk 16′ and is connected on the one hand to the bottom support disk 12 and on the other hand to the bottom working disk 16′. In the exemplary embodiment according to FIG. 3, labyrinthine temperature-controlling channels 44 are also formed in the bottom support disk 12′ supporting the bottom working disk 16′ and are connected via a connecting line 46 to the temperature-controlling channels 28 formed in the bottom working disk 16′, and are connected via the same feed 30 and discharge 32 to the temperature-controlling fluid supply. By means of these additional temperature-controlling channels 44 in the bottom support disk 12′, heat transfer from the bottom working disk 16′ to the bottom support disk 12 is more effectively prevented.

LIST OF REFERENCE SIGNS

[0050] 10 Second support disk [0051] 12 First support disk [0052] 12′ First support disk [0053] 14 Second working disk [0054] 16 First working disk [0055] 16′ First working disk [0056] 18 Working gap [0057] 20 Control and/or regulation apparatus [0058] 22 Distance measuring sensor [0059] 24 Distance measuring sensor [0060] 26 Distance measuring sensor [0061] 27 Distance measuring sensor [0062] 28 Temperature-controlling channels [0063] 30 Feed [0064] 32 Discharge [0065] 34 Temperature-controlling channels [0066] 36 Pressure volume [0067] 38 Feed [0068] 40 Disk [0069] 42 Disk [0070] 44 Temperature-controlling channels [0071] 46 Connecting line