Writer with Laterally Graded Spin Layer MsT
20220093123 · 2022-03-24
Inventors
- Ying Liu (San Jose, CA)
- Shohei Kawasaki (Sunnyvale, CA, US)
- Wenyu Chen (San Jose, CA, US)
- Yuhui Tang (Milpitas, CA, US)
Cpc classification
G11B5/3916
PHYSICS
G11B5/3912
PHYSICS
G11B5/3163
PHYSICS
Y10T29/49034
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G11B5/314
PHYSICS
International classification
Abstract
A spin transfer torque reversal assisted magnetic recording (STRAMR) writer is disclosed wherein a spin torque oscillator has a flux guiding layer (FGL) wherein magnetization flips to a direction substantially opposing the write gap (WG) field when sufficient current (I.sub.B) density is applied across the STO between a trailing shield and main pole (MP) thereby enhancing the MP write field. A key feature is that the FGL has a center portion with a larger magnetization saturation×thickness (MsT) than in FGL outer portions proximate to STO sidewalls. Accordingly, lower I.sub.B density is necessary to provide a given amount of FGL magnetization flipping and there is reduced write bubble fringing compared with writers having a FGL with uniform MsT. Lower MsT is achieved by partially oxidizing FGL outer portions. In some embodiments, there is a gradient in outer FGL portions where MsT increases with increasing distance from FGL sidewalls.
Claims
1. A spin torque magnetization reversal assisted magnetic recording (STRAMR) writer, comprising: (a) a main pole (MP) comprised of a trailing side having a track width w at an air bearing surface (ABS); (b) a write gap (WG) formed on the MP trailing side; (c) a first trailing shield (TS) on the WG and having a first side facing the MP; and (d) a spin torque oscillator (STO) formed in the WG between the MP trailing side and first side of the first TS, and comprising a flux guiding layer (FGL) with a magnetization aligned substantially parallel to a WG field (H.sub.WG) in the absence of an applied current across the STO, and wherein the STRAMR writer is configured so that the FGL magnetization flips to a direction substantially opposing H.sub.WG when a current I.sub.B of sufficient magnitude is applied from the first TS across the STO to the MP, the FGL comprises: (1) a center portion having a first saturation magnetization×thickness product (MsT.sub.1) and a first cross-track width w1 between two sides thereof; and (2) an outer portion adjoining each side of the FGL center portion and having a second cross-track width w2, and a second saturation magnetization×thickness product (MsT.sub.2) where MsT.sub.2<MsT.sub.1.
2. The STRAMR writer of claim 1 wherein a sum (2w2+w1) is less than or equal to the track width of the MP trailing side.
3. The STRAMR writer of claim 1 wherein MsT.sub.1 is from 1 nm×Tesla (nmT) to 14 nmT.
4. The STRAMR writer of claim 1 wherein w1 is from about 5 nm to 50 nm, and w2 is from about 5 nm to 20 nm.
5. The STRAMR writer of claim 1 wherein MsT.sub.2 is from 1 nmT to 8 nmT.
6. The STRAMR writer of claim 1 wherein the FGL center portion is an unoxidized magnetic layer, and each FGL outer portion is an oxidized magnetic layer.
7. The STRAMR writer of claim 6 wherein an oxygen content in each FGL outer portion is a continuous gradient such that the oxygen content decreases and MsT.sub.2 increases with increasing distance from a FGL sidewall up to the FGL center portion.
8. The STRAMR writer of claim 1 wherein MsT.sub.2 is substantially uniform within each FGL outer portion.
9. The STRAMR writer of claim 1 wherein the STO further comprises a non-spin preserving layer (pxL) contacting the MP trailing side, and a spin preserving layer (ppL) adjoining the first side of the first TS to give a pxL/FGL/ppL STO configuration.
10. The STRAMR writer of claim 1 wherein the STO further comprises a first non-magnetic spacer (NM1) between the MP trailing side and a first side of the FGL, a second non-magnetic spacer (NM2) on a second side of the FGL, and a spin polarization (SP) layer on the NM2 to give a NM1/FGL/NM2/SP STO configuration.
11. The STRAMR writer of claim 1 wherein the FGL comprises one or more of layers of Ni.sub.xFe.sub.100-x, Co.sub.yFe.sub.100-y, Co.sub.zNi.sub.100-z, and where x, y, and z are from 0 atomic % to 100 atomic %, or alloys thereof with one or more additional elements.
12. The STRAMR writer of claim 9 wherein the pxL is a single layer or multilayer of one or more of Ta, W, Pt, Ru, Ti, and Pd so that spin polarized electrons in the applied current I.sub.B transiting the pxL will have a spin polarization randomized by spin flipping scattering.
13. The STRAMR writer of claim 9 wherein the ppL is Cu, Ag, Au, Al, or Cr, or an alloy thereof in which electrons in the applied current I.sub.B will substantially retain a spin polarization when traversing the ppL.
14. The STRAMR writer of claim 1 wherein the STO has a front side that is exposed at the ABS or is recessed behind the ABS to a height of 2 nm to 100 nm.
15. A head gimbal assembly (HGA), comprising: (a) the STRAMR writer of claim 1; and (b) a suspension that elastically supports the STRAMR writer, wherein the suspension has a flexure to which the STRAMR writer is joined, a load beam with one end connected to the flexure, and a base plate connected to the other end of the load beam.
16. A magnetic recording apparatus, comprising: (a) the HGA of claim 15; (b) a magnetic recording medium positioned opposite to a slider on which the STRAMR writer is formed; (c) a spindle motor that rotates and drives the magnetic recording medium; and (d) a device that supports the slider, and that positions the slider relative to the magnetic recording medium.
17. A method of forming a spin torque magnetization reversal assisted magnetic recording (STRAMR) writer, comprising: (a) providing a main pole (MP) with a trailing side having a track width w at a first plane, a side gap adjoining a side of the MP on each side of a center plane that is orthogonal to the first plane and bisects the MP trailing side, and a side shield adjoining a side of each side gap that faces away from the center plane; (b) depositing a spin torque oscillator (STO) stack of layers comprising a flux guiding layer (FGL) that has a switchable magnetization, the STO stack is formed on the MP trailing side, side gaps, and side shields; (c) patterning the STO stack of layers in a cross-track direction such that the FGL has a sidewall on each side of the center plane; (d) performing an oxidation process to form FGL outer portions that are oxidized and each having a cross-track width w2, a saturation magnetization×thickness (MsT.sub.2) and bounded by the FGL sidewall on an outer side, and a center unoxidized FGL portion having cross-track width w1 and a saturation magnetization×thickness (MsT.sub.1) between the FGL outer portions, wherein MsT.sub.1>MsT.sub.2; (e) depositing a write gap (WG) on the side gaps and side shields, and that adjoins the FGL sidewalls; and (f) forming an air bearing surface (ABS) at the first plane.
18. The method of claim 17 wherein a sum (2w2+w1) is less than or equal to the track width of the MP trailing side.
19. The method of claim 17 wherein MsT.sub.1 is from 1 nm×Tesla (nmT) to 14 nmT, and MsT.sub.2 is from 1 nmT to 8 nmT.
20. The method of claim 17 wherein w1 is from about 5 nm to 50 nm, and w2 is from about 5 nm to 20 nm.
21. The method of claim 17 wherein an oxygen content in each oxidized FGL outer portion is a continuous gradient such that the oxygen content decreases and MsT.sub.2 increases with increasing distance from each FGL sidewall up to the cross-track width w2.
22. The method of claim 17 wherein MsT.sub.2 and an oxygen content are substantially uniform within each oxidized FGL outer portion.
23. The method of claim 17 wherein the STO further comprises a non-spin preserving layer (pxL) contacting the MP trailing side, and a spin preserving layer (ppL) adjoining a first side of a first trailing shield (TS) to give a pxL/FGL/ppL STO configuration.
24. The method of claim 17 wherein the STO further comprises a first non-magnetic spacer (NM1) between the MP trailing side and a first side of the FGL, a second non-magnetic spacer (NM2) on a second side of the FGL, and a spin polarization (SP) layer on the NM2 to give a NM1/FGL/NM2/SP STO configuration.
25. The method of claim 17 wherein the FGL comprises one or more of layers of Ni.sub.xFe.sub.100-x, Co.sub.yFe.sub.100-y, Co.sub.zNi.sub.100-z, and where x, y, and z are from 0 atomic % to 100 atomic %, or alloys thereof with one or more additional elements.
26. The method of claim 23 wherein the pxL is a single layer or multilayer that is one or more of Ta, W, Pt, Ru, Ti, and Pd so that spin polarized electrons in an applied current across the STO, and from the first TS to the MP trailing side will have a spin polarization randomized by spin flipping scattering when transiting the pxL.
27. The method of claim 23 wherein the ppL is Cu, Ag, Au, Al, or Cr, or an alloy thereof in which electrons in an applied current across the STO and from the first TS to the MP trailing side will substantially maintain a spin polarization when traversing the ppL.
28. The method of claim 17 wherein the oxidation process is a natural oxidation (NOX) process.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0015]
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DETAILED DESCRIPTION
[0028] The present disclosure is a writer structure wherein a STO device that enables both of a STRAMR assist from FGL magnetization flipping, and a MAMR assist for writing on adjacent magnetic bits in a magnetic medium, is formed between a main pole and a trailing shield. The FGL has a center portion with a greater MsT than in FGL outer portions. In the drawings, the y-axis is in a cross-track direction, the z-axis is in a down-track direction, and the x-axis is in a direction orthogonal to the ABS and towards a back end of the writer structure. Thickness refers to a down-track distance, width is a cross-track distance, and height is a distance from the ABS in the x-axis direction. In some of the drawings, a magnetic bit is considerably enlarged over actual size in order to more easily depict a magnetization therein. The term “higher degree of flipping” means that FGL magnetization is flipped closer to a direction that is pointing to the MP trailing side (anti-parallel to the WG magnetic field). The terms STO, STO device, and STO structure may be used interchangeably. Also, the terms density and magnitude may be used interchangeably when referring to applied current that flips FGL magnetization.
[0029] Referring to
[0030] HGA 100 is mounted on an arm 230 formed in the head arm assembly 103. The arm moves the magnetic recording head 101 in the cross-track direction y of the magnetic recording medium 140. One end of the arm is mounted on base plate 224. A coil 231 that is a portion of a voice coil motor is mounted on the other end of the arm. A bearing part 233 is provided in the intermediate portion of arm 230. The arm is rotatably supported using a shaft 234 mounted to the bearing part 233. The arm 230 and the voice coil motor that drives the arm configure an actuator.
[0031] Next, a side view of a head stack assembly (
[0032] With reference to
[0033] Referring to
[0034] A magnetoresistive (MR) element also known as MR sensor 6 is formed on bottom shield 4 at the ABS 30-30 and typically includes a plurality of layers (not shown) including a tunnel barrier formed between a pinned layer and a free layer where the free layer has a magnetization (not shown) that rotates in the presence of an applied magnetic field to a position that is parallel or antiparallel to the pinned layer magnetization. Insulation layer 5 adjoins the backside of the MR sensor, and insulation layer 3 contacts the backsides of the bottom shield and top shield 7. The top shield is formed on the MR sensor. An insulation layer 8 and a top shield (S2B) layer 9 are sequentially formed on the top magnetic shield. Note that the S2B layer 9 may serve as a flux return path (RTP) in the write head portion of the combined read/write head. Thus, the portion of the combined read/write head structure formed below layer 9 in
[0035] The present disclosure anticipates that various configurations of a write head may be employed with the read head portion. In the exemplary embodiment, magnetic flux 70 in MP 14 is generated with flowing a current through bucking coil 60a-c and driving coil 61a-c that are below and above the MP, respectively, and are configured in a 1+1T design. The bucking coil and driving coil each have a front portion 60a and 61a, respectively, middle portion 60c and 61c, respectively, that are connected through interconnect 51, and each have back portions 60b and 61b, respectively, that are each connected to a writer pad (not shown).
[0036] Magnetic flux 70 exits the MP at pole tip 14p at the ABS 30-30 and is used to write a plurality of bits on magnetic media 140. Magnetic flux 70b returns to the MP through a trailing loop comprised of trailing shields 17, 18, uppermost (PP3) trailing shield 26, and top yoke 18x. There is also a leading return loop for magnetic flux 70a that includes leading shield 11, leading shield connector (LSC) 33, S2 connector (S2C) 32, return path (RTP) 9, and back gap connection (BGC) 52. The magnetic core may also comprise a bottom yoke 35 below the MP. Dielectric layers 10, 13, 37-39, 42, 43, and 45 are employed as insulation layers around magnetic and electrical components. A protection layer 27 covers the PP3 TS and is made of an insulating material such as alumina. Above the protection layer and recessed a certain distance u from the ABS 30-30 is an optional cover layer 29 that is preferably comprised of a low coefficient of thermal expansion (CTE) material such as SiC. Overcoat layer 28 is formed as the uppermost layer in the write head. In other embodiments (not shown), the leading return loop is shortened with the removal of the BGC, or by removing the BGC, RTP, S2C, and LSC to force more return flux 70b through the trailing loop.
[0037] Referring to
[0038] STO device 22 features a lower non-spin preserving layer (pxL) 21 on MP trailing side 14t1, a middle flux guiding layer (FGL) 20, and an upper spin preserving layer (ppL) 19. The pxL is a single layer or multilayer that is typically one or more of Ta, W, Pt, Ru, Ti, or Pd so that spin polarized electrons transiting the pxL will have their spin polarization randomized by spin flipping scattering. Moreover, the pxL is sufficiently thick so that the MP and FGL are not magnetically coupled. The ppL is a conductive layer and is preferably comprised of Cu, Ag, Au, Al, or Cr, or an alloy thereof in which electrons in applied current I.sub.B (
[0039] In the exemplary embodiment, STO width w is essentially equivalent to the track width of the MP trailing side 14t1 at plane 41-41. However, in other embodiments (not shown), width w may be less than the MP track width. Preferably, STO width is at least 10 nm.
[0040] Referring to
[0041] As described in a later section with regard to
[0042] In
[0043] In
[0044]
[0045] Current I.sub.B is applied from a direct current (DC) source 50 through lead 58 and first TS 17, and across STO 22 from first TS side 17b to MP trailing side 14t1, and exits MP 14 through a second lead 57. Note that the flow of electrons is opposite to the I.sub.B direction and is from the MP to the first TS. It should be understood that the electrical current (I.sub.B) direction required for the FGL to provide a STRAMR assist is from TS shield.fwdarw.spin preserving layer.fwdarw.FGL.fwdarw.non-spin preserving layer.fwdarw.MP. Furthermore, the I.sub.B direction is independent of the gap field direction. Thus, the I.sub.B direction stays the same when the write field (and H.sub.WG) is switched to the opposite direction in order to write a transition.
[0046] STO device 22 is configured so that sufficient spin torque (not shown) is exerted on FGL 20 (from backscattered electrons from the first TS) to flip the FGL magnetization. The flipping mechanism is based on the behavior of electrons with spins parallel and anti-parallel to the moment in the first TS. The portion of electrons having a moment that is parallel to TS magnetization 17m is able to enter first TS 17 with very little resistance. However, electrons with a moment that is anti-parallel to first TS magnetization proximate to side 17b do not enter the first TS easily because of less unoccupied states in the first TS, and are backscattered to the FGL. As a result, spin torque is exerted on FGL magnetization 20m, and the FGL magnetization is flipped to a direction primarily oriented toward MP trailing side 14t1.
[0047] The degree of FGL magnetization flipping is determined by the magnitude of I.sub.B current density. A higher degree of flipping means that cone angle β is smaller and provides a greater STRAMR assist (lower MAMR assist) than at a lower I.sub.B current density that gives a lower degree of flipping. Improved STO devices are desired where a lower I.sub.B current density is required to provide a given amount (degree) of FGL magnetization flipping so that an improved STRAMR assist is realized with a minimum amount of write bubble fringing. Accordingly, there will be less STO device heating (better stability) and better EWAC performance while maintaining high TPI capability. This objective is achieved in STO 22 because outer FGL portions have a lower MsT than in the FGL center portion (MsT.sub.2<MsT.sub.1) thereby allowing FGL magnetization flipping at a lower I.sub.B current density than in the prior art where the FGL has a uniform MsT throughout the layer.
[0048] According to another embodiment of the present disclosure illustrated in
[0049] In
[0050] Referring to
[0051] The present disclosure also anticipates that other STO configurations may be employed rather than STO 22 and STO 22-1 described previously. For example, in related U.S. Pat. No. 10,490,216, a STO is disclosed where two spin polarization layers apply spin torque to a FGL from opposite sides. The spin torques are additive and create a larger spin torque than achieved with a single SP layer so that the I.sub.B current density is reduced for FGL magnetization flipping, or there is a greater FGL magnetization flipping at the same I.sub.B current density.
[0052] A magneto-static modeling study was performed to compare three writers with simplified assumptions. Head 1 is a process of record (POR) writer with a STO where the entire FGL has a MsT of 16 nmT, and assuming magnetization in the entire FGL is flipped. Head 2 is the POR writer with the assumption that only the center 20 nm width portion of the FGL is 100% flipped while a 10 nm outer FGL on each side of the center portion is not flipped at all. Head 3 is a writer according to an embodiment of the present disclosure where a center FGL portion that is 20 nm wide has MsT.sub.1=16 nmT, outer FGL portions that are each 10 nm wide have a MsT.sub.2=8 nmT, and magnetization in the entire FGL is flipped. Although the deep gap field is not uniform across the cross-track direction (gap field in the center is significantly larger than gap field off the center), the FGL in the new STO design (Head 3) will be substantially easier to flip than a FGL in a conventional STO (POR) writer. Thus, the actual behavior of the POR writer will be close to Head 2 and the actual behavior of the STO design in the present disclosure will be close to Head 3.
[0053]
[0054] The present disclosure also encompasses a process sequence for fabricating a STO comprised of a FGL having outer portions with a MsT less than a MsT in a FGL center portion. According to one embodiment of the present disclosure depicted in
[0055] Referring to
[0056] Referring to
[0057] In
[0058] While the present disclosure has been particularly shown and described with reference to, the preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made without departing from the spirit and scope of this disclosure.