SUSCEPTOR OF A CVD REACTOR

Abstract

A susceptor for a CVD reactor includes a bearing surface for supporting a substrate holder. A carrier gas is fed into an inner radial zone, in order to floatingly cushion a substrate holder supported above the bearing surface. The gas fed into the inner radial zone leaves a second radial zone through discharge channels and to a slight extent through a gap surrounding the second radial zone and assigned to a third radial zone. The cross-sectional area of the discharge channels and the radial length of the gap are dimensioned such that the volumetric flow of the gas through the discharge channels is greater than through the gap if the latter has a gap height of 200 μm.

Claims

1. A susceptor (1), comprising: a circular disc-shaped substrate holder (2); and a bearing surface (7) with a circular outline, for supporting the circular disc-shaped substrate holder (2) in a fashion that allows the circular disc-shaped substrate holder (2) to rotate about a center (Z) of the bearing surface (7), wherein the bearing surface (7) has a first radial zone (11), in which at least one gas distribution channel (4) fluidly coupled to a gas supply line (3) extends, a second radial zone (12), which is radially offset from the first radial zone (11) with respect to the center (Z), and which forms a gas discharge system with one or more discharge channels (6), and a third radial zone (13), which surrounds the first radial zone (11) and the second radial zone (12), and forms a gap (9) between the bearing surface (7) and the substrate holder (2), which gap (9) is directly adjacent to a radially outer edge of the bearing surface (7), wherein the first, second and third radial zones (11, 12, 13) are configured such that a gas flow fed into the first radial zone (11) through the gas supply line (3) generates a pressure in a volume between the bearing surface (7) and a lower face (2′) of the substrate holder (2), which pressure holds the substrate holder (2) in a floating state, and which gas flow leaves the volume through the gas discharge system and through the gap (9), and wherein a cross-sectional area of the one or more discharge channels (6) and a radial length of the gap (9) are dimensioned such that a gas volumetric flow rate through the gas discharge system is greater than that through the gap (9) with a gap height of 300 μm.

2. A susceptor (1), comprising: a circular disc-shaped substrate holder (2); and a bearing surface (7) with a circular outline, for supporting the circular disc-shaped substrate holder (2) in a fashion that allows the circular disc-shaped substrate holder (2) to rotate about a center (Z) of the bearing surface (7), wherein the bearing surface (7) has a first radial zone (11), in which at least one gas distribution channel (4) fluidly coupled to a gas supply line (3) extends, a second radial zone (12), which is radially offset from the first radial zone (11) with respect to the center (Z) and which has a gas collection channel (5) formed by a recess, from which discharge channels (6) open into the gas collection channel (5) away from the bearing surface (7), and a third radial zone (13), which forms an annular surface (10) surrounding the first radial zone (11) and the second radial zone (12), and forming a radially outer edge of the bearing surface (7), which in a radially inward direction, is adjacent to the gas collection channel (5), and wherein the annular surface (10) has a radial length of at least 4 mm with respect to the center (Z), and the discharge channels (6) comprise at least four bores with respective diameters of at least 2 mm.

3. The susceptor (1) of claim 1, wherein the third radial zone (13) is formed by an annular surface (10) with a radial length of at least 4 mm, which in a radially inward direction is adjacent to a gas collection channel (5) formed by a recess

4. The susceptor (1) of claim 3, wherein at least one of: the bearing site (7) is bounded in a radially outward direction by a step (15) or cover plate (15′), or the annular surface (10) is flat.

5. The susceptor (1) of claim 1, wherein the discharge channels (6) terminate on a rear face (14) of the susceptor (1) opposite the bearing surface (7), on an edge face (16) of the susceptor (1), or on a broad surface (17) of the susceptor (1) adjacent to the bearing surface (7).

6. The susceptor (1) of claim 1, wherein the respective diameters and a total number of the discharge channels (6) are selected such that the following relationship is satisfied: $n.Math.r^4>\frac{2.Math.d.Math.I_a}{3.Math.I_s}.Math.h^3$ where wherein r represents a radius of each of the discharge channels (6), l.sub.arepresents a length of each of the discharge channels (6), n represents the total number of the discharge channels (6), d represents a diameter of the third edge zone (13), l.sub.s represents a radial length of the gap (9), h represents a maximum height of the gap (9), and wherein a left-hand side of the relationship is at least ten times as large as a right-hand side of the relationship.

7. The susceptor (1) of claim 3, wherein the substrate holder (2) has in a radially outer region extending congruently with the third radial zone (13), an annular and flat, edge surface (20), which, together with the annular surface (10) of the third radial zone (13), bound the gap (9) with a constant gap height.

8. The susceptor (1) of claim 1, wherein the gap (9) is formed by two congruent, annular surfaces.

9. The susceptor (1) of claim 1, wherein the annular surface (10) forming the radially outer edge of the bearing surface (7), and a corresponding edge surface (20) of the substrate holder (2) have intermeshing annular structures, which are formed as an annular rib (24) engaging in an annular groove (25).

10. A method of utilizing the susceptor (1) of claim 1, the method comprising feeding the gas flow into the volume between the bearing surface (7) and the lower face (2′) of the substrate holder (2), wherein the feeding of the gas flow generates the pressure, which holds the substrate holder (2) in the floating state.

11. A chemical vapor deposition (CVD) reactor, comprising: a process chamber arranged in a housing (23); a gas inlet unit (22) opening into the process chamber for feeding process gases into the process chamber; the susceptor (1) of claim 1 disposed in the housing (23); and a heating device (21) for heating the susceptor (1).

12. (canceled)

13. The susceptor (1) of claim 3, wherein the discharge channels (6) comprise at least four bores that open into the gas collection channel (5) away from the bearing surface (7), and have respective diameters of at least 2 mm.

14. The susceptor (1) of claim 2, wherein at least one of: the bearing site (7) is bounded in a radially outward direction by a step (15) or cover plate (15′), or the annular surface (10) is flat.

15. The susceptor (1) of claim 2, wherein the discharge channels (6) terminate on a rear face (14) of the susceptor (1) opposite the bearing surface (7), on an edge face (16) of the susceptor (1), or a broad surface (17) of the susceptor (1) adjacent to the bearing surface (7).

16. The susceptor (1) of claim 2, wherein the annular surface (10) forming the radially outer edge of the bearing surface (7), and a corresponding edge surface (20) of the substrate holder (2) have intermeshing annular structures, which are formed as an annular rib (24) engaging in an annular groove (25).

17. A method of utilizing the susceptor (1) of claim 2, the method comprising feeding gas flow into a volume between the bearing surface (7) and a lower face (2′) of the substrate holder (2), wherein the feeding of the gas flow generates a pressure, which holds the substrate holder (2) in a floating state.

18. A chemical vapor deposition (CVD) reactor, comprising: a process chamber arranged in a housing (23); a gas inlet unit (22) opening into the process chamber for feeding process gases into the process chamber; the susceptor (1) of claim 2 disposed in the housing (23); and a heating device (21) for heating the susceptor (1).

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Examples embodiments of the invention are explained below with reference to the accompanying drawings. Here:

[0016] FIG. 1 shows a plan view onto a susceptor in accordance with the invention, with twelve bearing surfaces 7 arranged on a circular arc line around the center of the susceptor, in each case for the support of a substrate,

[0017] FIG. 2 shows in an enlarged view a section along the line II-II in FIG. 1,

[0018] FIG. 3 shows in an enlarged view the detail III in FIG. 1,

[0019] FIG. 4 shows a segment in a three-dimensional illustration along a section line II-II in FIG. 1,

[0020] FIG. 5 shows a schematic sectional illustration through a substrate holder 2, which lies in a pocket of a susceptor 1 of a first example embodiment,

[0021] FIG. 6 shows an illustration as in FIG. 5 of a second example embodiment,

[0022] FIG. 7 shows an illustration as in FIG. 5 of a third example embodiment,

[0023] FIG. 8 shows schematically the arrangement of a susceptor arrangement 1, 2 in a CVD reactor with a housing 23,

[0024] FIG. 9 shows an illustration as in FIG. 4 of a fourth example embodiment,

[0025] FIG. 10 shows an illustration as in FIG. 4 of a fifth example embodiment, and

[0026] FIG. 11 shows an illustration as in FIG. 5 of a further example embodiment.

DETAILED DESCRIPTION

[0027] The inventive susceptor 1 is used in a CVD reactor, in particular an MOCVD reactor, as illustrated in FIG. 8. In a housing 23, which can be evacuated, is located a process chamber, into which process gases are fed by means of a gas inlet unit 22. The process gases are fed into a center of the process chamber, the floor of which is formed by a broad surface of the susceptor 1 facing upwards. The susceptor can have the shape illustrated in FIG. 1, that is to say, it can have, for example, twelve bearing surfaces 7, arranged at regular intervals around the center, wherein each bearing surface 7 is designed as a pocket. The pocket can consist of a recess in the susceptor 1 made of graphite. However, it is also possible to form the pockets from cover plates, which form circular openings.

[0028] The susceptor 1 is heated from below by means of a heating device 21, such that heat flows through the susceptor 1, into the substrate holder 2, through the substrate holder 2 to a substrate 19 lying on the substrate holder 2, so as to bring the substrate surface up to a process temperature at which process gases fed through the gas inlet unit 22 decompose on the substrate surface, such that a single-crystalline layer, in particular a III-V-layer, is deposited there. For this purpose, organometallic compounds of an element of the III-main group or hydrides of elements of the V-main group are fed through the gas inlet unit 22, together with a carrier gas, for example hydrogen.

[0029] The floor of the pocket formed by cover plates 15′, or by a step 15 of the susceptor 1, forms a bearing surface for a circular disc-shaped substrate holder 2 made of graphite. The bearing surface 7 forms a first, central radial zone 11, into which extend spiral-shaped gas conduction channels 4, into which a carrier gas is fed through a gas supply line 3. For this purpose, the gas supply lines 3 are connected to supply lines 18 within the susceptor 1.

[0030] Radially outside the first radial zone 11 extends a second, narrower, annular radial zone 12, which is essentially formed by a gas collection channel 5. The gas collection channel 5 can have a cross-sectional area of 3×3 mm, and extends along a circular arc line around a center Z of the bearing surface 7. The second radial zone 12, formed by the gas collection channel 5, thus surrounds the first central circular radial zone 11, into which the carrier gas is fed, such that a gas cushion is formed, which holds the substrate holder 2 in a floating state.

[0031] Discharge channels 6 originate from the floor of the gas collection channel 5 in a uniform peripheral distribution. The discharge channels 6 are designed as bores, and are spaced apart from each other by a maximum of 10 cm, preferably a maximum of 4 cm. The diameter of the holes forming the discharge channel lies in the range between 2 and 4 mm. The bores preferably have a minimum diameter of 1 mm, preferably a minimum diameter of 2.5 mm, and preferably a minimum diameter of 3 mm.

[0032] A third radial zone 13 extends radially outside the gas collection channel 5; in the example embodiment the radial extent of the third radial zone 13 is greater than the radial extent of the second radial zone 12. The radial extent of the third radial zone 13 is preferably at least 5 mm. In the region of the third radial zone 13, the bearing surface 7 forms a flat surface, which forms a gap boundary surface 10. A surface 20 congruent with the first gap boundary surface 10 is formed by an annular zone of the lower face 2′ of the substrate holder 2. In a basic state, in which no carrier gas is fed through the gas supply lines 3 and consequently no gas cushion is formed in the region between the lower face 2′ and the bearing surface 7, the edge surface 20 of the substrate holder 2 lies flat in a sealing manner on the gap boundary surface 10. The gap boundary surface 10 of the third radial zone 13 preferably lies at the same level as a surface in which the gas conduction channels 4 extend, so that the gas collection channel 5 is a recess in a plane formed by the surfaces 8, 10.

[0033] If a gas flow is fed into the gas supply line 3, the gas flow is caused to rotate by the gas conduction channels 4, and lifts the substrate holder 2, wherein at the same time the gas flow causes the substrate holder 2 to rotate about its figure axis. In the inventive use, and/or in the inventive method, the gas flow, which is fed into the volume between the lower face 2′ of the substrate holder 2 and the bearing surface 7, is dimensioned such that a gap 9 with a gap height of at most 300 μm is formed between the two gap boundary surfaces 10, 20. By virtue of the dimensioning and number of the discharge channels 6, and the radial length of the third radial zone 13, the flow resistance of the gap 9 is considerably greater than the flow resistance of a gas discharge system that is formed by the discharge channels 6. The difference is preferably by at least a factor of 20, or a factor of at least 50. As a result, 90 percent or more of the carrier gas flows through the discharge system formed by the discharge channels 6, and only a maximum of 10 percent of the carrier gas flows through the gap 9 into the process chamber.

[0034] The second example embodiment illustrated in FIG. 6 essentially differs from the first example embodiment illustrated in FIG. 5 in that the discharge system 6 does not terminate on the rear face 14 of the susceptor 1, as in the first example embodiment, but rather on a peripheral wall 16.

[0035] The third example embodiment illustrated in FIG. 7 differs from the first example embodiment shown in FIG. 5 essentially only in that the discharge channel 6 terminates on an upper face 17 of the susceptor 1 facing towards the process chamber, wherein the issuing of the discharge channel is arranged downstream of the bearing site 7 in the direction of flow S through the process chamber.

[0036] FIG. 4 shows an example embodiment of a susceptor 1, wherein the radially outer surrounding wall of the bearing sites 7 is formed by a semicircular step 15, which is connected in a materially integral manner to the part of the susceptor 1 forming the bearing surface 7. Cover plates (not shown) are provided, which form semicircular steps, and which complete the wall of the pockets forming the bearing surfaces 7 on the radially inward side.

[0037] In the example embodiment illustrated in FIG. 9, the susceptor 1 has an essentially flat broad surface. Here, the walls of the pockets are formed by the curved walls of cover plates (not shown). The cover plates lie on the broad surface of the susceptor. The bearing surfaces 7 also extend in this plane.

[0038] In the example embodiment illustrated in FIG. 10, the radially inward wall of the pocket forming the bearing surface 7 is formed by a radially inner plinth of the susceptor 1, which is connected to the area of the susceptor 1 forming the bearing surfaces 7 in a materially integral manner. The radially outer walls of the bearing pockets are here formed by cover plates (not shown).

[0039] In the example embodiment shown in FIG. 11, the edge surfaces 10, 20, of the bearing surface 7 and the lower face 2′ of the substrate holder 2 respectively, have intermeshing structures 24, 25. These preferably take the form of annular structures, which form a kind of labyrinth seal. In the example embodiment, a rib 24 is provided, which engages in an annular groove 25. The rib 24 can be formed by one of the two surfaces 10, 20. The annular groove is then formed by the respectively other surface 20, 10. In the example embodiment, the rib 24 originates from the bearing surface 7 and the annular groove 25 is incorporated into the lower face 2′ of the substrate holder 2. In the example embodiment, the rib 24 and the annular groove 25 are arranged radially outside the gas collection channel 5. The substrate holder 2 is located in a pocket that is formed by a cover plate 15′.

[0040] The above statements serve to explain the inventions covered by the application as a whole, which inventions in each case also independently further the prior art at least by means of the following combinations of features, wherein two, a plurality, or all, of these combinations of features can also be combined, namely:

[0041] A susceptor, which is characterized in that the cross-sectional area of the discharge channels 6 and the radial length of the gap 9 are dimensioned such that the gas volumetric flow rate through the gas discharge system 6 is greater than that through the gap 9 with a gap height of 300 μm.

[0042] A susceptor, which is characterized in that the circular surface has a radial length of at least 5 mm with respect to the center Z, and in that the discharge channels 6 are at least four bores with a diameter of at least 2 mm, preferably of at least 4 mm.

[0043] A susceptor, which is characterized in that the third radial zone 13 is formed by an annular closed surface 10 with a radial length of at least 4 mm, which in the radially inward direction is adjacent to a gas collection channel 5 formed by a recess, from which originate in particular at least four discharge channels 6, which issue outside the bearing surface 7, and in particular are bores with a diameter of at least 2 mm, preferably of at least 3 mm.

[0044] A susceptor, which is characterized in that the bearing site 7 is bounded in the radially outward direction by a step 15, or by a cover plate 15′, and/or in that the surface 10 is flat.

[0045] A susceptor, which is characterized in that the discharge channels 6 terminate on a rear face 14 opposite the bearing surface 7, on an edge face 16, or downstream of the bearing surface 7 on the broad surface 17 of the susceptor 1.

[0046] A susceptor, which is characterized in that the diameters and the number of the leakage channels 6 are selected such that the following relationship is satisfied:

[00004]$n.Math.r^4>\frac{2.Math.d.Math.I_a}{3.Math.I_s}.Math.h^3$

where r: radius of the discharge channel (6), l.sub.a: length of a discharge channel (6), n: number of discharge channels (6), d: diameter of the third edge zone (13), l.sub.s: radial length of the gap (9), h: maximum height of the gap (9), wherein the left-hand side of the relationship is preferably at least ten times, more preferably at least twenty times, and particularly preferably at least fifty times as large as the right-hand side of the relationship.

[0047] A susceptor arrangement, consisting of a susceptor 1 in accordance with one of the preceding claims, and a substrate holder 2, supported on the bearing surface 7 such that it can rotate, wherein the substrate holder 2 has a circular disc-shaped form, and, at least in a radially outer region extending congruently with the third radial zone 13, has an annular, in particular a flat, edge surface 20 which, together with the surface 10 of the third radial zone 13, bounds the gap 9 with a constant gap height.

[0048] A susceptor, or a susceptor arrangement, which is characterized in that the surfaces 10, 20 bounding the gap 9 do not have any other gas discharge systems, but rather are formed by two congruent, closed annular surfaces.

[0049] A susceptor, or a susceptor arrangement, which is characterized in that the surface 10 forming the radially outer edge of the bearing surface 7, and the corresponding edge surface 20 of the substrate holder 2, have intermeshing annular structures, which in particular are designed as an annular rib 24 engaging in an annular groove 25.

[0050] A use, which is characterized in that the gas flow fed into the volume between the bearing surface 7 and the lower surface 2′ of the substrate holder 2 generates a pressure, which holds the substrate holder in a floating state, and generates a gap height less than 300 μm, and preferably in a range between 50 or 100 μm, and 250 μm.

[0051] A CVD reactor, which is characterized in that the susceptor 1 and the substrate holder 2 are designed according to one of the Claims 1 to 9.

[0052] All disclosed features are essential to the invention (individually, but also in combination with each other). The disclosure of the application hereby also includes the full disclosure content of the associated/attached priority documents (copy of the previous application), also for the purpose of including features of these documents in the claims of the present application. The subsidiary claims, even without the features of a claim referred to, characterise with their features independent inventive further developments of the prior art, in particular in order to make divisional applications on the basis of these claims. The invention specified in each claim can additionally have one or a plurality of the features specified in the above description, in particular those provided with reference numerals, and/or in the list of reference numerals. The invention also relates to forms of design, in which individual features cited in the above description are not realized, in particular to the extent that they can recognisably be dispensed with for the respective intended use, or can be replaced by other means having the same technical effect.

LIST OF REFERENCE SYMBOLS

[0053] 1 Susceptor [0054] 2 Substrate holder [0055] 2′ Lower surface of substrate holder [0056] 2″ Side surface of substrate holder [0057] 3 Gas supply line [0058] 4 Gas duct [0059] 5 Gas collection channel [0060] 6 Discharge channel [0061] 7 Bearing surface [0062] 8 Gap [0063] 9 Gap [0064] 10 Surface [0065] 11 First radial zone [0066] 12 Second radial zone [0067] 13 Third radial zone [0068] 14 Rear face [0069] 15 Step [0070] 15′ Cover plate [0071] 16 Edge face [0072] 17 Upper face [0073] 18 Supply line [0074] 18′ Supply line [0075] 19 Substrate [0076] 20 Edge surface [0077] 21 Heating device [0078] 22 Gas inlet unit [0079] 23 Housing [0080] 24 Rib [0081] 25 Annular groove [0082] S Flow direction [0083] Z Center