Method for producing a sensor housing for a force or pressure sensor and sensor housing, force or pressure sensor, and use of an additive manufacturing device
11268872 · 2022-03-08
Assignee
Inventors
Cpc classification
B33Y80/00
PERFORMING OPERATIONS; TRANSPORTING
International classification
G01L19/00
PHYSICS
G01L9/08
PHYSICS
G01L9/00
PHYSICS
G01L19/06
PHYSICS
G01L19/04
PHYSICS
Abstract
The invention relates to a method for producing a sensor housing for a pressure sensor and to a sensor housing for a pressure sensor, to a pressure sensor having such a sensor housing, and to the use of an additive production device for producing such a sensor housing. A sensor body and/or at least one membrane stamp is applied to a provided metal plate by means of additive production. The additive production produces an integrally joined, in particular planar joint connection between the sensor body and/or the at least one membrane stamp, on the one side, and the metal plate, on the other side.
Claims
1. A sensor housing for a force or pressure sensor, particularly for use in a combustion chamber, comprising: a metallic sensor body; and a metal sheet produced by a separating process or a forming process which closes off the metallic sensor body on one side; wherein the metallic sensor body is applied to the metal sheet by additive manufacturing and connected to the metal sheet by a first integral joint produced during the additive manufacturing, and wherein the metal sheet forms a membrane in a region bounded by the metallic sensor body.
2. The sensor housing according to claim 1, further comprising: at least one metallic membrane stamp in contact with the metal sheet; wherein the membrane is formed between the metallic sensor body and the at least one metallic membrane stamp.
3. The sensor housing according to claim 2, wherein the at least one metallic membrane stamp is applied to the metal sheet by the additive manufacturing and connected to the metal sheet by a second integral joint.
4. The sensor housing according to claim 2, wherein the metal sheet, the metallic sensor body, or the at least one metallic membrane stamp comprise different materials.
5. The sensor housing according to claim 3, wherein the metal sheet comprises a rigid section where the metal sheet connects to the metallic sensor body and/or the at least one metallic membrane stamp by means of the first or second integral joint and a flexible section in the area of the membrane.
6. The sensor housing according to claim 2, wherein the metallic sensor body and/or the at least one metallic membrane stamp comprise at least one cooling duct which is formed during the additive manufacturing of the metallic sensor body and/or the at least one metallic membrane stamp.
7. The sensor housing according to claim 6, wherein the at least one cooling duct is configured in correspondence with a shape of the metallic sensor body or the at least one metallic membrane stamp, and runs at least substantially parallel to the metal sheet.
8. The sensor housing according to claim 6, wherein the at least one cooling duct runs in a spiral within the metallic sensor body or the at least one metallic membrane stamp.
9. The sensor housing according to claim 2, further comprising a thermal protection element which is integrally bonded to the metallic sensor body and/or the at least one metallic membrane stamp by additive manufacturing and arranged on a side of the metallic sensor body, the at least one metallic membrane stamp, or the membrane able to face a pressure chamber.
10. The sensor housing according to claim 9, wherein the thermal protection element is materially and/or thermoconductively connected to the metallic sensor body or the at least one metallic membrane stamp in operative connection by means of an additive-manufactured connecting means.
11. The sensor housing according to claim 1, wherein the membrane together with at least one section of the metallic sensor body forms a thermal protection element, further comprising: a supporting structure, wherein the metal sheet is operatively connected to the supporting structure in a region of the membrane by means of a rigid connecting means or a coupling medium.
12. The sensor housing according to claim 10, wherein the operative connection acts exclusively in a radial direction of the sensor housing.
13. The sensor housing according to claim 12, wherein a supporting structure is in contact with the least one metallic membrane stamp.
14. The sensor housing according to claim 11, wherein the metallic sensor body and/or at least one metallic membrane stamp are applied to the supporting structure by the additive manufacturing and connected to the supporting structure by a third integral joint.
15. The sensor housing according to claim 1, wherein the metal sheet and/or a supporting structure closes the sensor housing, so as to be gas-tight.
16. The sensor housing according to claim 1, comprising at least two membrane stamps and at least one pressure transducer, wherein the metal sheet forms at least two membranes between the metallic sensor body and the at least two membrane stamps.
17. The sensor housing according to claim 1, wherein the metal sheet exhibits heat-conducting and/or reinforcing membrane structures in a region of the membrane which are materially connected to the metal sheet by a fourth integral joint.
18. The sensor housing according to claim 1, wherein the sensor housing exhibits an angular cross section in an axial direction, wherein the membrane at least substantially exhibits the form of the cross section.
19. The sensor housing according to claim 1, wherein the metal sheet exhibits, at least in a region of the membrane, a curvature which is not rotationally symmetrical with respect to a longitudinal axis of the sensor housing.
20. A pressure sensor or a force sensor having a sensor housing according to claim 1 and a pressure transducer, wherein the pressure transducer is arranged within the metallic sensor body and designed to convert a pressure or a force recorded by at least one metallic membrane stamp into an electrical signal.
21. The use of an additive manufacturing apparatus for producing a sensor housing of a force or pressure sensor according to claim 1.
22. The sensor housing according to claim 1, wherein the membrane has an annular shape.
23. The sensor housing according to claim 1, wherein one or more integral joints are planar.
24. The sensor housing according to claim 1, wherein the metal sheet is produced by turning or by forging.
25. The sensor housing according to claim 1, wherein the metal sheet is a flat or a thin substantially planar metal piece.
26. The sensor housing according to claim 1, wherein the metal sheet is a metal foil.
27. The sensor housing according to claim 1, wherein the metal sheet includes at least a partial waved configuration, curved configuration, or arched configuration substantially in a radially extending plane.
28. The sensor housing according to claim 1, wherein the metal sheet has a lower membrane thickness than the supporting structure so that the membrane absorbs more acting heat than the supporting structure.
29. The sensor housing according to claim 1, wherein the metal sheet comprises the membrane stamp and wherein the metal sheet is integrally formed with the membrane stamp.
30. The sensor housing accordingly to claim 29, wherein the metal sheet is integrally formed with the membrane stamp by means of a separating process, by turning, or by electrochemical machining (ECM).
31. A method for producing a sensor housing for a force or pressure sensor, comprising the steps: providing a metal sheet produced by a separating process or a forming process; and applying a sensor body and/or at least one membrane stamp to the metal sheet by means of additive manufacturing, wherein the additive manufacturing produces an integral joint between the sensor body and the at least one membrane stamp or the metal sheet.
32. The method according to claim 31, wherein the metal sheet is at least partially melted onto at least one surface during the additive manufacturing.
33. The method according to claim 31, wherein at least one cavity is formed in the sensor body and/or the at least one membrane stamp during the additive manufacturing.
34. The method according to claim 33, further comprising the following step: removing residues produced during the additive manufacturing from the at least one cavity via a bore or an access channel formed during the additive manufacturing.
35. The method according to claim 31, wherein the integral joint is planar.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
(1) The invention will be described in greater detail in the following on the basis of non-limiting exemplary embodiments as depicted in the figures. Shown therein at least to some extent schematically:
(2)
(3)
(4)
(5)
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(8)
(9)
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(11)
DETAILED DESCRIPTION OF THE INVENTION
(12)
(13) The pressure sensor 1 exhibits a sensor housing 2 having a sensor body 3 and a membrane stamp 4. The sensor body 3 and the membrane stamp 4 are produced or respectively formed by means of additive manufacturing on a metal sheet 5 which closes an opening 10 of the sensor body 3 facing a pressure chamber 6, in particular a combustion chamber. A pressure transducer 8 is arranged inside the sensor housing 2 and in particularly operatively connected to the membrane stamp 4 such that pressure recorded by the membrane stamp 4, as described in detail further below, can be converted into electrical signals by the pressure transducer 8.
(14) The pressure sensor 1 preferably exhibits a longitudinal axis X. Correspondingly, the following will refer to directions along the longitudinal X axis as “axial directions” and directions perpendicular to the longitudinal X axis as “radial directions,” even if the longitudinal axis X is not explicitly plotted.
(15) The sensor housing 2, in particular the sensor body 3 and/or the membrane stamp 4 and/or the metal sheet 5, is preferably substantially rotationally symmetric with respect to the longitudinal axis X. Alternatively, however, the sensor housing and the metal sheet may exhibit no symmetry at all or another symmetry, for example mirror symmetry with respect to a plane.
(16) Preferably, the sensor body 3 and the membrane stamp 4 are applied to the metal sheet 5 by means of additive manufacturing. In particular, first the metal sheet 5 is provided and a layer of raw material, for instance metal particulates, is deposited on the metal sheet. One or more production blasts, in particular laser or electron beams, heat, in particular melt, the raw material layer at predetermined points. In particular, the predetermined points are sequentially traversed; i.e. scanned. Preferably, the surface of the metal sheet 5 is thereby also at least partially melted on or fused, particularly at the predetermined points. When curing, the raw material layer materially bonds to the metal sheet 5 at these points, in particular in planar fashion. This integral planar joint is identified in
(17) Preferably, the sensor housing 2 comprises a gap 7 between the membrane stamp 4 and the sensor body 3 in a sensor body 3 and membrane stamp 4 produced as such. In the area which limits the gap 7 to the pressure chamber 6, in particular in the region of the opening 10 of the sensor body 3, the metal sheet 5 forms an in particular flexible or respectively elastic membrane 11. The membrane 11 is therefore bounded on the outside by the sensor body 3 and on the inside by the membrane stamp 4 and thus of annular configuration.
(18) The membrane 11 is designed to absorb pressure from the pressure chamber 6, in particular a combustion chamber, by deforming, in particular deflecting. The deformation, in particular deflection, of the membrane 11 transfers to the membrane stamp 4 connected to the membrane by the bonded joint 9. The metal sheet 5, or membrane 11 respectively, are configured such that upon pressure acting on membrane 11, the membrane stamp 4 is deflected preferably about 2-6 μm, preferentially about 4-5 μm, in particular approximately 4.5 μm. The deflection of the membrane 11, or membrane stamp 4 respectively, is thereby at least substantially proportional to the acting pressure.
(19) The membrane stamp 4 is thereby designed to pass the recorded pressure on to the pressure transducer 8 or, respectively, transmit or transfer same to it. The pressure transducer 8 can thus produce an electrical signal proportional to the pressure in the pressure chamber 6, particularly in a combustion chamber. Preferably, the pressure transducer 8 is designed as a piezoelectric element which generates an electrical voltage subject to the acting pressure or, respectively, the resulting compression or decompression.
(20)
(21)
(22) In the first exemplary embodiment of the connecting geometry, the sensor body 3 exhibits a riser at the opening 10 on an inner side facing the membrane stamp 4 against which the first outer edge 5′a abuts. The riser is thereby of shallower configuration than the thickness of the metal sheet 5 so that a part of the metal sheet 5 axially protrudes from the sensor body 3. Preferably, the metal sheet 5, in particular first outer edge 5′a, is materially and flatly bonded to the sensor body 3 along the contour of the riser.
(23) In the second exemplary embodiment of the connecting geometry, the membrane stamp 4 has a riser at a side facing the opening 10 against which the first inner edge 5″a abuts. The riser is thereby of deeper configuration than the thickness of the metal sheet 5 so that a part of the metal stamp 4 forms a pressure chamber-side projection, in particular projecting into the pressure chamber 6. Preferably, the metal sheet 5, in particular first inner edge 5″a, is materially and flatly bonded to the membrane stamp 4 along the contour of the riser.
(24) In the third exemplary embodiment of the connecting geometry, the membrane stamp 4 exhibits a recess at a side facing the opening 10 which accommodates the metal sheet 5, in particular the second inner edge 5″b, particularly in a positive fit. In this embodiment as well, a part of the membrane stamp 4 forms a pressure chamber-side projection and/or projects into the pressure chamber 6. Preferably, the metal sheet 5, in particular the second inner edge 5″b, is materially and flatly bonded to the membrane stamp 4 along the contour of the recess.
(25) In the fourth exemplary embodiment of the connecting geometry, the sensor body 3 exhibits a riser at an inner side facing the opening 10 against which the second outer edge 5′b abuts. The riser is thereby configured just as deep as the metal sheet 5 is thick so that on the side facing the pressure chamber 6, the sensor body 3 is flush with the metal sheet 5. Preferably, the metal sheet 5, in particular second outer edge 5′b, is materially and flatly bonded to the sensor body 3 along the contour of the riser.
(26) It should be noted that these four embodiments are interchangeable or can be combined with one another respectively.
(27)
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(29) In particular, the metal sheet 5 can also be of shorter configuration than the sensor body 3. In this case, the extension 3′ of the sensor body 3 can be configured around the metal sheet 5 and directly connected to the sensor body 3 in the additive manufacturing process.
(30)
(31)
(32) In this exemplary embodiment, the sensor body 3 comprises cooling ducts 12 running circularly within the sensor body 3; i.e. in correspondence with its shape. The cooling ducts 12 are easily realized during the additive manufacturing of the sensor body 3 by the production blast(s) not processing the raw material at the locations of the cooling ducts.
(33) The raw material thereby remaining in the cooling ducts 12 can be removed through an access channel 13, in particular blown or rinsed out, after the sensor body 3 is produced. The access channel 13 can thereby be produced directly during the additive manufacturing of the sensor body 3 or subsequently, for instance by means of a drilling. Preferably, the access channel 13 also serves as a coolant inlet via which a coolant can be conducted into or out of the cooling ducts 12.
(34)
(35) The thermal protection element 14 is configured, in particular formed, such that it at least partially shields in particular the membrane 11, but preferably also the sensor body 3 and/or the membrane stamp 4, from heat from the pressure chamber 6, in particular a combustion chamber. As schematically depicted, it thereby at least partially projects from the membrane yet allows pressure from the pressure chamber 6 to act on the membrane 11.
(36) It is advantageous to prevent the influx of heat into the sensor body 3 and/or the membrane stamp 4 and/or the metal sheet 5 or membrane 11 respectively since the expansion, warping and/or distortion associated with heat influx affect the elastic properties of in particular the membrane 11 and thus the measuring characteristic of the pressure sensor 1. In particular, such an unwanted influx of heat can cause the membrane 11 to deform to a greater or lesser extent at a given pressure or the membrane stamp 4 to respectively be deflected to a greater or lesser extent. The electrical signal generated by the pressure transducer is thus distorted; i.e. is correspondingly stronger or not as strong.
(37) The thermal protection element 14 is in particular connected to the sensor body 3 and the membrane stamp 4 by connecting means 15. The connecting means 15, which can for instance be configured as webs or bars, are preferably thermoconductive so that the heat absorbed by the thermal protection element 14 from the pressure chamber 6 can be dissipated to the sensor housing 3 and/or the membrane stamp 4 via said connecting means 15 and particularly preferentially expelled there by a coolant via cooling ducts. Preferentially, the connecting means 15 are of elastic configuration; i.e. mechanically flexible, so that heat-related deformations, distortions and/or warping of the thermal protection element 14 do not transfer to the sensor body 3 and/or the membrane stamp 4.
(38) The thermal protection element 14 is preferably configured to expand along its surface, particularly in the radial direction, when exposed to heat. The preferentially elastic connecting means 15 thereby deform, in particular warp. Alternatively or additionally, the thermal protection element 14 is configured to expand perpendicular to its surface, particularly in the axial direction, when exposed to heat, whereby the preferentially elastic connecting means deform, in particular warp.
(39) As
(40) Alternatively to the embodiment shown in
(41)
(42) In this exemplary embodiment, the thermal protection element 14 spans the metal sheet 5, in particular the membrane 11, like a bridge. In particular, the thermal protection element 14 substantially covers the entire side of the sensor housing 2 facing the pressure chamber 6. Preferably, the thermal protection element 14 is thereby connected to the sensor body 3, in particular additively manufactured with same. Further preferably, the thermal protection element 14 is thereby particularly of solid configuration so as to be able to absorb heat from the pressure chamber 6, in particular a combustion chamber, particularly well. In order to enable pressure from the pressure chamber 6, in particular a combustion chamber, to act on the membrane 11, the thermal protection element 14 exhibits holes 16 or slots arranged in particular in the axial direction.
(43)
(44) In this exemplary embodiment, the thermal protection element 14 is formed by the metal sheet 5 which in this exemplary embodiment is in particular a metal foil.
(45) The membrane 11 is preferably supported by a supporting structure 17. The supporting structure 17 can thereby preferably be configured as a mesh or a perforated plate and is in contact with or materially bonded to the membrane stamp 4.
(46) Like the metal sheet 5, the supporting structure is also materially and flatly bonded to the sensor body 3 and/or a projection 3′ of the sensor body 3 arranged on the pressure chamber side, in particular projecting into the pressure chamber 6, preferably during the additive manufacturing.
(47) In addition, the supporting structure is preferably materially bonded in particular to the metal sheet 5, particularly membrane 11, by in particular additively manufactured connecting means 15.
(48) The connecting means 15 in this exemplary embodiment are of rigid and thermally non-conductive configuration so that heat absorbed by the membrane 11 cannot be released, or only to a limited extent, to the supporting structure 17.
(49)
(50) The membrane 11 is thus configured to absorb heat from the pressure chamber 6 and thereby expand along its surface, in particular in the radial direction. In particular, the membrane 11 thereby assumes a waved or curving shape.
(51)
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(53) In this exemplary embodiment as well, the thermal protection element 14 is formed by the metal sheet 5, in particular a metal foil, and spans the supporting structure 17 like a bridge. In particular, the membrane 11 covers a side of the sensor housing 2 facing the pressure chamber 6. Preferably, an extension 4′ of the membrane stamp 4 in this exemplary embodiment connects the supporting structure 17 to the membrane 11.
(54) The supporting structure 17 is materially and flatly bonded to the sensor body 3 and the membrane stamp 4, in particular by the additive manufacturing of the sensor body 3 and/or the membrane stamp 4.
(55) A coupling medium 18, preferably a coolant, is arranged between the metal sheet 5, in particular the membrane 11, and the supporting structure 17, which in the present case is at least liquid-tight. In particular, the metal sheet 5, in particular the membrane 11, and the supporting structure 17 sandwich the coupling medium 18. The coupling medium 18 provides an operative connection between the metal sheet 5, in particular the membrane 11, and the supporting structure 17 in the axial direction.
(56) The membrane 11 is configured to absorb heat from the pressure chamber 6 and relay it to the coupling medium 18, which expands due to the influx of heat. Since the coupling medium 18 is rigidly limited in the radial direction by the sensor body 3 and the membrane stamp 4′ and elastically limited in the axial direction by the membrane 11 and the supporting structure 17, the membrane 11 and the supporting structure 17 thereby deform symmetrically; i.e. oppositely. In particular, the supporting structure 17 is deflected toward the interior of the sensor body 3; i.e. to the side facing away from the pressure chamber 6, while the membrane 11 is deflected toward the pressure chamber 6; i.e. to the side facing the pressure chamber 6.
(57) Preferably, the elastic properties of the membrane 11 and the support structure 17 are equal such that there is equal opposite deflection in the membrane 11 and the support structure 17.
(58) Alternatively or additionally, the coupling medium 18 conducts the absorbed heat on to the supporting structure 17 such that there is equal opposite deflection in the membrane 11 and the support structure 17. The force acting on the membrane stamp 4 due to the deflections of the membrane 11 and the supporting structure 17 are thus compensated; i.e. a deflection of the membrane stamp 4 by the effect of heat, in particular from a thermal shock, is prevented.
(59) Preferably, the sensor body 3 comprises at least one further access channel 13′ which is arranged between the metal sheet 5 and the further membrane 17. The coupling medium 18, in particular a coolant, can be conducted between the metal sheet 5, in particular the membrane 11, and the further membrane 17 via said further access channel 13′ and/or drained from there. Preferably, the further access channel 13′ is produced during the additive manufacturing of the sensor body 3.
(60)
(61) The sensor body 3 is applied to the metal sheet 5 by means of additive manufacturing such that three membrane stamps 4 can be arranged in the sensor body 3, in particular produced during the additive manufacturing or applied to the metal sheet 5 respectively. Accordingly, the sensor housing 2 in this exemplary embodiment exhibits three pressure transducers 8, each operatively connected to a membrane stamp 4.
(62)
(63) The three gaps 7 between each of the three membrane stamps 4 and the sensor body 3 are clearly visible in the top plan view. The not-depicted metal sheet forms in each case a membrane at the three openings 10 between the sensor body 3 and the three membrane stamps 4 so that the three membrane stamps 4 are in particular mounted so as to be axially movable independently of each other and thereby be able to absorb a pressure acting on the respective membrane or be able to transmit or release it to a respective pressure transducer respectively.
(64)
(65) The openings 10 of the sensor body 3 are closed to the pressure chamber 6 by the metal sheet 5 which in each case forms a membrane 11 between the sensor body 3 and each membrane stamp 4. Each membrane stamp 4 is operatively connected to a pressure transducer 8 such that a pressure-induced deformation, in particular deflection, of the membrane 11 connected to the membrane stamp 4 triggers the generating of an electrical signal proportional to the pressure acting on the membrane 11.
(66) With a sensor housing 2 having three or also two or more pressure transducers 8, membrane stamps 4 and membranes 11 arranged in or on a sensor body 3, pressure measurement in a pressure chamber 6 by a corresponding pressure sensor 1 provides three or also two or more electrical signals. This redundancy enables the control and/or monitoring of the individual pressure transducers 8, resulting in more reliable pressure measurement.
(67)
(68) The metal sheet 5 forms a membrane 11 between the sensor body 3 and the membrane stamp 4.
(69) The metal sheet 5, in particular membrane 11, comprises membrane structures 19-19″ for heat absorption and/or heat dissipation. Alternatively or additionally, the membrane structures 19-19″ are configured to influence the elastic properties of the membrane 11, in particular strengthen the membrane 11. The membrane structures 19-19″ run particularly linearly, in approximate straight lines or in serpentine fashion, on the surface of the membrane 11. Preferably, the membrane structures 19-19″ are applied and materially bonded to the metal sheet 5, in particular the membrane 11, during the additive manufacturing of the sensor body 3 and/or the membrane stamp 4. In particular, the membrane elements 19-19″, like the metal sheet 5, particularly the membrane 11, are formed as materially bonded metal strips and preferably configured to radially dissipate absorbed heat to the sensor body 3, where the heat is preferentially absorbed and dissipated by a coolant within cooling ducts.
(70) In a first implementation, the membrane structures 19 run in the radial direction, particularly in fan-like manner, in particular from an inner edge 11′ of the membrane to an outer edge 11″ of the membrane.
(71) In a second implementation, the membrane structures 19′ run in wave-like manner, in particular in the radial direction, in particular from an inner edge 11′ of the membrane to an outer edge 11″ of the membrane.
(72) In a third implementation, the membrane structures 19″ run circularly and/or semi-circularly around the inner edge 11′ of the membrane.
(73) In a fourth implementation, the membrane structures 19″ run in the radial direction, particularly at the same or differing lengths, in particular in random distribution.
(74)
(75)
(76) When pressure measuring sensors, such as for example the pressure sensor 1 shown in
(77) Utilizing additive manufacturing, however, enables the realization of sensor shapes and/or sensor housing shapes which are not axially symmetrical. Particularly able to be realized, as is evident from
(78) In principle, all the exemplary embodiments of the inventive sensor housing 2 can thus provide for the sensor housing 2 to exhibit an angular, in particular rectangular, outer counter. In this case, the membrane 11, which is supported by the sensor body 3, can also exhibit a rectangular shape.
(79) This has the advantage of the sensor housing 2 being able to expand farther in one spatial direction having a lot of space than in another spatial direction. Because of the greater expansion of the membrane 11 and the thereby associated larger surface, a pressure sensor 1 provided with such a membrane 11 exhibits higher sensitivity. In particular, such a rectangular sensor housing 2 or rectangular sensor 1 respectively can be introduced, for example into a combustion chamber 6, by way of a relatively small mounting hole.
(80) For example, such a pressure sensor 1 can be arranged on the side of a probe 20, as is shown for example in the applicant's AT 407 577 B, in which the pressure sensor is integrated into a spark plug which in this case serves as probe 20 (see hereto in particular FIG. 3 of AT 407 577 B). A pressure sensor connected to a spark plug in a spark plug hole is thereby introduced into the combustion chamber of an internal combustion engine. Due to its rectangular shape, the membrane of the pressure sensor 1 thereby exhibits a substantially enlarged surface.
(81) A pressure sensor 1 having an inventive sensor housing 2 can also be e.g. laterally arranged on a probe 20 in the manner as depicted in
(82) Additionally, a membrane 11 can also be curved along a spatial direction as shown in
(83) Due to the rectangular shape, the pressure sensor 1 or its membrane 11 respectively exhibits a substantially enlarged effective area and thus a higher sensitivity. By being arranged in a probe 20, as shown in
(84) The pressure sensor 1 is preferably inserted into the probe 20 from the side and secured therein, for example by a screw connection or other joining technique.
(85) Of course, other sensor/sensor housing shapes and membrane shapes are also possible. In particular, the metal sheet 5 can be repeatedly waved or even exhibit a different structure substantially running only along one spatial direction.
(86) The above-described exemplary embodiments are merely examples which are in no way to limit the protective scope, application or design of the invention. Rather, the preceding description affords one skilled in the art a guideline for the implementation of at least one exemplary embodiment, whereby various modifications can be made, in particular with regard to the function and arrangement of the described components and feature combinations of various exemplary embodiments, without departing from the protective scope as results from the claims and these equivalent feature combinations.
LIST OF REFERENCE NUMERALS
(87) 1 sensor 2 sensor housing 3 sensor body 4 membrane stamp 5 metal sheet 5′a,5′b first, second outer edge 5″a,5″b first, second inner edge 6 pressure chamber 7 gap 8 pressure transducer 9 integral joint 10 sensor body opening 11 membrane 12 cavity 13 access channel 13′ further access channel 14 thermal protection element 14′ connection point 15 connecting means 15′ connecting point 16 hole 17 further membrane 18 coupling medium 19, 19′, 19″, 19′″ membrane structure 20 probe 21 probe socket