HIGHLY DENSE BRITTLE-MATERIAL STRUCTURAL MEMBER HAVING IMPREGNATING PROPERTY
20220073434 · 2022-03-10
Inventors
- Muneyasu SUZUKI (Tsukuba-shi, JP)
- Jun Akedo (Tsukuba-shi, JP)
- Shusuke Kanazawa (Tsukuba-shi, JP)
- Motoshi Itagaki (Tsukuba-shi, JP)
- Shun Hasegawa (Tsukuba-shi, JP)
- Tetsuo TSUCHIYA (Tsukuba-shi, JP)
- Hirobumi Ushijima (Tsukuba-shi, JP)
Cpc classification
H01M4/62
ELECTRICITY
C04B2235/96
CHEMISTRY; METALLURGY
C04B2235/616
CHEMISTRY; METALLURGY
C04B38/0038
CHEMISTRY; METALLURGY
C04B35/491
CHEMISTRY; METALLURGY
Y02E60/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
C04B38/0038
CHEMISTRY; METALLURGY
C04B38/00
CHEMISTRY; METALLURGY
C04B35/491
CHEMISTRY; METALLURGY
C04B38/00
CHEMISTRY; METALLURGY
C04B2111/00853
CHEMISTRY; METALLURGY
H01M10/056
ELECTRICITY
C04B2235/5445
CHEMISTRY; METALLURGY
International classification
C04B38/00
CHEMISTRY; METALLURGY
C04B35/491
CHEMISTRY; METALLURGY
C04B41/00
CHEMISTRY; METALLURGY
Abstract
Disclosed is a highly dense aggregate of brittle material particles having an interface at which the particles are bonded to each other and pores between the brittle material particles structuring the highly dense aggregate, where a porosity which is a volume ratio of the pores with respect to the whole of the highly dense aggregate is equal to or less than 20%, and a volume ratio of the pores communicating with an apparent outer surface of the highly dense aggregate with respect to a volume of all of the pores of the highly dense aggregate is equal to or higher than 65%.
Claims
1. A highly dense aggregate of brittle material particles having interfaces at which the particles are bonded to each other and pores between the brittle material particles, wherein a porosity which is a volume ratio of the pores with respect to the whole of the highly dense aggregate is equal to or less than 20%, and wherein a volume ratio of the pores communicating with an apparent outer surface of the highly dense aggregate with respect to a volume of all of the pores of the highly dense aggregate is equal to or higher than 65%.
2. The highly dense aggregate according to claim 1, wherein the brittle material particles structuring the highly dense aggregate consist of first brittle particles and second brittle particles smaller than the first brittle particles, have the second particles in the pores between the first particles bonding to each other, and further have pores between the plurality of second particles in the pores between the first particles and between the second particles and the peripheral first particles.
3. The highly dense aggregate according to claim 2, wherein the particle diameter size of the second particles is equal to or less than 1 μm.
4. The highly dense aggregate according to claim 1, wherein an average pore width between the brittle material particles is equal to or less than 200 nm.
5. The highly dense aggregate according to claim 1, wherein silicon oil, a liquid in which nanoparticles with a particle diameter of 100 nm or less is dispersed, a liquid resin, or a solution of a polymer is impregnated.
6. The highly dense aggregate according to claim 5, wherein the liquid resin impregnated in the highly dense aggregate is cured.
7. An electric element unit including, on both surfaces of a base material, at least one stack in which a film consisting of the highly dense aggregate according to claim 1, an electrode layer, and a mesh foil having electric conductivity are stacked, wherein a resin or a polymer is impregnated in the highly dense aggregate.
8. The electric element according to claim 7, where the at least one stack includes a plurality of stacks.
9. A solid-state battery comprising the highly dense aggregate in which a first polymer is impregnated, wherein the first polymer has ion conductivity.
10. The solid-state battery according to claim 9, further comprising a second polymer over the first polymer, wherein the second polymer has ion conductivity, and wherein the second polymer includes brittle material particles.
11. The solid-state battery according to claim 10, wherein the solid-state battery has a folded shape.
12. The solid-state battery according to claim 10, wherein the solid-state battery has a folded and stacked shape.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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EXAMPLES
Example 1
Pore Structure of Highly Dense Aggregate Film Using PZT Particles
[0076] Next, a specific manufacturing method of the structural member of the present invention is explained.
[0077] PZT particles (average particle size: 1550 nm) serving as the first particles were attached on a surface of stainless-steel SUS 304 substrate (thickness of 20 μm).
[0078] The first PZT particles were synthesized with a molten salt method using PZT-LQ powder manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD. The first PZT particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) and were transferred into a 50 cc glass vessel added with ethanol, and a dispersion treatment was carried out with ultrasonic waves of 350 W and 20 kHz using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750) for one minute. The dispersion was transferred into an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set) and was sprayed onto a SUS 304 substrate of a transfer plate prepared on a hot plate set at 60° C. in advance so that the first PZT particles were attached onto the surface of the SUS 304 substrate.
[0079] Next, second particles were attached onto the first particles so that the mixing ratio of the second particles (volume occupied by the second particles/volume of the summation of the first particles and the second particles) fell within 15% to 30%.
[0080] The spray painting of the second particles was the same as that of the first particles. PZT particles (average particle diameter: 150 nm) were used as the second particles. The second particles were obtained as follows: a sintered body was first prepared using PZT-LQ powder of SAKAI CHEMICAL INDUSTRY CO., LTD, the sintered body was transformed into a powder with a mortar, the powder was added into a zirconia ball mill pot together with zirconia balls and acetone and crushed by a planetary ball mill, the powder obtained by evaporating acetone was dispersed in ethanol and was treated in a centrifuge, and then a classification treatment was carried out. Similar to the first PZT particles, the second PZT particles were also attached onto the first PZT particles by dispersing the second PZT particles in ethanol and then spraying this dispersion on a surface of the SUS 304 substrate on which the first PZT particles have been attached.
[0081] The SUS 304 substrate on which the first and second particles were attached was retrieved from the hot plate and was cut into a plurality of 1 cm.sup.2 circular plates, the first and second particles were pressed against a base material of an aluminum foil (thickness of 20 μm), and the pressure transfer was performed to fix the first and second particles onto the base material.
[0082] The base material is preferred to be a metal with an elastic modulus of 180 GPa or lower or carbon. The fixing pressure is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2GPa or lower. In this experiment, the pressing was carried out under two pressures of 1000 MPa and 400 MPa. The pressure transfer of the first and second particles onto the aluminum foil base material from the SUS 304 substrate was repeated nine times, by which a highly dense aggregate film (pressed at 1000 MPa) and a pressed powder film of PZT (pressed at 400 MPa) were stacked over the aluminum foils.
[0083] As a comparable reference example, a sintered body was obtained by sintering PZT-LQ powder manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD so as to realize a relative density of approximately 80%.
[0084] Specific surface areas were evaluated with the multipoint BET method (Kr gas absorption method) for the obtained highly dense aggregate film, the pressed powder film, and the poorly dense sintered body. The results are summarized in Table 1.
[0085] As a true density of PZT, a value of 8.0 g/cm.sup.3 was used. The specific surface area in the form of powder was calculated by approximating the powder to a sphere having a diameter of the average particle diameter of the first and second PZT particles. The size of the particles of the sintered body was an average diameter of the particles bonded to each other as observed after sintering, and the specific surface area in the form of powder was calculated from a particle diameter on an assumption that the powder still exists as powder. In each case, the PZT particles themselves were assumed to be non-porous.
[0086] The weights of the PZT layers of the highly dense aggregate film and the pressed powder film were obtained by measuring the weights before and after the first and second PZT particles were deposited on the aluminum foils and then by calculating the difference therebetween. The film thicknesses of the highly dense aggregate film and the pressed powder film were obtained by observing cross-sectional SEM images followed by obtaining the average values of the film thicknesses. From these results, the densities of the highly dense aggregate film and the pressed powder film were calculated and then divided by the true density of PZT to calculate the relative densities (%) of the PZT layers, whereas the porosity (%) of all of the PZT layers was calculated by subtracting the relative density from 100.
[0087] The specific surface areas of the PZT layers were evaluated with the BET method while the PZT film are deposited on the aluminum foils. Since the specific area of the aluminum foil is negligibly smaller than the specific surface areas of the PZT layers, only the specific areas of the PZT layers were calculated from the weight of the deposited PZT film by converting the specific surface area value of the whole of the PZT film including the aluminum foil per weight, which was obtained by the BET method, to a value of the PZT layers included in the PZT film per weight.
[0088] Since a specific surface area measured by the BET method is a surface area of a range to which Kr serving as a measurement gas can reach from an apparent outer surface of an object sample to be measured, the specific surface area of the PZT layers obtained with the BET method corresponds to a value obtained by subtracting, from the specific surface area of the powder, the specific surface areas of the interfaces formed by the bonding of the powder at the time when the PZT layers are formed from the powder and the specific surface area corresponding to the porous portions which are the pores formed by this process and confined in the PZT layers.
[0089] Here, since the shapes of the pores are generally uniform in each of the highly dense aggregate film, the pressed powder film, and the low-density sintered body, the ratio of the specific surface area of the PZT layers obtained with the BET method with respect to the specific surface area in the form of powder can be approximated to a proportion of the pores of the portions communicating with the apparent outer surface of the PZT layers with respect to all of the pores included in the PZT layers.
TABLE-US-00001 TABLE 1 PZT highly dense PZT pressed PZT poorly dense aggregate film powder film sintered body Preparation conditions, shapes, and density (1) Preparation conditions 1000 MPa press 400 MPa press sintering treatment (2) True density of PZT (g/cm.sup.3) 8.0 (3) Particle diameter of first particles (nm) 1550 750 (after sintering) (4) Particle diameter of second particles (nm) 150 — (5) Mixing ratio (first particles:second particles) 81.7:18.3 — (6) Specific surface area in the form of powder 1.313 1.0000 (m.sup.2/g) (7) Weight of PZT layers (mg) 8.063 7.318 315.7 (8) Average thickness of PZT layers (μm) 11.20 13.75 1734 (9) Area (cm.sup.2) 1.0 1.0 0.291 (10) Density of PZT layers (g/cm.sup.3) 7.20 5.32 6.258 (11) Relative density of PZT layers (%) 90.0 66.5 78.2 (12) Whole porosity 10.0 33.5 21.8 BET evaluation (Kr gas absorption method, multipoint method) (13) Weight of the whole of sample (g) 0.0297 0.0307 0.3157 (14) Weight of PZT layers (mg) 16.001 16.358 0.3157 (15) Measurement results of specific surface 0.6973 0.6864 0.4279 area (m.sup.2/g) (including aluminum foil) (16) Specific surface area of PZT layers (m.sup.3/g) 1.29 1.29 (17) Specific surface area of PZT layers 9.32 8.86 2.68 (m.sup.2/cm.sup.3) (18) Volume density of porous portions 98.6 98.1 42.8 continuing to outer surface with respect to all pores (5) [(16)/(6)]*.sup.1
[0090] The PZT film prepared by applying a pressure of 400 MPa exhibited a porosity of 33.5% similar to that of the normally pressed powder, while the PZT film obtained by applying a pressure of 1000 MPa was highly densified and showed a porosity of 10%. The specific surface areas of the PZT layers of the pressed PZT powder film and the highly dense PZT aggregate film were each 1.29 m.sup.2/g, revealing that the volume density of the pores communicating with the apparent outer surface with respect to all of the pores is 98% or more. Furthermore, comparison of the specific surface area in the form of powder in (6) in Table 1 with the specific area of the PZT layers of (16) in Table 1 means that the contacting areas between the PZT particles in the highly dense PZT aggregate film and the areas of the portions of the particles facing the pores confined inside by the bonding between the particles are only 2% of the whole of the specific areas of the particles. Thus, the highly dense PZT aggregate film has a characteristic whereby the specific area thereof is almost the same as that of the powder even if the highly dense PZT aggregate film is densified so that the porosity reaches 10%.
[0091] The specific surface area of the comparable reference example was 0.43 m.sup.2/g, while the porosity was 21.8%. The volume density of the pores communicating with the apparent outer surface with respect to all of the pores was 42.8%
[0092] As described above, the highly dense PZT aggregate film according to the present invention is a highly dense film having a porosity of 20% or less which is unattainable without the sintering treatment or crushing the particles and exhibits an extremely unique characteristic whereby the large specific surface area comparable to the specific surface area of the particles before aggregation can be maintained even after the aggregation.
[0093] Next, the fine structures of the highly dense PZT aggregate film and the PZT sintered body were studied in detail through three-dimensional SEM observation.
[0094] The highly dense PZT aggregate film was prepared similarly to the sample used in the BET evaluation. The pressing pressure was 750 MPa, and the porosity of the aggregate film was 14%. As a comparable reference example, a sintered body with a porosity of 4% was prepared.
[0095] Three-dimensional SEM images can be reproduced as a three-dimensional CG by obtaining a plane image of a surface and then by repeatedly thinly shaving the observed surface with FIB (the thickness was 50 nm in the case of the highly dense aggregate film, while the thickness was 100 nm in the case of the sintered body) and obtaining a plane image again, followed by digitally treating a huge amount of obtained image data, by which the fine structures and the like can be numerically analyzed. The experimental conditions and the results are summarized in Table 2.
[0096] A cross-sectional SEM image of the highly dense PZT aggregate film used for the three-dimensional SEM observation is shown in
[0097] From
[0098] The observation results of the fine structures obtained from the three-dimensional SEM do not contradict the aforementioned fine structures of the highly dense PZT aggregate and the PZT sintered body derived from the BET specific surface areas obtained with the multipoint BET method, which proves that the aforementioned investigation using the BET specific surface areas is reasonable.
[0099] Moreover, on the basis of this fact, the specific surface area of the pore portions communicating with the outer surface of the highly dense PZT aggregate film which was prepared at a press pressure of 750 MPa and which was used for the aforementioned three-dimensional SEM analysis can be estimated to be 11.23 μm.sup.2/μm.sup.3 from the particle diameter size of the raw-material particles, the specific surface area of the raw-material particles calculated from the mixing ratio (73.8:26.2), and the volume density (98%) of the pore portions communicating with the outer surface with respect to all of the pores analyzed using the three-dimensional SEM images.
TABLE-US-00002 TABLE 2 PZT highly dense PZT sintered aggregate film body Measurement area: vertical (μm) 7 14 Measurement area: lateral (μm) 7.0 14.0 Measurement area: depth (μm) 7 14 Measurement area: volume (μm.sup.3) 343 2744 Volume of pores communicating 48.38 108.22 with outer surface (μm.sup.3) Maximum pore volume (μm.sup.3) 47.58 7.91 Porosity (%) 14 4 Relative density (%) 86 96 Volume density of pore portion 98.30 7.3 communicating with outer surface with respect to volume of all of the pores (%) (volume of pores communicating with outer surface/ all of the pores ×100
[0100] A relationship between the volume density of the pores communicating with the outer surface with respect to all of the pores and the entire porosity, which was derived from the results of the multipoint BET method and the observation of the three-dimensional SEM images described above, is shown in
[0101] Three white-background circles on the solid line at the top of
[0102] The lower solid line in
[0103] As shown here, in the sintered body, the crystal growth of the raw-material particles by sintering decreases the porosity, which leads to a decrease in the volume density of the pores communicating with the outer surface with respect to all of the pores.
[0104] The center dotted line in
[0105] The black rectangle on the dotted line is a plot of alumina described in the Japanese Patent Application Publication No. 2018-110527 and Uchida, Y. et al., Sumitomo Kagaku, 2000-I, p. 45 as a molding body, which is obtained by the normal one-step compression and has been conventionally known to have the minimum porosity, in a range in which crushing of the raw-material particles is suppressed as much as possible and is plotted on the solid line on the top of
[0106] It is considered to be possible to further reduce the porosity by performing sintering or molding as well as crushing the raw-material particles. However, crystal growth or crushing the raw-material particles by this process results in a decrease in the volume density of the pores communicating with the outer surface with respect to all of the pores as demonstrated by the dotted line.
[0107] The plots of the PZT sintered body and alumina reveals that, in the traditional ceramic-industrial method involving a heat treatment and crushing of raw-material particles, the maximum pore density tends to decrease because the decrease in porosity scatters the pores integrated in the pressed powder.
[0108] On the other hand, the highly dense aggregate according to the present invention is capable of maintaining almost 100% volume density of the pores communicating with the outer surface with respect to all of the pores, which is the same as a general pellet molding body prior to sintering, even in the case where the porosity is 20% or less because crushing the raw-material particles is suppressed as much as possible and no crystal growth occurs.
[0109] From the plots of alumina and the curve of the PZT sintered body, it is possible to show a limit region of the porosity and the volume density of the pores communicating with the outer surface with respect to all of the pores according to the traditional technology. Meanwhile, it is apparent that a structural member having porosity of 20% or less and 60 to 65% of volume density of pores communicating with an outer surface with respect to all pores can be manufactured by further sintering or pressing the highly dense aggregate according to the present invention, for example.
[0110] The average pore width between the particles of the highly dense aggregate of the present invention is preferred to be 200 nm or less in view of the impregnation with silicone oil, a liquid in which nanoparticles are dispersed, or a liquid resin described below. As described above, the specific surface area of the pore portions communicating with the outer surface of the highly dense PZT aggregate film subjected to the three-dimensional SEM image observation shown in
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[0112]
Example 2
Physical Properties of Highly Dense Aggregate Film Using PZT Particles
[0113] Next, a leak-current property and a polarization property of the highly dense aggregate film according to the present invention were studied. In order to evaluate the physical properties, an Au electrode with an area of 0.5 mm×0.5 mm and a thickness of 400 nm was deposited over each PZT surface with a sputtering method.
[0114] In the normal pressed powder with a porosity of approximately 35%, breakdown immediately occurred due to the extremely large leak current even if silicon oil is impregnated. On the other hand, in the highly dense PZT aggregate film with a porosity of 11% to 15%, the leak current decreased by approximately four orders of magnitude, and it was also confirmed that the leak current was further reduced by approximately one order of magnitude by impregnating with silicon oil. In addition, the highly dense PZT aggregate film impregnated with silicon oil and having a porosity of approximately 10% or less exhibited an excellent insulating property as proven by the leak current of 4.67×10.sup.−7 A/cm.sup.2 even under a highly applied electric field of 500 kV/cm.
[0115]
[0116] Both cases show a saturated polarization property, and the highly dense PZT aggregate film impregnated with silicon oil exhibited a residual polarization value (P.sub.r) of 38 μC/cm.sup.2 and an anti-electric field (E.sub.c) of 280 kV/cm, while P.sub.r and the anti-electric field (E.sub.c) respectively increased to 37 μC/cm.sup.2 and 400 kV/cm in the highly dense PZT aggregate film impregnated with the dispersion in which TiO.sub.2 nanoparticles are dispersed in ethanol.
[0117] These results suggest that the functionality of the highly dense PZT aggregate film can be controlled by impregnating nanoparticles, or a resin, or the like.
Example 3
Stack of Highly Dense Aggregate Sandwiched by Electrode Layers (FIG. 8)
(1) Manufacture of Unit 1
[0118] The PZT particles (average particle diameter: 1550 nm) serving as the first particles were attached onto a surface of a SUS 304 substrate (thickness of 20 μm).
[0119] The first PZT particles were prepared with a molten salt method using PZT-LQ powder manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD. The first PZT particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) and were transferred into a 50 cc glass vessel added with ethanol, and a dispersion treatment was carried out with ultrasonic waves of 350 W and 20 kHz using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750) for one minute. The dispersion was transferred into an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set) and was sprayed onto a SUS 304 substrate of a transfer plate prepared on a hot plate set at 60° C. in advance so that the first PZT particles were attached onto the surface of the SUS 304 substrate.
[0120] Second particles were attached onto the first particles so that the mixing ratio of the second particles (volume occupied by the second particles/volume of the summation of the first particles and the second particles) fell within 15% to 30%.
[0121] The spray painting of the second particles was carried out similar to that of the first particles. PZT particles (average particle diameter: 150 nm) were used as the second particles. The second particles were obtained as follows: a sintered body was first prepared using PZT-LQ powder of SAKAI CHEMICAL INDUSTRY CO., LTD, the sintered body was transformed into powder with a mortar, the powder was added into a zirconia ball mill pot together with zirconia balls and acetone and crushed by a planetary ball mill, the powder obtained by evaporating acetone was dispersed in ethanol and was treated in a centrifuge, and then a classification treatment was performed. Similar to the first PZT particles, the second PZT particles were also attached onto the first PZT particles by dispersing the second PZT particles in ethanol and then spraying this dispersion on a surface of the SUS 304 substrate on which the PZT particles have been attached.
[0122] The SUS 304 substrate on which the first and second particles were attached was retrieved from the hot plate and was cut into a plurality of circular plates with a diameter of 13 mm, and a base material of an aluminum foil (thickness of 20 μm) to which an aluminum terminal with a width of 1 mm and a length of 5 mm was attached was sandwiched by the first and second particles attached to the SUS 304 substrates and was applied with a fixing pressure so that the PZT particles were fixed on both surfaces of the base material of the aluminum foil to transfer the first particles and the second particles on both surfaces of the base material.
[0123] The base material is preferred to be a metal with an elastic modulus of 180 GPa or lower or carbon. The fixing pressure is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2 GPa or lower.
[0124] In this experiment, after the first and second particles were transferred onto both surfaces of the aluminum foil at 450 MPa eight times, the aluminum foil was pressed at 900 MPa using hard chromium-plated steel to deposit the PZT layers each having a 20 μm thickness on both surfaces of the aluminum foil and exhibiting an insulating property.
[0125] A highly dense aggregate film having electric conductivity may be interposed between the base material and the highly dense PZT aggregate film which has insulating properties.
[0126] As a comparable reference example, a mesh foil having electrical conductivity was used as a base material, and the transfer of the first and second PZT particles was attempted. The mesh foil having electrical conductivity was prepared by forming, with sputtering, gold electrodes on both surfaces of PET in which holes with a diameter of 250 μmφ were formed with a 300 μm pitch by laser processing.
[0127] A microscopy picture of the obtained aggregate film is shown in
[0128] Next, electrode layers were deposited on the surfaces of the highly dense PZT aggregate films on both sides by depositing gold of 1 cm.sup.2 with sputtering.
[0129] The deposition of these electrode layers is preferably performed with a deposition method which does not close the pores of the highly dense aggregate film because the highly dense PZT aggregate film is impregnated with PMMA in the next process. The method may be a sputtering method or a vacuum evaporation method, and the deposition may be performed by forming a highly dense aggregate film having electrical conductivity.
[0130] Both sides of the highly dense PZT aggregate film on which the gold electrodes were formed with sputtering were impregnated with PMMA dissolved in PEGMEA and sandwiched by 1 cm.sup.2 mesh foils having electrical conductivity to which a terminal with a width of 1mm and a length of 5 mm was attached, and PEGMEA was vaporized at 60° C. while pressing at 6 N/cm.sup.2 to precipitate PMMA.
[0131] In this experiment, the mesh foils having electrical conductivity were prepared by forming, with sputtering, gold electrodes on both surfaces of a PET in which the 25 μmφ holes with a 300 μm pitch were prepared with laser processing. However, the foils are preferred to be a foil prepared by forming similar minute holes in a metal film, cloth woven with yarn having electrical conductivity such as a metal and carbon, or a mesh foil having electrical conductivity manufactured with a 3D printer.
[0132] The relative permittivity of the unit 1 obtained by this way was 136.
[0133] As a comparable reference example, the electrode layer was not provided, and the mesh foils having electrical conductivity were directly bonded, using PMMA dissolved in PEGMEA, onto the highly dense aggregate films on both surfaces of the base material. The relative permittivity of the obtained unit was 0.67.
[0134] These results suggest that close adherence sufficient for an electrode cannot be obtained with respect to the highly dense PZT aggregate when only the mesh foils having electrical conductivity is used.
[0135] As a comparable reference example, the mesh foils having electrical conductivity and the highly dense PZT aggregate film were directly contacted without PMMA dissolved in PEGMEA, and a fixing pressure of 1 GPa was applied to attempt bonding. However, as shown in
(2) Manufacture of Unit 2
[0136] Three elements of the unit 1 manufactured in (1) described above were stacked (unit 2). PMMA dissolved in PEGMEA was impregnated between the units 1, and PEGMEA was evaporated to precipitate PMMA while pressing at 6 N/cm.sup.2 at 60° C.
[0137] With this process, an integrated electrical element unit was prepared in which the units 1 are not required to be held with a pressing tool or the like while stacking the units 1.
Example 4
Removal of Resin Cured on Surface of Highly Dense Aggregate Film
[0138] It is extremely difficult to impregnate the press-molded highly dense aggregate film with a resin without any excess and deficiency and to cure the resin in order to expose only the surface of the highly dense aggregate film. For example, when a liquid including a resin such as PMMA dissolved in a solvent is impregnated and then PMMA is precipitated by vaporizing the solvent, there are problems whereby a volume decrease caused by vaporization of the solvent does not allow the precipitated resin to reach the surface of the highly dense aggregate film or whereby application of an excessive amount of liquid results in precipitation of an excessive resin to form a surface layer. In addition, when an epoxy resin or the like is impregnated, there is a problem whereby an attempt to prune the excessive resin overflowing on the surface with silicone rubber or the like prior to curing readily destroys the highly dense aggregate film prepared only by press molding.
[0139] For example, when an upper electrode is formed with a sputtering method or the like in a state where the excessive resin on the highly dense aggregate film exhibiting a ferroelectric property is precipitated to form a surface layer, there is a problem whereby the ferroelectric and piezoelectric properties are not exhibited because an electric field is concentrated on the precipitated excessive resin between the upper electrode and the ferroelectric and highly dense aggregate film. Moreover, when the resin is impregnated after the upper electrode is deposited on the highly dense aggregate film in advance and then the resin is precipitated to form the surface layer, a problem arises whereby the precipitated excessive resin in the surface layer inhibits the connection between the upper electrode and a circuit.
[0140] The inventors found that there are differences in the dissolving rate into an organic solvent and in the swelling rate when soaked in the organic solvent between the resin which is impregnated in the highly dense aggregate film and then cured and the resin cured on the surface to become the surface layer, and that the manufacturing method can solve the aforementioned problems. Next, a specific manufacturing method is explained using PZT as an example.
[0141] PZT particles (average particle diameter: 1550 nm) serving as the first particles were attached on a surface of a stainless SUS 304 base material (thickness of 20 μm).
[0142] The first PZT particles were prepared with a molten salt method using PZT-LQ powder manufactured by SAKAI CHEMICAL INDUSTRY CO., LTD. The first PZT particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) and were transferred into a 50 cc glass vessel added with ethanol, and a dispersion treatment was carried out with ultrasonic waves of 350 W and 20 kHz using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750) for one minute. The dispersion was transferred into an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set) and was sprayed onto the SUS 304 base material serving as a transfer plate placed on a hot plate set at 60° C. in advance so that the first PZT particles were attached onto the surface of the SUS 304 base material.
[0143] Next, second particles were attached onto the first particles so that the mixing ratio of the second particles (volume occupied by the second particles/volume of the summation of the first particles and the second particles) fell within 15% to 30%.
[0144] The spray painting of the second particles was the same as that of the first particles. PZT particles (average particle diameter: 150 nm) were used as the second particles. The second particles were obtained as follows: a sintered body was first prepared using PZT-LQ powder of SAKAI CHEMICAL INDUSTRY CO., LTD, the sintered body was transformed into powder with a mortar, the powder was added into a zirconia ball mill pot together with zirconia balls and acetone and crushed by a planetary ball mill, the powder obtained by evaporating acetone was dispersed in ethanol and was treated in a centrifuge, and then a classification treatment was carried out. Similar to the first PZT particles, the second PZT particles were also attached onto the first PZT particles by dispersing the second PZT particles in ethanol and then spraying this dispersion on a surface of the SUS 304 base material on which the first PZT particles have been attached.
[0145] The SUS 304 base material on which the first and second particles were attached was retrieved from the hot plate and was cut into a plurality of 1 cm.sup.2 of circular plates, the first and second particles were pressed against a base material of an aluminum foil (thickness of 20 μm), and the pressure transfer was carried out to fix the first and second particles onto the base material.
[0146] The base material is preferred to be a metal with an elastic modulus of 180 GPa or lower or carbon. The fixing pressure is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2 GPa or lower. In this experiment, pressure of 1000 MPa was applied. The pressure transfer of the first and second particles onto the aluminum base material from the SUS 304 base material was repeated nine times, by which a highly dense PZT aggregate film was stacked over the aluminum foil.
[0147] Next, an epoxy resin was impregnated so as to cover the surface as shown in
[0148] Next, several milliliters of cyclohexane were applied on the sample surface and left to stand for 30 minutes to swell only the excessive epoxy resin of the surface layer as shown in
[0149]
[0150] Although the cured excessive epoxy resin of the surface layer contacts with cyclohexane through a “plane”, the epoxy resin impregnating into the highly dense PZT aggregate film hardly swells because cyclohexane reaching the epoxy resin contacts therewith through a “point”, which is considered to be a reason why only the epoxy resin of the surface layer can be removed.
[0151]
[0152] In addition, although a Kapton adhesive tape was put on the surface of the highly dense PZT aggregated film which exhibited the saturated hysteresis loop and was impregnated with the epoxy resin and then peeled off, the highly dense PZT aggregated film did not peel from the aluminum foil of the base material. On the other hand, the highly dense PZT aggregated film impregnated with silicon oil readily peeled from the aluminum foil of the base material.
[0153] Thus, the highly dense aggregated film having high bonding intensity and ceramic functionality was fabricated.
Example 5
Preparation of Sheet-Shaped All-Solid-State Lithium Ion Battery Having Flexibility
[0154] There is a problem whereby all-solid-state lithium ion batteries using a polymer-based solid-state electrolyte can be charged and discharged only at a temperature equal to or higher than 50° C. because the ion conductivity thereof is lower than that of liquid electrolyte solutions. Moreover, the polymer-based electrolytes also have a problem whereby they are viscous and require a long time for impregnation as well as a problem in increasing energy density by arranging active materials at a high density. It was found that the highly dense aggregate film according to the present invention has a feature where a liquid is impregnated throughout and that diffusing and moving distances of lithium ions can be drastically reduced and an all-solid-state lithium ion battery operable at a room temperature can be prepared by using this structural member in an electrode layer to impregnate a polymer-based solid-state electrolyte.
[0155] This all-solid-state lithium ion battery is preferred to include a positive electrode sheet in which a highly dense aggregate film of a positive electrode active material is formed over a base material and a negative electrode sheet in which a negative electrode active material is formed over a base material and is preferred to have a feature where a polymer-based electrolyte is impregnated between this positive electrode sheet and negative electrode sheet. This polymer-based electrolyte may be a non-crosslinked polymer-based electrolyte but is preferred to be a cured polymer-based solid-state electrolyte by crosslinking. Moreover, it is preferred to include a polymer-based electrolyte layer between the highly dense aggregate film of the positive electrode active material and the highly dense aggregate film of the negative electrode active material.
[0156] A thickness of the highly dense aggregate film of the positive electrode sheet and a thickness of the highly dense aggregate film of the negative electrode sheet are each preferred to be approximately 3 μm to 50 μm and may be between 1 μm and 300 μm. Moreover, the porosity of the highly dense aggregate film of the positive electrode sheet is preferred to be equal to or less than 20%, whereas the porosity of the highly dense aggregate film of the negative electrode sheet may be equal to or less than 35%.
[0157] The positive electrode active material is not limited to the following materials, and lithium cobalate (LOC), lithium manganate, lithium nickelate, nickel-cobalt-manganese oxide, nickel-cobalt-aluminum oxide, lithium iron phosphate, and the like are represented.
[0158] The negative electrode active material is not limited to the following materials, and lithium titanate (LTO), carbon, metal silicon, and the like are represented.
[0159] The base material of the positive electrode sheet is preferred to be aluminum but is preferred to be a metal coated with corrosion-resistant Au or Pt and having a modulus of 180 GPa or less or carbon. A thickness of the base material of the positive electrode sheet is preferred to be between 10 μm and 30 μm but may be between 5 μm and 50 μm.
[0160] The base material of the negative electrode sheet is preferred to be aluminum coated with Au at a thickness of 10 nm to 1 μm but may be a metal coated with Cu or Pt resistant to Li.sup.+ and having a modulus of 180 GPa or less or carbon. A thickness of the base material of the negative electrode sheet is preferred to be between 10 μm and 30 μm but may be between 5 μm and 50 μm.
[0161] The polymer-based electrolyte layer is preferred to be a non-crosslinked polymer-based electrolyte but is preferred to include a polymer-based solid-state electrolyte cured by crosslinking. In addition, although the higher the ion conductivity of the polymer-based electrolyte layer the better, the ion conductivity of 1×10.sup.−6 S/cm to 1 S/cm is acceptable. A thickness of the polymer-based electrolyte layer is preferred to be from 1 μm to 20 μm but may be between 100 nm and 50 μm.
[0162] Next, an example of specific manufacturing methods is explained.
[0163] Powder of LiCoO.sub.2 (LCO) was used as the positive electrode active material. This powder is commercially available (“CELLSEED 5hV” manufactured by Nippon Chemical Industrial CO., LTD.). Into a 500 cc vessel made of zirconia (manufactured by Fritsch Japan Co., Ltd.) were added 0. 5g of LCO, 50 mL of ethanol, and balls of silicon nitride (total amount of approximately 500 g uniformly including 10 mmφ, 5 mmφ, and 2 mmφ balls), and LCO was crushed with a planetary ball mill (P-6 Classic Line manufactured by Fritsch Japan Co., Ltd.) at 200 rpm for 12 hours.
[0164] Ethanol was added so that the liquid ejected from the planetary ball mill amounts to 250 mL, and centrifuge was carried out at centrifuge force of 470×g for 5 minutes. A SEM image of the precipitated particles is shown in
[0165] Next, an alumina-coated SUS 304 foil was prepared by depositing an alumina film having a thickness of approximately 1 μm over a stainless SUS 304 foil (thickness of 20 μm) with an AD method. The LCO particles which will become the first particles were attached onto the alumina film surface. The first LCO particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) and transferred to a 50 cc glass vessel to which super-dehydrated heptane was added, a dispersion treatment was carried out with supersonic waves of 150 W and 20 kHz for one minute using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750), the dispersion was transferred to an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set), the alumina-coated SUS 304 foil of a transfer plate prepared on a hot plate set at 70° C. in advance was spray-painted so that the first LCO particles were attached onto the surface of the alumina-coated SUS 304 foil.
[0166] Next, the second LCO particles were attached onto the first LCO particles so that the mixing ratio of the second particles (volume occupied by the second particles/total volume of the first particles and the second particles) fell between 15% and 35%. The second LCO dispersion was used to perform the spray-painting of the LCO second particles. Similar to the first LCO particles, the second LCO particles were attached onto the first LCO particles by spraying the second LCO dispersion on the surface of the alumina-coated SUS 304 foil to which the LCO particles have been attached.
[0167] The alumina-coated SUS 304 foil onto which the first and second LCO particles were attached was retrieved from the hot plate and was subjected to a heating treatment at 350° C. under air with the dew-point temperature of −40° C. for 5 minutes.
[0168] Next, a base material of a rectangular aluminum foil (area of 6 mm×10 mm, thickness of 12 μm) was prepared. In order to readily and visually confirm that is the positive electrode sheet, an Au film with a 400 nm thickness was formed, with sputtering, on a surface opposite to a surface which fixes the LCO with the rectangular aluminum foil. The first and second LCO particles were pressed against the aluminum surface under air with a dew-point temperature of −40° C., and the pressure transfer was performed to fix the particles onto the base material. The fixing pressure is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2 GPa or lower. In this experiment, pressure of 420 MPa was applied. The pressure transfer of the first and second particles onto the aluminum foil base material from the alumina-coated SUS 304 foil was repeated four times, by which a highly dense LCO aggregate film was stacked over the aluminum foil. The thickness of the highly dense LCO aggregate film was approximately 5 μm. The positive electrode sheet was obtained by these methods.
[0169] Powder of Li.sub.4Ti.sub.5O.sub.12 (LTO) was used as the negative electrode active material. As this powder, commercially available LTO particles whose surfaces were coated by carbon (LTO-2 manufactured by Xiamen Tmax Battery Equipments Limited) and the powder synthesized from reagents were used.
[0170] First, a dispersion in which 1 g of the commercially available carbon-coated LTO particles were dispersed in 25 0mL of ethanol was prepared and was centrifuged at centrifuge force of 75×g, and the liquid was recovered and was sufficiently dried to obtain powder. The particles of this powder were used as the first LTO particles. A SEM image of these particles is shown in
[0171] Next, lithium carbonate (LIH06XB manufactured by Kojundo Chemical Lab. Co., Ltd.) and titanium oxide (TIO14PB manufactured by Kojundo Chemical Lab. Co., Ltd.) were weighted so as to amount to 20 g of a stoichiometric ratio of Li.sub.4Ti.sub.5O.sub.12 , added to a 500 cc vessel made of zirconia (manufactured by Fritsch Japan Co., Ltd.) together with 200 mL of ethanol and balls of silicon nitride (total amount of approximately 500 g uniformly including 10 mmφ, 5 mmφ, and 2 mmφ balls), and crushed and mixed with a planetary ball mill (P-6 Classic Line manufactured by Fritsch Japan Co., Ltd.) at 500 rpm for 2 hours. After the obtained liquid was transferred to a tray and sufficiently dried at 80° C., the obtained mixed powder was transferred to an alumina crucible, and a thermal treatment was carried out at 800° C. for 6 hours. The obtained powder was added again to a 500 cc vessel made of zirconia (manufactured by Fritsch Japan Co., Ltd.) together with 200 mL of ethanol and balls of silicon nitride (total amount of approximately 500 g uniformly including 10 mmφ, 5 mmφ, and 2 mmφ balls), crushed with a planetary ball mill (P-6 Classic Line manufactured by Fritsch Japan Co., Ltd.) at 500 rpm for 2 hours, transferred to a tray, and sufficiently dried at 80° C. to obtain a powder, and the obtained powder was transferred to an alumina crucible and subjected to a thermal treatment at 800° C. for 6 hours to obtain LTO powder.
[0172] To a 500 cc vessel made of zirconia (manufactured by Fritsch Japan Co., Ltd.) were added 1 g of this LTO powder, 50 mL of ethanol, and balls of silicon nitride (total amount of approximately 500 g uniformly including 10 mmφ, 5 mmφ, and 2 mmφ balls), and crush was carried out with a planetary ball mill (P-6 Classic Line manufactured by Fritsch Japan Co., Ltd.) at 250 rpm for 18 hours. After ethanol was added so that the obtained liquid amounted to 500 mL, centrifugation was carried out at centrifuge force of 836×g for 15 minutes, and ethanol was evaporated in a vacuum drier so that the centrifuged liquid amounted to 100 mL. The condensed liquid was used as the second LTO solution. Moreover, half of the second LTO solution (50 mL) was transferred to another vessel and further dried in a vacuum dryer sufficiently to obtain LTO powder. This LTO powder was used as the second LTO particles. An SEM image of the second LTO particles is shown in
[0173] Next, an alumina-coated SUS 304 foil was prepared by depositing an alumina film having a thickness of approximately 1 μm over a stainless SUS 304 foil (thickness of 20 μm) by an AD method. The LCO particles which will become the first particles were attached onto the alumina film surface. The first LCO particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) and transferred to a 50 cc glass vessel to which ethanol was added, a dispersion treatment was carried out with supersonic waves of 150 W and 20 kHz for one minute using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750), the dispersion was transferred to an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set), the alumina-coated SUS 304 foil of a transfer plate prepared on a hot plate set at 70° C. in advance was spray-painted with the dispersion so that the first LCO particles were attached onto the surface of the alumina-coated SUS 304 foil.
[0174] Next, the second LTO particles and the first LTO particles were each weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200) so that the mixing ratio of the second LTO particles (volume occupied by the second particles/total volume of the first particles and the second particles) was approximately 25%, transferred to a 50 cc glass vessel to which ethanol was added, and subjected to a dispersion treatment with supersonic waves of 150 W and 20 kHz for one minute using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750) to prepare a dispersion. Similar to the first LTO particles, the alumina-coated SUS 304 film onto which the first LTO particles were attached was sprayed with the dispersion including the first and second LTO particles to attach the mixture of the first and second LTO particles onto the first LTO particles.
[0175] Next, the second LTO particles were attached onto the LTO particles in which the first and second LTO particles were mixed so that the mixing ratio of the first LTO particles and the second LTO particles initially attached by spraying fell between 15% and 35%. The second LTO dispersion was used for the spray-painting of the second LTO particles.
[0176] The alumina-coated SUS 304 foil onto which the first and second LTO particles were attached was retrieved from the hot plate and was subjected to a heating treatment at 350° C. under an atmosphere with a dew-point temperature of −75° C. or lower for 5 minutes.
[0177] A base material of a rectangular aluminum foil (area of 8 mm×12 mm, thickness of 13 μm) on which an Au film with a 400 nm thickness was formed by sputtering was prepared, the first and second LTO particles were pressed against a surface on which the Au film was formed by sputtering under air with a dew-point temperature of −40° C. or lower, and the pressure transfer was carried out to fix the first and second LTO particles onto the base material. This Au sputtering film is a barrier layer to inhibit the aluminum to react with Li.sup.+ and may be a copper or Pt film highly resistant to Li.sup.+. The fixing pressure is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2 GPa or lower. In this experiment, pressure of 420 MPa was applied. The pressure transfer of the first and second particles onto the aluminum foil base material from the alumina-coated SUS 304 foil was repeated four times, by which a highly dense LTO aggregate film was stacked over the aluminum foil. The thickness of the highly dense LTO aggregate film was approximately 5 μm. The negative electrode sheet was obtained by these methods.
[0178] A method for impregnating a polymer-based solid-state electrolyte into the positive electrode sheet and the negative electrode sheet and for bonding the positive electrode sheet and the negative electrode sheet with the polymer-based solid-state electrolyte to provide an all-solid-state lithium ion battery is explained. A commercially available “product name: all-solid-state polymer-based electrolyte” (a 20 wt % polymer-based electrolyte and a crosslinking initiator dissolved in acetonitrile) manufactured by OSAKA SODA CO., LTD.) was used as the polymer-based solid-state electrolyte. The ion conductivity of the all-solid-state polymer-based electrolyte synthesized in this experiment was 2×10.sup.−5 S/cm.
[0179]
[0180] As a comparative reference example, an all-solid-state lithium ion battery having a commercially available all-solid-state polymer-based electrolyte sheet (ion conductivity: 5×10.sup.−5S/cm) with a 50 μm thickness between the positive electrode sheet and the negative electrode sheet, which is shown in
[0181] Charge-discharge curves of the fabricated all-solid-sate lithium ion batteries are shown in
[0182] From these results, it was proven that an oxide-based all-solid-state lithium ion battery operable even at room temperature can be fabricated by entirely impregnating a polymer-based solid-state electrolyte in the highly dense aggregate film.
Example 6
Bendable All-Solid-State Lithium Ion Battery Having Flexibility
[0183] In traditional lithium ion batteries, high capacity is realized by accommodating a rolled electrode sheet in a housing as performed in the “quadrangular-prism lithium ion batteries” or by taking out and bonding terminals from edges of stacked battery sheets as performed in the “lamination-type lithium ion batteries”. However, there is a problem whereby the shape of the whole of the battery is limited by the shape of the housing and the process to take out the terminals from the edges.
[0184] The inventors found that a bendable battery sheet having flexibility can be fabricated by using the highly dense aggregate film as an electrode layer, impregnating a polymer-based solid-state electrolyte into this structural member, and embedding ceramic particles in the polymer-based electrolyte layer. It is considered that the use of this battery sheet enables the production of a battery with a high degree of freedom in shape as exemplified by a folded battery shape demonstrated in
[0185] This bendable sheet having flexibility is preferred to include a polymer-based solid-state electrolyte layer embedding ceramic particles between the aforementioned positive electrode sheet and the negative electrode sheet impregnated with the polymer-based solid-state electrolyte as shown in
[0186] Next, an example of a specific manufacturing method for the bendable all-solid-sate lithium ion battery with flexibility is explained.
[0187] Alumina particles (SumicorundumAA-2 manufactured by Sumitomo Chemical Co., Ltd., average particle diameter: 2 μm) were attached on a surface of a stainless SUS 304 base material (thickness of 20 μm).
[0188] The AA-2 particles were weighted with a micro-analytical balance (SHIMADZU, Model: AEM-5200), transferred to a 50 cc glass vessel to which ethanol was added, and subjected to a dispersion treatment with supersonic waves of 150 W and 20 kHz for one minute using an ultrasonic homogenizer (manufactured by SONIC & MATERIALS, model: VCX750), and the dispersion was transferred to an air-brush painting system (manufactured by GSI Creos Corporation, PS311 Air Brush Set). A SUS 304 base material of a transfer plate prepared on a hot plate set at 60° C. in advance was spray-painted with the dispersion so that the AA-2 particles were attached onto the surface of the SUS 304 base material.
[0189] The SUS304 base material on which the AA-2 particles were attached was retrieved from the hot plate and subjected to a thermal treatment at 350° C. for 5 minutes under an environment of a dew-point temperature of −40° C. or lower, and then the AA-2 particles were pressed against a positive electrode sheet and a negative electrode sheet to perform the pressure transfer. The preparation of the positive electrode sheet and the negative electrode sheet was the same as that of Example 5. The pressure of the pressure transfer is preferred to be lower than a pressure under which the raw-material particles are crushed and to be 2GPa or lower. In this experiment, pressure of 420 MPa was applied. The pressure transfer of the AA-2 particles onto the positive electrode sheet and the negative electrode sheet from the SUS 304 base material was carried out once.
[0190] Next, similar to Example 5, each of the positive electrode sheet and the negative electrode sheet on which the AA-2 was attached was impregnated with the 20 wt % of all-solid-state polymer-based electrolyte manufactured by OSAKA SODA CO., LTD., acetonitrile was sufficiently evaporated, the highly dense aggregate film of the positive electrode and the aggregate film of the negative electrode were bonded so that air is not included, and then a press pressure of 7 kN was applied to squeeze the excessive polymer-based electrolyte prior to crosslinking so that the battery sheet was prepared. The thickness of the polymer-based electrolyte layer was approximately 5 μm that was thinner than that of Example 5.
[0191] When the excessive polymer-based electrolyte was squeezed by the press treatment for the battery sheet including the polymer-based electrolyte layer containing no ceramic particles like that of Example 5, the highly dense aggregate film of the positive electrode and the aggregate film of the negative electrode came into contact and short-circuited.
[0192] After an edge of the obtained battery sheet was folded by 180°, a thermal treatment was carried out at 70° C. for 1 hour under the conditions that the dew-point temperature was −70° C. or lower and the oxygen concentration was 50 ppm or lower to crosslink the polymer-based electrolyte so that the battery sheet was wholly transformed to a solid state. Photographs of the folded all-solid-state lithium ion battery sheet are shown in
[0193] The charge and discharge characteristics of the folded all-solid-state lithium ion battery sheet are shown in
[0194] As a reference, comparison of impedance characteristics of a polymer-based solid-state electrolyte having a thickness of 9 μm and interposed between aluminum foils with a thickness of 13 μm before and after folding is shown in
[0195] From these results, it was confirmed that an all-solid-state lithium ion battery having flexibility and a folded shape can be manufactured.