Wide injection range open circuit voltage decay system
11143694 · 2021-10-12
Assignee
Inventors
Cpc classification
G01R31/2891
PHYSICS
G01R31/2642
PHYSICS
G01R3/00
PHYSICS
H01L2924/0002
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L22/20
ELECTRICITY
International classification
G01R31/00
PHYSICS
G01R3/00
PHYSICS
Abstract
A system, method and apparatus for measuring carrier lifetime of a device comprises subjecting a test device to a voltage via a voltage source associated with the test system, disconnecting the test device from the voltage source, measuring the voltage as a function of time, measuring the current as a function of time, and determining a carrier lifetime of the test piece according to the slope of the measured voltage and the measured current.
Claims
1. A system comprising: a voltage source; a switch configured to disconnect a test piece from said voltage source; an assembly configured to collect a voltage versus time measurement and a current versus time measurement; and an analytics module comprising at least one processor and a storage device communicatively coupled to the at least one processor, the storage device comprising non-transitory computer-readable media which, when executed by the at least one processor, cause the at least one processor to perform operations comprising: identifying a carrier lifetime of said test piece according to said measured voltage versus time and said measured current versus time.
2. The system of claim 1 wherein said voltage source further comprises a pulsed voltage source.
3. The system of claim 1 further comprising: at least two low equivalent series resistance capacitors charged by said voltage source.
4. The system of claim 1 where said analytics module is further configured for: determining a slope of a waveform collected from said voltage versus time measurement and said current versus time measurement; and calculating a carrier lifetime from said slope.
5. The system of claim 1 further comprising: a control configured to provide a variable sampling rate for said voltage versus time measurement.
6. The system of claim 1 wherein said current versus time measurement is applicable to current in a range from 1 milliamp to 100 amps.
7. The analytics system of claim 1 wherein said work piece comprises a p-n junction device.
8. An analytics apparatus comprising: a voltage source; a switch configured to disconnect a test piece from said voltage source; an assembly for measuring a voltage versus time and a current versus time; and an analytics module comprising at least one processor and a storage device communicatively coupled to the at least one processor, the storage device comprising non-transitory computer-readable media which, when executed by the at least one processor, cause the at least one processor to perform operations comprising: identifying a carrier lifetime of said test piece according to said measured voltage versus time and said measured current versus time.
9. The analytics apparatus of claim 8 wherein said voltage source further comprises a pulsed voltage source.
10. The analytics apparatus of claim 8 further comprising: at least two low equivalent series resistance capacitors charged by said voltage source.
11. The analytics apparatus of claim 8 where said analytics module is further configured for: determining a slope of a waveform collected from said voltage versus time measurement and said current versus time measurement; and calculating a carrier lifetime from said slope.
12. The analytics apparatus of claim 8 further comprising: a control configured to provide a variable sampling rate for said voltage versus time measurement.
13. The analytics apparatus of claim 8 wherein said current versus time measurement is applicable to current in a range from 1 milliamp to 100 amps.
14. The analytics apparatus of claim 8 wherein said work piece comprises a p-n junction device.
15. A method for measuring carrier lifetime said method comprising: subjecting a test device to a voltage via a voltage source associated with a test system; disconnecting said test device from said voltage source; measuring a voltage as a function of time; measuring a current as a function of time; and determining a carrier lifetime of said test device according to said measured voltage and said measured current.
16. The method of claim 15 wherein said voltage source further comprises a pulsed voltage source.
17. The method of claim 15 further comprising: charging at least two low equivalent series resistance capacitors with said voltage source.
18. The method of claim 15 further comprising: determining a slope of a waveform of said voltage as a function of time and said current as a function of time; and calculating a carrier lifetime from said slope.
19. The method of claim 15 wherein a variable sampling rate control is used to collect said voltage as a function of time; and wherein a monitored current range comprises 1 milliamp to 100 amps.
20. The method of claim 15 wherein said test device comprises a p-n junction device.
Description
BRIEF DESCRIPTION OF THE FIGURES
(1) The accompanying figures, in which like reference numerals refer to identical or functionally-similar elements throughout the separate views and which are incorporated in and form a part of the specification, further illustrate the embodiments and, together with the detailed description, serve to explain the embodiments disclosed herein.
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DETAILED DESCRIPTION
(16) The particular values and configurations discussed in these non-limiting examples can be varied and are cited merely to illustrate at least one embodiment and are not intended to limit the scope thereof.
(17) U.S. Provisional patent application 62/577,888, filed Oct. 27, 2017 titled “Wide Injection Range Open Circuit Voltage Decay System” is herein incorporated by reference in its entirety.
(18) Example embodiments will now be described more fully hereinafter with reference to the accompanying drawings, in which illustrative embodiments are shown. The embodiments disclosed herein can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the embodiments to those skilled in the art. Like numbers refer to like elements throughout.
(19) The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms “a”, “an”, and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprise” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
(20) Throughout the specification and claims, terms may have nuanced meanings suggested or implied in context beyond an explicitly stated meaning. Likewise, the phrase “in one embodiment” as used herein does not necessarily refer to the same embodiment and the phrase “in another embodiment” as used herein does not necessarily refer to a different embodiment. It is intended, for example, that claimed subject matter include combinations of example embodiments in whole or in part.
(21) Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
(22) It is contemplated that any embodiment discussed in this specification can be implemented with respect to any method, kit, reagent, or composition of the invention, and vice versa. Furthermore, compositions of the invention can be used to achieve methods of the invention.
(23) It will be understood that particular embodiments described herein are shown by way of illustration and not as limitations of the invention. The principal features of this invention can be employed in various embodiments without departing from the scope of the invention. Those skilled in the art will recognize or be able to ascertain using no more than routine experimentation, numerous equivalents to the specific procedures described herein. Such equivalents are considered to be within the scope of this invention and are covered by the claims.
(24) The use of the word “a” or “an” when used in conjunction with the term “comprising” in the claims and/or the specification may mean “one,” but it is also consistent with the meaning of “one or more,” “at least one,” and “one or more than one.” The use of the term “or” in the claims is used to mean “and/or” unless explicitly indicated to refer to alternatives only or the alternatives are mutually exclusive, although the disclosure supports a definition that refers to only alternatives and “and/or.” Throughout this application, the term “about” is used to indicate that a value includes the inherent variation of error for the device, the method being employed to determine the value, or the variation that exists among the study subjects.
(25) As used in this specification and claim(s), the words “comprising” (and any form of comprising, such as “comprise” and “comprises”), “having” (and any form of having, such as “have” and “has”), “including” (and any form of including, such as “includes” and “include”) or “containing” (and any form of containing, such as “contains” and “contain”) are inclusive or open-ended and do not exclude additional, unrecited elements or method steps.
(26) The term “or combinations thereof” as used herein refers to all permutations and combinations of the listed items preceding the term. For example, “A, B, C, or combinations thereof” is intended to include at least one of: A, B, C, Aft AC, BC, or ABC, and if order is important in a particular context, also BA, CA, CB, CBA, BCA, ACB, BAC, or CAB. Continuing with this example, expressly included are combinations that contain repeats of one or more item or term, such as BB, AAA, Aft BBC, AAABCCCC, CBBAAA, CABABB, and so forth. The skilled artisan will understand that typically there is no limit on the number of items or terms in any combination, unless otherwise apparent from the context.
(27) All of the compositions and/or methods disclosed and claimed herein can be made and executed without undue experimentation in light of the present disclosure. While the compositions and methods of this invention have been described in terms of preferred embodiments, it will be apparent to those of skill in the art that variations may be applied to the compositions and/or methods and in the steps or in the sequence of steps of the method described herein without departing from the concept, spirit and scope of the invention. All such similar substitutes and modifications apparent to those skilled in the art are deemed to be within the spirit, scope and concept of the invention as defined by the appended claims.
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(29) A block diagram of a computer system 100 that executes programming for implementing the methods and systems disclosed herein is shown in
(30) Computer 110 may include or have access to a computing environment that includes input 116, output 118, and a communication connection 120. The computer may operate in a networked environment using a communication connection to connect to one or more remote computers or devices. The remote computer may include a personal computer (PC), server, router, network PC, a peer device or other common network node, or the like. The remote device may include a sensor, photographic camera, video camera, tracking device, or the like. The communication connection may include a Local Area Network (LAN), a Wide Area Network (WAN) or other networks. This functionality is described in more fully in the description associated with
(31) Output 118 is most commonly provided as a computer monitor, but may include any computer output device. Output 118 may also include a data collection apparatus associated with computer system 100. In addition, input 116, which commonly includes a computer keyboard and/or pointing device such as a computer mouse, computer track pad, or the like, allows a user to select and instruct computer system 100. A user interface can be provided using output 118 and input 116. Output 118 may function as a display for displaying data and information for a user and for interactively displaying a graphical user interface (GUI) 130.
(32) Note that the term “GUI” generally refers to a type of environment that represents programs, files, options, and so forth by means of graphically displayed icons, menus, and dialog boxes on a computer monitor screen. A user can interact with the GUI to select and activate such options by directly touching the screen and/or pointing and clicking with a user input device 116 such as, for example, a pointing device such as a mouse, and/or with a keyboard. A particular item can function in the same manner to the user in all applications because the GUI provides standard software routines (e.g., module 125) to handle these elements and report the user's actions. The GUI can further be used to display the electronic service image frames as discussed below.
(33) Computer-readable instructions, for example, program module 125, which can be representative of other modules described herein, are stored on a computer-readable medium and are executable by the processing unit 102 of computer 110. Program module 125 may include a computer application. A hard drive, CD-ROM, RAM, Flash Memory, and a USB drive are just some examples of articles including a computer-readable medium.
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(35) In the depicted example, sensor 204, external device 205, and server 206 connect to network 202 along with storage unit 208. In addition, clients 210, 212, and 214 connect to network 202. These clients 210, 212, and 214 may be, for example, personal computers, network computers, mobile devices, or tablet devices. Computer system 100 depicted in
(36) Computer system 100 can also be implemented as a server such as server 206, depending upon design considerations. In the depicted example, server 206 provides data such as boot files, operating system images, applications, and application updates to clients 210, 212, and 214, and/or to sensor 204 and external device 205. Clients 210, 212, and 214 and video sensor 204 are clients to server 206 in this example. Network data-processing system 200 may include additional servers, clients, and other devices not shown. Specifically, clients may connect to any member of a network of servers, which provide equivalent content.
(37) In the depicted example, network data-processing system 200 is the Internet with network 202 representing a worldwide collection of networks and gateways that use the Transmission Control Protocol/Internet Protocol (TCP/IP) suite of protocols to communicate with one another. At the heart of the Internet is a backbone of high-speed data communication lines between major nodes or host computers consisting of thousands of commercial, government, educational, and other computer systems that route data and messages. Of course, network data-processing system 200 may also be implemented as a number of different types of networks such as, for example, an intranet, a local area network (LAN), or a wide area network (WAN).
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(39) Generally, program modules (e.g., module 125) can include, but are not limited to, routines, subroutines, software applications, programs, objects, components, data structures, etc., that perform particular tasks or implement particular abstract data types and instructions. Moreover, those skilled in the art will appreciate that the disclosed method and system may be practiced with other computer system configurations such as, for example, hand-held devices, multi-processor systems, data networks, microprocessor-based or programmable consumer electronics, networked personal computers, minicomputers, mainframe computers, servers, and the like.
(40) Note that the term module as utilized herein may refer to a collection of routines and data structures that perform a particular task or implements a particular abstract data type. Modules may be composed of two parts: an interface, which lists the constants, data types, variable, and routines that can be accessed by other modules or routines, and an implementation, which is typically private (accessible only to that module) and which includes source code that actually implements the routines in the module. The term module may also simply refer to an application such as a computer program designed to assist in the performance of a specific task such as word processing, accounting, inventory management, etc.
(41) The interface 315 (e.g., a graphical user interface 130) can serve to display results, whereupon a user 320 may supply additional inputs or terminate a particular session. In some embodiments, operating system 310 and GUI 130 can be implemented in the context of a “windows” system. It can be appreciated, of course, that other types of systems are possible. For example, rather than a traditional “windows” system, other operation systems such as, for example, a real time operating system (RTOS) more commonly employed in wireless systems may also be employed with respect to operating system 310 and interface 315. The software application 305 can include, for example, module(s) 125, which can include instructions for carrying out steps or logical operations such as those shown and described herein.
(42) The following description is presented with respect to embodiments of the present invention, which can be embodied in the context of a data-processing system such as computer system 100, in conjunction with program module 125, and data-processing system 200 and network 202 depicted in
(43) The embodiments disclosed herein include methods and systems for material characterization using an open circuit voltage decay (OCVD) system. In certain embodiments, the effective lifetime of devices can be determined according to the systems and methods disclosed. In general, the OCVD methods and systems disclosed herein provide a viable technique for extracting the effective lifetime from packaged pn junction devices. OCVD is more accurate than the various other methods used for the same purpose, largely because device lifetime is the fundamental quantity measured with the OCVD technique (as opposed to extrapolating the lifetime from a sample's conductance, as in prior art methods).
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(45) As illustrated in
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(47) The system 500 includes a high current, controllable source. The source is specifically configured to provide injection that can operate in a pulsed manner, to avoid heating and altering system measurements. An electronically controlled, fast, nearly ideal, switch serves to disconnect the device under test (DUT) when required. A voltage measurement system with widely variable sampling rates can be included. A current measurement system is provided that is capable of monitoring a range of approximately 1 milliamp to 100 amps. Software can be included that circumvents the inherent abstraction of the lifetime caused by heavy filtering and differentiating. A controllable parallel resistance is used to compensate for parallel capacitance.
(48) All of these features are incorporated in the system 500. The system 500 can apply a controlled voltage pulse through a high-power linear amplifier fed by low equivalent series resistance (ESR) high capacitance capacitors 510, which are charged from a low power voltage source 505. In some embodiments the voltage source 505 can be a 12 V source although it should be understood that other voltage sources can also be used.
(49) Three Insulated Gate Bipolar Junction Transistors 515 (IGBTs) arranged in parallel are used to form a high voltage/current series pass element that is controlled by a high gain feedback amplifier 525 which is in turn fed by a 10-bit Digital to Analog Converter (DAC) 530. The DAC 530 receives data from the system's microcontroller 535 (in certain embodiments this can comprise a PIC 18F6585) via a Serial Peripheral Interface (SPI) protocol. The voltage waveform at the output terminals (the DUT voltage) is acquired through a differential amplifier 540 and a Programmable Gain Amplifier (PGA) 545 and is fed into a high-speed Analog to Digital Converter (ADC) 550 with built in RAM memory.
(50) The voltage read in the ADC 550 has a separate, programmable clock 555 that is controlled by the microcontroller 535 and can range from approximately 1 MHz to 200 MHz. In series with the DUT is a low RDS—on MOSFET 560 with a custom designed fast gate driver 562 that is used to disconnect the pn junction 565 quickly from the driving source and through two precision shunt resistors, for acquiring the current waveform. One of the shunt resistors is paralleled with another low RDS—on MOSFET 580 (driven at a slower rate) to read relatively low current levels and give the system 500 a wide range of injected current. These current shunts are attached to two differential amplifiers, amplifier 570 and amplifier 575 that are fed through a multiplexer 585 and into another PGA (illustrated as 585), a differential amplifier 590, and high-speed ADC/RAM unit 595. The addition of a relatively high voltage analog multiplexer 585 on the output terminals gives the user the ability to add programmable parallel resistance to the pn junction 565 being evaluated in order to compensate for device, system, or cabling capacitances.
(51) The OCVD system 500 can include specially designed software to implement methods as described herein. A GUI, can be implemented in order to communicate with the system, send commands to the OCVD system, and collect data and waveforms for display and manipulation.
(52) From the GUI, a user can initiate a single, set voltage pulse and acquire the resulting voltage and current waveforms with the system 500. The user can further set limits (compliance) for voltage and current and perform an IV sweep of currents ranging from milliamps up to 200 A, at up to 10 V, or the user can specify a current injection level and the system will pulse this current for approximately 100 μs (or other desired amount of time) followed by initiation of a voltage read and disconnection of the attached pn junction. The voltage waveform can be displayed on the screen along with the current injection level. For any of these functions, data can be saved as both a CSV and an image file in a specifically created folder in the computer system 100 with the hardcopy button 670.
(53) In order to calculate the effective carrier lifetime from the OCVD decay waveform (e.g. waveform 605), the slope of the voltage decay must be extracted. This can be accomplished by extracting the slope, and essentially filtering the raw data. Next, numerical differentiation can be performed on the extracted data.
(54) While both of these options are viable for OCVD lifetime extraction, actual implementation across a broad signal spectrum is complicated by the fact that real life data is inherently noisy, the act of differentiation increases the level of noise in the data (hence the pre-filtering). Furthermore, filtering further abstracts the actual data from the original signal. In addition, the level of the voltage drop due to series resistance in a pn junction can be significant; if this drop is several volts in magnitude, and the desired signal a few millivolts, the derivative can be “saturated” in an analog circuit and incorrectly calculated by numerical differentiation. In
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(56) Even in the idealized simulation illustrated in
(57) Thus, in another embodiment intended to address the inherent problems associated with the extraction of the decay waveform's slope, and hence the carrier lifetime, a method 1000 can be implemented on a computer, such as computer system 100, and in connection with the system 500, that makes use of the data set(s) acquired from the DUT using system 500. The method begins at 1005.
(58) The method 1000 first requires identification of a line segment of chosen length (data points) as shown at 1010. The line segment “slides” down the data set in an arbitrarily chosen interval as shown at 1015. As illustrated at 1020 the line segment is calculated via the least—squares method at each point along its path on the interval. At each point on this interval, the average distance from the line to each data point in the interval is calculated and used as a figure of merit for the “linearity” of the segment as illustrated at 1025. In this way, the actual slope is calculated at 1030, instead of a number that is, in reality, removed from the slope by the filtering and differentiating processes. The method ends at 1035.
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(61) Where η is the injection-dependent ideality factor. An illustration of the GUI 130 providing results as described above is provided in chart 1200 of
(62) In certain embodiment the OCVD System may require additional procedural readiness steps including verification and calibration. The OCVD system can undergo basic functionality testing including IV curve tracing from very low, mA ranges, up through 100 A with the expectation that good results are produced.
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(64) At 1310, a test system, such as the system 500 illustrated in
(65) The waveform from the system can be acquired using a custom designed fast gate driver as illustrated in
(66) At 1330 the data collected from the system illustrated in
(67) The methods and systems disclosed herein have been proven to be more accurate than other prior art approaches and do not suffer the common falsely elevated low-level readings of optical methods. Importantly, the embodiments are also convenient for use with packaged devices. In addition, the embodiments disclosed herein are completely electrical, non-destructive, and require only two connections through wires to the device, allowing ease of access to temperature chambers.
(68) Based on the foregoing, it can be appreciated that a number of embodiments, preferred and alternative, are disclosed herein. For example, in one embodiment, an analytics system comprises a voltage source, a switch configured to disconnect a test piece from the source, an assembly configured to collect a voltage versus time measurement and a current versus time measurement, and an analytics module configured to identify a carrier lifetime of the test piece according to the measured voltage versus time and the measured current versus time. The voltage source can further comprise a pulsed voltage source. In an embodiment the system further comprises at least two low equivalent series resistance capacitors charged by the voltage source.
(69) In an embodiment the analytics module further comprises: at least one processor; and a storage device communicatively coupled to the at least one processor, the storage device storing instructions which, when executed by the at least one processor, cause the at least one processor to perform operations comprising: determining a slope of a waveform collected from the voltage versus time measurement and the current versus time measurement and calculating a carrier lifetime from the slope.
(70) In an embodiment the system further comprises a control configured to provide a variable sampling rate for the voltage versus time measurement. The system further comprises a current versus time measurement applicable to current in a range from 1 milliamp to 100 amps.
(71) In certain embodiments the work piece comprises a p-n junction device.
(72) In another embodiment n analytics apparatus comprises a voltage source, a switch configured to disconnect a test piece from the source, an assembly for measuring a voltage versus time and a current versus time, and an analytics module configured to identify a carrier lifetime of the test piece according to the measured voltage versus time and the measured current versus time. The voltage source can further comprise a pulsed voltage source. In an embodiment the analytics apparatus further comprises at least two low equivalent series resistance capacitors charged by the voltage source.
(73) In an embodiment the analytics module further comprises at least one processor and a storage device communicatively coupled to the at least one processor, the storage device storing instructions which, when executed by the at least one processor, cause the at least one processor to perform operations comprising: determining a slope of a waveform collected from the voltage versus time measurement and the current versus time measurement and calculating a carrier lifetime from the slope.
(74) In an embodiment the analytics apparatus further comprises a control configured to provide a variable sampling rate for the voltage versus time measurement. The current versus time measurement can be applicable to current in a range from 1 milliamp to 100 amps.
(75) In an embodiment the work piece comprises a p-n junction device.
(76) In yet another embodiment a method for measuring carrier lifetime comprises subjecting a test device to a voltage via a voltage source associated with the test system, disconnecting the test device from the voltage source, measuring a voltage as a function of time, measuring a current as a function of time, and determining a carrier lifetime of the test piece according to the measured voltage and the measured current. The voltage source further comprises a pulsed voltage source. The method can further comprise charging at least two low equivalent series resistance capacitors with the voltage source.
(77) In an embodiment the method further comprises determining a slope of a waveform of the voltage as a function of time and the current as a function of time and calculating a carrier lifetime from the slope. In an embodiment a variable sampling rate control is used to collect the voltage as a function of time and the monitored current range comprises 1 milliamp to 100 amps. In an embodiment the test piece comprises a p-n junction device.
(78) It will be appreciated that variations of the above-disclosed and other features and functions, or alternatives thereof, may be desirably combined into many other different systems or applications. Also, it should be appreciated that various presently unforeseen or unanticipated alternatives, modifications, variations or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.