Cantilever linear motion reference device employing two-layer air suspension

Abstract

A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Claims

1. A cantilever linear motion reference device employing two-layer air suspension, comprising a two-layer air suspension sliding sleeve component (1), a vertical drive motor (10), a vertical rail (12), a driven rail (15), and a suspended counterweight component (16), the vertical rail (12) and the vertical drive motor (10) being disposed on a back plate (2), the two-layer air suspension sliding sleeve component (1) being fixedly connected to a motor coil (3) via an adapter (4), the vertical rail (12) and the driven rail (15) being disposed in the two-layer air suspension sliding sleeve component (1), and the suspended counterweight component (16) being disposed at a cantilever end of the driven rail (15), wherein the two-layer air suspension sliding sleeve component (1) consists of a U-shaped bottom plate (17), a middle plate (18), and a U-shaped cover plate (19); the U-shaped bottom plate (17) and the middle plate (18) are disposed in cooperation with each other, and connected with each other via a bottom air-sealing screw (20); the vertical rail (12) is disposed between the U-shaped bottom plate (17) and the middle plate (18) to form a force sealed air suspension structure; the middle plate (18) and the U-shaped cover plate (19) are disposed in cooperation with each other, and connected with each other via a top air-sealing screw (21); the driven rail (15) is disposed between the middle plate (18) and the U-shaped cover plate (19) to form a force sealed air suspension structure; a grating ruler component (5) is disposed on the two-layer air suspension sliding sleeve component (1); a displacement reading head (6) used in cooperation with the grating ruler component is disposed on the vertical drive motor (10) via a pitch adjustment seat (7) and a position adjustment seat (8); a horizontal drive device (13) is disposed on the two-layer air suspension sliding sleeve component (1), and connected to the driven rail (15) via a transmission component (14); and a lower end of the vertical rail (12) is disposed on the back plate (2) via a fixed base (9), and an upper end of the vertical rail (12) is disposed on the back plate (2) via an adjustable base (11); and the horizontal drive device (13) drives the driven rail (15) to move in a horizontal direction via the transmission component (14); and when the vertical drive motor (10) drives the motor coil (3) to drive the two-layer air suspension sliding sleeve component (1) and the grating ruler component (5) to move in a vertical direction, the driven rail (15) and the suspended counterweight component (16) form a cantilever structure and move accordingly.

2. The cantilever linear motion reference device employing two-layer air suspension according to claim 1, wherein the vertical displacement of the two-layer air suspension sliding sleeve component (1) is subjected to measurement and feedback control via cooperation of the grating ruler component (5) and the displacement reading head (6).

3. The cantilever linear motion reference device employing two-layer air suspension according to claim 1, wherein the displacement reading head (6) is capable of being adjusted in 3 degrees of freedom via the pitch adjustment seat (7) and the position adjustment seat (8).

4. The cantilever linear motion reference device employing two-layer air suspension according to claim 1, wherein the vertical rail (12) is capable of being adjusted in 2 degrees of freedom via the fixed base (9) and the adjustable base (11).

Description

BRIEF DESCRIPTION OF FIGURES

(1) FIG. 1 is a schematic diagram of a cantilever linear motion reference device employing two-layer air suspension.

(2) FIG. 2 is a schematic diagram of a two-layer air suspension sliding sleeve component.

(3) In the drawings, 1 denotes a two-layer air suspension sliding sleeve component; 2 denotes a back plate; 3 denotes a motor coil; 4 denotes an adapter; 5 denotes a grating ruler component; 6 denotes a displacement reading head; 7 denotes a pitch adjustment seat; 8 denotes a position adjustment seat; 9 denotes a fixed base; 10 denotes a vertical drive motor; 11 denotes an adjustable base; 12 denotes a vertical rail; 13 denotes a horizontal drive device; 14 denotes a transmission component; 15 denotes a driven rail; 16 denotes a suspended counterweight component; 17 denotes a U-shaped bottom plate; 18 denotes a middle plate; 19 denotes a U-shaped cover plate; 20 denotes a bottom air-sealing screw; and 21 denotes a top air-sealing screw.

DETAILED DESCRIPTION

(4) Embodiments of the invention are described in detail below with reference to the accompanying drawings.

(5) Referring to FIG. 1, a cantilever linear motion reference device employing two-layer air suspension includes a two-layer air suspension sliding sleeve component 1, a vertical drive motor 10, a vertical rail 12, a driven rail 15, and a suspended counterweight component 16. The vertical rail 12 and the vertical drive motor 10 are disposed on a back plate 2. The two-layer air suspension sliding sleeve component 1 is fixedly connected to a motor coil 3 via an adapter 4. The vertical rail 12 and the driven rail 15 are disposed in the two-layer air suspension sliding sleeve component 1. The suspended counterweight component 16 is disposed at a cantilever end of the driven rail 15. A grating ruler component 5 is disposed on the two-layer air suspension sliding sleeve component 1. A displacement reading head 6 used in cooperation with the grating ruler component is disposed on the vertical drive motor 10 via a pitch adjustment seat 7 and a position adjustment seat 8. A horizontal drive device 13 is disposed on the two-layer air suspension sliding sleeve component 1, and connected to the driven rail 15 via a transmission component 14. A lower end of the vertical rail 12 is disposed on the back plate 2 via a fixed base 9, and an upper end of the vertical rail 12 is disposed on the back plate 2 via an adjustable base 11.

(6) Referring to FIG. 2, the two-layer air suspension sliding sleeve component 1 consists of a U-shaped bottom plate 17, a middle plate 18, and a U-shaped cover plate 19. The U-shaped bottom plate 17 and the middle plate 18 are disposed in cooperation with each other, and connected with each other via four bottom air-sealing screws 20. The vertical rail 12 is disposed between the U-shaped bottom plate 17 and the middle plate 18 to form a force sealed air suspension structure. The middle plate 18 and the U-shaped cover plate 19 are disposed in cooperation with each other, and connected with each other via four top air-sealing screws 21. The driven rail 15 is disposed between the middle plate 18 and the U-shaped cover plate 19 to form a force sealed air suspension structure.

(7) With the two-layer air suspension sliding sleeve component 1 as the core of motion, the cantilever linear motion reference device employing two-layer air suspension can realize the functions of support and motion guiding, drive control, and measurement feedback. The support and motion guiding function is realized via the two-layer air suspension sliding sleeve component 1, the vertical rail 12, and the driven rail 15. The drive control function is realized via the vertical drive motor 10 and the horizontal drive device 13. The measurement feedback function is realized via the grating ruler component 5 and the displacement reading head 6.

(8) In the assembly and calibration stage of the cantilever linear motion reference device employing two-layer air suspension, the displacement reading head 6 is capable of being adjusted in 3 degrees of freedom via the pitch adjustment seat 7 and the position adjustment seat 8. The vertical rail 12 is capable of being adjusted in 2 degrees of freedom via the fixed base 9 and the adjustable base 11. The above-mentioned high-precision adjustment and positioning functions enable the cantilever linear motion reference device employing two-layer air suspension to calibrate the device itself by tracing to a higher linear reference.

(9) In the use stage of the cantilever linear motion reference device employing two-layer air suspension, the horizontal drive device 13 drives the driven rail 15 to move in a horizontal direction via the transmission component 14, and when the vertical drive motor 10 drives the motor coil 3 to drive the two-layer air suspension sliding sleeve component 1 and the grating ruler component 5 to move in a vertical direction, the driven rail 15 and the suspended counterweight component 16 form a cantilever structure and move accordingly.