Machining position correcting device and electrochemical machining device

Abstract

A machining position correcting device is configured to be applied to an electrochemical machining device configured to make an electrolyte flow out of a distal end part of an electrode bar extending along an axis while rotating the electrode bar about the axis to electrochemically machine a material to be machined in a range from the distal end part of the electrode bar. The machining position correcting device includes a position detector configured to detect a rotational position of a feature point of the electrode bar.

Claims

1. An electrochemical machining device configured to make an electrolyte flow out of a distal end part of an electrode bar extending along an axis while rotating the electrode bar about the axis to electrochemically machine a material to be machined in a range from the distal end part of the electrode bar, the electrochemical machining device comprising: a machining head configured to rotatably support the electrode bar around the axis; a machining position correcting device; and a controller configured to control a rotational position of the electrode bar in the machining head, and control the machining head based on a rotational position of a feature point of the electrode bar detected by the machining position correcting device, wherein the electrode bar includes: an electrode extending along the axis and having a tubular shape, the electrode being made from a conductive, flexible material; an insulating layer coated on an outer circumferential surface of the electrode so as to expose a distal end surface of the electrode; and a radial direction outlet port defined at the distal end part of the electrode bar at a position in a radial direction, the radial direction outlet port being defined from inside of the electrode bar toward outside of the electrode bar in the radial direction, and wherein the machining position correcting device includes a position detector configured to detect the rotational position of the radial direction outlet port as the feature point.

2. The machining position correcting device according to claim 1, further comprising: a supporting unit that is positioned and fixed along with the material to be machined, wherein: the supporting unit is configured to receive the electrode bar therein such that the electrode bar is rotatably insertable therein around the axis; and the position detector is attached to the supporting unit.

3. The machining position correcting device according to claim 2, wherein the supporting unit is a guide member configured to guide the electrode bar to the material to be machined.

4. The machining position correcting device according to claim 2, wherein the supporting unit is attachable and detachable to a guide member configured to guide the electrode bar to the material to be machined.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a schematic view illustrating an electrochemical machining device in accordance with an embodiment of the present invention.

(2) FIG. 2 is a schematic view illustrating an electrochemical machining device in accordance with the embodiment of the present invention.

(3) FIG. 3 is a schematic view illustrating an electrode bar in the electrochemical machining device in accordance with the embodiment of the present invention.

(4) FIG. 4 is a schematic view illustrating a machining position correcting device in accordance with the embodiment of the present invention.

(5) FIG. 5 is an enlarged schematic view illustrating the machining position correcting device in accordance with the embodiment of the present invention.

(6) FIG. 6 is a view illustrating a detection example of the machining position correcting device in accordance with the embodiment of the present invention.

(7) FIG. 7 is an operation step view of the machining position correcting device in accordance with the embodiment of the present invention.

(8) FIG. 8 is an explanatory view illustrating machining errors.

(9) FIG. 9 is a view illustrating another example of a feature point of the machining position correcting device in accordance with the embodiment of the present invention.

(10) FIG. 10 is a view illustrating another example of a feature point of the machining position correcting device in accordance with the embodiment of the present invention.

(11) FIG. 11 is a schematic view illustrating another example of the machining position correcting device in accordance with the embodiment of the present invention.

DESCRIPTION OF EMBODIMENTS

(12) An embodiment according to the present invention will now be described with reference to the accompanying drawings. It should be noted that the embodiment is not intended to limit this invention. Components in the embodiment include components that can be replaced and are facilitated by the skilled person or substantially like components.

(13) FIG. 1 is a schematic view illustrating an electrochemical machining device in accordance with the present embodiment. FIG. 2 is a schematic view illustrating an electrochemical machining device in accordance with the present embodiment. FIG. 3 is a schematic view illustrating an electrode bar in the electrochemical machining device in accordance with the embodiment of the present invention.

(14) As illustrated in FIG. 1, the electrochemical machining device in the present embodiment machines a cooling hole (hereinafter, referred to as a hole) 100A to a material to be machined (workpiece) (for example, a turbine blade of a gas turbine) 100 by electrochemical machining. The electrochemical machining device includes a machining head 1, an electrode bar 2, a rotational mechanism 3, an elevating and lowering mechanism 4, a fixed base 5, a guide member 6, an electrolyte supply unit 7, a machining tank 8, a power source 9, a controller 10, a storage unit 11, an input/output unit 12, and a machining position correcting device 13.

(15) As illustrated in FIGS. 1 and 2, the machining head 1 includes a grasping unit 1A that grasps a base end part of the electrode bar 2. A plurality of the grasping units 1A (four grasping units 1A in FIG. 2) are provided corresponding to a plurality of the holes 100A machined to the material to be machined 100.

(16) As illustrated in FIG. 3, the electrode bar 2 includes an electrode 2A, an electrical insulating layer 2B, a radial direction outlet port 2C, and an axis direction outlet port 2D.

(17) The electrode 2A extends along an axis C and is formed in a tubular shape. The electrode 2A is a cylindrical body the outer diameter of which is, for example, equal to or more than 1 mm and equal to or less than 10 mm. The electrode 2A is made of materials such as a stainless alloy, copper, and titanium so as to have conductivity and flexibility. In the electrode 2A of a cylindrical body, a flow path 2Aa is formed through which an electrolyte flows. The power source 9 can be connected to a base end part of the electrode 2A, and the electrolyte supply unit 7 can be connected to the flow path 2Aa.

(18) The electrical insulating layer 2B coats an outer circumferential surface 2Ab of the electrode 2A. The electrical insulating layer 2B is formed of, for example, a polyester resin having electric insulation. The electrical insulating layer 2B does not coat a distal end surface 2Ac and a distal end side surface 2Ad of the electrode 2A, and the distal end surface 2Ac and the distal end side surface 2Ad are exposed. In the distal end side surface 2Ad, the number, the size, the position in an extending direction of the axis C of the electrode 2A, and the shape are not particularly limited.

(19) The radial direction outlet port 2C is provided by opening on a side opposite to the distal end side surface 2Ad (symmetric position with reference to the axis C) across the axis C, and communicates the flow path 2Aa with the outside by passing through the electrode 2A and the electrical insulating layer 2B in the radial direction. The radial direction is a direction orthogonal to the axis C. An aperture shape of the radial direction outlet port 2C is not particularly limited, and may be rectangular or circular. When the radial direction outlet port 2C is inclined toward the side opposite to the distal end side surface 2Ad, the number of the radial direction outlet port 2C is, not limited to one, and the size of the radial direction outlet port 2C is not particularly limited.

(20) The axis direction outlet port 2D is provided by opening a tubular shape at the distal end of the electrode 2A along the axis C, and communicates the flow path 2Aa with the outside.

(21) The rotational mechanism 3 causes the grasping unit 1A to rotate about the axis C in the machining head 1. A motor, which is not illustrated, causes the grasping unit 1A to rotate, and causes the electrode bar 2 grasped by the grasping unit 1A to rotate about the axis C in association with the rotation of the grasping unit 1A. The rotational mechanism 3 includes a rotational detector 3A that detects a rotational angle of the grasping unit 1A (electrode bar 2).

(22) The elevating and lowering mechanism 4 elevates and lowers the machining head 1 along the axis C. A motor, which is not illustrated, elevates and lowers the machining head 1, and elevates and lowers the electrode bar 2 grasped by the grasping unit 1A along the axis C in association with the elevating and lowering of the machining head 1. The elevating and lowering mechanism 4 includes a position detector 4A that detects an elevating and lowering position of the machining head 1 (electrode bar 2).

(23) The fixed base 5 fixes the material to be machined 100 and the guide member 6. The fixed base 5 includes a fixing unit 5A, a first supporting unit 5B, and a second supporting unit 5C. The fixing unit 5A is fixed to an immovable device base 15. The first supporting unit 5B supports the material to be machined 100, is movable in an axis extending direction and an axis rotational direction with respect to a vertical axis and first and second horizontal axes orthogonal to each other, and adjusts a vertical position and a horizontal position of the material to be machined 100. The second supporting unit 5C supports the guide member 6, is movable in an axis extending direction and an axis rotational direction with respect to a vertical axis and first and second horizontal axes orthogonal to each other, and adjusts a vertical position and a horizontal position of the guide member 6. In this manner, the fixed base 5 adjusts the vertical positions and the horizontal positions of the material to be machined 100 and the guide member 6 together.

(24) The guide member 6 is supported by the fixed base 5, and is disposed directly on the material to be machined 100. The guide member 6 is provided with a guide hole 6A for communicating the machining head 1 side with the material to be machined 100 side in an up-and-down direction. The guide hole 6A rotatably supports the electrode bar 2 around the axis C while allowing the electrode bar 2 to be inserted therein in an up-and-down direction, and a plurality of the guide holes 6A (4 guide holes 6A in FIG. 2) are provided corresponding to the holes 100A machined to the material to be machined 100. The guide holes 6A are formed in conformity with the position of the holes 100A machined to the material to be machined 100 and an angle (direction) with which the distal end part of the electrode bar 2 is introduced in order to machine the holes 100A to the material to be machined 100. Thus, When the elevating and lowering mechanism 4 lowers the electrode bar 2 inserted into the guide holes 6A, the distal end part of the electrode bar 2 is guided to reach the material to be machined 100 so as to match the position of the holes 100A machined to the material to be machined 100, and the distal end part of the electrode bar 2 is guided to reach the material to be machined 100 so as to match the angle of the machined holes 100A.

(25) The electrolyte supply unit 7 supplies an electrolyte to the flow path 2Aa of the electrode 2A in the electrode bar 2. In the electrolyte supply unit 7, a supply tube and a pump are connected to a storage part that stores therein an electrolyte, and the supply tube is connected to the flow path 2Aa of the electrode 2A through the machining head 1, which are not illustrated. Examples of the electrolyte include nitric acid and nitrate of soda.

(26) The machining tank 8 coats the periphery of the machining head 1 to which the electrode bar 2 is attached and the periphery of the fixed base 5. In this manner, the machining tank 8 prevents scattering of an electrolyte while protecting the material to be machined 100 during machining.

(27) The power source 9 supplies electric power to the electrochemical machining device.

(28) The controller 10 is, for example, a computer, and includes a microprocessor such as a central processing unit (CPU). The controller 10 includes a display device including a display, an input device including a keyboard and a mouse, a sound output device including a speaker, and a drive device that reads data such as a computer program for executing arithmetic processing of the controller 10 from a recording medium in which the data is recorded, which are not illustrated. Examples of the recording medium can include various types of recording media that are a recording media optically, electrically, or magnetically recording information such as a compact disc read only memory (CD-ROM), a flexible disk, and a magnetic optical disk, and a semiconductor memory electrically recording information such as a read-only memory (ROM) and a flash memory.

(29) The storage unit 11 is included in the controller 10, includes memories such as ROM and a random-access memory (RAM), and storage, and stores therein a computer program for performing arithmetic processing in the controller 10.

(30) The input/output unit 12 inputs and outputs various kinds of data. Specifically, the input/output unit 12 is connected to the machining position correcting device 13 and the controller 10, and outputs data input from the machining position correcting device 13 to the controller 10.

(31) The machining position correcting device 13, which will be described in detail later, detects a rotational position of the distal end part of the electrode bar 2 based on feature points provided to the electrode bar 2. The detected data is output to the controller 10 through the input/output unit 12 as described above.

(32) The controller 10 controls the electrochemical machining device (the rotational mechanism 3, the elevating and lowering mechanism 4, the electrolyte supply unit 7, and the power source 9) based on data from the input/output unit 12 (machining position correcting device 13) and a computer program in the storage unit 11.

(33) Specifically, the controller 10 causes the storage unit 11 to store therein a rotational position of the distal end part of the electrode bar 2 acquired from the machining position correcting device 13. The controller 10 causes, based on a computer program in the storage unit 11, the distal end part of the electrode bar 2 to reach the material to be machined 100 through the elevating and lowering mechanism 4. The controller 10 causes the power source 9 to supply electric power to the electrode 2A in the electrode bar 2, and causes the electrolyte supply unit 7 to supply an electrolyte to the flow path 2Aa of the electrode 2A. In this manner, electricity is applied to a space between the distal end part of the electrode 2A and the material to be machined through the electrolyte, so as to dissolve the material to be machined 100 and machine the holes 100A. When curving and machining the holes 100A, the controller 10 causes the rotational mechanism 3 to rotate the electrode bar 2. As illustrated in FIG. 3, an electrolyte W flowing through the flow path 2Aa of the electrode 2A is discharged from the axis direction outlet port 2D on the distal end surface of the electrode 2A, and a part of the electrolyte W is also discharged from the radial direction outlet port 2C toward the outside of the electrode bar 2 in the radial direction. In this case, the electrolyte W discharged from the radial direction outlet port 2C applies a fluid acting force F1 to an inner surface of the holes 100A, so as to apply a reaction force F2 of the fluid acting force F1 to the distal end part of the electrode bar 2. In this manner, the distal end part of the electrode bar 2 is displaced so that the distal end part bends in a direction where the reaction force F2 directs M, and current density distribution of the distal end surface of the electrode bar 2 and the inner surface of the holes 100A is locally wider depending on an amount of displacement. Thus, at a position of the electrode bar 2 in the circumferential direction, an amount of machining on a side where the electrode bar 2 is displaced by the reaction force F2 becomes large, and the holes 100A are curved.

(34) FIG. 4 is a schematic view illustrating a machining position correcting device in accordance with the present embodiment. FIG. 5 is an enlarged schematic view illustrating the machining position correcting device in accordance with the present embodiment. FIG. 6 is a view illustrating a detection example of the machining position correcting device in accordance with the present embodiment. FIG. 7 is an operation step view of the machining position correcting device in accordance with the embodiment of the present invention. FIG. 8 is a view illustrating another example of a feature point of the machining position correcting device in accordance with the present embodiment. FIGS. 9 and 10 are views illustrating another example of a feature point of the machining position correcting device in accordance with the present embodiment. FIG. 11 is a schematic view illustrating another example of the machining position correcting device in accordance with the present embodiment.

(35) As illustrated in FIGS. 4 and 5, the machining position correcting device 13 includes a position detector 13A. The position detector 13A detects a feature point provided to the electrode bar 2, and detects a rotational position of the distal end part of the electrode bar 2 based on this feature point. Examples of the feature points include the radial direction outlet port 2C formed in the electrode bar 2 and the distal end side surface 2Ad of the electrode 2A in the present embodiment. In order to detect the radial direction outlet port 2C and the distal end side surface 2Ad of the electrode 2A, examples of the position detector 13A include a proximity sensor (photoelectric, magnetic, eddy-current, contact, laser detection, and the like) and an image sensor (imaging device). In addition, in order to detect the distal end side surface 2Ad of the electrode 2A, examples of the position detector 13A include an electric conduction sensor detecting a metal unit and an image sensor (imaging device). The position detector 13A is attached to the guide member 6, and detects a feature point of the electrode bar 2 inserted into the guide hole 6A.

(36) The machining position correcting device 13 detects, in a state where the rotational mechanism 3 rotates the electrode bar 2 inserted into the guide hole 6A, a feature point of the electrode bar 2, so as to detect a rotational position using the feature points as a reference. FIG. 6 illustrates an example of data where a photoelectric proximity sensor that switches a detected signal on and off depending on a distance from a detected position to an object to be detected is used. In the case of the photoelectric proximity sensor, as indicated by a solid line in FIG. 6, the photoelectric proximity sensor detects the radial direction outlet port 2C and the distal end side surface 2Ad, but the radial direction outlet port 2C has a larger sensor detection strength. Thus, a detection threshold is provided in the sensor detection strength, so as to turn a detected signal of only the radial direction outlet port 2C on and off as indicated by a dot-and-dash line. In this manner, a center position of the radial direction outlet port 2C in a rotational direction can be calculated, and the center position of the radial direction outlet port 2C in the rotational direction can be defined as an origin and can be used as a reference of an electrode phase (rotational position) of the distal end part of the electrode bar 2.

(37) As illustrated in FIG. 7, the controller 10 performs operation for correcting a machining position. After an operator attaches the electrode bar 2 to the machining head 1 (step S1), the controller 10 controls the elevating and lowering mechanism 4 to insert the electrode bar 2 into the guide holes 6A in the guide member 6 (step S2). At this time, the controller 10 acquires an elevating and lowering position from the elevating and lowering mechanism 4, and adjusts the distal end part of the electrode 2A to a height of the position detector 13A (step S3). After that, the controller 10 controls the rotational mechanism 3 to rotate the electrode bar 2 about the axis C, and causes the position detector 13A to input a detected signal once for each rotation and calculates the center position of the radial direction outlet port 2C N times (step S4). N times indicates multiple times. When a deviation of a calculation result of the center position in N times is equal to or less than X (Yes at step S5), the controller 10 makes a zero-point correction (step S6) so that the center position is defined as an origin and is used as a reference of an electrode phase (rotational position) of the electrode bar 2. The controller 10 causes the storage unit 11 to store therein the reference of the corrected electrode phase (rotational position) of the electrode bar 2. After that, the controller 10 ends this operation successfully (step S7). In the subsequent machining operation, the controller 10 causes the rotational mechanism 3 to rotate the electrode bar 2 based on the reference of the corrected electrode phase (rotational position) of the electrode bar 2. By contrast, at step S5, when a deviation of a calculation result of the center position in N times is not equal to or less than X (No at step S5), the controller 10 determines whether determination of No is the Yth time (for example, the third time) (step S8). If not (No at step S8), the process goes back to the processing at step S4 and the center position of the radial direction outlet port 2C is calculated N times. When determination of No is the Yth time (Yes at step S8), the number of times when a deviation of a calculation result of the center position exceeds X is equal to or more than Y times (step S9), thereby ending this operation abnormally (step S10). After that, when examining the cause why a deviation exceeds X and, for example, attachment of the electrode bar 2 to the machining head 1 is insufficient, the operator reattaches the electrode bar 2 to the machining head 1 and performs the operation again.

(38) According to the machining position correcting device 13 and the electrochemical machining device of the present embodiment, with the position detector 13A that detects a feature point provided to the electrode bar 2, a zero-point correction can be made so that a detected rotational position is defined as an origin and is used as a reference of an electrode phase (rotational position) of the electrode bar 2. After the zero-point correction, the electrode phase is adjusted to a machining target phase so as to reduce an amount of phase shifting from a machining initial stage and reduce machining errors of the whole machining path. Thus, correcting an electrode phase of the electrode bar 2 reduces machining errors in particularly long curved hole machining, and leads to improvement in machining accuracy, machining yield, and a degree of freedom in design.

(39) The following describes machining errors. FIG. 8 is an explanatory view illustrating machining errors. FIG. 8(a) illustrates a case where a zero-point correction of the electrode phase (rotational position) of the electrode bar 2 is made. FIG. 8(b) illustrates a case where a zero-point correction of the electrode phase (rotational position) of the electrode bar 2 is not made.

(40) As illustrated in FIG. 8(b), when a zero-point correction of the electrode phase (rotational position) of the electrode bar 2 is not made, as compared with a target route R1 of the design electrode bar 2 machining the holes 100A to the material to be machined 100, an amount of phase shifting of a machining route R2 that reaches a machining initial stage R2b from a machining start R2a is large. Even when the machining route R2 is corrected to the target route R1 from the machining initial stage R2b, the machining route R2 cannot be immediately corrected to the target route R1 in order to smoothly connect the holes 100A. Thus, the maximum machining errors between the target route R1 and the machining route R2 are large, and overshoot is large until the machining route R2 is corrected to the target route R1.

(41) By contrast, in the machining position correcting device 13 and the electrochemical machining device of the present embodiment, as illustrated in FIG. 8(a), by making a zero-point correction of the electrode phase (rotational position) of the electrode bar 2, as compared with the target route R1 of the design electrode bar 2 machining the holes 100A to the material to be machined 100, an amount of phase shifting of the machining route R2 that reaches the machining initial stage R2b from the machining start R2a is small. If the machining route R2 needs to be corrected to the target route R1 from the machining initial stage R2b, the machining route R2 can be immediately corrected to the target route R1. Thus, the maximum machining errors between the target route R1 and the machining route R2 are small, and overshoot is also small until the machining route R2 is corrected to the target route R1.

(42) It is preferable that the machining position correcting device 13 and the electrochemical machining device of the present embodiment include a supporting unit (guide member 6) that is positioned and fixed along with the material to be machined 100 and that has the electrode bar 2 rotatably inserted and supported therein around the axis C, and the position detector 13A be attached to the supporting unit (guide member 6).

(43) In other words, by attaching the position detector 13A to the supporting unit (guide member 6) that is positioned and fixed along with the material to be machined 100, a support position of the electrode bar 2 can be positioned with respect to the material to be machined 100 that is going to be machined, and a zero-point correction of the electrode phase (rotational position) of the electrode bar 2 can be made in this embodiment. Thus, machining errors can be reduced more.

(44) In the machining position correcting device 13 and the electrochemical machining device of the present embodiment, the supporting unit is preferably the guide member 6 that guides the electrode bar 2 to the material to be machined 100.

(45) In other words, the configuration for positioning a support position of the electrode bar 2 with respect to the material to be machined 100 that is going to be machined can be shared with the guide member 6 that guides the electrode bar 2 to the material to be machined 100, the number of components can be reduced, and the device can be miniaturized.

(46) In the machining position correcting device 13 and the electrochemical machining device of the present embodiment, the position detector 13A preferably detects the radial direction outlet port 2C or the distal end side surface 2Ad as a feature point.

(47) In other words, a new feature point is not necessarily provided by detecting the configuration for machining the curved holes 100A to the material to be machined 100 as a feature point. Thus, the number of configurations for making a zero-point correction of the electrode phase (rotational position) of the electrode bar 2 can be reduced.

(48) The feature point is not limited to the radial direction outlet port 2C and the distal end side surface 2Ad described above. FIGS. 9 and 10 are views illustrating another example of the feature point of the machining position correcting device in accordance with the present embodiment.

(49) The feature point illustrated in FIG. 9 is a straight line 2E that is successively drawn along the axis C on the surface of the electrode bar 2. The straight line 2E is, for example, drawn on a line where the center of the distal end side surface 2Ad extends along the axis C. Detecting the straight line 2E by the position detector 13A makes it possible to detect a rotational position of the distal end side surface 2Ad. In addition, the straight line 2E can be detected in real time during machining because the straight line 2E is successively drawn along the axis C.

(50) The feature point illustrated in FIG. 10 is a curved line 2F that is drawn by successively turning with respect to the extending direction of the axis C to match a rotational position of the electrode bar 2 corresponding to curving of the holes 100A machined on the surface of the electrode bar 2. By rotating the lowering electrode bar 2 so that the position detector 13A detects the curved line 2F, the holes 100A can be machined in predetermined curving. In addition, the curved line 2F can be detected in real time during machining because the curved line 2F is successively drawn along the axis C.

(51) FIG. 11 is a schematic view illustrating another example of the machining position correcting device in accordance with the present embodiment.

(52) The machining position correcting device 13 illustrated in FIG. 11 includes a supporting unit 13B that is formed independently of the guide member 6. The supporting unit 13B is provided with supporting holes 13Ba that rotatably support the electrode bars 2 around the axis C while allowing the electrode bars 2 to be inserted therein in an up-and-down direction. The supporting unit 13B is provided with the position detector 13A to match the position of the supporting holes 13Ba. The supporting holes 13Ba and the position detectors 13A are provided by the number of the electrode bars 2 attached to the electrochemical machining device. This supporting unit 13B is provided attachably and detachably to the guide member 6, and is positioned and fixed by a positioning mechanism 13C. The positioning mechanism 13C specifies vertical positions and horizontal positions of the supporting holes 13Ba of the supporting unit 13B with respect to the guide member 6. By fixing the supporting unit 13B to the guide member 6 through the positioning mechanism 13C, the support positions, vertical positions and horizontal positions, of the electrode bars 2 are positioned with respect to the material to be machined 100 that is going to be machined, and a zero-point correction of the electrode phase (rotational position) of the electrode bars 2 can be made in this embodiment.

(53) In this manner, the machining position correcting device 13 of the present embodiment includes the supporting unit 13B that is provided attachably and detachably to, and is positioned and fixed to the guide member 6 guiding the electrode bar 2 to the material to be machined 100.

(54) When, for example, a nitric acid-based electrolyte or a sodium nitrate-based electrolyte is used and affects the position detector 13A, lifetime of the position detector 13A may be shortened. In the machining position correcting device 13 of the present embodiment, the supporting unit 13B is provided attachably and detachably to the guide member 6 and the supporting unit 13B is removed from the guide member 6 during machining, thereby preventing an electrolyte from affecting the position detector 13A.

REFERENCE SIGNS LIST

(55) 1 Machining head 1A Grasping unit 2 Electrode bar 2A Electrode 2Aa Flow path 2Ab Outer circumferential surface 2Ac Distal end surface 2Ad Distal end side surface 2B Electrical insulating layer 2C Radial direction outlet port 2D Axis direction outlet port 2E Straight line 2F Curved line 3 Rotational mechanism 3A Rotational detector 4 Elevating and lowering mechanism 4A Position detector 5 Fixed base 5A Fixing unit 5B First supporting unit 5C Second supporting unit 6 Guide member 6A Guide hole 7 Electrolyte supply unit 8 Machining tank 9 Power source 10 Controller 11 Storage unit 12 Input/output unit 13 Machining position correcting device 13A Position detector 13B Supporting unit 13Ba Supporting hole 13C Positioning mechanism 15 Device base 100 Material to be machined 100A Hole C Axis F1 Fluid acting force F2 Reaction force M Direction where reaction force directs R1 Target route R2 Machining route W Electrolyte