Apparatus for evaluating gas barrier properties and method of evaluating gas barrier properties

Abstract

An apparatus for evaluating gas barrier properties, a support having a polymer for supporting a sample, a chamber on a permeation side, and a detection unit, the support being joined to the opening of the chamber on a permeation side; in which a polymer film is provided between the support and a sample; a chamber on a supply side is provided, being disposed so as to be closably attachable to the sample and able to go up and down; and an external chamber covers a region interposed between the polymer film and the support; and a method of evaluating gas barrier properties using the same.

Claims

1. An apparatus for evaluating gas barrier properties, comprising a support having a polymer for supporting a sample, a chamber on a permeation side, and a detection unit, the support being joined to an opening of the chamber on a permeation side; wherein a polymer film is provided between the support and the sample; a chamber on a supply side is provided, being disposed so as to be closably attachable to the sample and able to go up and down; and an external chamber covers a region interposed between the polymer film and the support.

2. The apparatus for evaluating gas barrier properties according to claim 1, wherein the external chamber provides a protective region formed from a dry gas between the support and the polymer film.

3. The apparatus for evaluating gas barrier properties according to claim 1, wherein a dry gas source is connected to the external chamber.

4. The apparatus for evaluating gas barrier properties according to claim 1, wherein a gas piping for introducing a dry gas into the space in the external chamber prior to the sample exchange and for evacuating the space in the external chamber after the sample exchange is provided with the external chamber.

5. The apparatus for evaluating gas barrier properties according to claim 1, wherein the permeability to water vapor of the support is 1×10.sup.−8 mol/m.sup.2sPa to 1×10.sup.−14 mol/m.sup.2sPa.

6. The apparatus for evaluating gas barrier properties according to claim 1, wherein the support is formed from a polyimide.

7. The apparatus for evaluating gas barrier properties according to claim 1, wherein the polymer film has a hole penetrating through in the thickness direction, and is fixed and joined to an opening of the external chamber.

8. The apparatus for evaluating gas barrier properties according to claim 1, wherein the polymer film blocks an opening of a polymer film support ring having the opening at the center and is fixed to the polymer film support ring.

9. The apparatus for evaluating gas barrier properties according to claim 1, wherein the thickness of the polymer film is 1 μm to 100 μm.

10. The apparatus for evaluating gas barrier properties according to claim 1, wherein the detection unit is a mass analysis apparatus.

11. A method of evaluating gas barrier properties, which comprises using an apparatus for evaluating gas barrier properties, wherein the apparatus for evaluating gas barrier properties comprises: a support having a polymer; a chamber on a permeation side; and a detection unit, wherein a front surface side of the support supports a sample while a rear surface side of the support is joined to an opening of the chamber on a permeation side, wherein a polymer film is disposed between the support and the sample, and wherein a protective region formed from a dry gas is provided between the support and the polymer film at a time of exchanging the sample.

12. The method of evaluating gas barrier properties according to claim 11, wherein the apparatus for evaluating gas barrier properties comprises an external chamber capable of isolating a region interposed between the polymer film and the support from atmospheric air, and wherein the protective region is provided by introducing a dry gas into the external chamber at the time of exchanging the sample.

13. The method of evaluating gas barrier properties according to claim 12, wherein a gas piping for introducing a dry gas into the space in the external chamber prior to the sample exchange and for evacuating the space in the external chamber after the sample exchange is provided with the external chamber; wherein, prior to the sample exchange, a dry gas is introduced into the space in the external chamber through the gas piping, to form the protective region between the support and the polymer film; and wherein, after the sample exchange, the space in the external chamber is evacuated through the gas piping.

14. The method of evaluating gas barrier properties according to claim 12, wherein the polymer film has a hole penetrating through in the thickness direction, and is fixed and joined to an opening of the external chamber.

15. The method of evaluating gas barrier properties according to claim 11, wherein the permeability to water vapor of the support is 1×10.sup.−8 mol/m.sup.2sPa to 1×10.sup.−14 mol/m.sup.2sPa.

16. The method of evaluating gas barrier properties according to claim 11, wherein the support is formed from a polyimide.

17. The method of evaluating gas barrier properties according to claim 11, wherein the polymer film blocks an opening of a polymer film support ring having the opening at the center and is fixed to the polymer film support ring.

18. The method of evaluating gas barrier properties according to claim 11, wherein the thickness of the polymer film is 1 μm to 100 μm.

19. The method of evaluating gas barrier properties according to claim 11, wherein the detection unit is a mass analysis apparatus.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a cross-sectional view schematically illustrating the state upon measurement of a first embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(2) FIG. 2 is a cross-sectional view schematically illustrating the state immediately before sample exchange of the first embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(3) FIG. 3 is a cross-sectional view schematically illustrating the state at the time of sample exchange of the first embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(4) FIG. 4 is a cross-sectional view schematically illustrating the state upon gas barrier properties measurement of Comparative Example 1 related to the apparatus for evaluating gas barrier properties of the present invention.

(5) FIG. 5 is a cross-sectional view schematically illustrating the state immediately before sample exchange of the Comparative Example 1 related to the apparatus for evaluating gas barrier properties of the present invention.

(6) FIG. 6 is a cross-sectional view schematically illustrating the state at the time of sample exchange of the Comparative Example 1 related to the apparatus for evaluating gas barrier properties of the present invention.

(7) FIG. 7 is a cross-sectional view schematically illustrating the state upon measurement of a second embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(8) FIG. 8 is a cross-sectional view schematically illustrating the state immediately before sample exchange of the second embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(9) FIG. 9 is a cross-sectional view schematically illustrating the state at the time of sample exchange of the second embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(10) FIG. 10 is a cross-sectional view schematically illustrating the state immediately before sample exchange of a third embodiment related to the apparatus for evaluating gas barrier properties of the present invention.

(11) FIG. 11 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Example 1 related to the barrier properties evaluation apparatus of the present invention.

(12) FIG. 12 is a graph showing a change in the WVTR value after initiation of the evacuation inside the external chamber in Example 1 related to the barrier properties evaluation apparatus of the present invention.

(13) FIG. 13 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) when the joining between the support and the chamber on the permeation side has been partially damaged, in Example 1 related to the apparatus for evaluating gas barrier properties of the present invention.

(14) FIG. 14 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Comparative Example 1 related to the barrier properties evaluation apparatus of the present invention.

(15) FIG. 15 is a graph showing a change in the WVTR value after initiation of the evacuation inside the external chamber in Comparative Example 1 related to the barrier properties evaluation apparatus of the present invention.

(16) FIG. 16 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Example 2 related to the barrier properties evaluation apparatus of the present invention.

(17) FIG. 17 is a graph showing a change in the WVTR value after initiation of the evacuation inside the external chamber in Example 2 related to the barrier properties evaluation apparatus of the present invention.

(18) FIG. 18 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Example 3 related to the barrier properties evaluation apparatus of the present invention.

(19) FIG. 19 is a graph showing changes in the ion current values of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Comparative Example 2 related to the barrier properties evaluation apparatus of the present invention.

(20) FIG. 20 is a graph showing a change in the ion current value of a detector (mass analysis apparatus) after initiation of the evacuation inside the external chamber in Example 3 related to the barrier properties evaluation apparatus of the present invention.

MODE FOR CARRYING OUT THE INVENTION

(21) As shown in FIG. 1, the apparatus for evaluating gas barrier properties 10 (10a) of the first embodiment has a chamber on a permeation side 41, and a support 2 supporting a sample 1 is joined with the opening 41a of the chamber. The term “join” implies that even when the sample 1 is exchanged, the support 2 and the chamber on the permeation side 41 are integrated, and a state in which a reduced amount of gas flows in through the boundary between the support 2 and the chamber on the permeation side 41 as compared to the gas flowing into the chamber on the permeation side by permeating through the support 2, is maintained. The means for joining is not particularly limited. However, for example, fixing by means of an adhesive may be mentioned. For example, a support 2 containing a polymer is fixed to the opening 41a of the chamber on the permeation side 41 with an adhesive.

(22) It is preferable that the support 2 is produced into a shape conforming to the shape of the sample 1 in order to support the sample 1 to be evaluated. Since the sample 1 is a flat film in many cases, it is preferable to produce the support into a flat shape.

(23) The polymer included in the support 2 refers to a polymer having, for example, a number average molecular weight of 1,000 or more. Preferred examples thereof include polyimide, polyamide, polycarbonate, polyether ether ketone, polyether sulfone, polyamide-imide, polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polyvinyl chloride, polyvinylidene chloride, polyacrylonitrile, polystyrene, polyphenylenesulfide, polytetrafluoroethylene, and nylon-66. Among those mentioned above, since polyimide has a lower nitrogen permeation rate against dry nitrogen than the nitrogen permeation rate against atmospheric air including water vapor, it is made possible to maintain the environment inside the chamber on the permeation side more satisfactorily by exchanging the sample in dry nitrogen. From such a viewpoint, polyimide is more preferred.

(24) The thickness of the support 2 is 0.1 mm to 20 mm, preferably 0.2 mm to 10 mm, and more preferably 0.5 mm to 2 mm. Since this thickness is provided, the strength of the support is maintained, and handling of the apparatus is made easy. When the support is too thin, the support may be damaged or bent due to the pressure difference between the supply side and the permeation side, and therefore, it is not preferable. When the support is too thick, gas permeation through the edge surfaces around the support becomes non-negligible, and the apparatus becomes complicated in order to solve the problem. Meanwhile, the thickness as used herein means the total thickness in the external appearance. For example, in a case of two plates structure in which a metal plate having a large number perforated holes and a polymer plate are stacked and used, the thickness is the thickness of the sum. Sample 1 is supported by the support 2, and a polymer film 3 is inserted between the support 2 and the sample 1.

(25) Furthermore, on the chamber on the permeation side 41, a chamber on the supply side 42 is disposed such that an opening 42a of the chamber on the supply side 42 faces the opening 41a of the chamber on the permeation side 41. The chamber on the supply side 42 is disposed so as to be closably attachable to the sample 1 and able to go up and down, such that the chamber on the supply side 42 forms a tightly sealed space with the chamber on the permeation side 41, with the support 2, the polymer film 3, and the sample 1 being interposed therebetween. The sample 1 and the polymer film 3 are fixed by being pressed to the support 2 side by the opening 42a of the chamber on the supply side 42. Elevation of the chamber on the supply side 42 is implemented by an elevation means that is not shown in the diagram. Meanwhile, a gasket that is not shown in the diagram may also be provided between the sample 1 and the opening 42a of the chamber on the supply side 42 in order to increase air tightness.

(26) Preferred examples of the material for the above-described polymer film 3 include polyimide, polyimide-amide, polyether sulfone, polycarbonate, polyether ether ketone, polystyrene, polyvinyl chloride, nylon-66, polyethylene terephthalate, polyacrylonitrile, and polyethylene. Furthermore, from the viewpoints of thermal stability and high gas diffusibility of rapidly discharging dissolved gas, polyimide is more preferred. The thickness of the polymer film 3 is 1 μm or more and 100 μm or less, preferably 5 μm or more and 60 μm or less, and more preferably 10 μm or more and 30 μm or less. When the thickness of the polymer film 3 is too thin, the water vapor that has penetrated through the surface on the sample 1 side at the time of sample exchange is discharged through the support 2 side during sample exchange, water vapor in the atmosphere arrives at the protective region 4, and this water vapor flows into the chamber on the permeation side through the support. When the thickness of the polymer film 3 is too thick, time is taken until the water vapor that has penetrated through the surface on the sample 1 side is sufficiently discharged through the support 2 side.

(27) The chamber on the supply side 42 is connected with a supply side gas piping 73, and the piping for an exhaust system and the piping for an evaluating gas introduction system are connected through a valve that is not shown in the diagram.

(28) The chamber on the permeation side 41 is connected with a gas piping on the permeation side 72 that leads to a space on the permeation side 51, and this gas piping on the permeation side 72 is connected with a vacuum pump that is not shown in the diagram, with a valve 62 being interposed therebetween. Furthermore, the chamber on the permeation side 41 is connected with a detection unit (mass analysis apparatus) 32 that leads to the space on the permeation side 51. This detection unit 32 may be a vacuum gauge. However, it is desirable that the detection unit is a mass analysis apparatus. Although the gas in the space on the permeation side is mostly water vapor, hydrogen and the like are also included. Since the concentration of water vapor in the space on the permeation side can be measured distinctively from other gas species by using a mass analysis apparatus, reliability is enhanced compared to the case of using a vacuum gauge. Furthermore, since this method of evaluating gas barrier properties in which gas in a vacuum is analyzed, enables measurement of water vapor as a main component of the gas to be measured, measurement is facilitated. On the other hand, in the equal pressure method of related art techniques, since it is necessary to measure a trace amount of water vapor in a carrier gas with a sensitivity of ppm or higher, an edge-cutting technique is required.

(29) Furthermore, there are an external chamber on the permeation side 81 and an external chamber on the supply side 82, which cover the region interposed between the polymer film 3 and the support 2. The space 53 in the external chamber disposed on the outside of the upper external part of the chamber on the permeation side 41, which includes the region interposed between the polymer film 3 and the support 2, and the chamber on the supply side 42, is covered by the external chamber on the permeation side 81 and the external chamber on the supply side 82, and thus tight sealing is enabled. Meanwhile, the periphery on the side of the chamber on the permeation side 41 in the external chamber on the permeation side 81 is sealed by an O-ring or the like on the external surface of the chamber on the permeation side 41. Thereby, tight sealing of the space 53 in the external chamber is further secured. Furthermore, an opening 81a of the external chamber on the permeation side 81 and an opening 82a of the external chamber on the supply side 82 face each other and are sealed by means of, for example, a gasket that is not shown in the diagram. Furthermore, the external chamber on the supply side 82 is made able to go up and down by means of an elevation means that is not shown in the diagram. Moreover, an external chamber gas piping 75 that leads to the space 53 in the external chamber is connected to the external chamber on the permeation side 81. This external chamber gas piping 75 is connected with the piping of the exhaust system and the piping of the gas introduction system, and the two systems are switched by an opening and closing valve that is not shown in the diagram. The piping of the exhaust system is connected with a vacuum pump. On the other hand, the piping of the gas introduction system is connected with a dry gas source that is not shown in the diagram. Examples of dry gas for the dry gas source include dry air, helium, nitrogen, oxygen, and argon, and nitrogen and argon are more preferred. From the viewpoint that the gas permeability of the support is generally low because the molecules are larger, nitrogen is even more preferred.

(30) As shown in FIG. 1 to FIG. 3, the method of evaluating gas barrier properties using the above-described apparatus for evaluating gas barrier properties 10 (10a) will be explained below.

(31) As shown in FIG. 1, the support 2 is fixed and joined to the opening 41a side of the chamber on the permeation side 41 with an adhesive. A polymer film 3 is inserted between the support 2 and the sample 1, and the sample 1 and the polymer film 3 are fixed to the support 2 side by being pressed by the opening 42a of the chamber on the supply side 42.

(32) During measurement, water vapor is introduced into the space on the supply side 52 in the chamber on the supply side 42, through the supply side gas piping 73. Water vapor permeates through the sample 1, the polymer film 3 (3A), and the support 2, and arrives at the space on the permeation side 51. The space on the permeation side 51 is evacuated using a vacuum pump (not shown in the diagram) through the gas piping on the permeation side 72. The gas partial pressure in the space on the permeation side 51 is measured using the detection unit (mass analysis apparatus) 32, and from the behavior, the WVTR value of the sample 1 is obtained. During the time, the space 53 in the external chamber is evacuated using a vacuum pump (not shown in the diagram) through the external chamber gas piping 75.

(33) After gas barrier properties measurement is completed, the space on the supply side 52 is evacuated through the supply side gas piping 73. After sufficient evacuation is achieved, the piping of the exhaust system of the supply side gas piping 73 is closed, and the chamber on the supply side 42 is pulled up. Subsequently, dry gas is introduced through the external chamber gas piping 75. This state is illustrated in FIG. 2. When the chamber on the supply side 42 is pulled up, since pressing from above is eliminated, a small space is naturally formed between the polymer film 3 and the support 2. In this space, dry gas that has been introduced through the external chamber gas piping 75 flows in, and thereby a protective region 4 is formed.

(34) Subsequently, the external chamber on the supply side 82 is pulled up, and the sample 1 is removed through the space between the external chamber on the supply side 82 and the external chamber on the permeation side 81. This state is shown in FIG. 3. Thereafter, a sample 1 to be measured next is disposed on the polymer film 3. In this operation of exchanging the sample 1, since the protective region 4 is in a state almost filled with dry gas, penetration of atmospheric components including water vapor into the support surface almost does not occur. Furthermore, when a dry gas is introduced into the space 53 in the external chamber or the space on the supply side 52, it is preferable to introduce the dry gas such that the space 53 in the external chamber or the space on the supply side 52 is in a state of higher air pressure than the atmospheric pressure. Thereby, when the external chamber on the supply side 82 is pulled up, it is difficult for the atmospheric air to enter the space 53 in the external chamber, and the environment of the protective region 4 can be maintained over a long time period.

(35) After the exchange of the sample 1 is completed, the external chamber on the supply side 82 is lowered, and thereby the space 53 in the external chamber is closed. It is preferable that such an operation of exchanging the sample 1 is carried out rapidly. However, when time is taken for the exchange operation, the design of the apparatus may be devised to use a thicker polymer film 3, or the like. Next, the space 53 in the external chamber is evacuated through the external chamber gas piping 75. At this time, the space on the supply side 52 that is in communication is also evacuated through the external chamber gas piping 75. Furthermore, the gas components in the atmosphere that have penetrated through the sample 1 side of the polymer film 3 at the time of sample exchange are discharged through both the sample 1 side and the support 2 side of the polymer film 3, and are evacuated through the external chamber gas piping 75. As a result, inflow of the gas components in the atmosphere into the space on the permeation side 51 can be prevented. After sufficient evacuation is achieved, the chamber on the supply side 42 is lowered, and the space on the supply side 52 is closed. Subsequently, water vapor is introduced into the space on the supply side 52 through the supply side gas piping 73. In this manner, the measurement state of FIG. 1 is attained again. The gas partial pressure in the space on the permeation side 51 is measured using the detection unit (mass analysis apparatus) 32, and from this value, the WVTR value can be obtained.

(36) With the above-described apparatus for evaluating gas barrier properties 10a and the method of evaluating gas barrier properties using the apparatus, a protective region 4 formed from a dry gas is provided on the sample-side surface 5 of the support 2 at the time of exchanging the sample 1, and water vapor in the atmosphere cannot reach the support surface 5. Therefore, inflow of water vapor and the like in the atmosphere into the space on the permeation side 51 at the time of exchanging the sample 1 can be suppressed. As a result, exchange of the sample 1 is enabled while the environment of the space on the permeation side 51 is maintained satisfactorily.

(37) Next, a conventional apparatus for evaluating gas barrier properties 10b will be explained as Comparative Example, with reference to FIGS. 4 to 6.

(38) As shown in FIG. 4, the apparatus for evaluating gas barrier properties 10b of Comparative Example has a configuration similar to that of the apparatus for evaluating gas barrier properties 10a of the first embodiment shown in FIG. 1, except that the polymer film 3 is absent.

(39) After gas barrier properties measurement is completed, the space on the supply side 52 is evacuated through the supply side gas piping 73. After sufficient evacuation is achieved, the piping of the exhaust system of the supply side gas piping 73 is closed, and the chamber on the supply side 42 is pulled up. Subsequently, dry gas is introduced through the external chamber gas piping 75. This state is illustrated in FIG. 5. When the chamber on the supply side 42 is pulled up, since pressing from above is eliminated, a small space is naturally formed between the sample 1 and the support 2. In this space, dry gas that has been introduced through the external chamber gas piping 75 flows in, and thereby a protective region 4 is formed.

(40) Subsequently, the external chamber on the supply side 82 is pulled up, and the sample 1 is removed through the space between the external chamber on the supply side 82 and the external chamber on the permeation side 81. This state is shown in FIG. 6. At this time, atmospheric air flows into the external chamber 53 and arrives at the region 5 on the support surface, and thus the protective region 4 disappears. Gas components such as water vapor in the atmosphere penetrate into the support 2 through the surface of the support 2. In such a state, a sample 1 to be measured next is disposed on the support 2. Then, the external chamber on the supply side 82 is lowered, the space 53 in the external chamber is closed, and then the space 53 in the external chamber is evacuated through the external chamber gas piping 75.

(41) At this time, the space on the supply side 52 that is in communication is also evacuated through the external chamber gas piping 75. However, the gas components that have penetrated into the support 2 diffuse through the support 2 and are discharged through the surface of the support on the side of the space on the permeation side 51 of the support 2. Evacuation of the space on the permeation side 51 is continued until discharge through the surface of the support 2 on the side of the space on the permeation side 51 no longer occurs. Subsequently, the chamber on the supply side 42 is lowered, and the space on the supply side 52 is closed.

(42) Subsequently, water vapor is introduced into the space on the supply side 52 through the supply side gas piping 73. In this manner, the measurement state of FIG. 4 is attained again. The gas partial pressure in the space on the permeation side 51 is measured using the detection unit (mass analysis apparatus) 32, and from this value, the WVTR value is obtained.

(43) In this method, since gas components such as water vapor in the atmosphere penetrate into the support 2, it is necessary to wait until those components are no longer discharged through the side of the space on the permeation side 51. Therefore, the time required for a series of procedures ranging from the exchange of samples to the completion of measurement is lengthened, and the efficiency of evaluation is decreased.

(44) Next, an apparatus for evaluating gas barrier properties 10 (10c) of a second embodiment will be explained with reference to FIGS. 7 to 9. The apparatus for evaluating gas barrier properties 10c has a configuration similar to that of the apparatus for evaluating gas barrier properties 10a, except that the shape and the position of installation of a polymer film 3 (3B) are different from those for the apparatus for evaluating gas barrier properties 10a.

(45) First, FIG. 7 shows the state of the apparatus for evaluating gas barrier properties 10c at the time of measuring the gas barrier properties.

(46) As illustrated in FIG. 7, the polymer film 3 (3B) is fixed and joined to the opening of an external chamber on the permeation side 81 using an adhesive. In this polymer film 3B, a hole 6 penetrating through in the thickness direction is opened, and gas may escape therethrough in the thickness direction of the polymer film. The diameter of the hole 6 is 0.1 mm or more and 10 mm or less, preferably 0.5 mm or more and 5 mm or less, and more preferably 1 mm or more and 3 mm or less. The number of holes 6 may be one; however, there may be a large number. The size, number, disposition and the like of the holes 6 are appropriately designed from the viewpoint of the flow of the gas inside the space 53 in the external chamber. This polymer film 3B is disposed on the support 2 so as to be in contact with the support 2, and a sample 1 is disposed thereon. Then, the sample 1 and the polymer film 3B are fixed by pressing to the support 2 side by an opening 42a of the chamber on the supply side 42. Furthermore, the space 53 in the external chamber is evacuated through the external chamber gas piping 75. As such, the same configuration as that of the apparatus for evaluating gas barrier properties 10a of the first embodiment, except for the polymer film 3B, is adopted.

(47) After gas barrier properties measurement is completed, the space on the supply side 52 is evacuated through the supply side gas piping 73. After sufficient evacuation is achieved, the piping of the exhaust system of the supply side gas piping 73 is closed, and the chamber on the supply side 42 is pulled up. Subsequently, dry gas is introduced through the external chamber gas piping 75. The dry gas flows into both sides of the polymer film 3B in the space 53 in the external chamber through the hole 6 of the polymer film 3B.

(48) This state is illustrated in FIG. 8. When the chamber on the supply side 42 is pulled up, since pressing from above is eliminated, a small space is naturally formed between the polymer film 3B and the support 2. In this space, dry gas that has been introduced through the external chamber gas piping 75 flows in, and thereby a protective region 4 is formed.

(49) Subsequently, the external chamber on the supply side 82 is pulled up, and the sample 1 is removed through the space between the external chamber on the supply side 82 and the external chamber on the permeation side 81. This state is shown in FIG. 9. Subsequently, the sample 1 to be measured next is disposed on the polymer film 3B, the external chamber on the supply side 82 is lowered, and the space 53 in the external chamber is closed. Subsequently, the space 53 in the external chamber is evacuated through the external chamber gas piping 75. At this time, the space on the supply side 52 that is in communication is also evacuated through the external chamber gas piping 75. The gas components in the atmosphere that have penetrated through the sample 1 side of the polymer film 3B at the time of sample exchange are discharged through both the sample 1 side and the support 2 side of the polymer film 3B, and are evacuated through the external chamber gas piping 75. As a result, inflow of the gas components in the atmosphere into the space on the permeation side 51 can be prevented. After sufficient evacuation is achieved, the chamber on the supply side 42 is lowered, and the space on the supply side 52 is closed. Subsequently, water vapor is introduced into the space on the supply side 52 through the supply side gas piping 73. In this manner, the measurement state of FIG. 7 is attained again. The gas partial pressure in the space on the permeation side 51 is measured using the detection unit (mass analysis apparatus) 32, and from this value, the WVTR value can be obtained.

(50) With this apparatus for evaluating gas barrier properties 10c, an operation effect similar to that of the apparatus for evaluating gas barrier properties 10a can be obtained. Together with that, the apparatus for evaluating gas barrier properties 10c has the following operation effect. That is, since the polymer film 3B is fixed to an opening 81a of an external chamber on the permeation side 81, although the polymer film 3B has the hole 6, the external chamber on the permeation side 81 is in a state close to a sealed space by means of the polymer film 3B. In such a state, when a dry gas is introduced through the external chamber gas piping 75 on the side of the external chamber on the permeation side 81, the pressure becomes higher than the atmospheric pressure, and inflow of atmospheric air including water vapor to the support 2 side of the polymer film 3B through the hole 6 can be suppressed. As a result, even if a long time is taken for sample exchange, a protective space 4 is maintained, and the environment of a space on the permeation side 51 can be maintained satisfactorily.

(51) Since the hole 6 is disposed in the polymer film 3B, a dry gas can be sent also to the space 53 in the external chamber of the external chamber on the supply side 82 through the hole 6 by introducing the dry gas through the external chamber gas piping 75 after measurement. At that time, by lifting the chamber on the supply side 42, the dry gas flows into the space on the supply side 52 through the gap produced by the lifting. Therefore, it is not necessary to introduce a dry gas separately through the supply side gas piping 73. However, in a case in which it is wished to introduce a dry gas faster into the space on the supply side 52, or the like, the dry gas may be introduced through the supply side gas piping 73.

(52) Next, an apparatus for evaluating gas barrier properties 10 (10d) of a third embodiment will be explained with reference to FIG. 10. The apparatus for evaluating gas barrier properties 10d has a configuration similar to that of the apparatus for evaluating gas barrier properties 10a, except that the polymer film 3 (3C) is supported by a polymer film support ring.

(53) A polymer film support ring 7 is constructed from a plate-shaped compact material (aluminum, polypropylene, or the like) having an opening at the center, and the polymer film 3 (3C) is fixed thereto using an adhesive or the like so as to block this opening and is integrated with the support ring. Furthermore, the polymer film support ring 7 is fixed to the chamber on the permeation side 41 using a fixing tool that is not shown in the diagram, such that the polymer film 3C is in contact with the support 2. There is provided a gap between the polymer film support ring 7 and the external chamber on the permeation side 81.

(54) When a dry gas is introduced through the external chamber gas piping 75 for sample exchange, due to the pressure of the dry gas, the polymer film 3 is slightly bent, and a protective region 4 is formed between the polymer film 3 and the support 2. Furthermore, the dry gas flows out to the upper side of the polymer film support ring 7 through a gap between the polymer film support ring and the external chamber on the permeation side 81, and penetration of atmospheric air is prevented. After sample exchange, when the space 53 in the external chamber is evacuated through the external chamber gas piping 75, the space on the supply side 52 that is in communication through this gap is also evacuated.

(55) In this manner, penetration of atmospheric air can be reliably prevented using the thin polymer film 3.

EXAMPLES

(56) The present invention will be described in more detail based on examples given below, but the invention is not meant to be limited by these.

Example 1

(57) Measurement of a film-like sample (sample 1) was carried out using the apparatus for evaluating gas barrier properties 10 (10a) described in FIGS. 1 to 3.

(58) As the sample 1, a polyethylene naphthalate film having a thickness of 0.1 mm and having a barrier layer formed on the surface was used. As the support 2, a plate-like body made of polyimide and having a thickness of 125 μm and a stainless steel metal plate having a thickness of 1 mm and having a large number of 2-mmϕ holes were superposed and used. The plate-shaped polyimide film was fixed and joined to the chamber on the permeation side using an adhesive. A polyimide film having a thickness of 13 μm was used as the polymer film 3. The sample 1 was exchanged over about 2 minutes, the external chamber on the supply side 82 was lowered, and the space 53 in the external chamber was closed. The space 53 in the external chamber was evacuated through the external chamber gas piping 75 (state of FIG. 2). The relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the indicator values (ion current that increases or decreases according to the increase or decrease of various gas species) of the detection unit (mass analysis apparatus 32) is shown in FIG. 11. As shown in FIG. 11, the ion currents for water vapor, nitrogen, and oxygen did not change over one hour, and it is understood that there was no inflow of those gas components into the space on the permeation side 51. Subsequently, the chamber on the supply side 42 was lowered, the space on the supply side 52 was closed, and water vapor was introduced through the supply side gas piping 73. The change in the WVTR value thereafter was as shown in FIG. 12, and after a lapse of one day, the value was almost stabilized. Thus, a value of 4×10.sup.−4 g/m.sup.2 day was obtained.

(59) Subsequently, the gas barrier properties were repeatedly evaluated, and at a certain time, the indicator value representing nitrogen of the detection unit (mass analysis apparatus) 32 increased greatly at the time of sample exchange, as shown in FIG. 13. The apparatus for evaluating gas barrier properties was stopped and inspected, and it was found that the joining between the support 2 and the chamber on the permeation side 41 provided by an adhesive was partially damaged. Thus, the support 2 was exchanged and joined to the chamber on the permeation side 41 using an adhesive, and the barrier properties evaluation apparatus was produced again. The detection unit (mass analysis apparatus) 32 was not damaged, and thereafter, evaluation of the gas barrier properties was made possible without any change. That is, it is understood that by adopting the structure of the present invention, there are no need for any special safety measures to be taken when the joining between the support and the chamber on the permeation side is damaged.

Comparative Example 1

(60) Measurement of a film-like sample (sample 1) similar to that used in Example 1 was carried out using the apparatus for evaluating gas barrier properties 10 (10b) described in FIGS. 4 to 6. The apparatus for evaluating gas barrier properties 10b has a configuration similar to that of the apparatus for evaluating gas barrier properties 10a, except that the polymer film 3 used in the apparatus for evaluating gas barrier properties 10a is not used.

(61) As shown in FIG. 14, it is understood that the relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the ion current of the detection unit (mass analysis apparatus) 32 is such that the ion currents for water vapor and oxygen are increased after about 10 minutes, and such gas components have flowed into the space on the permeation side 51. Subsequently, it required about one day until the apparatus came to stabilization to the original level.

(62) From a comparison between Example 1 and Comparative Example 1, it was found that by using the polymer film 3 as in Example 1, inflow of gas components in the atmosphere into the space on the permeation side 51 at the time of sample exchange is suppressed, and measurement can be started rapidly by introducing water vapor.

(63) Meanwhile, thereafter, the chamber on the supply side 42 was moved to close the space on the supply side 52, and water vapor was introduced through the supply side gas piping 73. As a result, the change in the WVTR value was as shown in FIG. 15, and the value was almost stabilized after a lapse of about 5 days. Thus, a value of 4×10.sup.−4 g/m.sup.2 day, which is the same as that of Example 1, was obtained.

(64) Furthermore, in an apparatus having the same structure as that of Comparative Example 1, except that the apparatus did not have a support 2, Cellophane having a thickness of 40 μm was used as a film-like sample 1. When water vapor was introduced into the space on the supply side 52, the sample 1 was broken, and water vapor penetrated into the space on the permeation side 51. As a result, the filament in the detector (mass analysis apparatus) 32 was down, and exchange was needed. That is, in conventional apparatuses, it is understood that safety measures are needed for the occasion of damage of the sample 1 or impairment of the joining between the support 2 and the chamber on the permeation side 41.

Example 2

(65) An evaluation was carried out using the same apparatus and the same procedure as those of Example 1, except that as the sample 1, a polyethylene terephthalate film having a thickness of 0.1 mm and having a barrier layer formed on the surface was used as a film-like sample different from that of Example 1.

(66) The relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the ion current values of the detection unit (mass analysis apparatus 32) is shown in FIG. 16. The ion current values for water vapor, nitrogen, and oxygen did not change over one hour, and it is understood that there was no inflow of those gas components into the space on the permeation side 51.

(67) From these results, it was found that even with a sample different from Example 1, inflow of gas components in the atmosphere into the space on the permeation side 51 is similarly suppressed.

(68) Subsequently, the chamber on the supply side 42 was lowered, the space on the supply side 52 was closed, and water vapor was introduced through the supply side gas piping 73. As a result, the change in the WVTR value was as shown in FIG. 17, and the value was almost stabilized after a lapse of about 5 days. Thus, a value of 2×10.sup.−5 g/m.sup.2 day was obtained.

Example 3

(69) In order to understand the essence of the effects of the present invention, a test was carried out using the same apparatus and the same procedure as those of Example 1 without using the sample 1.

(70) First, as shown in FIG. 1, it was assumed that measurement of gas barrier properties was completed, and the space on the supply side 52 was evacuated through the supply side gas piping 73. After sufficient evacuation was achieved, the piping of the exhaust system of the supply side gas piping 73 was closed, and the chamber on the supply side 42 was pulled up. Subsequently, dry gas was introduced through the external chamber gas piping 75. When the chamber on the supply side 42 was pulled up, since pressing from above was eliminated, a small space was naturally formed between the polymer film 3 and the support 2. In this space, the surrounding dry gas that has been introduced through the external chamber gas piping 75 flew in, and thereby a protective region 4 was formed. This state corresponds to FIG. 2.

(71) Subsequently, the external chamber on the supply side 82 was pulled up. This state corresponds to FIG. 3. Simulating the exchange of the sample, the state was retained for 90 seconds, subsequently, the external chamber on the supply side 82 was lowered, and the space 53 in the external chamber was closed. The space 53 in the external chamber was evacuated through the external chamber gas piping 75. This corresponds to the state illustrated in FIG. 2. The relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the ion current values of the detection unit (mass analysis apparatus 32) is shown in FIG. 18. As shown in FIG. 18, the ion current values for water vapor, nitrogen, and oxygen did not change over 24 hours, and it is understood that there was no inflow of those gas components into the space on the permeation side 51. A slight amount of nitrogen was seen; however, the change was not significant.

Comparative Example 2

(72) A test was carried out by the same procedure as that of Example 3 as described above, using an apparatus for evaluating gas barrier properties 10b that did not use a polymer film 3 as explained in FIGS. 4 to 6, and without using the sample 1.

(73) The relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the ion current values of the detection unit (mass analysis apparatus 32) is shown in FIG. 19. From about 10 minutes after initiation of evacuation, the ion current values for water vapor, nitrogen, and oxygen increased, and it was found that these gases flowed into the space on the permeation side 51. Evacuation was continued for 8 hours, and the ion current value of oxygen returned to the level before evacuation. However, for water vapor and nitrogen, the ion current values did not return to the original level. From a comparison between this test and Example 3, it became clear that by using the polymer film 3, penetration of gas components in the atmosphere into the space on the permeation side 51 can be prevented.

Example 4

(74) In order to understand the essence of the effects of the present invention, a test was carried out using the apparatus for evaluating gas barrier properties 10 (10d) explained above using FIG. 10.

(75) First, for the sample exchange, the space on the supply side 52 was evacuated through the supply side gas piping 73. After sufficient evacuation was achieved, the piping of the exhaust system of the supply side gas piping 73 was closed, and the chamber on the supply side 42 was pulled up. Subsequently, dry gas was introduced through the external chamber gas piping 75. When the chamber on the supply side 42 was pulled up, since pressing from above was eliminated, a small space was naturally formed between the polymer film 3 and the support 2. In this space, dry gas that has been introduced through the external chamber gas piping 75 flowed in, and thereby a protective region 4 was formed. This state corresponds to the state of the apparatus shown in FIG. 10.

(76) Subsequently, the external chamber on the supply side 82 was pulled up. The sample was exchanged over 30 seconds, subsequently, the external chamber on the supply side 82 was lowered, and the space 53 in the external chamber was closed. The space 53 in the external chamber was evacuated through the external chamber gas piping 75. The relationship between the time after the initiation of evacuation of the space 53 in the external chamber and the ion current value of the detection unit (mass analysis apparatus 32) is shown in FIG. 20. As shown in FIG. 20, the ion current value for water vapor did not change over 24 hours, and it is understood that there was no inflow of those gas components into the space on the permeation side 51. That is, it became clear that even with the apparatus of the apparatus for evaluating gas barrier properties 10 (10d), the effects of the present invention can be obtained.

(77) Having described our invention as related to the present embodiments, it is our intention that the invention not be limited by any of the details of the description, unless otherwise specified, but rather be construed broadly within its spirit and scope as set out in the accompanying claims.

(78) This application claims priority on Patent Application No. 2017-035207 filed in Japan on Feb. 27, 2017, which is entirely herein incorporated by reference.

REFERENCE SIGNS LIST

(79) 1 Sample 2 Support 3, 3A, 3B, 3C Polymer film 4 Protective region 5 Region on support surface 6 Hole 7 Polymer film support ring 10 Apparatus for evaluating gas barrier properties 32 Detection unit (mass analysis apparatus) 41 Chamber on permeation side 41a Opening of chamber on permeation side 42 Chamber on supply side 42a Opening of chamber on supply side 51 Space on permeation side 52 Space on supply side 53 Space in external chamber 62 Valve 72 Gas piping on permeation side 73 Supply side gas piping 75 External chamber gas piping 81 External chamber on permeation side 81a Opening of external chamber on permeation side 82 External chamber on supply side 82a Opening of external chamber on supply side