OPTICAL FILM AND FABRICATION METHOD THEREOF AND DISPLAY APPARATUS
20210223604 · 2021-07-22
Assignee
- Boe Technology Group Co., Ltd. (Beijing, CN)
- HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. (Hefei, Anhui, CN)
Inventors
Cpc classification
B32B33/00
PERFORMING OPERATIONS; TRANSPORTING
B32B2457/20
PERFORMING OPERATIONS; TRANSPORTING
G03F7/0005
PHYSICS
C23C14/086
CHEMISTRY; METALLURGY
C23C14/35
CHEMISTRY; METALLURGY
B32B3/30
PERFORMING OPERATIONS; TRANSPORTING
International classification
C23C14/35
CHEMISTRY; METALLURGY
G02B27/00
PHYSICS
Abstract
The present disclosure is related to an optical film. The optical film may include a substrate and a planarization layer. A plurality of cavities may be on a surface of the substrate. A cross-sectional area of each of the cavities parallel to a bottom surface thereof may increase along a direction away from the bottom surface. The planarization layer may be on the surface of the substrate having the cavities. A refractive index of the planarization layer may be larger than that of the substrate.
Claims
1. An optical film, comprising: a substrate; and a planarization layer; wherein a plurality of cavities are provided on a surface of the substrate, a cross-sectional area of each of the cavities parallel to a bottom surface thereof increases along a direction away from the bottom surface; and the planarization layer is on the surface of the substrate having the cavities, and a refractive index of the planarization layer is larger than a refractive index of the substrate.
2. The optical film according to claim 1, wherein the plurality of cavities are arranged in an array.
3. The optical film according to claim 1, wherein the cavities each have a shape of a regular polygonal prism.
4. The optical film according to claim 3, wherein the regular polygonal prism is a regular quadrangular prism.
5. The optical film according to claim 4, wherein a length L of a side of a positive projection of each of the cavities on the substrate is substantially equal to a distance L′ between two adjacent cavities on the substrate.
6. The optical film according to claim 5, wherein L and L′ each are approximately in a range between 1 μm and 5 μm.
7. The optical film according to claim 1, an angle between a side surface of each of the cavities and the bottom surface thereof is approximately in a range between 110° to 150°.
8. The optical film according to claim 1, wherein a depth of each of the cavities is approximately in a range between 500 nm to 1 μm.
9. The optical film according to claim 1, wherein a thickness of the planarization layer is approximately in a range between 1 μm to 2 μm.
10. The optical film according to claim 1, wherein the planarization layer at least fills and levels up the cavities.
11. The optical film according to claim 1, wherein a surface of the planarization layer is substantially parallel to the bottom surface of each of the cavities.
12. The optical film according to claim 1, wherein the planarization layer is made of a transparent conductive material.
13. The optical film according to claim 12, wherein the transparent conductive material is indium tin oxide.
14. A display substrate comprising the optical film according to claim 1.
15. The display substrate according to claim 14, wherein the display substrate further comprises a color film layer on a side of the substrate away from the cavities.
16. A method for fabricating an optical film, comprising: providing a substrate; forming a cavity on a surface of the substrate, wherein a cross-sectional area of the cavity parallel to a bottom surface of the cavity increases along a direction away from the bottom surface; and forming a planarization layer on the surface of the substrate having the cavity.
17. The method for fabricating an optical film according to claim 16, wherein forming the cavity on the surface of the substrate comprises: coating a layer of photoresist on the surface of the substrate and forming photoresist retention regions and photoresist non-retention regions on the substrate; etching the photoresist non-retention regions to form the cavity by a plasma etching apparatus; and removing the photoresist at the photoresist retention regions.
18. The method for fabricating an optical film according to claim 16, wherein forming the planarization layer on the surface of the substrate having the cavity comprises: forming the planarization layer on the surface of the substrate having the cavity by a magnetron sputtering method.
19. A display apparatus comprising the display substrate according to claim 14.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0007] The subject matter which is regarded as the invention is particularly pointed out and distinctly claimed in the claims at the conclusion of the specification. The foregoing and other objects, features, and advantages of the invention are apparent from the following detailed description taken in conjunction with the accompanying drawings in which:
[0008]
[0009]
[0010]
[0011]
[0012]
[0013]
DETAILED DESCRIPTION
[0014] The present disclosure will be described in further detail with reference to the accompanying drawings and embodiments in order to provide a better understanding of the technical solutions of the present disclosure by those skilled in the art.
[0015]
[0016] An optical film according to one embodiment of the present disclosure may be applied into a display substrate. The display substrate may be assembled with an array substrate into a cell to form a display panel. The optical film is on a light exiting side of the display panel. In one embodiment, the display substrate may be a color film substrate or an opposite substrate. In another embodiment, the optical film may also be used in an array substrate. A side of a substrate 1 of the optical film having the cavities 3 is at a light exiting side of the display panel. In one embodiment, as shown in
[0017] As shown in
[0018] In one embodiment, there is a plurality of cavities 3 on the substrate 1. The plurality of cavities 3 are arranged in an array. That is, spacing between positive projections of any of two adjacent cavities 3 in a row direction or in a column direction on the substrate 1 is equal. As shown in
[0019] In one embodiment, each of the above-described cavities 3 has a shape of a regular polygonal prism. At such, light can be refracted to a same angle after passing through each side of the cavity 3, and the light emits uniformly. In one embodiment, the cavity 3 may have a shape of a regular quadrangular prism. In another embodiment, the cavity 3 may have a shape of a regular hexagonal prism or a regular octagonal prism. In another embodiment, the cavity has a shape of a hemisphere. In one embodiment, a side surface of the cavity is a planar surface. In another embodiment, a side surface of the cavity is a curved surface such as a concave surface or a convex surface, as shown in
[0020] In one embodiment, a cavity 3 has a shape of a regular quadrangular prism as shown in
[0021] In one embodiment, the planarization layer 4 may be made of a transparent conductive material. The transparent conductive material may be inorganic materials such as indium tin oxide (ITO), indium zinc oxide (IZO), or fluorine doped tin oxide (FTO). The transparent conductive material may also be organic materials such as transparent conductive polymers, for example, poly (3,4-ethylenedioxythiophene) and its derivatives. One advantage of using a transparent conductive material is that, when an optical film of the present embodiments is used in a touch panel, a touch element needs to be fabricated on a light exiting side of the optical film. Static electricity is usually generated on a surface of the substrate 1 during the fabrication process. The static electricity can be discharged through the transparent conductive material, thereby avoiding electro-static discharge (ESD).
[0022] In one embodiment, a thickness of the planarization layer 4 may be approximately in a range between 1 μm to 2 μm. The thickness of the planarization layer 4 should at least fill and level up the cavities 3 and can be determined based on specific circumstance.
[0023]
[0024] In one embodiment, the display substrate may be a color film substrate. That is, a color film layer 9 is provided on a side of the substrate 1 away from the cavities. In another embodiment, the display substrate may be an opposite substrate, that is, a color film layer 9 is not included.
[0025]
[0026] In one embodiment, the method for fabricating the optical film are described in detail as follows:
[0027] During step 101, a layer of photoresist 2 is coated on a surface of a substrate 1, and then exposed and developed to form photoresist retention regions 21 and photoresist non-retention regions.
[0028] During step 102, the photoresist non-retention regions are etched to form cavities 3 by a plasma etching apparatus.
[0029] In one embodiment, a mixture gas of Ar and CHF.sub.3 is used as etching gas to etch the substrate 1 with an inductively coupled plasma (ICP) etching apparatus. When the Ar inert gas is ionized into Ar in an etching chamber, the Ar.sup.+ can Obtain a lot of kinetic energy through self-bias acceleration of the ICP apparatus, thereby increasing bombardment effect of the plasma and assisting the plasma ionized from CHF.sub.3 to etch the substrate 1. A power of an upper electrode of the ICP may be set at about 200 W. A power of an lower electrode thereof, which is to provide self-bias electrode power, may be set at about 50 W. As such, high-speed etching of the substrate 1 is achieved. An angle between a side surface of an etching cavity 3 and a bottom surface of the substrate 1 may be controlled by adjusting a ratio of Ar/CHF.sub.3 in the mixture gas, a pressure of the etching chamber, and/or powers of the upper electrode and the lower electrode.
[0030] During step 103, the photoresist at the photoresist retention regions 21 is removed to form the substrate 1 having the cavities 3.
[0031] During step 104, a transparent conductive film, which may be an ITO film, having a thickness approximately in a range of 1 to 2 μm is formed on a surface of the substrate 1 having the cavities 3 by magnetron sputtering. An upper surface of the ITO film is planarized by a chemical mechanical planarization process or an anneal process to obtain a flat ITO thin film. That is, the planarization layer 4 is formed. In one embodiment, the planarization layer 4 at least fills and levels up the cavities 3. In addition, a surface of the formed planarization layer 4 is flat.
[0032] A display apparatus including a display substrate of Embodiment 1 is provided according to one embodiment of the present disclosure. As such, the display apparatus has wider viewing angles and better display effect.
[0033] In one embodiment, the display apparatus may be a liquid crystal display apparatus, an electroluminescent display apparatus, or any product or component with a display function, such as a liquid crystal panel, an electronic paper, an Organic Light-Emitting, Diode (OLED) panel, a mobile phone, a tablet computer, a television set, a monitor, a notebook computer, a digital photo frame, or a navigator etc. In the case of an OLED panel, the optical film is disposed on the outer surface of the package cover plate and can share one substrate with the package cover plate.
[0034]
[0035] The descriptions of the various embodiments of the present disclosure have been presented for purposes of illustration, but are not intended to be exhaustive or limited to the embodiments disclosed, Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein was chosen to best explain the principles of the embodiments, the practical application or technical improvement over technologies found in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
DESCRIPTION OF SYMBOLS IN THE DRAWINGS
[0036] 1: substrate [0037] 2: photoresist [0038] 21: photoresist retention region [0039] 3: cavity [0040] 4: planarization layer [0041] 5: substrate of an array substrate [0042] 6 and 8: alignment layer [0043] 7: liquid crystal layer [0044] 9: color film layer