LAMINATED BODY ASSEMBLY UNIT, LAMINATED BODY, AND METHOD FOR MANUFACTURING LAMINATED BODY
20210229393 · 2021-07-29
Inventors
Cpc classification
G02B3/0056
PHYSICS
B32B37/16
PERFORMING OPERATIONS; TRANSPORTING
B32B2457/08
PERFORMING OPERATIONS; TRANSPORTING
B32B2255/10
PERFORMING OPERATIONS; TRANSPORTING
G02B27/32
PHYSICS
B32B27/06
PERFORMING OPERATIONS; TRANSPORTING
B32B27/308
PERFORMING OPERATIONS; TRANSPORTING
G01B11/00
PHYSICS
H05K3/00
ELECTRICITY
B32B2307/4026
PERFORMING OPERATIONS; TRANSPORTING
B32B3/30
PERFORMING OPERATIONS; TRANSPORTING
B32B27/20
PERFORMING OPERATIONS; TRANSPORTING
B32B17/06
PERFORMING OPERATIONS; TRANSPORTING
International classification
B32B3/30
PERFORMING OPERATIONS; TRANSPORTING
B32B37/16
PERFORMING OPERATIONS; TRANSPORTING
Abstract
The present invention provides a laminated body assembly kit with which two substrates can be easily aligned even when, for example, facing surfaces thereof have high-density pattern portions. A laminated body assembly kit with an alignment function of the present invention includes a first substrate 10 and a second substrate 20 that are to be laminated together. The first substrate 10 has a lens portion 11 on a surface thereof opposite to a facing surface thereof that faces the second substrate 20. The second substrate 20 has an alignment mark portion 21 on at least one surface thereof. The first substrate 10 and the second substrate 20 respectively have the lens portion 11 and the alignment mark portion 21 such that, in a set laminated state, the alignment mark portion 21 of the second substrate 20 is located at a focal position of the lens portion of the first substrate 10. An image of the alignment mark portion 21 that is formed in the lens portion 11 in the set laminated state is an image indicating that the set laminated state has been achieved.
Claims
1. A laminated body assembly kit with an alignment function, the kit comprising a first substrate and a second substrate that are to be laminated together, wherein the first substrate has a lens portion on a surface thereof opposite to a facing surface thereof that faces the second substrate, the second substrate has an alignment mark portion on at least one surface thereof, the first substrate and the second substrate are respectively provided with the lens portion and the alignment mark portion such that, in a set laminated state, the alignment mark portion of the second substrate is located at a focal position of the lens portion of the first substrate, and an image of the alignment mark portion that is formed in the lens portion in the set laminated state is an image indicating that the set laminated state has been achieved.
2. The laminated body assembly kit according to claim 1, wherein the first substrate and the second substrate are transparent substrates.
3. The laminated body assembly kit according to claim 1, wherein the first substrate has two or more of the lens portions, and the second substrate has two or more of the alignment mark portions.
4. The laminated body assembly kit according to claim 1, wherein, on a facing surface of the second substrate, a total area of the alignment mark portion is 3% or less of an area of the entire second substrate.
5. The laminated body assembly kit according to claim 1, wherein the lens portion has a spherical or aspherical surface.
6. The laminated body assembly kit according to claim 1, wherein the lens portion is a cylindrical lens.
7. The laminated body assembly kit according to claim 1, wherein the alignment mark portion has a quadrangular shape in a plan view.
8. A laminated body comprising a first substrate and a second substrate, wherein the first substrate has a lens portion on a surface thereof opposite to a facing surface thereof that faces the second substrate, the second substrate has an alignment mark portion on at least one surface thereof, the first substrate and the second substrate are laminated together such that the lens portion of the first substrate and the alignment mark portion of the second substrate are located opposing each other, and an image of the alignment mark portion of the second substrate that is formed in the lens portion is an image that is formed when the alignment mark portion is located at a focal position of the lens portion.
9. The laminated body according to claim 8, wherein the first substrate and the second substrate are transparent substrates.
10. The laminated body according to claim 8, wherein the first substrate has two or more of the lens portions, and the second substrate has two or more of the alignment mark portions.
11. The laminated body according to claim 8 wherein, on a facing surface of the second substrate, a total area of the alignment mark portion is 3% or less of an area of the entire second substrate.
12. The laminated body according to claim 8, wherein the lens portion has a spherical or aspherical surface.
13. The laminated body according to claim 8, wherein the lens portion is a cylindrical lens.
14. The laminated body according to claim 8, wherein the alignment mark portion has a quadrangular shape in a plan view.
15. A method for manufacturing a laminated body using the laminated body assembly kit with an alignment function according to claim 1, the method comprising: placing the first substrate and the second substrate facing each other such that the lens portion and the alignment mark portion are located opposing each other, aligning the first substrate and the second substrate with each other by adjusting an image of the alignment mark portion of the second substrate that is formed in the lens portion to an image that is formed when the alignment mark portion is located at a focal position of the lens portion, and fixing the first substrate and the second substrate in this state.
16. The manufacturing method according to claim 15, wherein the alignment mark portion has a quadrangular shape in a plan view, the first substrate and the second substrate are aligned by being moved in directions of two axes that are orthogonal to each other, and the two axes are parallel to respective pairs of opposing sides of the quadrangular shape.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0021]
[0022]
[0023]
[0024]
[0025]
[0026]
[0027]
[0028]
[0029]
[0030]
[0031]
[0032]
DESCRIPTION OF EMBODIMENTS
[0033] In the laminated body assembly kit of the present invention, for example, the first substrate and the second substrate are transparent substrates.
[0034] In the laminated body assembly kit of the present invention, for example, the first substrate has two or more of the lens portions, and the second substrate has two or more of the alignment mark portions.
[0035] In the laminated body assembly kit of the present invention, for example, on a facing surface of the second substrate, a total area of the alignment mark portion is 3% or less of an area of the entire second substrate.
[0036] In the laminated body assembly kit of the present invention, for example, the lens portion has a spherical or aspherical surface.
[0037] In the laminated body assembly kit of the present invention, for example, the lens portion is a cylindrical lens.
[0038] In the laminated body assembly kit of the present invention, for example, the alignment mark portion has a quadrangular shape in a plan view.
[0039] In the laminated body of the present invention, for example, the first substrate and the second substrate are transparent substrates.
[0040] In the laminated body of the present invention, for example, the first substrate has two or more of the lens portions, and the second substrate has two or more of the alignment mark portions.
[0041] In the laminated body of the present invention, for example, on a facing surface of the second substrate, a total area of the alignment mark portion is 3% or less of an area of the entire second substrate.
[0042] In the laminated body of the present invention, for example, the lens portion has a spherical or aspherical surface.
[0043] In the laminated body of the present invention, for example, the lens portion is a cylindrical lens.
[0044] In the laminated body of the present invention, for example, the alignment mark portion has a quadrangular shape in a plan view.
[0045] In the manufacturing method of the present invention, for example, the alignment mark portion has a quadrangular shape in a plan view, the first substrate and the second substrate are aligned by being moved in directions of two axes that are orthogonal to each other, and the two axes are parallel to respective pairs of opposing sides of the quadrangular shape.
[0046] Hereinafter, a laminated body assembly kit with an alignment function, a laminated body, and a method for manufacturing a laminated body, of the present invention will be described using the drawings and the like. In the drawings, the same portions are denoted by the same reference numerals. Moreover, unless otherwise specified, descriptions of each embodiment can be applied to other embodiments.
[0047] The laminated body of the present invention can be obtained using the laminated body assembly kit of the present invention or by performing the manufacturing method of the present invention. For this reason, the following description can be applied to each of the aspects of the present invention, for example.
[0048] The laminated body assembly kit and the method for manufacturing a laminated body, of the present invention can be used, without limitation, in the case where a laminated body is formed by aligning two or more substrates with each other. Also, the field to which the present invention is applicable is not particularly limited, and the present invention can be used in the case where a laminated body is formed by aligning two or more substrates with each other as described above. A specific example thereof is a case where substrates having, for example, patterning portions (portions subjected to patterning) on each other's facing surfaces, each facing the other substrate, are laminated together. For example, compared with a case where only the facing surface of one substrate has a patterning portion, more complex patterning of a laminated body is possible when two substrates have patterning portions on their facing surfaces and the two substrates are laminated together facing each other. The type of treatment used for the patterning is not particularly limited, and examples thereof include hydrophilic treatment, hydrophobic treatment, formation of a circuit such as a conductive film, formation of protrusions and recesses such as a flow channel, and the like. In this case, patterning portions are also referred to as functional portions, for example. For example, inkjet printing, screen printing, and the like can be used to form a conductive film. With these printing techniques, a high-density pattern portion can be formed on the facing surfaces of the substrates, and furthermore, a pattern portion and the above-described alignment mark portion can also be printed in the same step. Thus, the position accuracy of the pattern portion and the alignment mark portion can be improved. The higher the density of the pattern portion is, the more important the precision of alignment of the two substrates is. According to the present invention, alignment can be easily performed as described above, and therefore, the present invention is extremely useful in producing a laminated body having a high-density pattern portion.
Laminated Body Assembly Kit with Alignment Function
[0049] As described above, the laminated body assembly kit of the present invention includes a first substrate and a second substrate that are to be laminated together, [0050] wherein the first substrate has a lens portion on a surface thereof opposite to a facing surface thereof that faces the second substrate, [0051] the second substrate has an alignment mark portion on at least one surface thereof, [0052] the first substrate and the second substrate are respectively provided with the lens portion and the alignment mark portion such that, in a set laminated state, the alignment mark portion of the second substrate is located at a focal position of the lens portion of the first substrate, and [0053] an image of the alignment mark portion that is formed in the lens portion in the set laminated state is an image indicating that the set laminated state has been achieved.
[0054] In the present invention, the number of substrates to be laminated is not particularly limited, and may be two or more, or three or more, for example. In the present invention, at least two substrates to be aligned are referred to as a first substrate and a second substrate.
[0055] In the present invention, the first substrate has a lens portion on a surface thereof opposite to a facing surface thereof that faces the second substrate, and the second substrate has an alignment mark portion on at least one of a facing surface thereof that faces the first substrate and a surface thereof opposite to the facing surface. A relationship between the lens portion of the first substrate and the alignment mark portion of the second substrate will be described using
[0056]
[0057]
[0058] However, as shown in
[0059] That is to say, it can be said that, only when the first substrate 10 and the second substrate 20 are in a specific positional relationship, will the alignment mark portion 21 be fully imaged in the lens portion 11. For this reason, in the laminated body assembly kit of the present invention, the first substrate is provided with the lens portion and the second substrate is provided with the alignment mark portion such that the alignment mark portion of the second substrate is located at the focal position of the lens portion of the first substrate in a set laminated state. Then, an image of the alignment mark portion that is formed in the lens portion in the set laminated state is used as an image indicating that the set laminated state has been achieved. Thus, the laminated body assembly kit of the present invention is configured such that it can be judged that the positions of the first substrate and the second substrate are aligned when the first substrate and the second substrate are placed facing each other, and an image indicating the set laminated state can be confirmed in the lens portion of the first substrate. Taking the case of the first substrate 10 and the second substrate 20 shown in
[0060] As described above, according to the present invention, the first substrate and the second substrate can be easily aligned simply by checking the image of the alignment mark portion of the second substrate that is formed in the lens portion of the first substrate. According to the present invention, even alignment with a precision of about 0.01 mm, for example, is possible.
[0061] In the present invention, the “set laminated state” refers to a preset laminated state of the first substrate and the second substrate, and is, for example, a laminated state that enables the laminated body to achieve an intended function. Here, as a specific example, construction of a laminated body having a conductive pattern and a flow channel pattern, such as those described later, will be described by way of example. To construct a structure having the conductive pattern and the flow channel pattern as a laminated body, first, the positional relationship between the conductive pattern and the flow channel pattern is determined, and the conductive pattern is provided on one of the substrates (e.g., first substrate), and the flow channel pattern is provided on the other substrate (e.g., second substrate). What is important here is to laminate the first substrate and the second substrate such that the conductive pattern and the flow channel pattern are in the determined positional relationship. Therefore, in this specific example, the laminated state that satisfies the predetermined positional relationship is the “set laminated state”. The first substrate and the second substrate are provided with the lens portion and the alignment mark portion, respectively, such that, for example, an image 30 such as that shown in
[0062] In the first substrate, the lens portion is formed of a transparent member, for example. Only the lens portion of the first substrate may be formed of a transparent member, or the entire first substrate may be formed of a transparent member. The transparent member may be, for example, a translucent member, and examples thereof include resin, glass, and the like. Examples of the resin include polycarbonate (PC), acrylic resins (e.g., polymethyl methacrylate (PMMA)), cycloolefin polymers (COPs), cycloolefin copolymers (COCs), and the like.
[0063] The second substrate is not particularly limited, and may be a transparent substrate, for example, or may be a substrate other than a transparent substrate. In the present invention, it is sufficient that, when detecting the alignment mark portion of the second substrate in the lens portion of the first substrate, the alignment mark portion of the second substrate can be optically distinguished from the other regions of the second substrate. In the case where the second substrate is a transparent substrate as described above, the member constituting the transparent substrate is not particularly limited, and may be similar to those for the first substrate, for example. Moreover, in the case where the second substrate is a substrate other than a transparent substrate as described above, the substrate may be a colored substrate, for example. The colored substrate can be molded using a colored resin obtained by adding a colorant to a resin such as those described above. The resin to which the colorant is added may be similar to those described above, for example. Examples of the colorant include a masterbatch, a dry color, and the like.
[0064] There is no particular limitation on the method for forming the alignment mark portion of the second substrate, and the alignment mark portion can be formed through inkjet printing, screen printing, or the like, for example. Moreover, as described above, according to the present invention, alignment can be checked based on the image of the alignment mark portion that is formed in the lens portion of the first substrate, and therefore, fitting or the like, for example, which has conventionally been required, is no longer necessary. For this reason, in the present invention, the second substrate does not need to have a thickness, a strength, and the like that have been required for handling in a conventional method, for example. In the present invention, the thickness and the strength of the second substrate are not particularly limited, and, for example, a plate, a film, a sheet, and the like can also be used.
[0065] There is no limitation on the combination of the color of the second substrate and the color of the alignment mark portion of the second substrate, and, for example, a combination of colors that can be distinguished from each other is preferable. When the color of the second substrate is transparent or white, for example, the color of the alignment mark portion is preferably black, for example.
[0066] The number of lens portions of the first substrate and the number of alignment mark portions of the second substrate are not particularly limited, and each may be two or more, three or more, or four or more, for example. It is preferable that the number of lens portions and the number of alignment mark portions are equal in order that the lens portions and the alignment mark portions correspond one-to-one during the alignment. The number of lens portions can be appropriately determined depending on, for example, the shape and the like of the first substrate and the second substrate to be aligned.
[0067]
[0068]
[0069] The shape of a lens portion of the first substrate is not particularly limited, and the lens portion of the first substrate may have, for example, the shape of a lens having a circular shape in a plan view or the shape of a cylindrical lens extending in a planar direction. In the former case, as shown in
[0070]
[0071]
[0072] A lens portion of the first substrate may have a single lens per lens portion as shown in
[0073]
[0074]
[0075] In
[0076] In
[0077] The pitch of the lenses 141 in a lens portion 14 may be constant or may vary, for example, and is preferably constant. Moreover, the pitch of the marks 241 in a mark portion 24 may be constant or may vary, for example, and is preferably constant. The pitch of the lenses 141 in a lens portion 14 and the pitch of the marks 241 in a mark portion 24 may be the same or different from each other, and furthermore, are preferably different from each other from the viewpoint of enabling improvement of the position accuracy and quantitative determination of the amount of positional deviation.
[0078] The shape of an alignment mark portion of the second substrate is not particularly limited and can be appropriately set depending on the shape of the lens portion of the first substrate, for example. The number of marks included in the alignment mark portion is not particularly limited and may be one or two or more, for example. Examples of the shape of the alignment mark portion include circular shapes, such as a perfect circle and an ellipse, polygonal shapes, linear shapes, and the like, and examples of the polygonal shapes include quadrangles, such as a square and a rectangle, and the like. The shape of the alignment mark portion means the shape of a mark that forms the alignment mark portion, and is the shape of the alignment mark portion itself when the alignment mark portion is formed by a single mark, or is the shape of each mark when the alignment mark portion is formed by a plurality of marks. Note that there is no particular limitation on the shape of an entire alignment mark portion formed by a plurality of marks, that is, an outer shape containing the plurality of marks.
[0079] It is preferable that the alignment mark portion has, for example, a quadrangular shape in a plan view, because an image thereof at a boundary portion has a straight line. When an image at the boundary portion has a straight line, this means that, for example, the shape of a boundary of a virtual image formed in the lens portion has a straight line. Usually, an adjustment platform is used in aligning the first substrate and the second substrate that face each other. The adjustment platform is capable of moving in, for example, the directions of two axes (X axis and Y axis) that are orthogonal to each other, and therefore, alignment can be performed by moving at least one of the first substrate and the second substrate in a planar direction in either one of the directions of the two orthogonal axes. Thus, when the alignment mark portion has a quadrangular shape, a virtual image has straight lines, for example, and therefore, alignment can be performed with higher accuracy in a simpler manner by arranging the two pairs of opposing sides respectively along the two orthogonal axes, which are the moving directions.
[0080] The alignment mark portion may be a two-dimensional mark or a three-dimensional mark, for example. The two-dimensional mark refers to, for example, a mark that does not have a substantial height (e.g., has a height of less than 50 μm) on the second substrate, or specifically, may be a mark that can be identified by the color of the alignment mark portion on the second substrate, for example. In this case, the alignment mark portion can be formed through printing onto the second substrate, for example. The three-dimensional mark refers to, for example, a mark with a three-dimensional structure that has a substantial height (e.g., a height of 50 μm or more) on the second substrate, or specifically, may be a mark that can be identified by the three-dimensional shape of the alignment mark portion on the second substrate, for example. Examples of the three-dimensional shape include a protrusion and recess shape, an edge, and the like on the second substrate.
[0081] It is sufficient that the alignment mark portion is arranged on at least one surface of the second substrate. As specific examples, the alignment mark portion, for example, may be arranged on the facing surface of the second substrate that faces the first substrate, may be arranged on the surface opposite to the first substrate, or may be arranged on both surfaces.
[0082] In the case where the alignment mark portion is arranged on the facing surface of the second substrate, the position of the alignment mark portion is not particularly limited, and, for example, any position can be set in a region excluding a patterning portion such as those described above. The proportion of the alignment mark portion on the facing surface of the second substrate is not particularly limited. The upper limit of the proportion of the total area of the alignment mark portion on the facing surface is, for example, 3% or less, or 1% or less. The upper limit of the planar area of the alignment mark portion is, for example, 0.01 mm.sup.2 or less, or 0.0001 mm.sup.2 or less.
[0083] According to the present invention, the alignment mark portion can be imaged and thereby observed in the lens portion in an enlarged manner. Therefore, even when the proportion of the total area of the alignment mark portion is, for example, 3% or less of the area of the entire second substrate, the first substrate and the second substrate can be aligned with high accuracy. Moreover, according to the present invention, the area of the alignment mark portion can be reduced to a small area. Therefore, for example, the degree of freedom of arrangement of a functional portion, such as a conductive film, to be arranged on the second substrate can be increased.
[0084] As described above, in the case where the first substrate and the second substrate are laminated together, the patterning portions are formed on the facing surfaces of the two substrates, for example. Thus, if the alignment mark portion is formed on the opposite surface of the second substrate, patterning can be freely performed over the entire region of the facing surface thereof, for example.
[0085] In the case where the alignment mark portion is arranged on the opposite surface of the second substrate, the position of the alignment mark portion is not particularly limited, and, for example, the alignment mark portion can be formed at any position where the alignment mark portion can be seen from the facing surface side of the second substrate. The proportion of the alignment mark portion on the opposite surface of the second substrate is not particularly limited, and may be similar to that described above, for example.
[0086] The present invention may further include one or more substrates, for example. As a specific example, the present invention may further include a third substrate having a lens portion or a third substrate having an alignment mark portion.
[0087] In the case where the present invention includes a third substrate having the lens portion, a form is conceivable, for example, in which the first substrate having the lens portion and the third substrate having the lens portion are laminated to the two surfaces of the second substrate having the alignment mark portion. The lens portion of the third substrate is, for example, a lens portion corresponding to the alignment mark portion of the second substrate as is the case with the first substrate. The second substrate has the alignment mark portion on at least one surface thereof. The first substrate has the lens portion on the surface opposite to the second substrate, and the first substrate is laminated such that the facing surface thereof faces one of the surfaces of the second substrate. While the first substrate is laminated to one of the surfaces of the second substrate, for example, another substrate can be further laminated to the other surface of the second substrate. Therefore, when the lens portion is arranged on the third substrate serving as the other substrate, it is possible to further laminate the third substrate on the surface of the second substrate that is on the opposite side to the surface on which the first substrate is laminated, and to perform alignment using the alignment mark portion of the second substrate. In this case, the first substrate having the lens portion and the third substrate having the lens portion are individually aligned on the two surfaces of the second substrate using the same alignment mark of the second substrate. For this purpose, it is preferable that the first substrate, the second substrate, and the third substrate are transparent substrates, for example.
[0088] In the case where the present invention includes a third substrate having the alignment mark portion, a form is conceivable, for example, in which the second substrate having the alignment mark portion and the third substrate are laminated in this order on the surface of the first substrate that is opposite to the surface on which the lens portion is formed. In this form, it is preferable that the first substrate has a lens portion corresponding to the alignment mark portion of the second substrate and a lens portion corresponding to the alignment mark portion of the third substrate. The lens shape and the lens thickness of each lens portion can be appropriately set such that, for example, the lens portion can be focused on a corresponding mark portion. It is preferable that the second substrate and the third substrate respectively have the mark portions at positions where the mark portions do not overlap when the two substrates are laminated, and the second substrate is a substrate that allows the mark portion of the third substrate to be seen from the facing surface of the second substrate that faces the first substrate. Since the lens portions of the first substrate respectively correspond to the mark portion of the second substrate and the mark portion of the third substrate, the lens portions can be aligned with the respective mark portions of the second substrate and the third substrate.
[0089] According to the present invention, even when three substrates are used as described above, alignment can be performed with excellent accuracy. Therefore, providing functional portions on facing surfaces of the three substrates makes it possible to, for example, design more complex functional portions for a laminated body in which the three substrates are laminated together.
[0090] As described above, the first substrate and the second substrate respectively have the lens portion and the alignment mark portion such that, in the set laminated state, the alignment mark portion of the second substrate is located at the focal position of the lens portion of the first substrate. The laminated body assembly kit of the present invention is a kit for making it easy to align the first substrate and the second substrate in the set laminated state, and the laminated state in which the substrates are correctly aligned can be set as desired. Moreover, the focal position of the lens portion of the first substrate can be set depending on, for example, the thickness of the first substrate, the refractive index of the lens portion, and the like, and the position of the alignment mark portion of the second substrate that is located at the focal position can be appropriately set depending on, for example, the distance from the lens portion to the alignment mark portion, the thickness of the second substrate, and the like.
Laminated Body and Method for Manufacturing Laminated Body
[0091] As described above, a laminated body of the present invention includes a first substrate and a second substrate, [0092] wherein the first substrate has a lens portion on a surface thereof opposite to a facing surface thereof that faces the second substrate, [0093] the second substrate has an alignment mark portion on at least one surface thereof, [0094] the first substrate and the second substrate are laminated together such that the lens portion of the first substrate and the alignment mark portion of the second substrate are located opposing each other, and [0095] an image of the alignment mark portion of the second substrate that is formed in the lens portion is an image that is formed when the alignment mark portion is located at a focal position of the lens portion.
[0096] A method for manufacturing a laminated body of the present invention uses the laminated body assembly kit with an alignment function of the present invention and includes: [0097] placing the first substrate and the second substrate facing each other such that the lens portion and the alignment mark portion are located opposing each other, [0098] aligning the first substrate and the second substrate with each other by adjusting an image of the alignment mark portion of the second substrate that is formed in the lens portion to an image that is formed when the alignment mark portion is located at a focal position of the lens portion, and [0099] fixing the first substrate and the second substrate in this state.
[0100] The laminated body of the present invention can be manufactured in accordance with the manufacturing method of the present invention with use of the laminated body kit with an alignment function of the present invention.
[0101] As described above using
[0102] Hereinafter, as specific application examples of the present invention, a first substrate and a second substrate having patterning portions will be described by way of example. Note that, however, the present invention is not limited to these examples.
Embodiment 1
[0103] The present embodiment is a form in which the first substrate has a lens portion and a flow channel, and the second substrate has an alignment mark portion and a conductive film, and will be described using
[0104]
[0105] It is preferable that the lens portions 11, the recesses 61, and the recesses 62 of the first substrate 10 are formed at one time with the same processing such as injection molding, for example. The accuracy of the positional relationship of the various portions can be increased by forming the lens portions 11, the annular recesses 61, and the recesses 62 with the same processing. Furthermore, an additional step can be omitted during the manufacturing, and consequently, the process can be simplified.
[0106]
[0107] It is preferable that the alignment mark portions 22 and the conductive films 64 of the second substrate 20 are formed at one time in the same step through printing or the like, for example. The accuracy of the positional relationship of the various portions, for example, can be increased even more by forming the alignment mark portions 22 and the conductive films 64 in the same step, and furthermore, an additional step can be omitted during the manufacturing, and consequently, the process can be simplified.
[0108]
[0109] The set laminated state of the first substrate 10 and the second substrate 20 is a state in which the circular ends of the conductive films 64 coincide with the respective liquid collecting portions surrounded by the recesses 61. The lens portions 11 and the alignment mark portions 22 are formed on the first substrate 10 and the second substrate 20, respectively, such that, in this state, the alignment mark portions 22 of the second substrate 20 are located at the focal positions of the lens portions 11 of the first substrate 10. Thus, at the time when, after the first substrate 10 and the second substrate 20 are placed facing each other, the images formed in the lens portions 11 of the first substrate 10 become the images 30 as shown in
[0110] Moreover, the length of the first substrate 10 in the direction along the short side thereof is shorter than the length of the second substrate 20 in the direction along the short side thereof. Therefore, as shown in the top view on the left side in
Embodiment 2
[0111] The present embodiment is a form in which the first substrate has a lens portion and a branching flow channel, and the second substrate has an alignment mark portion and a conductive film, and will be described using
[0112]
[0113] It is preferable that the lens portions 11 and the circular recesses 71a, 71b, and 71c of the first substrate 10 are formed through the same processing, as in the case of Embodiment 1.
[0114]
[0115] It is preferable that the alignment mark portions 22 and the circular conductive films 74a, 74b, and 74c of the second substrate 20 are formed in the same step, as in the case of Embodiment 1.
[0116]
Embodiment 3
[0117] The present embodiment is a form in which the first substrate has a lens portion and a cut-away portion, and the second substrate has an alignment mark portion and a conductive film, and will be described using
[0118]
[0119] It is preferable that the lens portions 11 and the circular recesses 81a and 81b of the first substrate 10 are formed through the same processing, as in the case of Embodiment 1.
[0120]
[0121] It is preferable that the alignment mark portions 22 and the circular conductive films 84a and 84b of the second substrate 20 are formed in the same step, as in the case of Embodiment 1.
[0122]
[0123] Moreover, since the first substrate 10 has the cut-away portions 83, as shown in the top view on the left side in
Embodiment 4
[0124] The present embodiment is a form in which the first substrate has a lens portion and a flow channel, and the second substrate has an alignment mark portion and a conductive film, and will be described using
[0125]
[0126]
[0127] It is preferable that the alignment mark portions 22 and the circular conductive films 94a, 94b, 94c, and 94d of the second substrate 20 are formed in the same step, as in the case of Embodiment 1.
[0128]
Embodiment 5
[0129] The present embodiment is a form in which the first substrate has a lens portion and a cut-away portion, and the second substrate has an alignment mark portion and a conductive film, and will be described using
[0130]
[0131]
[0132] It is preferable that the alignment mark portions 22 and the conductive films 104a, 104b, 104c, and 104d of the second substrate 20 are formed in the same step, as in the case of Embodiment 1.
[0133]
[0134] Moreover, since the first substrate 10 has the cut-away portions 83, as shown in the top view on the left side in
Embodiment 6
[0135] The present embodiment is a form in which the laminated body assembly kit further includes a third substrate having a lens portion, and will be described using
[0136]
[0137]
[0138]
[0139] In the present embodiment, each of the first substrate 10A and the third substrate 10B has the lens portions 11 at positions corresponding to the alignment mark portions 22 of the second substrate 20. The first substrate 10A is arranged such that the facing surface 10Y thereof faces one of the surfaces of the second substrate 20, with use of the alignment mark portions 22, and the third substrate 10B is arranged such that the facing surface 10Y thereof faces the other surface of the second substrate 20, with use of the alignment mark portions 22. At this time, the lens portions 11 of the first substrate 10A and the lens portions 11 of the third substrate 10B are aligned with the alignment mark portions 22 of the second substrate 20.
[0140] In the present embodiment, the alignment marks 22 of the second substrate 20 may be formed on either one of the surfaces thereof or on both surfaces, for example.
[0141] In the former case, a form is conceivable, for example, in which the alignment mark portions 22 are formed on the facing surface 20Y of the second substrate 20 that faces the first substrate 10A. Even when the alignment mark portions 22 are formed on the facing surface 20Y that faces the first substrate 10A, the alignment mark portions 22 also need to function as the alignment mark portions 22 for the third substrate 10B on the surface side that faces the third substrate 10B. In this case, when a transparent substrate, for example, is used as the second substrate 20, the alignment mark portions 22 on the first substrate 10A side can be checked from the third substrate 10B side as well, and thus, alignment can be performed. Note that the same applies to the case where the second substrate 20 has the alignment mark portions 22 on the surface that faces the third substrate 10B.
[0142] In the latter case, for example, a form in which separate alignment marks 22 are formed on the two surfaces of the second substrate 20, and a form in which the second substrate 20 has through holes, columnar bodies are disposed in the through holes, and exposed surfaces of the columnar bodies at the two ends thereof serve as the alignment mark portions 22 are conceivable. It is preferable that the alignment mark portions 22 are formed on the two surfaces of the second substrate 20, because, for example, setting is easier when positioning the alignment marks 22 of the second substrate 20 at the focal positions of the lens portions 11 for each of the first substrate 10A and the third substrate 10B.
[0143] According to the present embodiment, even when three substrates are used as described above, alignment can be performed with excellent accuracy. Therefore, providing functional portions such as the conductive films on the facing surfaces of the three substrates makes it possible to, for example, design more complex functional portions for a laminated body in which the substrates are laminated together.
Embodiment 7
[0144] The present embodiment is a form in which the laminated body assembly kit further includes a third substrate having an alignment mark portion, and will be described using
[0145]
[0146]
[0147]
[0148]
[0149] In the present embodiment, the second substrate 20 and the third substrate 40 have the respective alignment mark portions 22 and 42 such that the alignment mark portions are located at different positions when the two substrates are laminated together. On the other hand, the first substrate 10 has the lens portions 14 each including the two lenses 141 and 142 such that the lenses correspond to the respective alignment mark portions 22 and 42 when the second substrate 20 and the third substrate 40 are laminated to the first substrate 10. Then, first, the first substrate 10 is arranged on the second substrate 20 such that the facing surface 10Y thereof faces the second substrate 20, with use of the alignment mark portions 22 of the second substrate 20 and the lenses 142 of the lens portions 14 of the first substrate 10. Next, the first substrate 10 is arranged on the third substrate 40 via the second substrate 20 with use of the alignment mark portions 42 of the third substrate 40 and the lenses 141 of the lens portions 14 of the first substrate 10.
[0150] According to the present embodiment, even when three substrates are used as described above, alignment can be performed with excellent accuracy. Therefore, providing functional portions such as the conductive films on the facing surfaces of the three substrates makes it possible to, for example, design more complex functional portions for a laminated body in which the substrates are laminated together.
[0151] As shown in the foregoing embodiments, according to the present invention, for example, even when complex pattern portions, such as the above-described conductive films, recesses, and the like, are formed on the facing surface of the first substrate and the facing surface of the second substrate, for example, the first substrate and the second substrate can be easily aligned simply by checking the image of the alignment mark portion of the second substrate in the lens portion of the first substrate. As described in the foregoing embodiments, for example, in the case where pattern portions such as a conductive film, a recess, and the like are arranged with high density on at least one of the first substrate and the second substrate, the present invention is especially useful because alignment can be easily performed. Moreover, since the alignment mark portion of the second substrate is detected as an image that is formed in the lens portion of the first substrate, the alignment mark portion may be an extremely small mark, for example. Therefore, in the case where the alignment mark portion is arranged on the facing surface of the second substrate as described above, for example, even when pattern portions are arranged with high density, the alignment mark portion can be easily arranged in a portion where no pattern portions are present. Moreover, in the case where the alignment mark portion is arranged on the opposite surface of the second substrate, for example, the entire facing surface can be used to form pattern portions thereon, and on the other hand, the alignment mark portion can be arranged in any portion on the opposite surface.
[0152] Moreover, according to the present invention, the accuracy of the positional relationship of the various portions can be increased even more by, for example, forming the lens portion and the recess of the first substrate through the same processing, and forming the alignment mark portion and the conductive film of the second substrate in the same step. Thus, an additional step can be omitted, and consequently, the process can be simplified.
[0153] In the present invention, furthermore, the alignment mark can also be arranged on the surface of the second substrate that is opposite to the facing surface. In this case, the entire facing surface of the second substrate can also be used as a functional portion.
[0154] Although the invention of the present application has been described with reference to the embodiments above, the invention of the present application is not limited to the foregoing embodiments. Various modifications that will be understood by a person skilled in the art can be made to the configurations and the details of the invention of the present application without departing from the scope of the invention.
[0155] This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2017-242542 filed on Dec. 19, 2017, the entire disclosure of which is hereby incorporated by reference.
INDUSTRIAL APPLICABILITY
[0156] As described above, with the laminated body alignment kit of the present invention, two substrates can be correctly aligned even when, for example, facing surfaces thereof have high-density pattern portions, and thus, a laminated body in which the two substrates are correctly aligned can be obtained.
REFERENCE SIGNS LIST
[0157] 10, 10A First substrate [0158] 10B, 40 Third substrate [0159] 11, 13, 14 Lens portion [0160] 141, 142 Lens [0161] 20 Second substrate [0162] 21, 22, 23, 24, 42 Alignment mark portion [0163] 241 Mark [0164] 61, 62, 71, 72, 81, 82 Recess [0165] 63 Through hole [0166] 64, 74, 84, 94, 104 Conductive film [0167] 83 Cut-away portion