ELECTRODE ARRANGEMENT FOR A MICRO-ELECTRO-MECHANICAL SYSTEM, MICRO-ELECTRO-MECHANICAL SYSTEM, AND METHOD FOR OPERATING A MICRO-ELECTRO-MECHANICAL SYSTEM

Abstract

An electrode configuration for a microelectromechanical system, including a first electrode structure and a second electrode structure. The first electrode structure has a receptacle, and the second electrode structure has a finger. The first and second electrode structure are designed for a relative movement in relation to one another along a movement axis. A first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region.

Claims

1-10. (canceled)

11. An electrode configuration for a microelectromechanical system, comprising: a first electrode structure having a receptacle; and a second electrode structure having a finger, the first electrode and the second electrode structure being configured or a relative movement in relation to one another along a movement axis; wherein a first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region.

12. The electrode configuration as recited in claim 11, wherein the finger is situated at least partly in the receptacle and is movable relative to the receptacle along the movement axis.

13. The electrode configuration as recited in claim 11, wherein the first width of the receptacle tapers in the first region in a direction of a second main body of the second electrode structure, and/or the second width of the finger tapers in the second region along the movement axis in the direction of the second main body.

14. The electrode configuration as recited in claim 11, wherein the first width of the receptacle tapers in the first region along the movement axis in a direction of a first main body of the first electrode structure, and/or the second width of the finger tapers in the second region along the movement axis in the direction of the first main body.

15. The electrode configuration as recited in claim 11, wherein the receptacle and the finger are configured such that an electrical capacitance between the first electrode structure and the second electrode structure changes in a nonlinear manner during the relative movement.

16. The electrode configuration as recited in claim 11, wherein the first electrode structure has a multiplicity of receptacles, the second electrode structure has a multiplicity of fingers.

17. A microelectromechanical system, comprising: an electrode configuration for a microelectromechanical system, including: a first electrode structure having a receptacle; and a second electrode structure having a finger, the first electrode and the second electrode structure being configured or a relative movement in relation to one another along a movement axis; wherein a first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region.

18. The microelectromechanical system as recited in claim 17, wherein the electrode configuration is part of an actuator or detector of the microelectromechanical system.

19. A method for operating a microelectromechanical system, the micromechanical system including an electrode configuration for a microelectromechanical system, including a first electrode structure having a receptacle, and a second electrode structure having a finger, the first electrode and the second electrode structure being configured or a relative movement in relation to one another along a movement axis, wherein a first width of the receptacle, perpendicular to the movement axis, tapers along the movement axis at least in a first region, and/or a second width of the finger, perpendicular to the movement axis, tapers along the movement axis at least in a second region, the method comprising: carry out, by the first and second electrode structure, the relative movement in relation to one another along the movement axis.

20. The method as recited in claim 19, wherein the electrical capacitance between the first electrode structure and second electrode structure changes in a nonlinear manner during the relative movement.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG. 1 shows a schematic representation of an electrode system according to a first specific embodiment of the present invention.

[0026] FIG. 2 shows a schematic representation of an electrode configuration according to a second specific embodiment of the present invention.

[0027] FIG. 3 shows a schematic representation of an electrode configuration according to a third specific embodiment of the present invention.

[0028] FIG. 4 shows a schematic representation of an electrode configuration according to a fourth specific embodiment of the present invention.

[0029] FIG. 5 shows a schematic representation of an electrode configuration according to a fifth specific embodiment of the present invention.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

[0030] In the various Figures, identical parts are provided with the same reference characters, and are therefore generally named or mentioned only once.

[0031] FIG. 1 shows a schematic representation of an electrode configuration 1 according to a first specific embodiment of the present invention. Electrode configuration 1 is part of a microelectromechanical system. It includes a first electrode structure 10 and a second electrode structure 20. One of the first and second electrode structures 10, 20 is for example connected fixedly to a substrate, and the other electrode structure 10, 20 is part of an oscillating body that is movable relative to the substrate. Correspondingly, first and second electrode structure 10, 20 can carry out a movement relative to one another along a movement axis 100. During such a relative movement, a finger 21 of second electrode structure 20 can penetrate deeper into a receptacle 11 of first electrode structure 10, or can be moved further out of receptacle 11. It is for example possible that movement axis 100 coincides with the drive movement axis of the microelectromechanical system.

[0032] Movement axis 100 is typically made at least substantially parallel to a surface of the substrate. Perpendicular to movement axis 100 (and perpendicular to the substrate surface), receptacle 11 has a first width 12. First width 12 is here constant over the entire extension of first receptacle 11 (along movement axis 100). Finger 21 has a second width 22 perpendicular to movement axis 100 (and parallel to the substrate surface). Over a second region 23 of finger 21, second width 22 of the finger here tapers in the direction of immersion (of the finger) along movement axis 100 and thus in the direction of a first main body 14 of first electrode structure 1. Second region 23 extends well beyond half of the overall extension of finger 21 along movement axis 100. In the remaining part of finger 21, second width 23 of finger 21 remains constant. Various other geometries are also possible; for example, second region 23 could have one or more interruptions in which second width 22 remains constant. Through the tapering of finger 21, the change of the capacitance between first and second electrode structure 10, 20 as a function of the immersion depth (along movement axis 100) is nonlinear. In particular, with the specific embodiment shown in FIG. 1, strengthening nonlinearities of a drive oscillation/detection oscillation can be compensated in this way.

[0033] FIG. 2 shows a schematic representation of an electrode configuration 1 according to a second specific embodiment of the present invention. In contrast to the first specific embodiment (FIG. 1), second width 22 of finger 21 is at least substantially constant over the entire extension of finger 21. In contrast, first width 12 of receptacle 11 tapers in a first region 13 along movement axis 100, in the direction of first main body 14.

[0034] Through this tapering of receptacle 11, the change of the capacitance between the first and second electrode structure 10, 20 as a function of the immersion depth (along movement axis 100) is nonlinear. In particular, with the specific embodiment shown in FIG. 2 strengthening nonlinearities of a drive oscillation/detection oscillation can be compensated in this way.

[0035] FIG. 3 shows a schematic representation of an electrode configuration 1 according to a third specific embodiment of the present invention. In the third specific embodiment, second width 22 of finger 21 tapers over second region 23, opposite the immersion direction of finger 21 along movement axis 100. Correspondingly, second width 22 of finger 21 becomes smaller in second region 23 in the direction of second main body 24 of second electrode structure 20. Second region 23 extends well beyond half the overall extension of finger 21 along movement axis 100. In the remaining part, second width 23 of finger 21 remains constant.

[0036] FIG. 4 shows a schematic representation of an electrode configuration 1 according to a fourth specific embodiment of the present invention. In contrast to the third specific embodiment (FIG. 3), second width 22 of finger 21 is at least substantially constant over the entire extension of finger 21. In contrast, first width 12 of receptacle 11 tapers in a first region 13 along movement axis 100, in the direction of second main body 24.

[0037] With the specific embodiments shown in FIGS. 3 and 4, weakening (negative) nonlinear effects of a drive oscillation/detection isolation can be compensated in this way. Typically, first electrode structure 10 includes a multiplicity of receptacles 11 that are attached alongside one another on first main body 14 of first electrode structure 10.

[0038] Correspondingly, second electrode structure 20 includes a multiplicity of fingers 21 that are attached on a second main body 24 of second electrode structure 20 and are each capable of being introduced into a receptacle 11.

[0039] FIG. 5 shows a schematic representation of an electrode configuration 1 according to a fifth specific embodiment of the present invention. As is shown in FIG. 5, fingers 21 and receptacles 11, each of which tapers, can be combined with one another. In this exemplary specific embodiment, first width 12 of receptacle 11 tapers along movement axis 100 in the direction of a first main body 14 of first electrode structure 1 (for example over the entire length of receptacle 11, or, alternatively, only in a first region 13). At the same time, second width 22 of finger 21 tapers in the direction of first main body 14 (for example over the entire length of the finger, or, alternatively, only in a second region 23).

[0040] A wide variety of other combinations of fingers 21 and receptacles 11, shown as examples in FIGS. 1 through 5, are also possible.