SILICON NITRIDE CERAMIC TOOL COMPRISING DIAMOND FILM AND METHOD OF PREPARING THE SAME
20210237168 · 2021-08-05
Inventors
Cpc classification
B23B27/148
PERFORMING OPERATIONS; TRANSPORTING
C23C16/0272
CHEMISTRY; METALLURGY
C04B41/52
CHEMISTRY; METALLURGY
B23C5/10
PERFORMING OPERATIONS; TRANSPORTING
C04B41/52
CHEMISTRY; METALLURGY
C23C16/0254
CHEMISTRY; METALLURGY
C04B41/89
CHEMISTRY; METALLURGY
B23C2210/082
PERFORMING OPERATIONS; TRANSPORTING
B23B2226/00
PERFORMING OPERATIONS; TRANSPORTING
International classification
Abstract
A cutting tool, including a silicon nitride (Si.sub.3N.sub.4) ceramic substrate, and a diamond film coated on the surface of the Si.sub.3N.sub.4 ceramic substrate. The diamond film has a thickness of 7-12 μm. The cutting tool includes a tool nose, a blade, and a handle. The blade has a rake angle γ of 5-15°, a clearance angle α of 10-14°, and a helix angle of 15-45°. The blade includes four cutting edges.
Claims
1. A cutting tool, comprising: a silicon nitride (Si.sub.3N.sub.4) ceramic substrate; and a diamond film coated on a surface of the Si.sub.3N.sub.4 ceramic substrate, and the diamond film having a thickness of 7-12 μm.
2. The cutting tool of claim 1, wherein the cutting tool comprises a tool nose, a blade, and a handle; the blade has a rake angle γ of 5-15°, a clearance angle α of 10-14°, and a helix angle β of 15-45°; and the blade comprises four cutting edges.
3. The cutting tool of claim 2, wherein a radius R of the tool nose is 0.18-0.22 mm.
4. The cutting tool of claim 2, wherein the blade has a length H1 of 4.7-5.3 mm.
5. The cutting tool of claim 2, wherein the cutting tool has a length H2 of 49.5-50.5 mm.
6. A method of preparing the cutting tool of claim 1, the method comprising: 1) putting silicon nitride (Si.sub.3N.sub.4) ceramic substrate in a hexane suspension mixed with diamond powders, and ultrasonically vibrating the hexane suspension, to grow diamond seeds on the Si.sub.3N.sub.4 ceramic substrate; and 2) ultrasonically cleaning the Si.sub.3N.sub.4 ceramic substrate in acetone for 3-8 min, and then in 92-98% anhydrous alcohol for 2-4 min; drying the Si.sub.3N.sub.4 ceramic substrate and placing in a hot-wire chemical vapor deposition (CVD) vessel.
7. The method of claim 6, wherein prior to 1), a rake face of the silicon nitride (Si.sub.3N.sub.4) ceramic substrate is grinded in diamond slurry on a cast iron grinding plate, and then the rake face is roughened in a nano size by CF4 plasma dry etching.
8. The method of claim 6, wherein in 2), the hot-wire chemical vapor deposition (CVD) vessel operates with the following parameters: a filament temperature of 2000-2400° C., a substrate temperature of 750-800° C., a total pressure of 3.0-5.0 kPa, a total flow of 300-350 sccm, a volume ratio of CH.sub.4/H.sub.2 of 1-3%, and a deposition time of 6-10 h.
9. The method of claim 6, wherein a particle size of the diamond powders is 0.5-1 μm.
10. A method of machining a graphite mold for hot bending of glass for a curved surface mobile phone, the method comprising machining the graphite mold using the cutting tool of claim 1.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0019]
[0020]
[0021]
[0022]
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[0029]
[0030] In the drawings, the following reference numbers are used: 1. Tool nose; 2. Blade; 3. Handle.
DETAILED DESCRIPTION
[0031] To further illustrate, embodiments detailing a cutting tool and a preparation method thereof are described below. It should be noted that the following embodiments are intended to describe and not to limit the disclosure.
[0032] The disclosure provides a cutting tool comprising a silicon nitride (Si.sub.3N.sub.4) ceramic substrate and a diamond film coated on the surface of the Si.sub.3N.sub.4 ceramic substrate, and the diamond film has a thickness of 7-12 μm. In this example, the thickness is 10 m.
[0033] As shown in
[0034] Specifically, in this example, the rake angle γ is 8°, the clearance angle α is 10°, and the helix angle of 35°. The radius R of the tool nose is 0.2 mm. The blade has a length H1 of 5 mm. The cutting tool has a length H2 of 50 mm. The blade comprises four cutting edges.
[0035] In operation, a proper geometric angle of the cutting tool with respect to the workpiece is helpful to reduce the vibration thereof, so that the graphite workpiece is not easy to collapse, and thus improving the overall cutting performance of the cutting tool.
[0036] A method of preparing the cutting tool comprises:
[0037] 1) putting silicon nitride (Si.sub.3N.sub.4) ceramic substrate in a hexane suspension mixed with diamond powders, and ultrasonically vibrating the hexane suspension, to grow diamond seeds on the Si.sub.3N.sub.4 ceramic substrate; and
[0038] 2) ultrasonically cleaning the Si.sub.3N.sub.4 ceramic substrate in acetone for 3-8 min, and then in 92-98% anhydrous alcohol for 2-4 min; drying the Si.sub.3N.sub.4 ceramic substrate and placing in a hot-wire chemical vapor deposition (CVD) vessel.
[0039] In certain embodiments, prior to 1), a rake face of the silicon nitride (Si.sub.3N.sub.4) ceramic substrate is grinded in diamond slurry on a cast iron grinding plate, and then the rake face is roughened in a nano size by CF4 plasma dry etching. After laser nano treatment, the surface the substrate of the ceramic tool is rough, which is favorable for diamond to bond with the substrate and grow.
[0040] Specifically, in 1), the Si.sub.3N.sub.4 ceramic substrate is ultrasonically cleaned in acetone for 5 min, and then in 95% anhydrous alcohol for 3 min.
[0041] In 2), the hot-wire chemical vapor deposition (CVD) vessel operates with the following parameters: a filament temperature of 2000-2400° C., a substrate temperature of 750-800° C., a total pressure of 3.0-5.0 kPa, a total flow of 300-350 sccm, a volume ratio of CH.sub.4/H.sub.2 of 1-3%, and a deposition time of 6-10 h. In this example, the filament temperature is 2200° C., the substrate temperature is 780° C., the total pressure is 4.0 kPa, the total flow of 320 sccm, the volume ratio of CH.sub.4/H.sub.2 is 2%, and the deposition time is 8 h.
[0042] The particle size of the diamond powders is 0.5-1 μm. In this example, the particle size is 1 μm.
[0043] As shown in
[0044] As shown in
[0045] The quality and residual stress of the diamond film were measured by the LaBram HR Evolution Raman spectrometer. The laser wavelength of the spectrometer was 800 nm, and the light transmission efficiency was >30%. Natural diamond (ND) only has a sharp characteristic peak at 1332.5 cm.sup.−1. As shown in
[0046] To evaluate the surface sharpness of the cutting tool comprising a diamond film coating, the surface morphology of the cutting tool is measured by means of Fastcan AFM atomic force microscope produced by Bruker, as shown in
[0047] As shown in
[0048] As shown in
[0049] The thermal expansion coefficient of the silicon nitride ceramic material is close to that of diamond (3.0 and 3.7, respectively), which can reduce the thermal expansion stress of the CVD diamond film and silicon nitride ceramic substrate, thus producing good adhesion therebetween. Because there is no cobalt in the ceramic substrate, there is no need to pretreat the substrate and remove cobalt (Co) through corrosion. At the same time, the CVD diamond film deposited on the silicon nitride ceramic material can not only fill the surface defects of the silicon nitride ceramic material, but also improve the surface hardness, reduce the friction coefficient, improve the wear resistance and corrosion resistance, so as to improve the wear resistance and service life of the tool.
[0050] As shown in
[0051] The cutting tool of the disclosure comprising the silicon nitride (Si.sub.3N.sub.4) ceramic substrate and the diamond film can be used for high-speed machining of a graphite mold for hot bending of glass for curved surface mobile phones.
[0052] Graphite is a typical brittle material with layered structure, which is easy to break and wear the cutting tool during machining. Tool wear is a concern in graphite electrode machining, which not only affects the production cost and processing time, but also affects the surface quality of the workpieces. The main factors affecting the tool wear comprise cutting speed, tool path, geometric angle, cutting depth, cutting parameters and graphite material. Graphite material has high hardness, so the cutting tool needs high wear resistance and impact resistance.
[0053] The diamond coated silicon nitride ceramic tool of the disclosure has high wear resistance, high hardness, high lubricity of the coating surface, long service life and high-cost performance, which is suitable for graphite finishing. At present, diamond coating is the best choice for cutting tools for machining graphite, which can improve the performance of the cutting tools and ensure the dimensional accuracy and smoothness of graphite surface.
[0054] Owing to excellent chemical and physical properties, the diamond films of the disclosure obtained through chemical vapor deposition (CVD) have high hardness, excellent wear resistance and chemical stability. Integrating the advantages of the coating materials and the ceramic substrate, the cutting tool of the disclosure exhibits good cutting performance, high hardness and wear resistance, and low friction coefficient, thus prolonging the service life of the cutting tool.
[0055] It will be obvious to those skilled in the art that changes and modifications may be made, and therefore, the aim in the appended claims is to cover all such changes and modifications.