DEVICE AND METHOD FOR MONITORING POWER SEMICONDUCTOR DIE
20210172994 · 2021-06-10
Assignee
Inventors
- Nicolas DEGRENNE (Rennes Cedex 7, FR)
- Stefan MOLLOV (Rennes Cedex 7, FR)
- Jeffrey EWANCHUK (Rennes cedex 7, FR)
Cpc classification
G01R31/2642
PHYSICS
G01R31/2644
PHYSICS
G01R31/2656
PHYSICS
International classification
Abstract
A device comprising at least one power semiconductor die coated with a metallization and at least one light guide having two opposite ends. The first end is able to be connected at least to a light source and to a light receiver. The second end is permanently fixed facing to a surface of the metallization such that to form a light path towards said surface and a light path from said surface.
Claims
1.-13. (canceled)
14. A device for monitoring a power semiconductor die coated with a metallization, comprising at least one power semiconductor die coated with a metallization and at least one light guide having two opposite ends, a first end being able to be connected at least to a light source and to a light receiver, the second end being permanently fixed facing to a surface of the metallization such that to form a light path towards said surface and a light path from said surface.
15. The device according to claim 14, further comprising a light source and a light receiver both connected to the first end of the light guide, at least the light receiver being able to be connected to a processor.
16. The device according to claim 15, further comprising the processor connected at least to the light receiver, said processor comparing properties of the light collected by the light receiver to at least one reference, said reference comprising at least one of the followings: a predetermined value, the intensity of the light emitted by the light source, the processor being further connected to the light source, an intensity of the light collected by the light receiver in the past, the intensity of the light collected by a second light receiver to which the processor is connected, and the wavelength of the light emitted by the light source, the processor being further connected to the light source, the processor further generating a monitoring signal in function of the result of the comparison.
17. The device according to claim 14, further comprising at least one light splitter disposed on a light path between the first end of the light guide and at least a light source or a light receiver.
18. The device according to claim 15, further comprising at least one light splitter disposed on a light path between the first end of the light guide and at least a light source or a light receiver.
19. The device according to claim 16, further comprising at least one light splitter disposed on a light path between the first end of the light guide and at least a light source or a light receiver.
20. The device according to claim 14, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
21. The device according to claim 15, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
22. The device according to claim 16, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
23. The device according to claim 17, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
24. The device according to claim 18, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
25. The device according to claim 19, wherein the light guide includes at least two light paths, the first light path being arranged to guide a light beam from the first end until said surface of the metallization, the second light path being arranged to guide a light beam from the second end until the first end of the light guide.
26. The device according to claim 20, wherein the conformation of a terminal surface of the second end of the light guide and the relative position of the second end with respect to the surface of the metallization are conjointly selected such that the most part of the light outputting from the first light path is reflected on an area of the surface and then takes the second light path.
27. The device according to claim 14, further comprising an infra-red light receiver connected to the first end of the light guide.
28. The device according to claim 14, comprising at least two power semiconductor dies coated with a metallization and each associated to a respective light guide, each having a first end and a second opposite end, the two first ends being connected to a common light source through a light splitter and being connected to a common light receiver through a light coupler, the two second ends being permanently fixed facing to the surface of the respective metallization such that to form a respective light path until said surface and/or a respective light path from said surface.
29. The device according to claim 14, comprising N power semiconductor dies coated with a metallization, N being superior or equal to two, and a common light guide, said light guide including N distinct second ends being permanently fixed facing to a respective surface of each metallization such that to form a light path until a first of the N surfaces and to form a light path from the last of the N surfaces, said light guide further including N−1 intermediate light paths between the second ends each arranged to collect a light beam reflected from one of the N surfaces and to guide said light beam until another surface of the N surfaces.
30. The device according to claim 14, further comprising an assembling material between the second end and the surface, the composition and the thickness of said assembling material being selected to have a an attenuation inferior to 2 dB/m for the wavelength of the light source when the temperature is comprised between −40° C. and 150° C.
31. A method to monitor a power semiconductor die coated with a metallization comprising: fixing permanently a light guide facing to a surface of the metallization, collecting through said light guide a light beam reflected on said surface, converting the collected light beam into an electric signal, comparing said signal to at least one reference, generating a monitoring signal in function of the result of the comparison.
32. The method according to claim 31, wherein the fixing is implemented in such a manner to collect a light beam reflected on said surface having an intensity which depends on the roughness of said surface.
33. The method according to claim 31, wherein comparing the signal to at least one reference includes: filtering the electrical signal and/or fitting the electrical signal to a reference curve, the method further comprising extrapolating from said signal an estimation of the end of life and/or of the remaining useful life of said power semiconductor die, the monitoring signal including data relative to said estimation.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DESCRIPTION OF EMBODIMENTS
[0048] Figures and the following detailed description contain, essentially, some exact elements. They can be used to enhance understanding the invention and, also, to define the invention if necessary.
[0049]
[0050] The device 1 shown on
[0051] The semiconductor die 3 is metalized at least on one of its side, here on its top side. In other words, the semiconductor die 3 is coated with a metallization 5. The top surface of the metallization 5 is referenced 51. The metallization layer is, for example, made of an aluminum alloy. Such a metallization 5 has a thickness comprised between 1 and 20 micrometers. The surface 51 is used to fix wire bonds 2, for example by thermosonic bonding. The free portions of the surface 51 (deprived from wire bonds 2) can be used to dispose at least one light guide 7. In the example described here, when a plurality of spaces of the surface 51 are free, the light guide 7 is disposed as close as possible to the middle of the semiconductor die 3, which is generally the hottest part of the device 1. As a consequence, such a part is submitted to the hardest conditions during the operational life of the device 1.
[0052]
[0053] In various embodiments, the optic fibers can be replaced by other means, for example solid bars fixed with respect to the surface 51 and made of a material able to conduct light.
[0054] The light guide 7 has two opposite ends 71, 72. The first end 71 is able to be connected to a light source 11 and/or to a light receiver 13. The first end 71 is distant from the surface 51. The second end 72 is fixed facing to the surface 51 of the metallization 5. In operation, the light guide 7 forms a light path 91 until the surface 51 and/or a light path 92 from the surface 51.
[0055] For example, the light source 11 can be a low-cost light emitting diode (LED) or a Laser diode. The light source 11 is associated to a power supply and a drive circuit (not shown on figures). The drive circuit is typically controlled by a processor, for example the processor 20 that will be described hereinafter. The processor decides when the light is generated.
[0056] The light receiver 13 is arranged to measure the intensity and/or the wavelength of the collected light. Commercially available light receiver can be used such as photo-conductive cells (e.g. light dependent resistor), and photo-junction devices (e.g. photodiode or phototransistor). The light receiver 13 generates an output electrical signal indicating the intensity and/or the wavelength of light. The light receiver 13 is associated to a power supply and a signal conditioning circuit (not shown on figures) to generate a voltage value that can be acquired by an analog-to-digital converter. After conversion the signal is treated by a processor, for example the processor 20 that will be described hereinafter. The signal conditioning circuit contains, for example, at least one operational amplifier (op-amp).
[0057] In the example of
[0058] The light guide 7 enables to dispose the light source 11 and/or the light receiver 13 distant from the semiconductor die 3. The light source 11 and the light receiver 13 are protected against high temperature and electro-magnetic interferences.
[0059] The light guide 7, especially the second end 72, is permanently positioned with respect to the surface 51. In other words, the relative position of the light guide 7 and the metallization 5 is not planned to be modified in normal condition of use and during the operational life of the device 1. In the described example, the device 1 further comprises an assembling material 8 between the second end 72 and the surface 51. The assembling material 8 comprises, for example glue, resin or gel. The composition and the thickness of the assembling material 8 are selected to preserve a high transparency during the operational life of the device 1, especially when submitted to high temperatures. Here, the word “transparency” or “transparent” has to be understood as having attenuation inferior to 2 dB/m for the wavelength of the light source 11 when the temperature is comprised in the operating range which is typically −40° C. to 150° C.
[0060] In the embodiment shown on
[0061] In various embodiments, the semiconductor die 3 is embedded in a printed circuit board (PCB). In such a case, the light guide 7 can be also embedded in the PCB. The device 1 can be deprived of assembling material 8 and/or filler material 9.
[0062] In the example of
[0063] In the embodiment of
[0064] In the embodiment of
[0065] In various embodiment, a light reflector/refractor piece can be used to replace the bevel forms or by combination with bevel forms.
[0066] In the embodiments of
[0067] During the operational life of the device 1, the surface 51 is deteriorated. Defects and irregularities appear. The roughness increases. The reflexivity and the shining decrease. The quantity of the light collected in the second light path 92 is reduced. For example, at least a portion of the light beam hits irregularities and is reflected outside from the light guide 7. Such a decreasing of the collected light can be used to detect deterioration of the surface 51 and, then, to estimate the wear of the device 1.
[0068] In a various embodiment, properties of the light collected in the second light path 92 are compared to at least one reference. The following are examples of comparison that can be made: [0069] the collected light intensity with respect to a preset value, [0070] the collected light intensity with respect to a collected light intensity in the past, for example when the device is novel and in a quasi-perfect state (obtained during a calibration step), [0071] the collected light intensity with respect to the emitted light intensity, [0072] the collected light intensity with respect to a collected light intensity issued from a reference measurement (see
[0078] The comparisons can be made in an absolute value. For example and as shown on the embodiment of
[0079] Monitoring the wavelength evolution enables to detect iridescence effects of the surface 51. Such a parameter can also be used to estimate the degradation of the surface 51 state. In such a case, the comparisons are preferably made for two similar temperatures, or by deducting the wavelength variation part due to the temperature variations.
[0080] In the embodiment of
[0083] For example, the terminal surface of each one of the optic fibers forming the second light path 92 and the reference light path 90 is designed in a bevel form. The bevel forms of the two optic fibers are substantially symmetric one to the other. The terminal surface of the optic fiber forming the first light path 91 is designed in a double-bevel form (or a pointed form, or a conical form). In a various embodiment, the terminal portion of the first light path 91 is equipped with a light splitter to divide the light beam into two light beams oriented respectively toward the area P and toward the reference portion 52.
[0084] The reference portion 52 is selected, or especially designed, to have stable surface properties during time and when submitted to the planned operational conditions. The reference portion 52 can comprise another area of the semiconductor die 3 or an area where the semiconductor die is attached such as a Direct Bounded Substrate (DBC).
[0085] The first end 71 is able to be connected to a second light receiver 15. The properties of the light collected by the second light receiver 15 can be used as reference values as above described. For example, at least one value issued from the second light receiver 15 can be subtracted from a corresponding value issued from the light receiver 13. This enables to compensate measured variations due to other parameters than the wear of the critical parts of the device 1, such as degradation of the analog circuits, light emitters, light receptors and light guides. The accuracy of the health estimation is improved.
[0086]
[0087] The infra-red light receiver 17 may be the same as the first light receiver 13, assuming its spectral responsivity covers at least some infra-red wavelengths (0.7 μm to 20 μm). The temperature can be monitored continuously in order to detect over-temperature phenomena. Such phenomena can be used to trigger a stop of the operations or specific measures to decrease the load. The temperature cycles can also be counted and/or be notified to the user.
[0088]
[0089] The first assembly including the first power semiconductor die 3a and the first light guide 7a and/or the second assembly including the second power semiconductor die 3b and the second light guide 7b can be similar one to the other and/or can be similar to at least one of the embodiments and various embodiments above described.
[0090] Each light guide 7a, 7b has a first end and a second opposite end. The two first ends are connected to a common light source 11 through a light splitter 31. The two first ends are also connected to a common light receiver 13 through a light coupler 33. The light source 11 emits light toward the two first light paths 91a, 91b. The light receiver 13 receives light from the two seconds light paths 92a, 92b. The two second ends are permanently fixed facing to the corresponding surface 51a, 51b of the respective metallization 5a, 5b.
[0091]
[0092] The light coupler 33 regroups/aggregates the incoming light beams from the different light paths 92a, 92b. For example, the light coupler 33 is a mechanical fixture that allows all the receiving light paths 92a, 92b to be guided toward a single light receiver 13.
[0093]
[0094]
[0095] Here, the device 1 further comprises a mirror 40, which is optional. The part of the emitted light reflected by the beam splitter 31 is then reflected by the mirror 40, and sent back to the beam splitter 31 where the transmitted portion is also sent to the light receiver 13, together with the reflected portion corresponding to the light beam reflected by the semiconductor die 3. In the case of a monochromatic light source (e.g. laser), the interferences (e.g. partial addition or subtraction) between the two light beams may be captured by the light receiver 13. If the two light beams have a phase shift of 7C, the intensity of the received light will be inversely proportional to the reflected light and thus can be considered as a measure of the surface 51 degradation. This is an alternative optical method to make a difference before the pre-processing ensured by computer means.
[0096] In the above described embodiments, the first end 71 of the light guides 7 are able to be connected to a light source 11, a light receiver 13, a second light receiver 15, an infra-red light receiver 17, a light/beam splitter 31 and/or a light coupler 33. Such elements are able to be operatively coupled to at least one processor 20, or generally a control unit, which will be described after.
[0097] The device 1 can be deprived from such elements. For example, the device 1 can be fabricated in a first step and provided without light source 11, light receiver 13, second light receiver 15, infra-red light receiver 17, light/beam splitter 31, light coupler 33 and/or processor 20. For example, the first end 71 is free or protected by a cap. In such a case, the first end 71 can be seen as a “diagnostic plug” of the device 1. During normal operations, the device 1 can also be deprived from the listed elements. The listed elements are only temporarily plugged to the first end 71 when there are used, for example during checking/maintenance operations.
[0098] In other embodiments, the device 1 further comprises at least one of the listed elements. The device 1 can be provided as a kit having an assembly including a power semiconductor module equipped with at least one light guide 7, and a set of pluggable elements ready to be assembled to the light guide 7. The device 1 can also be provided as an assembly including a power semiconductor module equipped with at least one light guide 7 and a set of elements already assembled to the light guide 7, for example definitively attached to the light guide 7. For example, if the processor 20 is continuously connected to the other elements during operations of the device 1, the monitoring can be made continuously or occasionally without waiting for specific maintenance operations. An output signal 22 can be emitted toward a user, including during normal operation of the device 1. The output signal 22 can comprise data like a routine signal to monitor the status of the device 1 and/or an alert signal sent only when a defect is detected.
[0099] A method to monitor a power semiconductor die 3 coated with a metallization 5 can comprise:
a) fixe permanently a light guide 7, 7a, 7b facing to a surface 51,51a, 51b of the metallization 5,
b) collect through said light guide 7, 7a, 7b a light beam reflected on said surface 51, 51a, 51b, c) convert the collected light beam into an electric signal,
d) compare said signal to at least one reference,
e) generate a monitoring signal 22 in function of the result of the comparison.
[0100] The step c) can be made by the light receiver 13 as above described, the electric signal being transmitted to the processor 20. The processor 20, or any other adapted computer resources, can be arranged to ensure the comparison step d) and/or the signal generation step e), for example based on the comparisons as described before.
[0101]
[0102] In some embodiments, the processor 20 is arranged to decide on the instant when the condition monitoring is realized. One example is every day, week, year, or at each start-up of the system. The processor 20 sends a signal to the light source 11 to generate light. The processor 20 receives a signal issued from the light receiver 13, here by the intermediate of an analog-to-digital converter. The signal is pre-processed, for example by averaging, or applying a gain. The pre-processed signal is optionally stored in a memory associated to the processor 20. The processor 20 uses the stored values in order to estimate the state of health of the device 1. The processor 20 sends an outputting signal 22. The outputting signal 22 can be sent to a user or to another system. The outputting signal 22 can be a warning/alert signal indicating of the state of health of the device 1.
[0103] For example, the first stored value (i.e. the initial pre-processed value corresponding to the signal received by the light receiver 13 in an initializing step) is used to define at least one threshold value (two threshold values th1 and th2 in the example of
[0104] In the example of
[0105] The features associated to an embodiment in the description can be combined one with others. The invention is not limited to the devices, assemblies and process described here, which are only examples. The invention encompasses every alternative that a person skilled in the art would envisage in the scope of the following claims.