Surface acoustic wave device
11043932 ยท 2021-06-22
Assignee
Inventors
Cpc classification
H03H9/25
ELECTRICITY
H03H9/1092
ELECTRICITY
H03H9/1071
ELECTRICITY
International classification
H03H9/54
ELECTRICITY
H03H9/25
ELECTRICITY
Abstract
A surface acoustic wave device includes a piezoelectric substrate, functional elements on the piezoelectric substrate, a cover portion that opposes the piezoelectric substrate with a support layer interposed therebetween, and an input/output terminal on the cover portion. At least a portion of the functional elements includes an interdigital transducer electrode, and a surface acoustic wave resonator is defined by the piezoelectric substrate and the IDT electrode. The functional elements include a filter that passes a signal in a predetermined frequency band, and a cancel circuit which is connected in parallel to the filter and attenuates a signal outside the predetermined frequency band in signals output from the output terminal. A portion of a wiring pattern connecting a first functional element and a second functional element included in the plurality of functional elements is provided on the cover portion.
Claims
1. A surface acoustic wave device comprising: a piezoelectric substrate; a plurality of functional elements on the piezoelectric substrate; a cover portion that opposes the piezoelectric substrate with a support layer interposed between the piezoelectric substrate and the cover portion, and that includes a first surface facing the piezoelectric substrate and a second surface opposite to the first surface; and an input terminal, an output terminal, and at least one wiring pattern on the cover portion; wherein at least a portion of the plurality of functional elements includes an interdigital transducer (IDT) electrode, and a surface acoustic wave resonator is defined by the piezoelectric substrate and the IDT electrode; the plurality of functional elements include: a filter that passes input signals in a predetermined frequency band in input signals from the input terminal to the output terminal; and a cancel circuit connected to the filter in parallel between the input terminal and the output terminal; the cancel circuit attenuates output signals outside the predetermined frequency band in signals output from the output terminal; the at least one wiring pattern includes a portion of a wiring pattern connecting a first functional element and a second functional element included in the plurality of functional elements that is provided on the second surface of the cover portion; the portion of the wiring pattern has a potential different from a reference potential; when the piezoelectric substrate is viewed in a plan view, the portion of the wiring pattern overlaps with a wiring pattern on the piezoelectric substrate connected to the reference potential; and in the plan view, the portion of the wiring pattern does not overlap with a wiring pattern on the piezoelectric substrate that is connected in series between the input terminal and the output terminal.
2. The surface acoustic wave device according to claim 1, wherein the piezoelectric substrate is provided with a first through-electrode and a second through-electrode penetrating through the support layer and the cover portion; and the portion of the wiring pattern on the second surface of the cover portion is connected to the first functional element by the first through-electrode, and is connected to the second functional element by the second through-electrode.
3. The surface acoustic wave device according to claim 1, further comprising: a protective resin covering the second surface opposite to the first surface facing the piezoelectric substrate on the cover portion; wherein the portion of the wiring pattern on the second surface of the cover portion is provided between the protective resin and the second surface of the cover portion; and the portion of the wiring pattern on the second surface of the cover portion is connected to the first functional element via a first wiring provided on a first side surface of the cover portion, and is connected to the second functional element via a second wiring provided on a second side surface of the cover portion.
4. The surface acoustic wave device according to claim 3, wherein the plurality of functional elements are housed in at least once space defined between the cover portion, the support layer, and the piezoelectric substrate.
5. The surface acoustic wave device according to claim 1, wherein at least a portion of the wiring pattern on the piezoelectric substrate connected to the reference potential intersects with the at least one wiring pattern on the cover portion when the piezoelectric substrate is viewed in the plan view.
6. The surface acoustic wave device according to claim 1, wherein the plurality of functional elements at least partially overlap with the at least one wiring pattern on the cover portion when the piezoelectric substrate is viewed in the plan view.
7. The surface acoustic wave device according to claim 1, wherein the at least one wiring pattern includes at least a portion of a wiring pattern connecting the functional elements included in the filter to each other and at least a portion of a wiring pattern extending from the input terminal to the output terminal through the cancel circuit that are provided on the cover portion.
8. The surface acoustic wave device according to claim 7, wherein the first functional element is the filter; the second functional element is the cancel circuit; and the at least one wiring pattern includes at least a portion of a wiring pattern connecting the filter and the cancel circuit that is provided on the cover portion.
9. The surface acoustic wave device according to claim 1, wherein the filter is a reception filter; the input terminal is connected to an antenna, and the output terminal is connected to a reception circuit; and the cancel circuit is connected in parallel to the reception filter.
10. The surface acoustic wave device according to claim 1, wherein the filter is a transmission filter; the input terminal is connected to a transmission circuit, and the output terminal is connected to an antenna; and the cancel circuit is connected in parallel to the transmission filter.
11. The surface acoustic wave device according to claim 1, wherein the cancel circuit includes: an amplitude adjustment circuit that adjusts an amplitude of the input signal; and a phase adjustment circuit that adjusts a phase of the input signal; the first functional element is the amplitude adjustment circuit, and the second functional element is the phase adjustment circuit; and the at least one wiring pattern includes at least a portion of a wiring pattern connecting the amplitude adjustment circuit and the phase adjustment circuit that is provided on the cover portion.
12. The surface acoustic wave device according to claim 11, wherein capacitors define the amplitude adjustment circuit, and a surface acoustic wave vibrator defines the phase adjustment circuit.
13. The surface acoustic wave device according to claim 1, wherein the cancel circuit further includes: a first amplitude adjustment circuit that adjusts an amplitude of the input signal; a phase adjustment circuit that adjusts a phase of a signal from the first amplitude adjustment circuit; and a second amplitude adjustment circuit that adjusts an amplitude of a signal from the phase adjustment circuit; the first functional element is the phase adjustment circuit; the second functional element is at least one of the first amplitude adjustment circuit and the second amplitude adjustment circuit; and the at least one wiring pattern includes at least one of a wiring pattern connecting the first amplitude adjustment circuit and the phase adjustment circuit, and a wiring pattern connecting the phase adjustment circuit and the second amplitude adjustment circuit that is provided on the cover portion.
14. The surface acoustic wave device according to claim 1, wherein the filter includes: a transmission filter that filters a signal from a transmission circuit received at a first terminal and outputs the signal to an antenna; and a reception filter that filters a signal received from the antenna and outputs the signal to a reception circuit from a second terminal; the cancel circuit reduces an influence of a signal received at the first terminal on a signal output from the second terminal; and the at least one wiring pattern includes a portion of a wiring pattern connected to the second terminal from the first terminal through the cancel circuit that is provided on the cover portion.
15. The surface acoustic wave device according to claim 1, wherein the piezoelectric substrate is made from a single crystal material of any one of lithium tantalate (LiTaO.sub.3), lithium niobate (LiNbO.sub.3), alumina (Al.sub.2O.sub.3), and sapphire, or a laminated material made of LiTaO.sub.3, LiNbO.sub.3, or silicon (Si).
16. The surface acoustic wave device according to claim 15, wherein capacitors define a first amplitude adjustment circuit, and a surface acoustic wave vibrator defines a phase adjustment circuit.
17. A ladder filter comprising; the surface acoustic wave device according to claim 1; wherein the ladder filter includes: a further input terminal and a further output terminal; series arm resonance portions; and parallel arm resonance portions; the series arm resonance portions are connected in series to a series arm provided between the further input terminal and the further output terminal; and the parallel arm resonance portions are provided on a parallel arm connected between the series arm and a ground potential.
18. The ladder filter according to claim 17, wherein at least one of the series arm portions defines a longitudinally coupled resonator filter including the surface acoustic wave resonator.
19. The surface acoustic wave device according to claim 1, further comprising: a protective resin covering the second surface of the cover portion opposite to the first surface of the cover portion facing the piezoelectric substrate; wherein the at least one wiring pattern on the cover portion is disposed between the protective resin and the second surface of the cover portion; and the input terminal and the output terminal extend through the protective resin covering.
20. The surface acoustic wave device according to claim 1, wherein the plurality of functional elements are housed in at least once space defined between the piezoelectric substrate, the support layer, and the cover portion.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
(11) Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same or corresponding portions in the figures are denoted by the same reference signs, and the description thereof will not be repeated.
(12)
(13) The piezoelectric substrate 24 is preferably made of, for example, a piezoelectric single crystal material such as lithium tantalate (LiTaO.sub.3), lithium niobate (LiNbO.sub.3), alumina (Al.sub.2O.sub.3), and sapphire, or a piezoelectric laminated material made of LiTaO.sub.3, LiNbO.sub.3, or silicon (Si). A plurality of functional elements 30 are provided on the piezoelectric substrate 24. The functional element preferably includes, for example, a pair of IDT electrodes made using an electrode material, such as a single metal composed of at least one kind selected from aluminum, copper, silver, gold, titanium, tungsten, platinum, chromium, nickel and molybdenum, or an alloy containing these as a main component. A surface acoustic wave resonator is defined by the piezoelectric substrate 24 and the IDT electrode.
(14) The support layer 22 is provided on the piezoelectric substrate 24. By arranging the cover portion 20 to oppose a surface of the piezoelectric substrate 24 on which the functional element 30 is provided with the support layer 22 interposed therebetween, a space is provided around the plurality of functional elements 30 including the IDT electrode. In this way, a surface acoustic wave propagates in a portion of the piezoelectric substrate 24 adjacent to the space.
(15) In the cover portion 20, a protective resin 27 is preferably laminated on a surface 37 opposite to a surface 36 opposed to the piezoelectric substrate 24. A plurality of terminal electrodes 28 are provided on the protective resin 27. The terminal electrode 28 is a terminal to be electrically connected to a mounting substrate (not illustrated). The functional element is connected to an external circuit or a ground potential via the terminal electrode 28.
(16) A through-electrode 26 is preferably provided in the cover portion 20 and the support layer 22 in a lamination direction (Z-axis direction in
(17) A portion of a wiring pattern 34 connecting the functional elements 30 to each other is preferably provided on the second surface 37 of the cover portion 20. The wiring pattern 34 is connected to the functional element 30 on the piezoelectric substrate 24 by a through-electrode 32. Although not clearly illustrated, among the wiring patterns that connect the functional elements 30 to each other, those other than the wiring patterns 34 on the second surface 37 are on the piezoelectric substrate 24. In
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(19) Referring to
(20) The filter 100 is connected to a transmission circuit (not illustrated) by an input terminal TX, and is connected to an antenna (not illustrated) by an output terminal ANT. The filter 100 is preferably, for example, a ladder filter including series arm resonance portions S1 to S4 connected in series to a series arm provided between the input terminal TX and the output terminal ANT, and parallel arm resonance portions P1 to P3 provided on a parallel arm connected between the series arm and a ground potential GND. Each resonance portion is defined by one or more surface acoustic wave resonators. The filter 100 and the respective resonance portions defining the filter 100 correspond to the functional element 30 illustrated in
(21) One end of the parallel arm resonance portion P1 is connected to a connection node between the series arm resonance portion S1 and the series arm resonance portion S2, and the other end thereof is connected to the ground potential GND. One end of the parallel arm resonance portion P2 is connected to a connection node between the series arm resonance portion S2 and the series arm resonance portion S3, and the other end thereof is connected to the ground potential GND. One end of the parallel arm resonance portion P3 is connected to a connection node between the series arm resonance portion S3 and the series arm resonance portion S4, and the other end thereof is connected to the ground potential GND.
(22) The cancel circuit 110 is connected in parallel to the filter 100 between the input terminal TX and the output terminal ANT. Although not illustrated in
(23) Here, double circles indicated by V1 and V3 to V6 in
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(25) Referring to
(26) The series arm resonance portion S3 is connected to the series arm resonance portion S4 and the parallel arm resonance portion P3 by other wiring patterns. The parallel arm resonance portion P3 is connected to the terminal GND of the second surface 37 via the through-electrode V5. The series arm resonance portion S4 is connected to the terminal ANT of the second surface 37 via the through-electrode V6.
(27) One end of the cancel circuit 110 is connected to the terminal ANT of the second surface 37 via the through-electrode V6, similarly to the series arm resonance portion S4. The other end of the cancel circuit 110 is connected to one end of the wiring pattern L1 of the second surface 37 via the through-electrode V7. The other end of the wiring pattern L1 is connected to a wiring pattern which is connected to the through-electrode V1 (i.e., the terminal TX) on the piezoelectric substrate 24 via the through-electrode V2. Alternatively, as illustrated in a wiring pattern L1A in
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(29) As illustrated in
(30) Although in
(31) Further, as in an equivalent circuit illustrated in
(32) In this manner, by providing a portion of the wiring pattern connecting the filter 100 and the cancel circuit 110 and/or a portion of the wiring pattern connecting between the resonance portions defining the filter 100 on the second surface 37 of the cover portion 20, even when the cancel circuit 110 is added, the piezoelectric substrate 24 is able to be prevented from becoming larger. Further, since the wiring patterns is able to be arranged so as not to intersect each other on the piezoelectric substrate 24, the degree of freedom in design is improved.
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(34) One end of the capacitor C1 is connected to the input terminal TX, and the other end thereof is connected to one end of the surface acoustic wave vibrator S100. The other end of the surface acoustic wave vibrator S100 is connected to one end of the capacitor C2. The other end of the capacitor C2 is connected to the output terminal ANT.
(35) Here, the functional elements of the capacitors C1, C2 and the surface acoustic wave vibrator S100 are provided on the piezoelectric substrate 24, but at least one of a portion of a wiring pattern connecting the capacitor C1 and the surface acoustic wave vibrator S100 (L2 in
(36) It should be noted that it is not essential to define the amplitude adjustment circuit with two capacitors, and only one of the capacitors C1 and C2 may be provided if so desired.
(37) Since a portion of the wiring pattern connecting the functional elements defining the cancel circuit 110 is provided on the second surface 37 of the cover portion 20, the space of the wiring pattern required for the piezoelectric substrate 24 is reduced, so that an increase in the device size is further reduced or prevented.
(38) In the present preferred embodiment, the example is described in which the functional element on the piezoelectric substrate and the wiring pattern on the cover portion are connected by the through-electrode. In a first variation, a description will be provided of an example in which the functional element on the piezoelectric substrate and the wiring pattern of the cover portion are connected to each other using a wiring pattern provided on a side surface of the cover portion.
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(41) As in the first variation, also by connecting the wiring pattern on the cover portion and the functional element on the piezoelectric substrate using the wiring pattern on the side surface, the surface area occupied by the functional element and the wiring pattern is able to be reduced on the piezoelectric substrate, and the degree of freedom in design is improved similarly to the example illustrated in
(42) Note that in the example illustrated in
(43) In the present preferred embodiment, the surface acoustic wave device is explained in the case of transmission filter of a communication device, but the configuration of the present preferred embodiment is also applicable to a case of a reception filter of the communication device.
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(45) The filter 100B is connected to the antenna (not illustrated) by an input terminal ANT, and is connected to a reception circuit (not illustrated) by an output terminal RX. The filter 100B is preferably a filter including series arm resonance portions S10 and S11 connected in series to a series arm provided between the input terminal ANT and the output terminal RX, and a parallel arm resonance portion P10 connected between the series arm and the ground potential GND.
(46) The series arm resonance portion S11 defines a longitudinally coupled resonator filter. The series arm resonance portion S11 includes IDT electrodes ID1 to ID3 and a reflector REF.
(47) One end of the IDT electrode ID2 is connected to the series arm resonance portion S10, and the other end thereof is connected to the ground potential GND via the through-electrode. The IDT electrode ID1 is arranged adjacent to a side surface on one side of the IDT electrode ID2. The IDT electrode ID3 is arranged adjacent to a side surface on the other side of the IDT electrode ID2. One end of each of the IDT electrodes ID1 and ID3 is connected to the output terminal RX. The other end of each of the IDT electrodes ID1 and ID3 is connected to the ground potential GND via the through-electrode. The reflector REF is arranged adjacent to each of the IDT electrodes ID1 and ID3.
(48) As can be seen from
(49) However, as illustrated in
(50) Note that, also in the case of the reception filter, a portion of the wiring pattern connecting the filter 100B and the cancel circuit 110B may be further provided on the second surface 37 of the cover portion 20. Also, the configuration of the first variation may be further applied to the second variation.
(51) In the present preferred embodiment, the case where the cancel circuit is applied when the surface acoustic wave device is either the transmission filter or the reception filter has been described. In a third variation of a preferred embodiment of the present invention, the cancel circuit may also be applied to a duplexer in which a transmission filter 210 and a reception filter 220 are provided in one device as in a surface acoustic wave device 200 illustrated in
(52) In such a duplexer, since the antenna terminal ANT is shared by the transmission filter 210 and the reception filter 220, when a transmission signal is output from the transmission circuit 310 to an antenna 300, the transmission signal is also able to be transmitted to the reception circuit 320 via the reception filter 220. Further, depending on a distance between a wiring pattern connecting the transmission terminal TX and the transmission filter 210 and a wiring pattern connecting the reception filter 220 and the reception terminal RX, a signal on a transmission side may be leaked to a reception side due to capacitance coupling between the wiring patterns. Therefore, by providing the cancel circuit 270 between the transmission terminal TX and the reception terminal RX, it is possible to eliminate the influence of the transmission signal on the reception signal.
(53) When the cancel circuit is provided in such a duplexer, at least a portion of wiring patterns (L10, L11, L20, L21, L30 and L31 in
(54) Although not illustrated in
(55) In the above-described preferred embodiments, the configuration in which a portion of the wiring pattern connecting the functional elements is provided on the second surface 37 of the cover portion 20 has been described, but instead or in addition thereto, the wiring pattern may be provided on the first surface 36 opposed to the functional element 30 in the cover portion 20.
(56) As described above, in the surface acoustic wave device, a portion of the wiring pattern connecting the functional elements is provided on the cover portion of the surface acoustic wave device, thus securing a space that houses the cancel circuit on the piezoelectric substrate on which the functional element is arranged, and reducing a space on the piezoelectric substrate which is required due to the addition of the cancel circuit. Thus, the attenuation characteristics in the blocking band are improved by the addition of the cancel circuit, and it is possible to reduce or prevent the increase in the size of the surface acoustic wave device and to improve the degree of freedom in designing the surface acoustic wave device.
(57) While preferred embodiments of the present invention have been described above, it is to be understood that variations and modifications will be apparent to those skilled in the art without departing from the scope and spirit of the present invention. The scope of the present invention, therefore, is to be determined solely by the following claims.