DEVICE FOR COATING A SUBSTRATE WITH A CARBON-CONTAINING COATING

Abstract

In a device for depositing graphene, carbon nano-tubes or other, in particular carbon-contained coatings on a strip-shaped substrate, the substrate enters a reactor housing through an inlet opening and is transported in a transport direction through a process area that is tempered by a tempering device, before being exiting the reactor housing through an outlet opening. Heat-transport-inhibiting means are arranged between the process area and the inlet opening and/or the outlet opening by means of which a heat transport from the process area to the inlet opening or the outlet opening is reduced. Guide elements are also provided in order to guide the substrate into and out of regions directly adjacent to the inlet and outlet openings.

Claims

1. A device for depositing graphene, carbon nanotubes or other carbon-containing coatings, on a substrate (2), wherein the substrate (2) is strip-shaped, the device comprising: a reactor housing (1) with an inlet opening (12), an outlet opening (12′) and a processing zone (5) arranged in the reactor housing, wherein the substrate (2) enters the reactor housing (1) through the inlet opening (12) and exits the reactor housing (1) through the outlet opening (12′), wherein said substrate (2) is transported in a transport direction from the inlet opening (12) to the outlet opening (12′) through the processing zone (5); at least one tempering device (8) for tempering the substrate (2); and heat transfer-inhibiting means (14, 15, 16, 17) arranged between the processing zone (5) and the inlet opening (12) and/or arranged between the processing zone (5) the outlet opening (12′) so as to reduce a heat transfer from the processing zone (5) toward the inlet opening (12) and/or the outlet opening (12′), wherein heat transfer-inhibiting means (14, 15, 16, 17) comprise flat bodies that extend transversely or obliquely to the transport direction, and wherein the flat bodies comprise at least one of a metal sheet or a metal reflector.

2. The device of claim 1, wherein the heat transfer-inhibiting means (14, 15, 16, 17) comprise a metal reflector.

3. The device of claim 1, wherein the heat transfer-inhibiting means (14, 15, 16, 17) have at least one of: slots (20); bores (22), through which rods (11) or pipes (6, 7) extend.

4. The device of claim 1, wherein the heat transfer-inhibiting means (14, 15, 16, 17) have a cross-sectional area that occupies more than 75 percent of a cross section of an inlet region (5′) or outlet region (5″) of the reactor housing (1), which lies adjacent to the processing zone (5) and in which the heat transfer-inhibiting means (14, 15, 16, 17) are arranged.

5. The device of claim 3, wherein the slots (20) and/or through-bores (22) are configured in such a way that the heat transfer-inhibiting means (14, 15, 16, 17) at least one of: are displaceably supported on the rods (11) or the pipes (6, 7); are penetrated by a pipe (6) of a gas inlet or a pipe (7) of a gas outlet (7); or consist of two parts, between which a gap (19) for a passage of the substrate (2) remains.

6. The device of claim 1, wherein respective ones of the heat transfer-inhibiting means (14, 15, 16, 17) at least one of: are arranged behind one another in the transport direction; are spaced apart from one another by spacer means; or have reflection surfaces that differ from one another in terms of their respective dimensions.

7. The device of claim 1, wherein the flat bodies comprise at least one of: a single-part or multi-part flat body with a circular design; a flat body with a cruciform designer; two flat bodies (14, 15) that are bent about respective ridge lines (14′, 15′), wherein said two flat bodies (14, 15) are connected to one another on the ridge lines (14′, 15′) and/or are connected to one another with connecting webs (24) in order to form a gap (19) for passage of the substrate (2).

8. A device for depositing graphene, carbon nanotubes or other carbon-containing coatings, on a substrate (2), wherein the substrate (2) is strip-shaped, the device comprising: a reactor housing (1) with an inlet opening (12), an outlet opening (12′) and a processing zone (5) arranged in the reactor housing, wherein the substrate (2) enters the reactor housing (1) through the inlet opening (12) and exits the reactor housing (1) through the outlet opening (12′), wherein said substrate is transported in a transport direction from the inlet opening (12) to the outlet opening (12′) through the processing zone (5); at least one tempering device (8) for tempering the substrate (2); and guide elements (11) for guiding the substrate (2), wherein the guide elements (11) are arranged within the reactor housing (1) in an inlet region (5′) bordering directly on the inlet opening (12) and/or in an outlet region (5″) bordering directly on the outlet opening (12′), and wherein the guide elements (11) comprise rods extending in the transport direction.

9. The device of claim 8, wherein the guide elements (11) extend into a cavity of the reactor housing (1) directly adjacent to the inlet opening (12) or the outlet opening (12′).

10. The device of claim 8, wherein the guide elements (11) at least one of: are arranged in a gap (19) between two parts of a heat transfer-inhibiting means (14, 15, 16, 17); are supported by heat transfer-inhibiting means (14, 15, 16, 17); or extend through bores (21) of the heat transfer-inhibiting means (14, 15, 16, 17).

11. The device of claim 8, wherein at least one of: the inlet opening (12) and/or the outlet opening (12′), through which the substrate (2) being unwound from a first roll (3) and wound up on a second roll (3′) and being continuously transported through the processing zone (5) passes, is flushed with an inert gas; the reactor housing (1) has a shape of a circular cylinder and the inlet opening (12) and/or the outlet opening (12′) is arranged on an end face of the reactor housing (1).

12. The device of claim 8, wherein at least one of: the transport direction of the substrate (2) through the reactor housing (1) is a vertical direction; the inlet opening (12) is arranged on an underside of the reactor housing (1); the outlet opening (12′) is arranged on an upper side of the reactor housing (1); or a gas inlet (6) and a gas outlet (7) are arranged such that a gas flow through the processing zone (5) is directed from a bottom of the reactor housing (1) toward a top of the reactor housing (1).

13. A device for guiding a substrate (2) into or out of a substrate treatment device (1), the device comprising: two gap delimiting bodies (110, 110′) that are spaced apart by a gap (112) with a gap width (w), wherein the two gap delimiting bodies (110, 110′) abut on one another on respective oblique surfaces (121, 122) of the two gap delimiting bodies (110, 110′), and wherein the two gap delimiting bodies (110, 110′) are displaceable in a direction of slopes of the oblique surfaces (121, 122) in order to adjust the gap width (w).

14. The device of claim 13, wherein the two gap delimiting bodies (110, 110′, 111, 111′) are identical to one another.

15. The device of claim 13, wherein surfaces (115, 115′) of a base body (114, 114′) of each of the two gap delimiting bodies (110, 110′; 111, 111′), which form delimiting walls of the gap (112), have-gas outlet openings (116, 116′) leading into the gap (112), wherein at least one of: the gas outlet openings (116, 116′) are formed by bores that connect a respective gas distribution volumes (117, 117′) arranged in each of the two gap delimiting bodies (110, 110′; 111, 111′) to the gap (112); the gas outlet openings (116, 116′) are distributed over the surfaces (115, 115′) in a regular arrangement similar to a showerhead; or the gas outlet openings (116, 116′) are arranged in multiple rows which lie adjacent to one another in the transport direction.

16. A method of using a substrate treatment device (1) with a first instance of the device of claim 13 disposed on a first side of the substrate treatment device (1) and a second instance of the device of claim 13 disposed on a second side of the substrate treatment device (1), the first and second sides facing away from one another, the method comprising: unwinding a substrate (2) from a first roll (3); transporting the substrate (2) into a processing chamber (5) of the substrate treatment device (1) through the first instance of the device of claim 13; coating the substrate (2) with graphene, carbon nanotubes or another coating in said processing chamber (5), transporting the substrate (2) out of the processing chamber (5) through the second instance of the device of claim 13; and winding up the substrate (2) on a second roll (3′).

17. (canceled)

18. The device of claim 1, further comprising guide elements (11) for guiding the substrate (2), wherein the guide elements (11) extend into a cavity of the reactor housing (1) directly adjacent to the inlet opening (12) or the outlet opening (12′).

19. The device of claim 1, wherein at least one of: the inlet opening (12) and/or the outlet opening (12′), through which the substrate (2) being unwound from a first roll (3) and wound up on a second roll (3′) and being continuously transported through the processing zone (5) passes, is flushed with an inert gas; or the reactor housing (1) has a shape of a circular cylinder and the inlet opening (12) and/or the outlet opening (12′) is arranged on an end face of the reactor housing (1).

20. The device of claim 1, wherein at least one of: the transport direction of the substrate (2) through the reactor housing (1) is a vertical direction; the inlet opening (12) is arranged on an underside of the reactor housing (1); the outlet opening (12′) is arranged on an upper side of the reactor housing (1); or a gas inlet (6) and a gas outlet (7) are arranged such that a gas flow through the processing zone (5) is directed from a bottom of the reactor housing (1) toward a top of the reactor housing (1).

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Exemplary embodiments of the invention are described below with reference to the attached drawings. In these drawings:

[0013] FIG. 1 shows a sectioned representation of a reactor, particularly a CVD reactor with a housing 1, which is arranged in a vertical direction, wherein a strip-shaped substrate 2 being unwound from a first roll 3 is introduced into said reactor through a bottom inlet opening 12 and withdrawn from a top opening 12′ in order to be wound up on a second roll 3′,

[0014] FIG. 2 shows an enlarged representation of the detail II in FIG. 1,

[0015] FIG. 3 shows a bottom view of the device illustrated in FIG. 1,

[0016] FIG. 4 shows a first perspective representation of heat transfer-inhibiting means 14, 15, 16, 17 that are fastened on a closing plate 13,

[0017] FIG. 5 shows an exploded view of the heat transfer-inhibiting means 14, 15, 16, 17,

[0018] FIG. 6 shows a section along the line VI-VI in FIG. 2,

[0019] FIG. 7 shows a representation similar to FIG. 1, however, with heat transfer-inhibiting means according to a second exemplary embodiment,

[0020] FIG. 8 shows a perspective representation of the second exemplary embodiment,

[0021] FIG. 9 shows a perspective representation of an individual heat transfer-inhibiting means according to the second exemplary embodiment,

[0022] FIG. 10 shows a view in the direction of the arrow X in FIG. 9,

[0023] FIG. 11 shows a view in the direction of the arrow XI in FIG. 10,

[0024] FIG. 12 shows a view in the direction of the arrow XII in FIG. 10,

[0025] FIG. 13 shows a section along the line XIII-XIII, in FIG. 10,

[0026] FIG. 14 shows a section along the line XIV-XIV in FIG. 11,

[0027] FIG. 15 shows an exploded view of two gap delimiting bodies 110, 111,

[0028] FIG. 16 shows a front view of the two gap delimiting bodies 110, 111 being mounted on one another viewed in the direction of the gap 112 in a first spacing position,

[0029] FIG. 17 shows two pairs of gap delimiting bodies 110, 111, 110′, 111′, which may be jointly arranged on the housing of the substrate treatment device 1 on the inlet side and on the outlet side,

[0030] FIG. 18 shows a top view of the paired arrangement of the gap delimiting bodies 110, 110′, 111, 111′ illustrated in FIG. 17,

[0031] FIG. 19 shows a section along the line XIX-XIX in FIG. 18,

[0032] FIG. 20 shows a section along the line XX-XX in FIG. 18 with a minimum gap width w,

[0033] FIG. 21 shows the same section, however, with a maximum gap width w, and

[0034] FIG. 22 shows a second exemplary embodiment of gap delimiting bodies 110, 111.

DETAILED DESCRIPTION

[0035] FIG. 1 shows a reactor, particularly a CVD reactor, with an elongate cylindrical shape, wherein the axis of the cylindrical housing 1 extends in the vertical direction. The two end faces of the reactor housing 1, which respectively point downward and upward, are closed with a closing plate 13. Gas supply conduits 6′ and gas discharge conduits 7′ lead into the closing plates. The gas supply conduit 6′ continues into a pipe, the open end of which forms a gas inlet 6. The gas discharge conduit 7′ continues into a pipe, the open end of which forms a gas outlet 7. The gas supply conduit 6′ is connected to a gas supply system that particularly supplies CH.sub.4. The gas discharge conduit 7′ is connected to a vacuum pump, by means of which the internal pressure within the reactor housing can be approximately adjusted to atmospheric pressure.

[0036] An inner pipe 9 in the form of a liner pipe extends between the two closing plates 13. The cylindrical space enclosed by the inner pipe 9 forms an inlet region 5′ adjacent to the lower closing plate 13 and an outlet region 5″ adjacent to the upper closing plate 13. The inlet region 5′ and the outlet region 5″ are respectively surrounded by a helical tempering body 8′, by means of which the region 5, 5′ can be heated or cooled.

[0037] A processing zone 5 extends between the inlet region 5′ and the outlet region 5″ and is surrounded by a heating coil 8 in order to heat the processing zone 5 to a process temperature.

[0038] The lower closing plate 13 and the upper closing plate 13 respectively have a gap 12, through which a strip-shaped endless substrate 2 can be transported into and once again transported out of the reactor housing cavity. A diffusion barrier 10 is located outside the closing plate 13. This diffusion barrier consists of multiple gap delimiting bodies that serve for adjusting the gap width of the gap, through which the substrate 2 can be transported into the reactor housing or out of the reactor housing. The diffusion barrier 10 furthermore comprises gas infeed openings, by means of which a flushing gas can be introduced into the gap between the two gap delimiting bodies.

[0039] Multiple heat transfer-inhibiting means 14, 15, 16, 17 and multiple guide elements 11 for guiding the substrate 2 are located on the inner side of each of the two closing plates 13 facing the processing zone 5.

[0040] In the exemplary embodiment, the means 14, 15, 16, for inhibiting the heat transfer from the processing zone 5 toward the closing plates 3 are formed by reflector plates 14, 15, 16, 17.

[0041] In the first exemplary embodiment illustrated in FIGS. 2 to 6, the reflector plates 14, 15, 16, 17 are formed by thin sheet metal plates that essentially have a circular outline and are respectively arranged in the inlet region 5′ and the outlet region 5″ in such a way that their surfaces are aligned transversely to the transport direction of the substrate. The reflector plates 14, 15, 16, 17 are spaced apart from one another by means of spacer sleeves 18. Each reflector plate 14, 15, 16, 17 is composed of two parts. These parts are respectively realized in the form of semicircular parts, wherein a gap 19, through which the substrate 2 can be transported, remains between said semicircular parts. A first reflector plate 17 is spaced apart from the closing plate 13 by a first distance with the aid of multiple spacer sleeves 18. A second reflector plate 16 is spaced apart from the first reflector plate 17 with the aid of spacer sleeves 18. A third reflector plate 15 is spaced apart from the second reflector plate 16 with the aid of spacer sleeves 18. A fourth reflector plate 14 is spaced apart from the third reflector plate 15 with spacer sleeves 18. The first and the second reflector plate 16, 17 have a diameter that essentially corresponds to the inside diameter of the inner pipe 9 whereas the third reflector plate 15 has a smaller diameter. Furthermore, the spacing between the third reflector plate 15 and the second reflector plate 16 is also smaller than the spacing between the second reflector plate 16 and the first reflector plate 17, which approximately corresponds to the spacing between the first reflector plate 17 and the closing plate 13. The spacing between the fourth reflector plate 14 and the third reflector plate 15 is once again smaller than the spacing between the third reflector plate 15 and the second reflector plate 16.

[0042] All reflector plates 14, 15, 16, 17 have radial slots 20 in the exemplary embodiment. The slot width of these radial slots 20 approximately corresponds to the material thickness of the reflector plates 14, 15, 16, 17.

[0043] First bores 22 are furthermore provided in each of the reflector plates 14, 15, 16, 17, wherein rods or pipes, on which the reflector plates 14, 15, 16, 17 are fastened, can extend through said first bores. The pipes may be the pipes for feeding the gas inlet 6 or the pipes connected to the gas outlet 7. However, this may also concern guide rods that merely have the function of guiding the reflector plates 14, 15, 16, 17.

[0044] Second bores 21 are provided directly adjacent to a linear outer edge of each part of a reflector plate 14, 15, 16, 17. These second bores 21 serve for receiving the aforementioned guide elements 11 in the form of rods. The rods are made of a ceramic material. The respective end faces of the rods may be supported on the closing plate 13 on the one hand and on the fourth reflector plate 14 on the other hand. It is particularly proposed to provide three pairs of opposite guide elements 11. Two guide elements 11 are respectively arranged on the two outer edges of the substrate 2. A third pair of guide elements 11 is arranged in the substrate center, i.e. centrally between the outer edges.

[0045] The reflector plates 14, 15, 16, 17 may also be shield plates of identical shape. The reflector plates 14, 15, 16, 17 or shield plates inhibit the heat transfer from the processing zone 5 toward the inlet opening 12 or toward the outlet opening 12′.

[0046] FIGS. 7 to 14 show a second exemplary embodiment of a shield plate 14, 15 or a reflector plate 14, 15. The means for inhibiting the heat transfer from the processing zone 5 toward the inlet region 5′ or toward the outlet region 5″ particularly are reflection elements 14, 15 or shield elements 14, 15. A heat transfer-inhibiting means according to the second exemplary embodiment consists of two metal sheets 14, 15 that are bent along a ridge line 14′, 15′ by an angle of approximately 90 degrees. The two metal sheets 14, 15 are connected to one another on the ridge lines 14′, 15′. To this end, connecting webs 24 are provided in order to hold the ridge lines 14′, 15′ at a distance from one another such that a gap 19, through which the substrate 2 can be transported, is formed between the ridge lines 14′, 15′.

[0047] The interconnected reflector or shield plates 14, 15 form a heat transfer-inhibiting means that essentially occupies the cross-sectional area of the inner pipe 9.

[0048] The two limbs of each reflector or shield plate 14, 15 are connected to one another with spacer sleeves 18. The ends of the sleeves may be rigidly connected to one of the limbs. Rods or pipes extend through these sleeves and respectively serve for holding the heat transfer-inhibiting means in a displaceable manner or for fixing the heat transfer-inhibiting means in position.

[0049] FIG. 7 furthermore shows a rod 25 that extends between the opposite closing plates 13 and lies in a recess 23 of the heat transfer-inhibiting means.

[0050] The inlet region 5′ and/or the outlet region 5″ may be respectively provided with just one heat transfer-inhibiting means.

[0051] The rolls 3, 3′ may be operated by an electric motor. A first deflection roller 4 is provided for deflecting the substrate 2 entering the reactor 1 and a second deflection roller 4′ is provided for deflecting the substrate 2 exiting the reactor housing 1.

[0052] A gas-flushed zone 26 is located directly adjacent to the closing plate 13 in the inlet region 5′ and in the outlet region 5″. An inert gas is introduced into this zone in the cavity of the reactor housing by means of a not-shown gas inlet.

[0053] FIGS. 15 to 22 concern another aspect of the invention.

[0054] The cavity of the substrate treatment device 1 is respectively closed with a closing plate 13, 13′ on the inlet side and on the outlet side. The closing plate 13, 13′ has a gap opening, through which the substrate 2 is transported. The closing plates 13, 13′ carry on their respective outer sides an arrangement that respectively consists of two gap delimiting bodies 110, 110′, 111, 111′. The gap delimiting bodies 110, 110′, 111, 111′ have gap delimiting surfaces or gap walls 115, 115′ that face one another and are spaced apart from one another by approximately 0 to 5 mm. The gap width w preferably amounts to no more than 2 mm.

[0055] Two arrangements, which respectively consists of two gap delimiting bodies 110, 111, are respectively arranged behind one another in the transport direction of the gap on the inlet side and on the outlet side such that the substrate has to pass through two of these arrangements when it enters the substrate treatment device 1 and through two of these arrangements when it exits the substrate treatment device 1. We refer to FIGS. 15 to 21 with respect to the design of the arrangements of gap delimiting bodies 110, 111.

[0056] Each arrangement of gap delimiting bodies 110, 111 comprises two gap delimiting bodies 110, 111 that are designed identical to one another. In the assembled state, they have gap delimiting walls 115, 115′ that face one another, wherein the gap 112 extends between said gap delimiting walls. The gap delimiting walls 115, 115′ are formed by a base body 114, 114′ that is made of steel, particularly special steel. In the exemplary embodiment, they are realized in the form of elongate base bodies 114, 114′, the extending direction of which is oriented transversely to the transport direction of the substrate 2.

[0057] The rear sides of the base bodies 114, 114′ lying opposite of the gap delimiting walls 115, 115′ have a trough-shaped recess that respectively forms a gas distribution chamber 117, 117′. The base of the gas distribution chambers 117, 117′ extends parallel to the gap delimiting wall 115, 115′ and comprises a plurality of regularly arranged bores, wherein said bores form gas outlet openings 116, 116′ leading into the gap delimiting wall 115 such that this gap delimiting wall forms a gas outlet surface. The opening of the depression forming the gas distribution chamber 117 is surrounded by an annular groove 119, 119′, wherein a sealing cord 118, 118′ such as an O-ring lies in said annular groove in order to cover the gas distribution chambers 117, 117′ with a cover 120, 120′ that is fastened on the base body 114, 114′ by means of fastening screws. A flushing gas can be fed into the gas distribution chamber 117 by means of a gas supply conduit 124, 124′ connected to the cover 120, 120′.

[0058] The gap delimiting wall 115, 115′ forms a gas outlet surface. The gas outlet surface has an elongate shape, wherein the extending direction of the gas outlet surface 115, 115′ is oriented transversely to the transport direction of the substrate 2. Identically oriented oblique surfaces 121, 121′, 122, 122′ lie adjacent to two opposite ends of the gas outlet surface 115, 115′, which in the exemplary embodiment are formed by the narrow side ends of the gas outlet surface 15, 15′. The first oblique surface 121, 121′ is sloped upward by approximately 10 degrees whereas the second oblique surface 122, 122′ is sloped downward by approximately 10 degrees. The two oblique surfaces 121, 121′, 122, 122′ extend in parallel planes to one another.

[0059] The two gap delimiting bodies 110, 111 are placed on top of one another in such a way that a first oblique surface 121′ of a second gap delimiting body 111 lies on a second oblique surface 122 of the first gap delimiting body 110 and a second gap delimiting surface 122′ of the second gap delimiting body 111 lies on a first oblique surface 121 of the first gap delimiting body 110. A displacement in a direction, which is identified by the reference symbol S in FIG. 21, makes it possible for the oblique surfaces 121, 121′, 122, 122′ to slide along one another and to displace these oblique surfaces relative to one another. During such a displacement, the two gap delimiting bodies 110, 111 are not only displaced in a direction that lies in the gap plane, but also in a direction extending transversely thereto, such that the gap width w can be varied between a minimum gap width w illustrated in FIG. 20 and a maximum gap width w′ illustrated in FIG. 21. The direction of displacement, in which one gap delimiting body 110 is displaced relative to the other gap delimiting body 111, is respectively oriented obliquely to the surface normal of the gap delimiting wall 115, 115′ or to the gap plane.

[0060] Set screws 123, 123′ are provided for realizing a sensitive adjustment of the gap with w, w′, wherein said set screws are respectively screwed into threaded bores 128, 128′ in a broad side of the gap delimiting body 110, 111. The heads of the set screws 123, 123′ act upon a sidewall of a respective other gap delimiting body 111 such that the gap width w, w′ can be adjusted by means of a rotational adjustment of the set screw 123, 123′. It is preferred to respectively arrange two set screws 123, 123′ on both narrow sides of the base body 114, 114′, wherein these set screws not only make it possible to adjust the gap width w, w′, but also to fix the gap width w, w′, because opposing screws act in opposite directions.

[0061] A threaded bore 127, 127′ is located within the first oblique surface 121, 121′. The axis of the threaded bore 127, 127′ extends in the direction of the surface normal of the gap wall 115, 115′. An oblong hole 126 for the passage of a fastening screw 125, 125′ is located in the second oblique surface 122, 122′, wherein said fastening screw can be screwed into the internal thread 127, 127′ in order to tension the two gap surfaces 121, 122, 121′, 122′ relative to one another.

[0062] The reference symbols 130, 130′ identify coupling elements, by means of which two pairs of gap delimiting bodies 110, 111, 110′, 111′ can be coupled to one another in such a way that the gaps 112 of the respective pairs are aligned with one another.

[0063] The preceding explanations serve for elucidating all inventions that are included in this application and respectively enhance the prior art independently with at least the following combinations of characteristics, wherein two, multiple or all of these combinations of characteristics may also be combined with one another, namely:

[0064] A device, which is characterized in that heat transfer-inhibiting means 14, 15, 16, 17 are arranged between the processing zone 5 and the inlet opening 12 and/or the outlet opening 12′ and reduce a heat transfer from the processing zone 5 toward the inlet opening 12 or the outlet opening 12′.

[0065] A device, which is characterized in that the heat transfer-inhibiting means 14, 15, 16, 17 are one or more thermal radiation protection shields and/or reflectors and/or are formed by flat bodies extending transversely or obliquely to the transport direction and/or have a cross-sectional area that occupies more than 75 percent, preferably more than 80 percent or more than 90 percent, of the clear cross section of an inlet region 5′ or outlet region 5″, which lies adjacent to the processing zone 5 and in which the heat transfer-inhibiting means 14, 15, 16, 17 are arranged.

[0066] A device, which is characterized in that the heat transfer-inhibiting means 14, 15, 16, 17 made of sheet metal have slots 20 and/or through-bores 22 for rods 11 or pipes 6, 7 and/or are displaceably supported on rods 11 or pipes 6, 7 and/or are penetrated by a pipe of a gas inlet 6 or a pipe of a gas outlet 7 and/or consist of two parts, between which a gap 19 for the passage of the substrate 2 remains.

[0067] A device, which is characterized in that multiple heat transfer-inhibiting means 14, 15, 16, 17 are arranged behind one another in the transport direction and/or held at a distance from one another with the aid of spacer means and/or have reflection surfaces that differ from one another with respect to their size.

[0068] A device, which is characterized in that one or more heat transfer-inhibiting means 14, 15, 16, 17 are a single-part or multi-part flat body with a circular design and/or a flat body with a cruciform design and/or formed by two flat bodies 14, 15 that are bent about a ridge line 14′, 15′, wherein said flat bodies 14, 15 are connected to one another on the ridge lines 14′, 15′ in order to form a gap 19 for the passage of the substrate 2, and/or in that two flat bodies 14, 15 are connected to one another with connecting webs 24 in order to form a gap 19 for the passage of the substrate 2.

[0069] A device, which is characterized in that guide elements 11 for guiding the substrate 2 are arranged within the reactor housing 1 in an inlet region 5′ bordering directly on the inlet opening 12 and/or in an outlet region 5″ bordering directly on the outlet opening 12′.

[0070] A device, which is characterized by guide elements 11 for guiding the substrate 2, which are arranged within the housing 1 in an inlet region 5′ and/or an outlet region 5″, and/or in that guide elements 11 for guiding the substrate 2 extend into the cavity of the housing 1 directly adjacent to the inlet opening 12 or the outlet opening 12′.

[0071] A device, which is characterized in that guide elements 11 for guiding the substrate 2 are formed by rods, which extend in the transport direction and are arranged directly the gap 19 between two parts of a heat transfer-inhibiting means 14, 15, 16, 17 and/or are supported by heat transfer-inhibiting means 14, 15, 16, 17 and/or extend through bores 21 of the heat transfer-inhibiting means 14, 15, 16, 17.

[0072] A device, which is characterized in that the gap-shaped inlet opening 12 and/or the gap-shaped outlet opening 12′, through which the substrate 2 being unwound from a first roll 3 and wound up on a second roll 3′ and being continuously transported through the processing zone 5 passes, is flushed with an inert gas and/or in that the reactor housing 1 has the shape of a circular cylinder and the inlet opening 12 and/or the outlet opening 12′ is arranged on one of the end faces of the reactor housing 1.

[0073] A device, which is characterized in that the transport direction of the substrate 2 through the reactor housing 1 is a vertical direction and/or in that the substrate 2 enters the reactor housing 1 through an inlet opening 12 arranged on the underside of the reactor housing and/or exits the reactor housing 1 through an outlet opening 12′ arranged on the upper side of the reactor housing 1 and/or in that a gas inlet 6 and a gas outlet 7 are arranged in an inlet region 5′ and/or an outlet region 5″ of the cavity of the reactor housing 1 in such a way that the gas flow through the processing chamber 5 is directed from the bottom toward the top.

[0074] A device, which is characterized in that the spacing between the two gap delimiting bodies 110, 110′; 111, 111′, which defines a gap width w, is adjustable.

[0075] A device, which is characterized in that the first and the second gap delimiting body 110, 110′; 111, 111′ are designed identically to one another.

[0076] A device, which is characterized in that surfaces 115, 115′ of a respective base body 114, 114′ of the gap delimiting body 110, 110′; 111, 11′, which form delimiting walls of the gap 112, have gas outlet openings 116, 116′ leading into the gap 112, wherein it is particularly proposed that the gas outlet openings 116, 116′ are formed by bores that connect a gas distribution volume 117, 117′ arranged in the gap delimiting body 110, 110′; 111, 111′ to the gap 112, wherein it is particularly proposed that a plurality of gas outlet openings 116, 16′ are distributed over the surface 115, 115′ in a regular arrangement similar to a showerhead, and wherein it is particularly proposed that the gas outlet openings 116, 116′ are arranged in multiple rows, particularly in at least four rows, which lie adjacent to one another in the transport direction.

[0077] A device, which is characterized in that two pairs of gap delimiting bodies 110, 110′; 111, 111′ respectively lie behind one another in a transport direction of the particularly flat, strip-shaped substrate 2.

[0078] A device, which is characterized in that a first gap delimiting body 110, 110′ has a first oblique surface 121 that abuts on a second oblique surface 122′ of a second gap delimiting body 111, 111′ and/or in that a first gap delimiting body 110, 110′ has a second oblique surface 122 that abuts on a first oblique surface 121′ of the second gap delimiting body 111, 111′, wherein the gap delimiting bodies 110, 110′; 111, 111′ can be displaced in a gap extending direction S, particularly transversely to a transport direction of the substrate 2, in order to adjust the gap width w, and wherein the gap width w can be varied due to a sliding motion of the first and second oblique surfaces 121, 121′, 122, 122′ on one another.

[0079] A device, which is characterized by a set screw 123 for adjusting the gap width w, wherein internal threads 128, 128′, into which the threaded shafts of the set screws 123 are screwed, are provided in sidewalls that particularly extend perpendicular to the gap delimiting surfaces 115, 115′, and wherein the heads of said set screws abut on sidewalls of a respective other gap delimiting body 110, 110′; 111, 111′.

[0080] A device, which is characterized in that base bodies 114, 114′ of the gap delimiting bodies 110, 110′; 111, 111′ have oblong holes 126, 126′, wherein fastening screws 125, 125′, which are screwed into the internal thread 127, 127′ of a respective other gap delimiting body 110, 110′; 111, 111′, extend through said oblong holes in order to press the abutting oblique surfaces 121, 121′, 122, 122′ against one another, and wherein it is particularly proposed that the oblong hole 126 and/or the internal thread 127, 127′ is respectively arranged in the region of an oblique surface 121, 121′, 122, 122′.

[0081] A device, which is characterized in that the gap width w is infinitely variable in a range between 0 and 5 mm and/or in that the angle of the oblique surface 121, 121′, 122, 122′ to the gap extending direction or the gap extending plane lies in the range between 5 and 40 degrees or 5 and 20 degrees, preferably in a range between 9 and 11 degrees.

[0082] A utilization of a device according to one of the preceding claims on a substrate treatment device 1, namely on two respective sides of the substrate treatment device 1 that face away from one another, wherein a substrate 2 being unwound from a first roll 3 enters a processing chamber 5 of the substrate treatment device 1 through a first arrangement of at least two gap delimiting bodies 110, 110′; 111, 111′, is coated with graphene, carbon nanotubes or another coating in said processing chamber, exits from a second arrangement of at least two gap delimiting bodies 110, 110′; 111, 111′ and is wound up on a second roll 3′.

[0083] All disclosed characteristics are essential to the invention (individually, but also in combination with one another). The disclosure of the associated/attached priority documents (copy of the priority application) is hereby fully incorporated into the disclosure content of this application, namely also for the purpose of integrating characteristics of these documents into claims of the present application. The characteristics of the dependent claims also characterize independent inventive enhancements of the prior art without the characteristics of a claim to which they refer, particularly for submitting divisional applications on the basis of these claims. The invention specified in each claim may additionally comprise one or more of the characteristics that were disclosed in the preceding description and, in particular, are identified by reference symbols and/or included in the list of reference symbols. The invention also concerns design variations, in which individual characteristics cited in the preceding description are not realized, particularly as far as they are obviously dispensable for the respective intended use or can be replaced with other, identically acting technical means.

LIST OF REFERENCE SYMBOLS

[0084] 1 Substrate treatment device, reactor housing

[0085] 2 Substrate

[0086] 3 Roll

[0087] 3′ Roll

[0088] 4 Deflection roller

[0089] 4′ Deflection roller

[0090] 5 Processing zone

[0091] 5′ Inlet region

[0092] 5″ Outlet region

[0093] 6 Gas inlet

[0094] 6′ Gas supply conduit

[0095] 7 Gas outlet

[0096] 7′ Gas discharge conduit

[0097] 8 Heating coil

[0098] 8′ Heating coil

[0099] 9 Liner pipe

[0100] 10 Diffusion barrier

[0101] 11 Guide element

[0102] 12 Inlet opening, gap

[0103] 12′ Outlet opening, gap

[0104] 13 Closing plate

[0105] 13′ Closing plate

[0106] 14 Fourth reflector plate, ridge element

[0107] 14′ Ridge line

[0108] 15 Third reflector plate, ridge element

[0109] 15′ Ridge line

[0110] 16 Second reflector plate

[0111] 17 First reflector plate

[0112] 18 Spacer sleeve

[0113] 19 Gap

[0114] 20 Slot

[0115] 21 Bore

[0116] 22 Bore, through-bore

[0117] 23 Recess

[0118] 24 Connecting web

[0119] 25 Rod

[0120] 26 Gas-flushed zone

[0121] 110 Gap delimiting body

[0122] 110′ Gap delimiting body

[0123] 111 Gap delimiting body

[0124] 111′ Gap delimiting body

[0125] 112 Gap

[0126] 114 Base body

[0127] 114′ Base body

[0128] 115 Gap wall (gas outlet surface)

[0129] 115′ Gap wall (gas outlet surface)

[0130] 116 Gas outlet opening

[0131] 116′ Gas outlet opening

[0132] 117 Gas distribution chamber

[0133] 117′ Gas distribution chamber

[0134] 118 Sealing cord

[0135] 118′ Sealing cord

[0136] 119 Annular groove

[0137] 119′ Annular groove

[0138] 120 Cover

[0139] 120′ Cover

[0140] 121 Oblique surface

[0141] 121′ Oblique surface

[0142] 122 Oblique surface

[0143] 122′ Oblique surface

[0144] 123 Set screw

[0145] 123′ Set screw

[0146] 124 Gas supply conduit

[0147] 124′ Gas supply conduit

[0148] 125 Fastening screw

[0149] 125′ Fastening screw

[0150] 126 Oblong hole

[0151] 126′ Oblong hole

[0152] 127 Threaded bore, internal thread

[0153] 127′ Threaded bore, internal thread

[0154] 128 Threaded bore, internal thread

[0155] 128′ Threaded bore, internal thread

[0156] 129 Recess

[0157] 130 Coupling element

[0158] 130′ Coupling element

[0159] w Gap width

[0160] w′ Gap width

[0161] S Gap extending direction