Three-dimensional magnetic device and magnetic memory

Abstract

Disclosed is a three-dimensional magnetic device based on a spin Hall effect which includes an internal electrode, at least one magnetic junction and at least one external electrode. The internal electrode, the at least one magnetic junction and the at least one external electrode have columnar structures. Each of the at least one magnetic junction comprises a magnetic free layer, a magnetic reference layer and a non-magnetic spacing layer between magnetic free layer and magnetic reference layer. The magnetic free layer is in contact with internal electrode, and the magnetic reference layer in each of the at least one magnetic junction is in contact with a corresponding one of the at least one external electrode. The three-dimensional magnetic device may be stacked in a normal direction of the bottom surface of the internal electrode. Magnetization reversal of three-dimensional magnetic device may be realized by a combination of a spin-orbit torque and a spin transfer torque. The magnetic device has advantages of reduced heating, improved reliability and stability, high storage density while ensuring thermal stability.

Claims

1. A three-dimensional magnetic memory, comprising: a three-dimensional magnetic device including an internal electrode with a columnar structure, at least one magnetic junction with a columnar structure configured to surround the internal electrode; and at least one external electrode with a columnar structure; and an operation circuit including a first-electrical-terminal configured to be provided on one end of the internal electrode, a second-electrical-terminal configured to be provided on an opposite end of the internal electrode, at least one third-electrical-terminal, and an operation module, wherein each one of the at least one external electrode is configured to surround a corresponding one of the at least one magnetic junction, wherein the at least one magnetic junction is stacked in a direction perpendicular to the bottom surface of the internal electrode, wherein each of the at least one magnetic junction includes: a magnetic free layer configured to be in contact with the internal electrode and used for data storage; a magnetic reference layer configured to be in contact with a corresponding one of the at least one external electrode; and a non-magnetic spacing layer between the magnetic free layer and the magnetic reference layer, wherein each of the at least one third-electrical-terminal is configured to be connected to a corresponding one of the at least one external electrode, wherein the first-electrical-terminal, the second-electrical-terminal and the at least one third-electrical-terminal are connected to the operation module, and the operation module is used to switch and/or sense a resistance state of the at least one magnetic junction of the three-dimensional magnetic device.

2. The three-dimensional magnetic memory of claim 1, wherein the internal electrode is made of a heavy metal/metalloid or an alloy/compound thereof, including one or more of Nb, Ta, Cr, Mo, W, Re, Ru, Os, Ir, Pd, Pt, Au, Cd, Hg, B, Tl, Sn, Pb, Sb, Bi, Se, Te, Cl, Sm, TaN, WN, Sb.sub.2Te.sub.3, BiSb, Bi.sub.2Se.sub.3, Bi.sub.2Te.sub.3, (BiSb).sub.2Te.sub.3, HgTe, BiSe, (Bi.sub.0.57Sb.sub.0.43).sub.2Te.sub.3, TlBiSe.sub.2, Bi.sub.1.5Sb.sub.0.5Te.sub.1.8Se.sub.1.2, SnTe, Bi.sub.2-xCr.sub.xSe.sub.3, SmB.sub.6, BiTeCl, HgTe/CdTe.

3. The three-dimensional magnetic memory of claim 1, wherein the magnetic free layer in each of the at least one magnetic junction is made of a ferromagnetic or ferrimagnetic material or the alloy thereof, including one or more of Fe, Co, Ni, Mn, FeCo, FeNi, FePd, FePt, CoPd, CoPt, YCo, LaCo, PrCo, NdCo, SmCo, MnBi, CoFeB or MnNiSb, and a combination thereof with one or more materials selected from B, Al, Zr, Hf, Nb, Ta, Cr, Mo, Pd or Pt; or the magnetic free layer is made of a synthetic ferromagnetic or ferrimagnetic material with a laminated structure of 3d, 4d, 4f, 5d, Sf, or rare earth metals, wherein the laminated structure is selected from, but not limited to, Co/Ir, Co/Pd, Co/Pt, Co/Au, Co/Ni or CrCo/Pt; or the magnetic free layer is made of a semi-metallic ferromagnetic material including a Heusler alloy in a form of XYZ or X.sub.2YZ, wherein X is selected from one or more of Mn, Fe, Co, Ni, Pd, or Cu, Y is selected from one or more of Ti, V, Cr, Mn, Fe, Co, or Ni, and Z is selected from one or more of Al, Ga, In, Si, Ge, Sn, or Sb; or the magnetic free layer is made of a synthetic antiferromagnetic material, which is formed by ferromagnetic layers separated by non-magnetic metal layers, wherein each of the ferromagnetic layers of the magnetic free layer is selected from, but not limited to, one or more of Fe, Co, Ni, FeCo, CrCoPt, or CoFeB, or one of laminated structures of (Co/Ni).sub.p, (Co/Pd).sub.m, or (Co/Pt).sub.n, wherein m, n, p refer to the numbers of lamination layers; and the non-magnetic metal layer of the magnetic free layer is selected from one or more of Nb, Ta, Cr, Mo, W, Re, Ru, Os, Rh, Ir, Pt, Cu, Ag, or Au.

4. The three-dimensional magnetic memory of claim 1, wherein the non-magnetic spacing layer of each of the at least one magnetic junction is made of an oxide, a nitride, or an oxynitride selected from one or more of Mg, B, Al, Ca, Sr, La, Ti, Hf, V, Ta, Cr, W, Ru, Cu, In, Si or Eu in combination with one or more of N, or O; or the non-magnetic spacing layer is made of a metal or an alloy selected from one or more of Mg, Al, Cu, Ag, Au, Y, Ti, V, Nb, Ta, Cr, Mo, W, Ru, Os, Rh, Pd or Pt; or the non-magnetic spacing layer is made of SiC or a ceramic material.

5. The three-dimensional magnetic memory of claim 1, wherein each of the at least one external electrode is made of a metal or an alloy selected from one or more of Li, Mg, Al, Ca, Sc, Ti, V, Mn, Cu, Zn, Ga, Ge, Sr, Y, Zr, Nb, Mo, Tc, Ru, Rh, Pd, Ag, Cd, In, Sn, Sb, Ba, Hf, Ta, W, Re, Os, Ir, Pt, Au, Tl, Pb, Bi, Po, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm or Yb.

6. The three-dimensional magnetic memory of claim 1, wherein the magnetization of the magnetic free layer in each of the at least one magnetic junction is in a normal direction of the surface of the magnetic free layer; or the magnetization of the magnetic free layer is in a tangent direction of the surface of the magnetic free layer.

7. The three-dimensional magnetic memory of claim 1, wherein the magnetization reversal of the magnetic free layer in a selected one of the at least one magnetic junction is achieved by at least a spin-orbit torque provided by a spin-polarized current generated by a charge current flowing through the internal electrode; when no electrical current flows through the internal electrode, no spin-polarized current is generated.

8. The three-dimensional magnetic memory of claim 1, wherein the magnetization reversal of the magnetic free layer in a selected one of the at least one magnetic junction is achieved by a combination of a spin-orbit torque and a spin transfer torque, the spin-orbit torque being provided by a spin-polarized current generated by a charge current, referred to as first writing current, flowing through the internal electrode, and the spin transfer torque being provided by injecting a second writing current along the radial direction of the annular cross section of the selected one of the at least one magnetic junction.

9. The three-dimensional magnetic memory of claim 1, wherein the resistance state of a selected one of the at least one magnetic junction is a low resistance state or a high resistance state, and a determination of the resistance state is achieved by injecting a reading current along the radial direction of the annular cross section of the selected one of the at least one magnetic junction.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1A shows the spin Hall effect in a heavy metal material; FIG. 1B shows the spin Hall effect in a heavy metal material with a columnar structure and a circular cross section, the outer surface of which is coated with a layer of ferromagnetic material; and FIG. 1C shows the spin Hall effect in a heavy metal material with a columnar structure and a square cross section, the outer surface of which is coated with a layer of ferromagnetic material.

(2) FIG. 2A shows a three-dimensional magnetic memory according to an embodiment of the present disclosure, and FIGS. 2B and 2C show a front view and a top view of the three-dimensional magnetic device 210 shown in FIG. 2A, respectively.

(3) FIG. 3A and FIG. 3B show a front view and a top view of a storage unit of the three-dimensional magnetic memory shown in FIG. 2A, respectively.

(4) FIG. 4A and FIG. 4B show a front view and a top view of a writing manner of the storage unit shown in FIG. 3A, respectively.

(5) FIG. 5A and FIG. 5B show a front view and a top view of another writing manner of the storage unit shown in FIG. 3A, respectively.

(6) FIG. 6A and FIG. 6B show a front view and a top view of a reading manner of the storage unit shown in FIG. 3A, respectively.

(7) FIG. 7 shows a control circuit including the storage unit shown in FIG. 3B.

(8) FIG. 8A and FIG. 8B show a front view and a top view of a writing manner of the three-dimensional magnetic device 210 shown in FIG. 2A, respectively.

(9) FIG. 9A and FIG. 9B show a front view and a top view of a reading manner of the three-dimensional magnetic device 210 shown in FIG. 2A, respectively.

(10) FIG. 10A shows a micromagnetic model based on the writing manner shown in FIG. 4A, and FIG. 10B and FIG. 10C show the micromagnetic simulation results.

DETAILED DESCRIPTION

(11) FIG. 1A shows the spin Hall effect in a heavy metal material. When a charge current is introduced in the x direction, a spin-polarized current can be generated in the z direction.

(12) FIG. 1B shows the spin Hall effect in a heavy metal material with a columnar structure and a circular cross section, which is coated with a layer of ferromagnetic material on the outer surface. When a charge current is introduced along the x direction into the heavy metal material, a spin-polarized current can be generated in the radial direction. The polarization of the spin-polarized current is oriented clockwise or counterclockwise along the tangent line. After spin-polarized electrons diffuse into the adjacent ferromagnetic layer, the electrons exchange spin angular momentum with the ferromagnetic layer, such that the magnetization of the ferromagnetic layer may be oriented clockwise or counterclockwise according to the selection.

(13) FIG. 1C shows the spin Hall effect in a heavy metal material with a columnar structure and a square cross section, which is coated with a layer of ferromagnetic material on the outer surface. If we introduce a charge current along the x direction into the heavy metal material, the spin polarization and flow direction of the resulting spin-polarized current, and its effect on the magnetization of the adjacent ferromagnetic layer, can be inferred in the same way as used in FIG. 1A and FIG. 1B.

(14) In the following, the three-dimensional magnetic device and magnetic memory proposed by the present disclosure will be described in view of a cylindrical structure as shown in, for example, FIG. 1B. The following composition, structures, materials, manufacturing processes, reading and writing manners depicted are also applicable to the columnar structure with a square cross section as shown in FIG. 1C which can be made into the three-dimensional magnetic device and magnetic memory.

(15) FIG. 2A shows a three-dimensional magnetic memory according to an embodiment of the present disclosure. The memory includes, as represented in block diagram form, a three-dimensional magnetic device 210, a first-electrical-terminal, a second-electrical-terminal, at least one third-electrical-terminal, and an operation module.

(16) FIGS. 2B and 2C show a front view and a top view of the three-dimensional magnetic device 210, respectively. As shown in FIG. 2B, the magnetic device is of a columnar structure including an internal electrode 201, at least one magnetic junction 206, and at least one external electrode 205. The internal electrode 201 is shared by the at least one magnetic junction 206. Each of the at least one magnetic junction 206 includes a magnetic free layer 202, a magnetic reference layer 204, and a non-magnetic spacing layer 203 positioned between the free layer 202 and the reference layer 204. Both ends of the internal electrode 201 are respectively provided with a first-electrical-terminal and a second-electrical-terminal. Each of the at least one external electrode 205 is connected to a corresponding one of the at least one third-electrical-terminal. The first-electrical-terminal, the second-electrical-terminal, and the at least one third-electrical-terminal are connected to the operation module.

(17) For the three-dimensional magnetic memory shown in FIG. 2A, the operations of data reading and writing are as follows.

(18) To realize the magnetization reversal of the free layer 202 of one selected magnetic junction in the at least one magnetic junction 206, the operation module injects a charge current, also referred to as first writing current, into the internal electrode 201 through the first-electrical-terminal and the second-electrical-terminal. Meanwhile, the operation module injects a second writing current into the selected magnetic junction in the at least one magnetic junction 206 through one corresponding third-electrical-terminal of the at least one third-electrical-terminal and the second-electrical-terminal. The second writing current is charge current.

(19) When a reading current is injected into one selected magnetic junction in the at least one magnetic junction 206 through one corresponding third-electrical-terminal of the at least one third-electrical-terminal and the second-electrical-terminal, the resistance state of the selected magnetic junction in the at least one magnetic junction 206 can be sensed. The reading current is charge current.

(20) FIG. 3A shows a storage unit of the three-dimensional magnetic memory shown in FIG. 2A. The storage unit has a columnar structure including an internal electrode 201, a magnetic junction 206, and an external electrode 205.

(21) In some embodiments, the magnetic junction 206 may be stacked in the normal direction of the bottom surface of the internal electrode 201. In one embodiment, the magnetic junction 206 includes a magnetic free layer 202, a magnetic reference layer 204, and a non-magnetic spacing layer 203 positioned between the free layer 202 and the reference layer 204. The free layer 202 is used for data storage. In another embodiment, the magnetic junction 206 further includes a pinning layer for fixing the magnetization direction of the reference layer 204. In another embodiment, the magnetization direction of the reference layer 204 may be fixed in other manners. The storage unit shown in FIG. 3A may further include a selection device, such as a transistor, and other magnetic junctions.

(22) In one embodiment, the magnetization orientation of the free layer 202 is in-plane, i.e., it is in a clockwise or counterclockwise direction along the tangent direction of the annular section of the free layer 202. In another embodiment, the magnetization orientation of the free layer 202 is out-of-plane, i.e., it is outward or inward along the radial direction of the annular section of the free layer 202.

(23) In the present embodiment, the internal electrode 201 is directly in contact with the free layer 202.

(24) In the present embodiment, the external electrode 205 is directly in contact with the reference layer 204.

(25) In some embodiments, the internal electrode 201 is made of a heavy metal/metalloid or an alloy/compound thereof.

(26) In some embodiments, the free layer 202 is made of a ferromagnetic or ferrimagnetic metal or an alloy thereof.

(27) In other embodiments, the free layer 202 is made of a synthetic ferromagnetic or ferrimagnetic material.

(28) In other embodiments, the free layer 202 is made of a semi-metallic ferromagnetic material. The semi-metallic ferromagnetic material comprises a Heusler alloy in the form of XYZ or X.sub.2YZ, wherein X, Y and Z are the constituent materials, the subscript(s) indicate the stoichiometric ratio of X, Y and Z.

(29) In other embodiments, the free layer 202 is made of a synthetic antiferromagnetic material. The free layer 202 made of a synthetic antiferromagnetic material is consisted of ferromagnetic layers separated by non-magnetic metal layers.

(30) In some embodiments, the spacing layer 203 is made of an oxide, nitride, or oxynitride material.

(31) In other embodiments, the spacing layer 203 is made of a metal or an alloy.

(32) In other embodiments, the spacing layer 203 is selected from, but not limited to, SiC or ceramic materials.

(33) In the present embodiment, the external electrode 205 is made of a metal or an alloy.

(34) In the following, the manufacturing process of the storage unit shown in FIG. 3A will be described in the context of the internal electrode 201 being Ta and the free layer 202 being CoFeB. The manufacturing technology and process described below are also applicable to the storage unit shown in FIG. 3A made of other materials.

(35) For the purpose of growing the internal electrode 201, a layer of Ta is grown by atomic layer deposition, magnetron sputtering deposition, or sub-atmospheric chemical vapor deposition, then ion beam etching or electron beam lithography is performed so as to obtain the internal electrode 201 with a columnar structure.

(36) In other embodiments, the internal electrode 201 may be prepared as follows: first, a layer of insulating material is grown by atomic layer deposition, magnetron sputtering deposition or sub-atmospheric chemical vapor deposition, then a groove is etched on the insulating material layer by ion beam etching or electron beam lithography. The groove is then filled with Ta by atomic layer deposition, magnetron sputtering deposition, or sub-atmospheric chemical vapor deposition. Finally, the insulating material around Ta is etched away by ion beam etching or electron beam lithography so as to obtain the internal electrode 201 with a columnar structure.

(37) After the preparation of the internal electrode 201 is completed, a layer of CoFeB is grown by atomic layer deposition, magnetron sputtering deposition or sub-atmospheric chemical vapor deposition, on the outer surface of the internal electrode 201 serving as the substrate, then a free layer 202 with a columnar structure having an annular cross section is obtained by using ion beam etching or electron beam lithography.

(38) The manufacturing processes of the spacing layer 203, the reference layer 204, and the external electrode 205 are similar to that of the free layer 202.

(39) FIG. 3B shows a top view of the storage unit shown in FIG. 3A.

(40) The reading and writing manners of the storage unit shown in FIG. 3A are given below.

(41) In some embodiments, magnetization reversal of the free layer 202 is achieved by at least a spin-orbit torque. As shown in FIG. 4A, the spin-orbit torque is provided by supplying a charge current with current density J.sub.SOT to the internal electrode 201 along the normal direction of the circular cross section of the internal electrode 201, so as to reverse the magnetization of the free layer 202.

(42) FIG. 4B shows a top view of the writing manner shown in FIG. 4A.

(43) In other embodiments, the magnetization reversal of the free layer 202 is achieved by a combination of a spin-orbit torque and a spin transfer torque. As shown in FIG. 5A, the spin-orbit torque is provided by supplying a charge current, also referred to as first writing current, with current density J.sub.SOT to the internal electrode 201 along the normal direction of the circular cross section of the internal electrode 201. Meanwhile, a second writing current with current density J.sub.STT is injected into the magnetic junction 206 along the radial direction of the annular cross section of the magnetic junction 206 to provide a spin transfer torque. The second writing current is charge current. The magnetization of the free layer 202 is reversed by the combination of the spin-orbit torque and the spin transfer torque.

(44) FIG. 5B is a top view of the writing manner shown in FIG. 5A.

(45) FIG. 6A shows the reading manner of the storage unit shown in FIG. 3A. The determination of the resistance state of the magnetic junction 206 is achieved by injecting a reading current with current density J.sub.R into the magnetic junction 206 along the radial direction of the annular cross section of the magnetic junction 206. The reading current is charge current.

(46) FIG. 6B is a top view of the reading manner shown in FIG. 6A.

(47) FIG. 7 shows a control circuit of the storage unit shown in FIG. 3B, represented in a block diagram form. The control circuit includes a storage unit as shown in FIG. 3B, a first-electrical-terminal, a second-electrical-terminal, a third-electrical-terminal, and a operation module. Both ends of the internal electrode 201 of the storage unit shown in FIG. 3B are respectively provided with the first-electrical-terminal and the second-electrical-terminal, and the external electrode 205 of the storage unit shown in FIG. 3B is provided with the third-electrical-terminal. The first-electrical-terminal, the second-electrical-terminal, and the third-electrical-terminal are connected to the operation module.

(48) In some embodiments, the magnetization reversal of the free layer 202 in FIG. 3B is achieved by the operation module injecting a charge current into the internal electrode 201 through the first-electrical-terminal and the second-electrical-terminal. In other embodiments, the magnetization reversal of the free layer 202 is achieved by the operation module injecting a charge current, also referred to as first writing current, into the internal electrode 201 through the first-electrical-terminal and second-electrical-terminal and at the same time injecting a second writing current into the magnetic junction 206 in FIG. 3B through the second-electrical-terminal and the third-electrical-terminal. The second writing current is charge current.

(49) The determination of the resistance state of the magnetic junction 206 in FIG. 3B is achieved by the operation module injecting a reading current into the magnetic junction 206 through the second-electrical-terminal and the third-electrical-terminal. The reading current is charge current.

(50) In the following, the reading and writing principles of the three-dimensional magnetic device 210 shown in FIG. 2A will be described in more detail.

(51) In the present embodiment, the magnetization reversal of the free layer 202 of one selected magnetic junction in the at least one magnetic junction 206 is achieved by a combination of a spin-orbit torque and a spin transfer torque. As shown in FIG. 8A, the spin-orbit torque is provided by supplying a charge current, also referred to as first writing current, with current density J.sub.SOT to the internal electrode 201 along the normal direction of the circular cross section of the internal electrode 201. Meanwhile, a second writing current with current density J.sub.STT is injected into the selected magnetic junction in the at least one magnetic junction 206 along the radial direction of the annular cross section of the selected magnetic junction in the at least one magnetic junction 206 to provide a spin transfer torque. The second writing current is charge current. The magnetization of the free layer 202 of the selected magnetic junction in the at least one magnetic junction 206 is reversed by the combination of the spin-orbit torque and the spin transfer torque.

(52) FIG. 8B shows a top view of the writing manner shown in FIG. 8A.

(53) FIG. 9A shows a reading manner of the three-dimensional magnetic device 210 shown in FIG. 2A. By injecting a reading current with current density J.sub.R into one selected magnetic junction in the at least one magnetic junction 206 along the radial direction of the annular cross section of the selected magnetic junction in the at least one magnetic junction 206, the resistance state of the selected magnetic junction in the at least one magnetic junction 206 can be determined. The reading current is charge current.

(54) FIG. 9B shows a top view of the reading manner shown in FIG. 9A.

(55) FIG. 10A shows a micromagnetic model of the free layer 202 based on the writing manner shown in FIG. 4A. The free layer 202 is made of Co, and has an inner diameter of 20 nm, an outer diameter of 40 nm, and a length in the x direction of 10 nm. The relationship between the spin-polarized current density J.sub.S and the charge current density J.sub.SOT is J.sub.S=J.sub.SOTθe.sup.−r/λ, wherein the spin Hall angle θ may be 0.08, r is the distance from a point on the annular cross section of the free layer 202 to the center of the circle, λ is the spin diffusion length and at room temperature λ may be 38 nm. The initial magnetization of the free layer 202 is oriented counterclockwise.

(56) FIG. 10B shows the micromagnetic simulation results depicting how the final magnetization at point B in the free layer 202 varies with charge current density J.sub.SOT, based on the micromagnetic model shown in FIG. 10A. It can be seen that the charge current density required for magnetization reversal (critical writing current density) is J.sub.SOT,C=1.7×10.sup.7 A/cm.sup.2. When J.sub.SOT>J.sub.SOT,C, the final magnetization of the free layer 202 changes from counterclockwise direction to clockwise direction.

(57) FIG. 10C shows the micromagnetic simulation results depicting how the critical writing current density J.sub.SOT,C varies with the spin Hall angle θ, based on the micromagnetic model shown in FIG. 10A. It can be seen that J.sub.SOT,C decreases as θ increases. When θ is large enough (e.g., θ>0.3), J.sub.SOT,C may reach below 0.5×10.sup.7 A/cm.sup.2, which is expected to greatly reduce the power consumption of writing operation and improve the reliability and stability of the three-dimensional magnetic device and magnetic memory made from it.