Ion guiding device and guiding method
11031224 · 2021-06-08
Assignee
Inventors
Cpc classification
H01J49/068
ELECTRICITY
International classification
Abstract
An ion guiding device includes ring electrodes with a same size disposed in parallel; wherein a connection line of centers of the ring electrodes is defined as an axis, a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode form an included angle being a range of (0, 90) degrees; a radio-frequency voltage source, for applying an out-phase radio-frequency voltage on a neighboring ring electrode along the axis, so that ions are confined inside the ring electrode during a transmission process; and a direct-current voltage source, applying a direct-current voltage with an amplitude changing along the axis on the ring electrode, so that the ions are transmitted along the axis and focused to a position closer to an inner surface of the ring electrode along a direction of the normal.
Claims
1. An ion guiding device, characterized by comprising: a plurality of ring electrodes with a same size disposed in parallel, wherein a connection line of centers of the plurality of ring electrodes is defined as an axis, a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode form a first included angle, and a range of the first included angle is greater than 0 and less than 90 degrees; a radio-frequency voltage source, for applying an out-phase radio-frequency voltage on a neighboring ring electrode along the axis, so that ions are confined inside the ring electrode during a transmission process; and a direct-current voltage source, for applying a direct-current voltage with an amplitude changing along the axis on the ring electrode, so that the ions are transmitted along the axis and focused off-axis to an inner surface of the ring electrode and an ions transmission direction and the axis form a second included angle, and a range of the second included angle is greater than 0 and less than 90 degrees.
2. The ion guiding device according to claim 1, characterized in that, the ring electrode is circular, oval or polygonal.
3. The ion guiding device according to claim 1, characterized in that, the axis is a straight line, curve or polygonal line.
4. The ion guiding device according to claim 1, characterized in that, the amplitude of the direct-current voltage is changed in a nonlinear manner along the axis.
5. The ion guiding device according to claim 1, characterized by further comprising: an ion injection device for injection ions to the ion guiding device, wherein an included angle between an ion injection direction and the direction of the normal ranges from 0 to 90 degrees.
6. The ion guiding device according to claim 1, characterized by further comprising: an ion ejection device for ejection focused ions from the ion guiding device, wherein an included angle between an ion exiting direction and the direction of the normal ranges from 0 to 90 degrees.
7. The ion guiding device according to claim 1, characterized by further comprising: an air pump device, for pumping neutral components around the plurality of ring electrodes.
8. The ion guiding device according to claim 1, characterized by further comprising: several ring electrodes disposed at upstream of the plurality of ring electrodes, wherein the several ring electrodes are disposed in parallel to the plurality of ring electrodes, and an included angle between a normal of a plane where the several ring electrodes are located and a tangent line of the axis at a center of the ring electrodes is 0 degree.
9. An ion guiding method, characterized by comprising the following steps: disposing a plurality of ring electrodes with a same size in parallel; defining a connection line of centers of the plurality of ring electrodes as an axis, and a first included angle being formed between a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode, wherein a range of the first included angle is greater than 0 and less than 90 degrees; applying an out-phase radio-frequency voltage on a neighboring ring electrode along the axis, so that ions are confined inside the ring electrode during a transmission process; and applying a direct-current voltage with an amplitude changing along the axis on the ring electrode, so that the ions are transmitted along the axis and focused off-axis to an inner surface of the ring electrode and an ions transmission direction and the axis form a second included angle, and a range of the second included angle is greater than 0 and less than 90 degrees.
10. The ion guiding method according to claim 9, characterized by further comprising: injection the ions to the ion guiding device, wherein an included angle between an ion injection direction and the direction of the normal ranges from 0 to 90 degrees.
11. The ion guiding method according to claim 9, characterized by further comprising: ejection the focused ions from the ion guiding device, wherein an included angle between an ion ejection direction and the direction of the normal ranges from 0 to 90 degrees.
12. The ion guiding method according to claim 9, characterized by further comprising: disposing several ring electrodes at upstream of the plurality of ring electrodes, wherein the several ring electrodes are disposed in parallel to the plurality of ring electrodes, and an included angle between a normal of a plane where the several ring electrodes are located and a tangent line of the axis at a center of the ring electrodes is 0 degree.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE INVENTION
(17) Implementing modes of the present invention are explained by means of specific detailed embodiments. A person skilled in the art can easily understand other advantages and effects of the present invention according to the disclosure of the present specification.
(18) It should be noted that, the structure, scale, size, etc., drawn in the drawings of the specification all are only used to cooperate with the disclosure of the specification to be understood and read by a skilled person in this field, rather than limiting the defining conditions that can be implemented by present invention, and therefore, do not have substantive means in technology. Any modification of structure, change in scale relation or adjustment of size should fall within the scope that can be covered by the technical contents disclosed in the present invention without influencing the effects that can be generated and the purposes that can be achieved in the present invention. Meanwhile, terms used in the present specification, such as, “upper”, “lower”, “left”, “right”, “middle”, and “a/an”, are only used for clarity in description, rather than limiting the scope that can be implemented by the present invention. A change or adjustment in a relative relation thereof should also be considered as a scope that can be implemented by the present invention without a substantively changed technical content.
(19) The ion guiding device and guiding method of the present invention comprise a plurality of ring electrodes with a same size disposed in parallel and in an equal distance; wherein a connection line of centers of the plurality of ring electrodes is defined as an axis, a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode form an included angle, and a range of the included angle is (0, 90) degrees; a radio-frequency voltage source, for applying an out-phase radio-frequency voltage on a neighboring ring electrode along the axis, so that ions are confined inside the ring electrode during transmission; and a direct-current voltage source, applying a direct-current voltage with an amplitude changing along the axis on the ring electrode, so that the ions are transmitted along the axis and focused to a position closer to an inner surface of the ring electrode along a direction of the normal. The ion guiding device and guiding method of the present invention can achieve ion transmission and focusing at a certain vacuum degree, and ions off-axis transmission to reduce the noises of the neutral components, while greatly reducing difficulties in processing, manufacturing and assembling.
(20) The ion guiding device of the present invention will be illustrated by means of the specific embodiments in detail as follows.
Embodiment 1
(21) As shown in
(22) A plurality of ring electrodes (101, 102 . . . ) with the same size disposed in parallel, wherein a connection line of centers of the plurality of ring electrodes is defined as an axis, and then a normal b1 of a plane where any of the ring electrodes in the embodiment is located and a tangent line of the axis a1 at a center of the ring electrode form an included angle α, and a range of the included angle α is (0, 90) degrees, that is the angle α is greater than 0 and less than 90 degrees. Preferably, the range of the included angle α is [5, 85] degrees, that is the angle α is equal to or greater than 5 and equal to or less than 85 degrees.
(23) The spaces between neighboring ring electrodes may be equal or may not be equal.
(24) A radio-frequency voltage source is used for applying an out-phase radio-frequency voltage on a neighboring ring electrode (for example, ring electrodes 101 and 102) along the axis a1, so that ions are confined inside the ring electrode during transmission.
(25) The amplitudes of the applied radio-frequency voltages may be equal or may not be equal. When the amplitudes of the applied radio-frequency voltages are not equal, preferably, the amplitudes of the radio-frequency voltages are similar to better achieve ion focusing.
(26) A direct-current voltage source is used for applying a direct-current voltage with an amplitude changing along the axis a1 on the ring electrode (for example, the ring electrodes 101 and 102), so that the ions are transmitted along the axis a1 and focused to a position closer to an inner surface of the ring electrode along a direction of the normal b1.
(27) For positive ions, the direct-current voltage applied on the ring electrode along the axis a1 gradually decreases; and for anions, the direct-current voltage applied on the ring electrode along the axis a1 gradually increases.
(28) Preferably, the amplitude of the direct-current voltage along the axis is changed in a nonlinear manner, or changed in a linear manner.
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(30) To radially confining the ions, the ion guiding device of the present invention adopts a stacked ring electrode similar to an ion funnel, and applies a radio-frequency voltage on the ring electrode, so that a radial barrier is formed around a surface of the electrode. When moving around the electrode, the ions would be limited by a rebound effect of the radio-frequency voltage. In order to drive the ions radially, i.e., in a z direction, in the present invention, the direct-current voltage is applied on the ring electrode to generate an axial direct-current field. As an important feature of the present invention to be distinguished from the prior art, a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode form an included angle.
(31) As shown in
(32) As compared with the prior art, in the ion guiding device of the present invention, a radius of each ring electrode is identical, and the ions can be focused without a structure with a gradually reduced diameter. Only a set of ring electrodes, rather than a structure with two sets of ring electrodes coupled to each other, is required for off-axis transmission. Hence, the ion guiding device of the present invention can completely achieve functions of an ion funnel type device and ion guiding device of US patent US2011/0049357A1, and overcomes the defects of the two devices, i.e., unable to meet two functions at the same time, i.e., focusing and off-axis.
(33) The existing ion funnels require to manufacture a ring with a changed diameter, which not only requires great efforts in manufacturing, but also has a higher requirement on accuracy. Moreover, it is more difficult for fixing. If a simple fixing is adopted, for example, four axes are fixed, a huge capacitance power consumption would be caused due to a large overlapped area between plates of the parts with reduced diameter Therefore, feasibility is unavailable. Moreover, for the ion guiding device disclosed in the previous US patent US2011/0049357A1, it not only requires to manufacture two sets (or more) of ring electrodes with different inner diameters and notches, but also requires to accurately couple the two sets of ring electrodes with different inner diameters. Therefore, angles of the notches of the two sets of ring electrodes and the assembly axis need to be accurately positioned, the manufacturing process is extremely complicated, and cleaning after use is also difficult. Upon comparison, the ion guiding device of the present invention greatly reduces manufacturing difficulty, and simplifies the manufacturing process. For example, when adopting an integral electrode manufacturing method in a Chinese Patent with an invention No. 201110425472.8 and entitled “Electrode Array And Manufacturing Method”, the structure with equal diameter of the ion guiding device of the present invention may reduce difficulty in machining a groove, without processing a conical surface, and thus has excellent utility.
(34) In addition, the ion guiding device of the present invention only requires a set of direct-current bias voltages to achieve axial and off-axis transmission of the ions at the same time, and the voltage applying mode is simple and flexible. By adjusting the direct-current bias voltage, the ion focusing position can be further adjusted. As shown in
Embodiment 2
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(36) The ion guiding device is generally disposed at a rear end of the ion injection device. The ions enter the ion guiding device through the ion injection device from atmosphere; airflow with ions discharges from the ion injection device, and then is subjected to vacuum adiabatic expansion, the speed of which can reach 3 to 6 times of sound speed. At this speed, the action time of a deviating force of the electric field on the ion is too short, so that the ions have a small deviating distance. Some ions have a probability to splat on the electrode due to the insufficient deviating distance, thereby reducing the transmission efficiency of the ions. The ion guiding device in this embodiment has an area for the ions to move along the axis; through this area, the speed of the airflow is reduced to subsonic speed, the action time of the deviating electric field on the ions is relatively long, and the deviating distance of the ions increases, thereby reducing the probability of the ion to splat on the electrode.
(37) Preferably, the axis is any one of a straight line, curve or polygonal line.
Embodiment 3
(38) As shown in
Embodiment 4
(39) As shown in
(40) It should be noted that, the change of the value of the included angle α along the z axis may be various. As shown in
Embodiment 5
(41) As shown in
Embodiment 6
(42) As shown in
Embodiment 7
(43) Regarding different ion injection directions, positions of the ion injection device and the ion ejection device can be flexibly set. As shown in
(44) As shown in
(45) As shown in
(46) As shown in
(47) Steps 1, dispose a plurality of ring electrodes with a same size in parallel; defining a connection line of centers of the plurality of ring electrodes as an axis, and forming an included angle between a normal of a plane where any of the ring electrodes is located and a tangent line of the axis at a center of the ring electrode, wherein the range of the included angle is (0, 90) degrees.
(48) Steps 2, apply an out-phase radio-frequency voltage on a neighboring ring electrode along the axis, so that ions are confined inside the ring electrode during a transmission process.
(49) Steps 3, apply a direct-current voltage with an amplitude changing along the axis on the ring electrode, so that the ions are transmitted along the axis and focused to a position closer to an inner surface of the ring electrode along a direction of the normal.
(50) Preferably, it further comprises: injection ions to the ion guiding device, and an included angle between an ion injection direction and the direction of the normal ranging between [0, 90] degrees.
(51) Preferably, it further comprises: exiting focused ions from the ion guiding device, an included angle between an ion exiting direction and the direction of the normal ranging between [0, 90] degrees.
(52) Preferably, it further comprises: disposing several ring electrodes at ion injection ends of the plurality of ring electrodes, wherein the several ring electrodes are disposed in parallel to the plurality of ring electrodes, and an included angle between a normal of a plane where the several ring electrodes are located and a tangent line of the axis at a center of the ring electrodes is 0 degree.
(53) It should be noted that the structure of the ion guiding device related to the ion guiding method has the same characteristics as the above, and therefore, the structure is omitted for conciseness.
(54) In view of the above, the ion guiding device and guiding method of the present invention, by disposing the plurality of ring electrodes with the same size in parallel and in an equal distance, ion focusing at a high air pressure or a low vacuum degree is effectively achieved; it also effectively removes neutral noises, greatly reduces difficulties in processing, manufacturing and assembling, and has strong utility. Therefore, the present invention effectively overcomes various defects in the prior art, and has a highly industrial value in use.
(55) The aforementioned embodiments merely exemplarily illustrate the principal and effects of the present invention, but are not used for limiting the present invention. Any skilled person in this field can modify or vary the aforementioned embodiments without prejudice to the spirits and scope of the present invention. Hence, all equivalent modifications or variations made by a skilled person in this field without prejudice to the spirits and technical concepts disclosed in the present invention are still covered by the claims of the present invention.