MAGNETIC-FIELD-ASSISTED PLASMA COATING SYSTEM
20210147974 · 2021-05-20
Assignee
- Board Of Trustees Of Michigan State University (East Lansing, MI)
- Fraunhofer USA (East Lansing, MI, US)
Inventors
- Thomas Schuelke (Pinckney, MI, US)
- Michael Becker (East Lansing, MI, US)
- Lars Haubold (East Lansing, MI, US)
- Qi Hua Fan (Okemos, MI, US)
Cpc classification
F02F1/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F02F1/18
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F02F2200/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
C23C14/046
CHEMISTRY; METALLURGY
International classification
C23C14/32
CHEMISTRY; METALLURGY
Abstract
A magnetic-field-assisted plasma coating system and method are provided. In another aspect, a coating system employs a cathode with a linearly moveable magnetic field. A further aspect employs a workpiece as an anode within which is located an elongated cathode which internally coats a bore of the workpiece. Still another aspect of the present system and method employs an elongated and hollow cathode with at least one magnetic source therein. In yet another aspect, end caps or plates seal against one or more open ends of a workpiece bore to be coated, with a cathode inserted into the bore and a vacuum being created within the bore such that the workpiece itself defines at least a portion of a vacuum chamber.
Claims
1. A coating system comprising: an elongated cathode; at least one magnetic source located within the cathode; a workpiece surrounding an outer surface of the cathode, the workpiece acting as an anode; a vacuum source adapted to create a vacuum around the cathode; the at least one magnetic source being adapted to cause a magnetic field to linearly move along the cathode; and an interior wall of the workpiece, surrounding the outer surface of the cathode, defining part of a vacuum chamber connected to the vacuum source.
2. The system of claim 1, wherein: the outer surface of the cathode includes graphite; and an ionic ta-C coating is operably emitted onto the workpiece.
3. The system of claim 1, further comprising at least one end cap removeably located over at least one opening of the workpiece defining part of the vacuum chamber, the vacuum chamber being entirely within a hollow area inside the workpiece.
4. The system of claim 1, further comprising at least one seal removeably located over at least one opening of the workpiece to define part of the vacuum chamber, the vacuum chamber being entirely within a hollow area inside the workpiece.
5. The system of claim 1, further comprising at least two of the magnetic sources located within a hollow interior of the cathode, the magnetic sources being longitudinally arranged relative to each other, and a magnetic force at the outer surface of the cathode being 1-20 milliteslas.
6. The system of claim 5, wherein the at least two magnetic sources are electromagnets which are longitudinally spaced apart from each other and located within a hollow interior of the cathode, further comprising a programmable controller and an electrical circuit being connected to the electromagnets.
7. The system of claim 1, further comprising an exterior of the workpiece being exposed to ambient air during plasma coating inside of the workpiece.
8. The system of claim 1, further comprising a solid and longitudinally elongated transmission shaft coaxially extending within a hollow center of the cathode, the shaft being attached to the magnetic source and operably moving the magnetic source in longitudinal and rotational directions during plasma coating of an interior wall of the workpiece.
9. The system of claim 1, further comprising a process gas emitted into an interior area defined by an interior wall of the workpiece, the gas being used to assist with ionization during plasma arc deposition coating of the interior wall.
10. The system of claim 1, wherein the workpiece is a metallic automotive vehicle engine block including an internal piston cylinder which is plasma arc deposition coated with a tetrahedrally bonded amorphous carbon thin film by the cathode.
11. The system of claim 1, further comprising: a plasma arc deposition coating using the cathode having an ion impact energy of at least 10 eV against the workpiece which is metallic; and a complete coating cycle being no greater than five minutes from when the vacuum is started to when the vacuum ends.
12. A coating system comprising: an elongated cathode; at least one magnetic source; a metallic workpiece including an internal surface defining an internal bore, the internal surface of the workpiece surrounding an outer surface of the cathode; a vacuum chamber being defined by at least the internal surface of the workpiece and at least one member comprising: (a) a removable end cap or (b) a flexible seal, positioned adjacent at least one open end of the bore; and the at least one magnetic source being located inside the bore of the workpiece during coating of the internal surface of the workpiece.
13. The system of claim 12, further comprising at least two of the magnetic sources located within the cathode, the magnetic sources being longitudinally arranged relative to each other, and a magnetic force at the outer surface of the cathode being 1-20 milliteslas.
14. The system of claim 13, wherein the at least two magnetic sources are electromagnets which are longitudinally spaced apart from each other, further comprising a programmable controller and an electrical circuit being connected to the electromagnets.
15. The system of claim 12, wherein the at least one magnetic source is located within a hollow center of the cathode, such that the cathode is laterally between the magnetic source and the workpiece.
16. The system of claim 15, further comprising a solid and longitudinally elongated transmission shaft coaxially extending within the cathode, the shaft being attached to the magnetic source, and the shaft and the magnetic source operably moving longitudinal and rotational directions during plasma coating of the internal surface of the workpiece.
17. The system of claim 12, further comprising: a plasma arc deposition coating using the cathode having an ion impact energy of at least 10 eV against the workpiece; and a complete coating cycle being no greater than five minutes from when vacuum pressure is started to when the vacuum pressure ends.
18. The system of claim 12, wherein the workpiece is an anode during the coating and a longitudinal length of the cathode is greater than a lateral diameter of the cathode.
19. A coating system comprising: an elongated cathode including a hollow interior; multiple magnetic sources located within the hollow interior of the cathode in a longitudinally spaced apart manner, the cathode laterally surrounding the magnetic sources; a vacuum source connected to a vacuum area surrounding a portion of the cathode; and the cathode being configured to operably apply a plasma arc deposition coating.
20. The system of claim 19, wherein the magnetic sources are electromagnets which are energizably controlled by a programmable controller.
21. The system of claim 20, further comprising: an electrical circuit connected to the electromagnets, the controller, the cathode and an anode; the anode comprising a workpiece including a cylindrical inner surface to be coated; and the deposition coating having an ion impact energy of 10-250 eV.
22. The system of claim 19, further comprising: a workpiece including an elongated internal bore within which is inserted the cathode; at least one member sealing an open end of the bore; and the vacuum source reducing pressure within the sealed bore to allow the coating to be applied to an internal and metallic workpiece surface defining the bore.
23. A method for coating a workpiece, the method comprising: (a) inserting a cathode inside an internal bore of the workpiece; (b) sealing at least one open end of the bore such that the bore acts as part of a vacuum chamber; (c) generating an arc in a plasma between the cathode and the workpiece, which acts as an anode; (d) using a magnetic field adjacent the cathode to assist in controlling the arc; and (e) exposing an exterior of the workpiece to ambient air exterior to the vacuum chamber during the coating.
24. The method of claim 23, further comprising: reducing pressure within the bore for the coating process; and moving a magnet, internally located within a hollow center of the cathode, relative to the cathode during the coating process.
25. The method of claim 23, further comprising: plasma arc deposition coating an internal and metallic workpiece surface surrounding the bore with an ion impact energy of at least 10 eV; the coating cycle being no greater than five minutes from when vacuum pressure is started to when vacuum pressure ends; and the internal workpiece surface being coated with a harder material than the remainder of the workpiece adjacent the bore.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0019] Referring to
[0020]
[0021] An actuator 71 and driven transmission 73 linearly move magnet 69 in the advancing and retracting directions within cathode 61. A programmable controller 101 of an electrical circuit 83 energizes and de-energizes actuator 71. Actuator 71 may be an automatically energized electric motor or fluid-powered cylinder. Transmission 73 may be a jack screw (as shown) with an interior of magnet 69 being attached to and moveable with an internally threaded nut or ball, a cable and slide mechanism, a piston rod if a fluid driven cylinder is used, or the like.
[0022] A longitudinal length of cathode 61 is at least twice and more preferably at least five times a lateral diameter dimension of cathode 61. Moreover, an arc ignitor 81 is located adjacent cathode 61 within cylinder bore 23 for initiating a plasma arc between cathode 61 and workpiece anode 26. Electrical circuit 83 connects a direct current power source 85 with both cathode 61 and workpiece anode 26. Alternately, power source 85 may combine direct and pulsed current, especially if carbon cathodes are employed.
[0023] A pair of opposed plates or end caps 87 and 89 of the present system and machine are moveable from a retracted position to an advanced position (as shown in
[0024] A vacuum source, such as a pump 97, is thereafter actuated to create a reduced pressure or vacuum through an outlet 99 in one of the caps 89. The vacuum pressure within bore 23 is preferably at least 10.sup.−3 and more preferably also less than 10.sup.−6 Torr for a bore diameter of about 10 cm and a cathode outer diameter of about 2 cm. It is noteworthy that in one exemplary configuration, exterior surface 65 of cathode 61 is only 2-5 cm away from inner bore surface 25 of engine block workpiece 26, thereby allowing the vacuum pressure that is sufficiently low for successful vapor deposition to be created relatively quickly and also subsequently allowing for relatively fast plasma coating especially as compared to conventional attempts.
[0025] During operation, after the seal is created and vacuum drawn, programmable controller 101 causes ignitor 81 to generate an electrical arc 103 from anode workpiece 26 to cathode 61 within the vacuum. This causes ionization of the cathodic material at various evaporative spots on the cathode adjacent a magnetic field 105 created by magnet 69. The magnetic field will control and guide the location of these cathode spots which in turn controls and guides where the plasma ionization is generated and emitted from. Thus, the ionic ta-C coating 107 is transferred within at least a portion of the magnetic field, and in a generally expanding fan-like side view shape, from the cathode to the anode workpiece 26. Based on predetermining time and speed values, programmable controller 101 subsequently causes actuator 71 to move magnet 69 in the linearly retracting and/or advancing direction(s) within the cathode in order to linearly move the magnetic field therealong. A tunnel magnetic field shape (as shown in
[0026] When completed, programmable controller 101 will electrically terminate the electrical arc, de-energize the vacuum pump 97 and cause a relief valve to vent the vacuum chamber to ambient outside air pressure, energize mechanism 63 to withdraw and retract cathode 61, and energize mechanism 95 to retract end caps 87 and 89. Thereafter, the engine block is moved from the workstation and a new engine block is subsequently inserted therein for another coating cycle. It is envisioned that the entire coating process, from sealing of the bore through unsealing of the bore will be five minutes or less, and more preferably two minutes or less.
[0027] The present system and method are expected to achieve an sp.sup.3 bond fraction percentage for carbon atoms of about 20-85%, which is controlled by the energy of the carbon ions and substrate temperature during plasma coating. It is envisioned that the present system and method will employ an ion impact energy of about 10-250 eV, which is far superior to traditional sputter coating of less than 5 eV. Furthermore, room temperature use of the present system and method are preferred to increase the fraction percentage, although temperatures less than 400° C. may also suffice.
[0028] The cathode is expected to generate less than 120° C. at its outer surface during the coating process, if about 2 kW of electrical power for about 120 seconds is employed. In this advantageously expected cool-cathode situation, cooling of the permanent magnet may be performed through a copper cylinder externally located adjacent to the proximal end of the cathode which acts as a heat sink, thereby avoiding the use of cooling fluid. Alternately, a hollow copper fluid-carrying tube with internal cooling channels, surrounded by a carbon sleeve or the like, is optionally located within the cathode around the permanent magnet. This alternate tube and sleeve serve to cool the magnet.
[0029] In an optional feature, the present system and method may employ a prior or subsequent separate cathode made of a different conductive material, such as a metal (for example: chromium, tantalum, niobium, titanium), using the same process within the bore vacuum before the use of the graphite cathode to deposit metals or metal nitrides. Metal nitrides would be deposited reactively, that is, by adding a partial pressure of nitrogen to the process during arc evaporation of the metal. This multiple cathode process allows for initial coating of the inner bore surface 25, especially if aluminum, with the more ductile metal material prior to application of the much harder ta-C coating layer to minimize cracking of the aluminum workpiece.
[0030] Reference should now be made to
[0031]
[0032] A fourth exemplary embodiment system 181 is shown in
[0033]
[0034] An insulator 280 is mounted between flange 266 and a vacuum flange 282 to which they are fastened. Moreover a motor support plate 284 is fastened to flange 270 with an insulator 286 therebetween. An actuator 271, such as an electric motor, and a longitudinally elongated and solid transmission shaft 273 are moveably coupled to support plate 284. Shaft 273 is operably driven by actuator 271.
[0035] A magnet holder 290 is retained to a distal end of shaft 273 via a connector 292 having a set screw 294 or other fastener. A permanent magnet 269 of a cylindrical shape (as illustrated in cross-section), ring (not shown), or rectangular-cubic shape (not shown) is secured within holder 290 for longitudinal and/or rotational movement by shaft 273 and motor 271. Magnet holder 290 is electrically isolated from cathode 268. Cathodes 268 and 261, and magnet 269 within the cathodes, are longitudinally insertable into and removeable from an open access end of an internal bore 223 of an engine or pipe workpiece 226. Any of the previously discussed end caps and/or seals may be employed to create a vacuum chamber within the internal bore area using workpiece 226 to define part of the vacuum chamber while the workpiece also acts as an anode. An exterior of the workpiece may be exposed to ambient air since a separate vacuum chamber is not necessary.
[0036] While various embodiments of the present system and method have been discussed, additional variations may be employed. For example, automated actuators, mechanisms and controllers have been disclosed for moving and activating the preferred machine, but manual movement and control may alternately be employed although various advantages may not be achieved. Furthermore, each of the features may be interchanged and intermixed between any and all of the embodiments. Changes and modifications are not to be regarded as a departure from the spirit or the scope of the present invention.