PROCESSING METHOD FOR MULTI-ROW, MULTI-COLUMN FLAT LENS WITH EQUIVALENT NEGATIVE REFRACTIVE INDEX
20210157231 · 2021-05-27
Inventors
Cpc classification
G02B3/0056
PHYSICS
B29D11/0074
PERFORMING OPERATIONS; TRANSPORTING
G03F7/2002
PHYSICS
G03F7/0005
PHYSICS
International classification
Abstract
Provided is a processing method for a multi-row, multi-column flat lens with an equivalent negative refractive index, which includes: performing photoresist coating, masking and exposure on the photolithography surface; removing photoresist in an unexposed block, and forming a rectangular groove; coating a surface of an exposed block and all surfaces of the rectangular groove with a protective layer, and then coating a side surface of the rectangular groove with a reflective film; removing the protective layer on the surface of the exposed block and the bottom surface of the rectangular groove, then filling up the groove with a filling material, and further processing the front and rear surfaces of the parallel plate in such a manner that a parallel misalignment between the front and rear surfaces thereof is smaller than 1′; and adding a protective window sheet on each of the front and rear surfaces of the new parallel plate.
Claims
1. A processing method for a multi-row, multi-column flat lens with an equivalent negative refractive index, comprising: step 1: processing an optical material into a rectangular block, cutting the rectangular block into a square plate, and processing the square plate into a parallel plate having a front surface and a rear surface that are parallel to each other; step 2: taking one of the front surface and the rear surface of the parallel plate as a photolithography surface, and successively performing photoresist coating, masking and exposure on the photolithography surface, wherein unexposed blocks and exposed blocks subjected to the exposure are rectangular blocks, diagonal sides of all the rectangular blocks are respectively parallel to edges of the parallel plate, and the exposed blocks and the unexposed blocks are diagonally interlaced; step 3: removing photoresist in the unexposed blocks on the parallel plate, and forming rectangular grooves each having a depth ranging from 0.1 mm to 2 mm; step 4: coating surfaces of the exposed blocks and all surfaces of the rectangular grooves with a protective layer, and coating side surfaces of the rectangular grooves with a reflective film; step 5: removing the protective layer on the surfaces of the exposed block and bottom surfaces of the rectangular grooves, filling the rectangular grooves with a filling material, and further processing the front surface and the rear surface of the parallel plate in such a manner that a parallel misalignment between the front surface and the rear surface thereof is smaller than 1′ to obtain a new parallel plate; and step 6: adding a protective window sheet on each of the front surface and the rear surface of the new parallel plate.
2. The processing method of claim 1, wherein each of the exposed blocks and the unexposed blocks in the step 2 having a size satisfying 0.01 mm<a length/a width<2 mm.
3. The process method of claim 1, wherein the protective layer in the step 4 is resin or photoresist.
4. The process method of claim 1, wherein the reflective film in the step 4 is an aluminum
5. The process method of claim 1, wherein the filling material in the step 5 is resin or optical glass.
6. The process method of claim 1, wherein the new parallel plate and the protective window sheet in the step 6 are glued together by using a photosensitive adhesive or a heat-sensitive adhesive.
Description
BRIEF DESCRIPTION OF DRAWINGS
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[0030] It should be noted that each five-pointed star in the above drawings represents a simple image.
DESCRIPTION OF EMBODIMENTS
[0031] In the following, the present disclosure will be described in further detail with reference to the drawings and embodiments, aiming to explain, rather than limiting, the present disclosure.
[0032]
Embodiment 1
[0033] The embodiment provides a processing method for a multi-row, multi-column flat lens with an equivalent negative refractive index, which includes steps as follows.
[0034] (1) An optical material is processed into a rectangular block, which is then cut into a square plate having a structure as illustrated in
[0035] (2) One of the front surface and the back surface of the parallel plate is used as a photolithography surface, and photoresist coating (as illustrated in
[0036] (3) Photoresist in the unexposed blocks on the parallel plate is removed, and a rectangular groove with a depth ranging from 0.1 mm to 2 mm is formed (as illustrated in
[0037] (4) A surface of the exposed block and all surfaces of the rectangular groove are coated with a resin protective layer, and a side surface of the rectangular groove is coated with an aluminum reflective film as a total reflection surface (as illustrated in
[0038] (5) The protective layers on the surface of the exposed block and a bottom surface of the rectangular groove are removed (as illustrated in
[0039] (6) A protective window sheet is added on each of the front surface and the rear surface of the new parallel plate to obtain the multi-row, multi-column flat lens with an equivalent negative refractive index as illustrated in
[0040] The multi-row, multi-column flat lens with an equivalent negative refractive index is disclosed by the Chinese patent with an application number of 201711305662X.
Embodiment 2
[0041] The imaging principle of the multi-row, multi-column flat lens with the equivalent negative refractive index obtained in Embodiment 1 will be explained as follows.
[0042] The present disclosure relates to the multi-row, multi-column optical waveguide array panel with the equivalent negative refractive index, which has core imaging elements as illustrated in
[0043] In conclusion, the present disclosure may greatly reduce individual differences among traditionally processed strip-shaped optical waveguides. The present disclosure adopts a photolithography method to process each unit, in such a manner that a size of each unit is uniformly processed with a small error, and an assembly error of a system is avoided. The processing size of each imaging unit of the flat lens may be reduced to an order of microns, and an imaging resolution of the flat lens may be greatly improved. Meanwhile, due to a fact that a system processing error is extremely small, requirements for an extremely small imaging distortion, three-dimensional display characteristics and the naked eye three-dimensional holographic display can be met, and the purpose of sharp three-dimensional imaging of the spliced array may be achieved.
[0044] Although embodiments of the present disclosure have been illustrated and described above, it will be understood that the above embodiments are exemplary and cannot be construed as limiting the present disclosure, and changes, modifications, substitutions and alternatives to the above embodiments may be made by those of ordinary skill in the art within the scope of the present disclosure.