Method of Manufacturing Component Carrier and Component Carrier

Abstract

A method of manufacturing component carriers is disclosed. The method includes providing a stack with at least one electrically conductive layer structure and/or at least one electrically insulating layer structure, forming a first hole in a core of the stack and subsequently embedding a first component in the first hole, thereafter forming a second hole in the same core of the stack and subsequently embedding a second component in the second hole. A component carrier has a stack with at least one electrically conductive layer structure and/or at least one electrically insulating layer structure. A first hole is formed in a core of the stack. A first component is embedded in the first hole. A second hole is formed in the same core of the stack and subsequently a second component is embedded in the second hole.

Claims

1. A method of manufacturing component carriers, comprising: providing a stack comprising at least one electrically conductive layer structure and/or at least one electrically insulating layer structure; forming a first hole in a core of the stack, and subsequently embedding a first component in the first hole; thereafter forming a second hole in the same core of the stack, and subsequently embedding a second component in the second hole.

2. The method according to claim 1, further comprising: forming a first adhesive structure at a bottom of the first component after embedding the first component and before forming the second hole.

3. The method according to claim 2, further comprising: forming a second adhesive structure at a bottom of the second component and at a bottom of the first adhesive structure after embedding the second component.

4. The method according to claim 1, wherein each of the first hole and the second hole is a through hole extending through the entire stack, and wherein the method comprises temporarily closing a respective one of the through holes at a bottom by a respective temporary carrier before embedding the first component and the second component, respectively.

5. The method according to claim 4, wherein the method comprises removing the respective temporary carrier after having embedded the first component and the second component, respectively, within the stack.

6. The method according to claim 1, further comprising: forming a first electrically conductive contact to contact the embedded first component after embedding the second component in the second hole.

7. The method according to claim 1, further comprising: forming a second electrically conductive contact to contact the embedded second component simultaneously with the formation of the first electrically conductive contact.

8. A component carrier, comprising: a stack comprising at least one electrically conductive layer structure and/or at least one electrically insulating layer structure; a first component embedded in a first hole in a core of the stack; a first adhesive structure at a bottom of the first component; a second component embedded in a second hole in said core of the stack; and a second adhesive structure at a bottom of the second component and at a bottom of the first adhesive structure.

9. The component carrier according to claim 8, wherein the first adhesive structure is a first adhesive layer, in particular a first adhesive layer having a recess in the second hole, wherein in particular the first adhesive layer covers a bottom of the core and/or a thickness of the first adhesive layer is in a range between 0.5 μm and 7 μm.

10. The component carrier according to claim 8, wherein the second adhesive structure is a second adhesive layer, wherein in particular a thickness of the second adhesive layer is in a range between 0.6 μm and 7 μm.

11. The component carrier according to claim 8, further comprising: a third adhesive structure encapsulating at least part of the first component in the first hole.

12. The component carrier according to claim 11, further comprising: a fourth adhesive structure encapsulating at least part of the second component in the second hole.

13. The component carrier according to claim 8, wherein at least one of the first hole and the second hole is a through hole extending through the entire stack.

14. The component carrier according to claim 8, wherein the first component and the second component are embedded within a common single core of the stack.

15. The component carrier according to claim 8, wherein substantially an entire vertical extension of the first component and of the second component is arranged within the core.

16. The component carrier according to claim 8, wherein none of the first component and the second component protrudes upwardly beyond the core.

17. The component carrier according to claim 8, wherein a height of the core is larger than a height of the first component and is larger than a height of the second component.

18. The component carrier according to claim 8, wherein a first material of the first adhesive structure and a second material of the second adhesive structure are different, wherein in particular the different first and second materials provide a different functionalization, in particular a different functionalization concerning at least one of the group consisting of thermal conductivity, coefficient of thermal expansion, high-frequency capability, magnetic properties, and electromagnetic shielding capability.

19. The component carrier according to claim 8, wherein a first material of the first adhesive structure and a second material of the second adhesive structure are the same.

20. The component carrier according to claim 8, comprising at least one of the following features: wherein a thickness of adhesive material below the first component is larger than a thickness of adhesive material below the second component; wherein a thickness of adhesive material above the first component is different from, in particular is smaller than, a thickness of adhesive material above the second component; wherein the first adhesive structure is absent at a bottom of the second component; wherein the first component and the second component have the same height; wherein the bottom of the first component and the bottom of the second component are arranged at different vertical levels; wherein a ratio between a volume of all embedded components and a volume of the entire component carrier is at least 0.3, in particular is at least 0.5; wherein at least one of the first component and the second component is selected from a group consisting of an electronic component, an electrically non-conductive and/or electrically conductive inlay, a heat transfer unit, a light guiding element, an energy harvesting unit, an active electronic component, a passive electronic component, an electronic chip, a storage device, a filter, an integrated circuit, a signal processing component, a power management component, an optoelectronic interface element, a voltage converter, a cryptographic component, a transmitter and/or receiver, an electromechanical transducer, an actuator, a microelectromechanical system, a microprocessor, a capacitor, a resistor, an inductance, an accumulator, a switch, a camera, an antenna, a magnetic element, a further component carrier and a logic chip; wherein the at least one electrically conductive layer structure comprises at least one of the group consisting of copper, aluminum, nickel, silver, gold, palladium, and tungsten, any of the mentioned materials being optionally coated with supra-conductive material such as graphene; wherein the at least one electrically insulating layer structure comprises at least one of the group consisting of resin, in particular reinforced or non-reinforced resin, for instance epoxy resin or bismaleimide-triazine resin, FR-4, FR-5, cyanate ester resin, polyphenylene derivate, glass, prepreg material, polyimide, polyamide, liquid crystal polymer, epoxy-based Build-Up Film, polytetrafluoroethylene, a ceramic, and a metal oxide; wherein the component carrier is shaped as a plate; wherein the component carrier is configured as one of the group consisting of a printed circuit board, and a substrate; wherein the component carrier is configured as a laminate-type component carrier.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0057] FIG. 1, FIG. 2, FIG. 3, FIG. 4, FIG. 5 and FIG. 6 illustrate cross-sectional views of structures obtained during carrying out a method of manufacturing a component carrier with embedded components, the component carrier being shown in FIG. 6, according to an exemplary embodiment of the invention.

[0058] FIG. 7 illustrates a cross-sectional view of a component carrier with embedded components according to an exemplary embodiment of the invention.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

[0059] The illustrations in the drawings are schematically presented. In different drawings, similar or identical elements are provided with the same reference signs.

[0060] Before referring to the drawings, exemplary embodiments will be de-scribed in further detail, some basic considerations will be summarized based on which exemplary embodiments of the invention have been developed.

[0061] According to an exemplary embodiment of the invention, a component carrier having at least two components embedded in a stack thereof is provided, wherein embedding the second component is not initiated before having completed embedding of the first component. If a third component is (or multiple further components are) embedded in the same component carrier, this may be accomplished after having completed embedding of the first and the second component. By taking this measure, a multiple embed-ding manufacturing architecture is provided with highly advantageous properties in terms of warpage suppression. The conventional risk of warp-age in particular at high die-to-package ratios may be mitigated by dividing the embedding process in two or more separate process stages to thereby prevent the formation of multiple holes in the same stack at the same time.

[0062] When the die-to-package ratio is very high (for instance 0.5 or more), high warpage may be present due to the low rigidity of the board. This warpage that appears on panel level may cause the manufacturing process to stop or become unprecise. Dividing embedding procedures in two or more stages may allow to have less deformation during heat procedure impressed, thus obtaining better warpage behavior, performance and capability. As a result of such a separation of different embedding stages, components embedded in the same stack may not be at the same lower level, but may for instance have a difference in height of 0.7 μm to 7 μm. A reason for this is a protection layer applied of adhesive material on already embedded components from a lower side.

[0063] A gist of an exemplary embodiment of the invention is to produce a high die-to-package ratio embedded package without giving up wide material selection to target desired performance. An advantage of such an embodiment is also that material restrictions are relaxed, such as less restrictions in terms of Young modulus of involved materials, CTE behavior, etc.

[0064] According to an exemplary embodiment of the invention, a component carrier is produced having at least two embedded components being located (in particular substantially completely) within the same core layer of a stack. Thus, it may be possible to use the same build-up layer for interconnection of both (or more than two) embedded components. In particular, a laser process for forming electrically conductive contacts of the embedded com-ponents can be initiated only after completion of the second (or last) embedding. Thus, it may be advantageously dispensable to build-up height to get to a next layer for a subsequent (for instance second) embedding.

[0065] FIG. 1 to FIG. 6 illustrate cross-sectional views of structures obtained during carrying out a method of manufacturing a component carrier 100 with embedded components 110, 116 according to an exemplary embodiment of the invention. The obtained plate-shaped laminate-type component carrier 100, which is here configured as printed circuit board (PCB), is shown in FIG. 6.

[0066] Referring to FIG. 1, a layer stack 102 with a first hole 108 accommodating a first component 110 is shown.

[0067] As illustrated schematically in a detail 191, the stack 102 may be a plate shaped laminate type layer stack composed of one or more electrically conductive layer structures 104 and one or more electrically insulating layer structures 106. For example, electrically conductive layer structures 104 may comprise patterned copper foils and vertical through connections, for example copper filled laser vias. Electrically insulating layer structure 106 may comprise a resin (such as epoxy resin) and optionally reinforcing particles therein (for instance glass fibers or glass spheres). For instance, the electrically insulating layer structures 106 may be made of FR4. In the shown embodiment, the stack 102 may be a single fully cured core 134 having a vertical thickness B of for example 100 μm. Thickness L of the first component 110 may be smaller, for instance 80 μm.

[0068] During manufacturing component carrier 100, first hole 108 is formed in the stack 102, for instance by laser cutting or mechanically cutting. The first hole 108 is a through hole extending through the entire stack 102. In order to enable accommodation of first component 110 in the first hole 108, it is possible to temporarily close the through hole at a bottom side by a temporary carrier 120, such as a sticky tape, before embedding the first component 110. Subsequently, it is possible to place first component 110 in the first hole 108 and on the sticky surface of the temporary carrier 120.

[0069] Thus, FIG. 1 shows the result of the formation of a first cavity in form of through hole 108, tape lamination to attach the temporary carrier 120 to the core 134, and placement of the first component 110 on the sticky tape and in the through hole 108.

[0070] Referring to FIG. 2, the first component 110 is glued in place within the first hole 108 by laminating a previously at least partially uncured electrically insulating layer structure, for instance a sheet of prepreg, on top of the structure shown in FIG. 1. At the result, encapsulating adhesive structure 130 is obtained which encapsulates and thereby embeds first component 110 in hole 108 and also covers the upper surface of the core 134. Thus, in order to obtain the structure shown in FIG. 2, the structure shown in FIG. 1 may be made subject to a lamination procedure. More specifically, the at least partially uncured electrically insulating layer structure may be attached from above to the structure shown in FIG. 1 and may be cured by lamination, i.e. the application of heat and/or mechanical pressure. As a result, the previously at least partially uncured material of the attached electrically insulating layer structure becomes flowable, cures and re-solidifies to thereby circumferentially surround the first component 110. In other words, the process described referring to FIG. 2 describes a top side resin pressing procedure for providing a partial top dielectric build-up. The attached electrically insulating layer structure surrounds the first component 110 in the through hole 108 and covers the upper main surface of the core 134.

[0071] Referring to FIG. 3, the temporary carrier 120 may be removed after having adhered the first component 110 within the stack 102. Further subsequently, it is possible to provide a layer-type first adhesive structure 112 as a protection layer to a bottom of the first component 110 and to a bottom of stack 102.

[0072] Hence, in order to obtain the structure shown in FIG. 3, the temporary carrier 120 may firstly be removed, for instance by peeling off the sticky tape. The support function of the temporary carrier 120 is no longer required, since curing of the previously at least partially uncured electrically insulating layer structure, forming encapsulating adhesive structure 130, has made the layer structure sufficiently rigid.

[0073] As can be taken from FIG. 3 as well, the layer-type first adhesive structure 112 has then be formed on a bottom main surface of the core 134, the encapsulating adhesive structure 130 and the first component 110. Descriptively speaking, the first adhesive structure 112 forms resin below the first component 110 and below the stack 102. In other words, a bottom side resin pressing procedure is carried out for creating a bottom dielectric build-up. A thickness D of the layer-type first adhesive structure 112 may be for instance in a range between 0.5 μm and 7 μm.

[0074] After having obtained the structure shown in FIG. 3 and now referring to FIG. 4, a second hole 114 is formed subsequently in another portion of the stack 102. As shown, the second hole 114 is also a through hole extending through the entire stack 102. For instance, the second hole 114 may be formed by laser drilling or mechanically drilling. In order to enable accommodation of a second component 116 in the second hole 114, it is possible to temporarily close this through hole at a bottom side by a further temporary carrier 120′, such as a further sticky tape, after forming the second hole 114 and before embedding the second component 116. Thereafter, it is possible to accommodate the second component 116 in the second hole 114 and attach it to the further sticky tape.

[0075] More specifically, in order to obtain the structure shown in FIG. 4, firstly the second through hole 114 is formed in the stack 102, followed by the attachment of further temporary carrier 120′ on the lower main surface of the first adhesive structure 112 and closing the second hole 114 from a bottom side. Thereafter, the second component 116 is placed in the second through hole 114 and is attached to the sticky surface of the further temporary carrier 120′. In other words, the structure shown in FIG. 4 is obtained by a second cavity formation process, a tape lamination, and the placement of the second component 116.

[0076] As can be taken from FIG. 4, the first adhesive structure 112 is absent at a bottom of the second component 116, since the portion of the first adhesive structure 112 applied in this region according to FIG. 3 has been removed when cutting the second hole 114. The first adhesive structure 112 embodied as first adhesive layer has a recess 126 in the second hole 114. Still referring to FIG. 4, it can be seen that the bottom of the first component 110 and the bottom of the second component 116 are arranged at different vertical levels. This is the result of the fact that the first adhesive structure 112 is present only beneath the first component 110, but not beneath the second component 116.

[0077] It can also be taken from FIG. 4 that the first component 110 and the second component 116 have the same height L. For instance, the height of the respective component 110, 116 may be in the range between 50 μm and 500 μm. Components 110, 116 may alternatively have different heights.

[0078] Referring to FIG. 5, the second component 116 is glued in place within the second hole 114 by laminating a further initially at least partially uncured electrically insulating layer structure on top of the structure shown in FIG. 4.

[0079] Thus, in order to obtain the structure shown in FIG. 5, the further electrically insulating layer structure of initially at least partially uncured material (for instance a prepreg sheet) is attached and laminated on top of the structure shown in FIG. 4, This can be accomplished in a similar way as described referring to FIG. 2. As a consequence, further encapsulating adhesive structure 132 is produced on the basis of said further at least partially uncured electrically insulating layer structure. The second component 116 is glued in place within the second through hole 114 and is partially encapsulated by the further encapsulating adhesive structure 132. The previously at least partially uncured material which is fully cured during the lamination process circumferentially surrounds the second component 116 to thereby form further encapsulating adhesive structure 132. Again, a top side resin pressing procedure for creating a final top dielectric build-up may be carried out.

[0080] Referring to FIG. 6, the further temporary carrier 120′ may be removed after having adhered the second component 116 within the stack 102. Further subsequently, it is possible to form a layer-type second adhesive structure 118 at a bottom of the second component 116 and at a bottom of the first adhesive structure 112. Also, an exposed bottom surface of the further encapsulating adhesive structure 132 is covered with material of the second adhesive structure 118.

[0081] Hence, in order to obtain the component carrier 100 shown in FIG. 6, the further temporary carrier 120′ may be removed from a bottom side of the structure shown in FIG. 5, for instance by peeling off the sticky tape. Furthermore, second adhesive structure 118 shaped as a layer is attached to the lower main surface of the so obtained layer structure. As a consequence, the thickness d+D of the adhesive dielectric material directly below the first component 110 is larger than the thickness d of the dielectric adhesive below the second component 116. Furthermore, thickness H of dielectric material above the first component 110 is smaller than thickness h of dielectric material above the second component 116.

[0082] Highly advantageously and as seen in FIG. 6, both the first component 110 and the second component 116 are embedded within common single core 134 of the stack 102. As shown, substantially an entire vertical extension of each of the first component 110 and of the second component 116 is arranged within the core 134, only the second component 116 extends vertically into the vertical level of the thin film provided by the first adhesive structure 112. As can be taken from FIG. 6 as well, none of the first component 110 and the second component 116 protrudes upwardly beyond the core 134. As shown in FIG. 1, height B of the core 134 is larger than a height L of the first component 110. In the illustrated embodiment, the height L of the first component 110 is identical to the height L of the second component 116. This configuration provides for a vertically compact component carrier 100 and strongly suppresses warpage due to the homogeneous material distribution within the component carrier 100, both in a horizontal plane and in the vertical direction.

[0083] Altogether, four adhesive structures are shown in the component carrier 100 according to FIG. 6: First adhesive structure 112 and second adhesive structure 118 are layer-shaped, whereas encapsulating adhesive structure 130 forms a third adhesive structure and further encapsulating adhesive structure 132 forms a fourth adhesive structure. The individual materials of the various adhesive structures may be the same or may be different. For instance, different ones of the adhesive structures may be functionalized in a different way, for instance in terms of thermal conductivity, CTE behavior, high-frequency behavior, etc.

[0084] FIG. 7 illustrates a cross-sectional view of a component carrier 100 with embedded components 110, 116 according to an exemplary embodiment of the invention.

[0085] Based on a structure similar to that shown in FIG. 6, component carrier 100 illustrated in FIG. 7 may be obtained by forming first electrically conductive contacts 122 to contact pads 152 on a bottom of the first component 110. Furthermore, second electrically conductive contacts 124 may be formed to contact pads 154 on a bottom of the second component 116. For example, both the first electrically conductive contacts 122 and the second electrically conductive contacts 124 may be formed simultaneously and after embedding the second component 116 in the second hole 114.

[0086] As a result, the component carrier 100 illustrated in FIG. 7 is obtained which comprises stack 102 composed of electrically conductive layer structures 104 and electrically insulating layer structures 106. In particular, the stack 102 comprises a single central core 134 in which both the first component 110 and the second component 116 are embedded and in which the first hole 108 and the second hole 114 are formed. First component 110 is embedded in first hole 108 of the stack 102. First adhesive structure 112 is provided at a bottom of the first component 110. Second component 116 is embedded in second hole 114 of the stack 102. Each of the first hole 108 and the second hole 114 is a through hole extending through the entire stack 102. Second adhesive structure 118 is formed at a bottom of the second component 116 and at a bottom of the first adhesive structure 112. In the shown embodiment, the first adhesive structure 112 is a first adhesive layer.

[0087] Furthermore, the illustrated component carrier 100 comprise third adhesive structure 130 encapsulating the first component 110 in the first hole 108. Fourth adhesive structure 132 encapsulates the second component 116 in the second hole 114.

[0088] Thus, FIG. 7 shows component carrier 100 according to an exemplary embodiment of the invention with first and second components 110, 116 embedded according to a procedure described referring to FIG. 1 to FIG. 6, i.e. without being prone to warpage. After embedding, the pads 152, 154 of the first and second components 110, 116 may be exposed by laser drilling. Laser drill holes may then be filled by electrically conductive material such as copper to thereby form electrically conductive contacts 122, 124. This can be accomplished by electroless plating, galvanic plating, etc. As a result, the components 110, 116 (here both face down components) may be electrically connected to an electronic periphery of the component carrier 100. Additionally or alternatively, pads on the upper main surfaces of one or both of the components 110, 116 may be electrically contacted by drilling holes through the adhesive material above the embedded components 110, 116 (not shown).

[0089] It should be noted that the term “comprising” does not exclude other elements or steps and the article “a” or “an” does not exclude a plurality. Also, elements described in association with different embodiments may be combined.

[0090] Implementation of the invention is not limited to the preferred embodiments shown in the figures and described above. Instead, a multiplicity of variants is possible which variants use the solutions shown and the principle according to the invention even in the case of fundamentally different embodiments.