Device for establishing a bonding connection and transducer therefor

Abstract

A device for establishing a bonding connection, with a bonding head mounted so as to rotate about an axis of rotation, and a transducer (1) mounted on the bonding head. The transducer (1) has a piezo actuator (5) for generating ultrasonic vibration, in particular a natural ultrasonic vibration. Electrodes are (20) provided on the piezo actuator (5) in such a way that the piezo actuator (5) can be excited by an electric field in a field direction (10) transverse to a polarization direction (9) of the piezo actuator, and as a result of the excitation and of the connection of the piezo actuator (5) to the fastening section (6) and to the tool holder (3), the piezo actuator (5) carries out a shearing motion in a shearing plane (18) formed by the polarization direction (9) and by the field direction (10).

Claims

1. A device for producing a bonding connection, comprising a bonding head mounted so as to rotate about an axis of rotation, a transducer (1), mounted on the bonding head, the transducer (1) comprising a piezo actuator (5) for exciting an ultrasonic bending vibration, a fastening section (6) for securing the transducer (1) to the bonding head, and a tool holder (3) for a bonding tool (2), wherein a longitudinal extension (8) of the transducer (1) and/or a direction of extension thereof in the direction of an axis of a minimum inertial moment (19) runs parallel to the axis of rotation of the bonding head, wherein electrodes (20) are provided on opposite sides of the piezo actuator (5) in such a way that the piezo actuator (5) is excited to resonance by an electric field in a field direction (10) transverse to a polarisation direction (9) of the piezo actuator, and wherein the piezo actuator (5), as a result of excitation and connection thereof to the fastening section (6) and to the tool holder (3), produces a shearing movement in a shearing plane (18) formed by the polarization direction (9) and the field direction (10).

2. The device as claimed in claim 1, wherein the piezo actuator (5) is form-fitting and/or force-fitting non-positively and/or adhesively connected to the tool holder (3) and/or the fastening section (6).

3. The device according to claim 1, wherein the piezo actuator (5) is clamped against the tool holder (3) and/or the fastening section (6).

4. The device according to claim 1, wherein a clamping module (13) is provided for clamping the piezo actuator (5), said clamping module being mechanically adjustable.

5. The device according to claim 4 wherein the piezo actuator (5) has a cuboid shape and/or has a planar contact surface on two opposing sides for applying the piezo actuator (5) to a correspondingly designed connection surface of the tool holder (3) and/or the clamping module (13) and/or the fastening section (6).

6. The device according to claim 1, wherein the piezo actuator (5) is adhered to the tool holder (3) and/or the fastening section (6).

7. The device according to claim 1, wherein the transducer (1) has a transducer body (4) and the transducer body (14) is provided with a recess (15), wherein the piezo actuator (5) is provided in the recess (15) of the transducer body (14).

8. The device according to claim 1, wherein the recess (15) is designed in the manner of a breakthrough recess (15) extending in the direction of the axis of rotation (11).

9. The device according to claim 1, wherein the tool holder (3) and/or the fastening section (6) are part of the transducer body (14) and/or the piezo actuator (5) is provided between the tool holder (3) and the fastening portion (6).

10. The device according to claim 1, wherein the piezo actuator (5) is provided in the node of the executed ultrasonic vibration.

11. The device according to claim 1, wherein a bore of the tool holder (3) is provided in a node of the executed ultrasonic vibration that is performed and/or the tool is fixed in the node on the tool holder (3).

12. The device according to claim 1, wherein the rotation axis of the bonding head is provided coaxially with the axis of the minimum mass moment of inertia (19) of the transducer (1).

13. The device according to claim 1, wherein the piezo actuator (5) is connected warp resistant to the fastening section (6) and/or the tool holder (3).

14. A device for producing a bonding connection, comprising a bonding head mounted so as to rotate about an axis of rotation, a transducer (1), mounted on the bonding head, the transducer (1) comprising a piezo actuator (5) for exciting an ultrasonic vibration, a fastening section (6) for securing the transducer (1) to the bonding head, a bonding tool (2), and a tool holder (3) for the bonding tool (2), wherein a longitudinal extension (8) of the transducer (1) and/or a direction of extension thereof in the direction of an axis of a minimum inertial moment (19) runs parallel to the axis of rotation of the bonding head, wherein the piezo actuator (5) has a cuboid shape and has a planar contact surface on two opposing sides, respectively, wherein electrodes (20) are provided on planar opposite sides of the piezo actuator (5) parallel to each other in such a way that the piezo actuator (5) is excited to resonance by an electric field in a field direction (10) transverse to a polarisation direction (9) of the piezo actuator, and wherein the piezo actuator (5), as a result of excitation and connection thereof to the fastening section (6) and to the tool holder (3), produces a shearing movement in a shearing plane (18) formed by the polarization direction (9) and the field direction (10), wherein the shearing movement of the piezo actuator (5) in the shear plane (18) generates the ultrasonic bending vibration in the transducer (1) and the bonding tool (2).

15. The device according to claim 1, wherein the piezo actuator (5) is of parallelepipedal shape.

Description

(1) Exemplary embodiments of the invention are explained in more detail below with the aid of drawings.

(2) There is show in:

(3) FIG. 1 a perspective view of a transducer according to the invention with a piezo actuator in a first embodiment.

(4) FIG. 2 a vibration representation for the transducer according to FIG. 1 in an excited state,

(5) FIG. 3 an enlarged view of the piezo actuator of the transducer of FIG. 1 in the excited state according to FIG. 2,

(6) FIG. 4 a perspective view of the transducer according to the invention in a second embodiment,

(7) FIG. 5 a perspective view of the transducer according to the invention in a third embodiment;

(8) FIG. 6 a perspective view of the transducer according the invention in a fourth embodiment,

(9) FIG. 7 a vibration representation for the transducer according to FIG. 6 in an excited state and

(10) FIG. 8 an enlarged view of the piezo actuator of the transducer according to FIG. 6 in the excited state according to FIG. 7.

(11) A transducer 1 according to the invention according to FIG. 1 is fixed on a bonding head of a bonding device. The bonding head is positioned relative to a substrate via various actuators of the bonding device. With the transducer 1 according to the invention, a bonding wire is then bonded to the substrate. For this purpose, an elongated bonding tool 2, which is designed to taper on a side facing away from the transducer 1 and forms a tool tip 12, is fixed on a tool receptacle 3 of the transducer 1. In the region of the tool tip 12 the bonding wire is positioned and pressed against the substrate. In order to fix the bonding tool 2, the transducer 1 has a tool receptacle 3. The bonding tool 2 is detachably held on the tool receptacle 3 by means of a screw 4. The piezo actuator 5 is excited by means of two electrodes 20 provided on opposite sides of the piezo actuator 5.

(12) As part of the transducer 1, a fastening section 6 with a bore 7 is also provided. The fastening section 6 is for fixing the transducer 1 to the bonding head of the bonding device. In particular, the transducer 1 is held on the bonding head in the region of the bore 7 of the fastening section 6 by means of suitable connecting means. A piezo actuator 5 is provided between the fastening section 6 on the one hand and the tool holder 3 on the other hand. The piezo actuator 5 is of parallelepipedal shape. It has planar contact surfaces on two opposite sides. With planar contact surfaces the piezo actuator 5 abuts the correspondingly configured connecting surface of the fastening section 6 on the one hand and a correspondingly designed connecting surface of the tool holder 3 on the other hand. The connection of the piezo actuator 5 with the tool holder 3 on the one hand and the fastening section 6 on the other hand is produced, in particular, by adhesive bonding. For this purpose, the opposing planar contact surfaces of the piezo actuator 5 are adhesively bonded to the correspondingly configured connecting surfaces of the tool receptacle 3 or the fastening section 6.

(13) In a mounted state, the transducer 1 is fixed to the bonding head of the bonding device such that a longitudinal direction 8 of the transducer 1 is oriented parallel to a rotation axis of the bonding head. At the same time, an axis of a minimum mass moment of inertia 19 extends parallel to the longitudinal direction 8 of the transducer 1. In this respect, the axis of the minimum moment of inertia 19 is also oriented parallel to the axis of rotation of the bonding head. A distance between the axis of the minimum mass moment of inertia 19 of the transducer 1 and the axis of rotation of the bonding head, which is determined transversely to the longitudinal direction 8, is small. More preferably, the axis of the minimum mass moment of inertia 19 is coaxial with the axis of rotation of the bonding head. The corresponding positioning of the transducer 1 on the bonding head improves the dynamics of the bonding device. In particular, the bonding head can be positioned particularly quickly and rotated about the rotational axis. Accordingly, many bondings can be produced per unit of time and the use of the bonding device is economically advantageous.

(14) FIG. 2 shows the piezo actuator 5, which excites an ultrasonic vibration of the transducer 1 extended in the longitudinal direction 8 and of the bonding tool 2 in a shearing plane 18. The piezo actuator 5 or a geometric center thereof is preferably positioned in a node of the ultrasonic vibration. Likewise, the bore 7 of the mounting portion 6 is provided in a node of the ultrasonic vibration. The connection of the transducer 1 to the bonding head takes place in the region of a vibration node. Likewise, the bonding tool 2 is preferably fixed in the region of a vibration node in the tool receptacle 3, whereby the excitation of the bonding tool 2 is performed rotationally. An antinode of vibration is located at the tip 12 of the bonding tool 2. The ultrasonic vibration, which is excited by the piezo actuator 5 and transmitted by the transducer 1 to the bonding tool 2, thus causes a maximum relative movement between the substrate and a bonding wire held on the tip 12 of the bonding tool 2 and pressed against a substrate.

(15) The fastening of the transducer 1 via the bore 7 is merely exemplary. According to an alternative embodiment of the invention, which is not shown, the transducer 1 can be fixed via a thread, glued, clamped or otherwise attached to a receptacle of a machine tool. Furthermore, it can be provided that the fastening takes place outside a vibration node.

(16) According to an alternative embodiment of the invention (not shown), the bonding tool 2 can be fixed on the tool holder 3 outside a vibration node of the ultrasonic vibration. The excitation of the bonding tool 2 is then not purely rotary, but by a superimposed rotary and linear vibration. The linear vibration is oriented in particular transversely to the longitudinal direction 8 of the transducer 1.

(17) In order to excite the vibration form shown in FIG. 2 in the transducer 1 and the bonding tool 2, the piezo actuator 5 performs an ultrasonic vibration in the shear plane 18 as shown in FIG. 3. The piezo actuator 5 is polarized in a polarization direction 9. An electric field is applied perpendicularly to the polarization direction 9 in a field direction 10 on the piezo actuator 5. To provide the electric field, the electrodes 20 are provided on the piezo actuator 5. As a result of the polarization in the polarization direction 9 and the applied electric field transversely thereto, an ultrasonic vibration is performed in the shear plane 18 defined by the polarization direction 9 and the field direction 10. In particular, this leads to the result that the transducer 1 performs the ultrasonic vibration as a natural vibration or bending vibration. For example, the ultrasonic vibration takes place around an axis of rotation 11 oriented perpendicular to the shear plane 18 (corresponds to the 2-direction). The shear motion of the piezo actuator 5 in the shear plane 18 generates the ultrasonic vibration in the transducer 1 and the bonding tool 2. In the present case, the longitudinal direction 8 extends in the shearing plane 18, or as the case may be, the polarization direction 9 extends in the longitudinal direction 8.

(18) An alternative embodiment of the inventive transducer 1 according to FIG. 4 provides a transducer body 14 having the fastening section 6 and the tool receptacle 3. A recess 15, which is designed in the manner of a perforation extending in the direction of the axis of rotation 11, is provided on the one-piece transducer body 14. The piezo actuator 5 is positioned in the recess 15 on the one hand. In addition, a clamping module 13 is provided in the recess 15, which serves to connect the piezo actuator 5 to the transducer body 14 in a force-locking manner. For this purpose, the clamping module 13 has clamping wedges which are not individually shown and which are held relative to each other and are fixed in such a way that the piezo actuator 5 is retained in the recess 15 in a force-fitting manner. A shearing motion performed by the piezo actuator 5 excites the ultrasonic vibration used in the transducer 1 and the bonding tool 2 in a known manner to produce the bonding connection between the bonding wire and the substrate.

(19) A first leg 16 and a second leg 17 are provided on the transducer body 14 in the region of the recess 15. The first leg 16 and the second leg 17 connect the fastening section 6 and the tool holder 3 with one another. They extend in the longitudinal direction 8 of the transducer 1 and are comparatively compliant. In particular, the legs 16, 17 are provided at a distance from the piezo actuator 5 on opposite sides thereof. The opposing contact surfaces of the piezo actuator 5 abut on the tool receptacle 3 on the one hand and a correspondingly configured connecting surface of the clamping module 13 on the other hand. The clamping module 13 is provided between the piezo actuator 5 and the fastening section 6 of the transducer 1.

(20) According to an alternative, non-illustrated embodiment of the invention, the clamping module 13 can be provided between the piezo actuator 5 and the tool holder 3 of the transducer 1. The recess 15 can be dispensed with, the legs 16, 17 can be applied directly to the piezo actuator 5 or the electrodes 20 and can be insulated therefrom.

(21) According to an alternative embodiment of the invention according to FIG. 5, the transducer 1 has two piezo actuators 5 provided in the recess 15. The piezo actuators 5 are designed in such a way that they form a shearing motion in the shearing plane 18 as ultrasonic vibration. Together, they stimulate the ultrasonic vibration of the transducer 1 and the bonding tool 2.

(22) The piezo actuators 5 are held in the recess 15 in a force-fit or friction-locked manner. For example, the different coefficients of thermal expansion of the piezoceramics used for producing the piezo actuators 5, on the one hand, and the transducer body 14 preferably made of a metallic material, are used for the force-fit or friction-locked reception of the piezo actuators 5 in the recess 15.

(23) A fourth embodiment of e transducer 1 according to the invention is shown in FIGS. 6 to 8. The transducer 1 has a transducer body 14, in which the piezo actuator 5 is fixed. The polarization direction 9 is perpendicular to the longitudinal direction 8 of the transducer 1. The electric field is applied in the longitudinal direction 8, that is to say, the field direction 10 is parallel to the longitudinal direction 8.

(24) The piezo actuator 5 is fixed on the transducer body 14 via two lateral cheeks 21 of the transducer body 14. For example, the piezo actuator 5 is clamped between the cheeks 21. For example, the piezo actuator 5 is glued with the cheeks 21. The opposing electrodes 20 are provided adjacent to two recesses 15 which favor the development of a vibration of the piezo actuator 5 in the shearer plane 18 which is stressed by the polarization direction 9 and the field direction 10.

(25) To fix the tool 2 on the transducer body 14, by way of example a screw 4 is dispensed with. For example, the tool 2 is fixed on the tool holder 3 of the transducer body 14 by means of clamping.

(26) To illustrate the invention, the representation of h transducer 1 in the illustrated embodiments is limited to the aspects and features which are essential to the invention. Further components can be provided on the transducer 1. The piezo actuator 5 is shown in principle. For example, a piezo actuator 5 produced from a single piezoceramic system can be provided. For example, the piezo actuator 5 can have a plurality of disc-shaped piezoceramics. For example, the piezo actuator 5 can be designed in the manner of a piezostatic actuator.

(27) Identical components and component functions are identified by the same reference symbols.