APPARATUS FOR MACHINING A WORKPIECE WITH A LASER BEAM COUPLED INTO A FLUID JET, WITH AUTOMATIC LASER-NOZZLE ALIGNMENT; METHOD OF ALIGNING SUCH A BEAM

Abstract

The invention relates to an apparatus 100 for machining a workpiece with a laser beam 101 coupled into a fluid jet. The apparatus 100 comprises a laser unit 101a for providing the laser beam 101, a nozzle unit 102 with an aperture 102a for producing the fluid jet, and an optical unit 103 configured to provide the laser beam 101 from the laser unit 101a onto the nozzle unit 102. Further, the apparatus 100 comprises a control unit 104 configured to control 108, 110 the optical unit 103 and/or nozzle unit 102 to change a point of incidence 109 of the laser beam 101 on the nozzle unit 102. The apparatus 100 also comprises a sensing unit 105 configured to sense laser light 106 reflected from a surface 102b of the nozzle unit 102 and produce a sensing signal 107 based on the sensed reflected laser light 106. The control unit 104 is particularly configured to evaluate the sensing signal 107 and to determine a defined sensing pattern in the sensing signal 107 indicative of the laser beam 101 being fully and/or partially aligned with the aperture 102a.

Claims

1. Apparatus (100) for machining a workpiece with a laser beam (101) coupled into a fluid jet, the apparatus (100) comprising a laser unit (101a) for providing the laser beam (101), a nozzle unit (102) with an aperture (102a) for producing the fluid jet, an optical unit (103) configured to provide the laser beam (101) from the laser unit (101a) onto the nozzle unit (102), a control unit (104) configured to control (108, 110) the optical unit (103) and/or nozzle unit (102) to change a point of incidence (109) of the laser beam (101) on the nozzle unit (102), a sensing unit (105) configured to sense laser light (106) reflected from a surface (102b) of the nozzle unit (102) and produce a sensing signal (107) based on the sensed reflected laser light (106), wherein the control unit (104) is configured to evaluate the sensing signal (107) and to determine a defined sensing pattern in the sensing signal (107) indicative of the laser beam (101) being fully and/or partially aligned with the aperture (102a).

2. Apparatus (100) according to claim 1, wherein the control unit (104) is configured to control (108, 110) the optical unit (103) to produce a lateral displacement of the laser beam (101) relative to the nozzle unit (102).

3. Apparatus (100) according to claim 1, wherein at least one part of the optical unit (103) is movable, in particular rotatable, and the control unit (104) is configured to control (108a, 108b) a movement, in particular a rotation, of the at least one part of the optical unit (103) to change the point of incidence (109) of the laser beam (101) on the nozzle unit (102).

4. Apparatus (100) according to claim 1, wherein the nozzle unit (102) is movable, and the control unit (104) is configured to control (110) a movement of the nozzle unit (102) to change the point of incidence (109) of the laser beam (101) on the nozzle unit (102).

5. Apparatus (100) according to claim 1, wherein the control unit (104) is configured to control (108, 110) the optical unit (103) and/or nozzle unit (102) to continuously and/or stepwise change the point of incidence (109) of the laser beam (101) on the nozzle unit (102) according to a determined movement pattern and to continuously and/or repeatedly evaluate the sensing signal (107).

6. Apparatus (100) according to claim 5, wherein the control unit (104) is configured to interrupt the control (108, 110) of the optical unit (103) and/or nozzle unit (102) to change the point of incidence (109) of the laser beam (101) on the nozzle unit (102), when it determines the sensing pattern in the sensing signal (107).

7. Apparatus (100) according to claim 1, wherein the reflected laser light (106) passes through at least a part of the optical unit (103) and/or is provided by the optical unit (103) to the sensing unit (105).

8. Apparatus (100) according to claim 1, wherein the optical unit (103) includes a first deflection element (401) and a second deflection element (402), the first deflection element (401) is configured to provide the laser beam (101) from the laser unit (101a) to the second deflection element (402), and the second deflection element (402) is configured to provide the laser beam (101) from the first deflection element (401) to the nozzle unit (102).

9. Apparatus (100) according to claim 8, wherein the first deflection element (401) and/or second deflection element (402) is rotatable to produce the change of the point of incidence (109) of the laser beam (101) on the nozzle unit (102).

10. Apparatus (100) according to claim 1, further comprising at least one optical element (501, 502, 503) configured to focus the laser beam (101) onto the nozzle unit (102).

11. Apparatus according to claim 10, wherein the at least one optical element (501, 502, 503) includes a first optical element (501) for providing the laser beam (101) from the laser unit (101a) to the optical unit (103) and a second optical element (502) for providing the laser beam (101) from the optical unit (103) to the nozzle unit (102), and the first optical element (501) and/or the second optical element (502) is movable, in particular along the propagation direction of the laser beam (101).

12. Apparatus according to claim 10, wherein the at least one optical element (501, 502, 503) includes a third optical element (503) for adjusting an image (802) of the reflected laser light (106) on the sensing unit (105).

13. Method (600) for aligning a laser beam (101) for machining a workpiece, the method (600) comprising providing (601) the laser beam (101), providing (602) the laser beam (101) to a nozzle unit (102) with an aperture (102a), changing (603) a point of incidence (109) of the laser beam (101) on the nozzle unit (102), sensing (604) laser light (106) reflected from a surface (102b) of the nozzle unit (102) to produce a sensing signal (107) based on the sensed reflected laser light (106), evaluating (605) the sensing signal (107) to determine a defined sensing pattern in the sensing signal (107) indicative of the laser beam (101) being fully and/or partially aligned with the aperture (102a).

14. Method (600) according to claim 13, further comprising focusing (701) the laser beam (101) onto the nozzle unit (102).

15. Method (600) according to claim 13, further comprising, initially setting (702) the point of incidence (109) of the laser beam (101) such that an image (802) of the reflected laser light (106) is centered on a sensing unit (105) for producing the sensing signal (107), and moving (703) the point of incidence (109) of the laser beam (101) on the nozzle unit (102) according to a determined movement pattern thereby generating an image (801) of that movement pattern on the sensing unit (105), and stopping (704) the movement (703) if determining the sensing pattern in the sensing signal (107).

16. Method (600) according to claim 15, further comprising aligning the laser beam (101) with the aperture (102a) by changing the point of incidence (109) of the laser beam (101) on the nozzle unit (102) based on the sensing pattern in the sensing signal (107).

17. Method (600) according to claim 15, wherein the movement pattern is a spiral pattern and/or any other pattern which causes the image (807) of the reflected laser light (106) to move along a spiral (801) or other pattern.

18. Method (600) according to claim 15, wherein the sensing pattern indicative of the laser beam (101) being fully and/or partially aligned with the aperture (102a) results from a change of the image (802) of the reflected laser light (106) on the sensing unit (105) from a smaller and/or brighter spot to a larger and/or darker spot or vice versa.

19. Method (600) according to claim 15, wherein the sensing pattern indicates full and/or partial lateral overlap of the image (802) of the reflected laser light (106) with an image (803) of the aperture (102a), in particular when moving the point of incidence (109) according to the movement pattern.

20. Method (600) according to claim 19, further comprising controlling at least one optical element (503) to adjust the image (802) of the reflected laser light (106) on the sensing unit (105), in particular to cause a change from a smaller and/or brighter image (802) to a larger and/or darker image (802) or vice versa.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0061] The above-described aspects and preferred implementation forms of the present invention are explained in the following description of specific embodiments in relation to the enclosed drawings, in which

[0062] FIG. 1 shows an apparatus according to an embodiment of the present invention.

[0063] FIG. 2 shows an apparatus according to an embodiment of the present invention.

[0064] FIG. 3 shows an apparatus according to an embodiment of the present invention.

[0065] FIG. 4 shows an apparatus according to an embodiment of the present invention.

[0066] FIG. 5 shows an apparatus according to an embodiment of the present invention.

[0067] FIG. 6 shows a method according to an embodiment of the present invention.

[0068] FIG. 7 shows a method according to an embodiment of the present invention.

[0069] FIG. 8 shows schematically an image of the reflected laser light on the sensing unit, which moves according to a movement pattern used for changing the point of incidence of the laser beam on the nozzle unit.

DETAILED DESCRIPTION OF EMBODIMENTS

[0070] FIG. 1 shows an apparatus 100 according to an embodiment of the present invention. The apparatus 100 is configured to machine a workpiece (not shown) with a laser beam 101 coupled into a fluid jet (not shown). The workpiece may be a made of a material including, for example, metals, ceramics, diamonds, semiconductors, alloys, superalloys, or ultra-hard materials. Machining the workpiece may include cutting or drilling the workpiece, or shaping the workpiece by material ablation in up to three dimensions. The laser beam 101 preferably has a laser power of between 20-400 W or even more. The laser beam 101 may thereby be a pulsed laser beam, but can also be a continuous laser beam. A pressure of the preferably pressurized fluid jet may be between 50-800 bar

[0071] During the machining of the workpiece, the apparatus 100 is configured to provide the fluid jet onto the workpiece, and to couple the laser beam 101 into the fluid jet by means of at least one optical element and through a nozzle aperture 102a of a nozzle unit 102 that generates the fluid jet. Thereby, the workpiece may be positioned on a machining surface, which may or may not be part of the apparatus 100. In either case, the apparatus 100 is arranged such that it is able to machine the workpiece disposed on the machining surface. The apparatus 100 may control movements of the machining surface in up to five dimensions.

[0072] The apparatus 100 of the present invention is particularly designed for performing an automatic alignment of the laser beam 101 with the aperture 102a of the nozzle unit 102. This can be done with or without the fluid jet being actively generated by the nozzle unit 102. Typically, the automatic laser-nozzle alignment is performed with the fluid jet being generated. The components of the apparatus 100 required for this alignment purpose are shown in FIG. 1. In particular, the apparatus 100 comprises a laser unit 101a, the nozzle unit 102, an optical unit 103, a control unit 104, and a sensing unit 105. The shown units of the apparatus 100 may all be concealed in a machining unit or head of the apparatus, or in another kind of enclosure or housing.

[0073] The laser unit 101a is configured to provide the laser beam 101, either by directly generating it or by receiving it and coupling it into the apparatus 100. Thus, the laser unit 101a may be a laser source or a laser port or inlet of the apparatus 100. A laser port or inlet may comprise a window, which is transparent for the laser beam 101 provided from an external laser source, and/or may comprise an optical element for focusing, directing and/or dividing the laser beam 101 further in the apparatus 100.

[0074] The nozzle unit 102 is configured to produce the fluid jet, when fluid is provided to the apparatus 100. The nozzle unit 102 is preferably disposed within the machining unit/head or housing/enclosure of the apparatus 100, in order to produce the fluid jet in a protected environment. The nozzle aperture 102a defines the width of the fluid jet. Through the nozzle aperture 102a, the laser beam 101 may be coupled into the fluid jet. The nozzle aperture 102a has preferably a diameter of 10-200 μm, and the fluid jet has preferably a diameter of about 0.6-1 times the diameter of the nozzle aperture 102a. The pressure for the preferably pressurized fluid jet may be provided via an external fluid supply, which may be controlled by the control unit 104. The fluid supplied for the fluid jet is preferably water, i.e. the fluid jet is a water jet. For outputting the fluid jet from the apparatus 100, the apparatus 100 preferably includes an exit nozzle with an exit aperture. The exit aperture is preferably wider than the nozzle aperture 102a.

[0075] The optical unit 103 is configured to provide the laser beam 101 from the laser unit 101a onto the nozzle unit 102. For instance, the optical unit 103 may receive the laser beam 101 from the laser unit 101a, and may deflect or direct it otherwise towards the nozzle unit 102. Thereby, the optical unit 103 may be configured to produce a lateral displacement of the laser beam 101 relative to at least the nozzle unit 102, wherein the lateral displacement is changeable by e.g. moving, rotating or otherwise controlling the optical unit 103. The optical unit 103 may particularly be controlled by the control unit 104.

[0076] The control unit 104 is configured to control the optical unit 103 and/or nozzle unit 102 to change a point of incidence 109 of the laser beam 101 on the nozzle unit 102. For instance, the control unit 104 can move and/or rotate at least a part of the optical unit 103, in order to change the point of incidence 109, and/or can move the nozzle unit 102 for the same effect. If the point of incidence 109 is on the surface 102b of the nozzle unit 102, the laser beam 101 is reflected from the surface 102b.

[0077] The sensing unit 105 is arranged and configured to sense such laser light 106 reflected from the surface 102b of the nozzle unit 102, and to produce a sensing signal 107 based on the sensed reflected laser light 106. FIG. 1 shows a scenario, in which the laser beam 101 impacts on the nozzle unit surface 102b, and is reflected from the surface 102b towards and onto the sensing unit 105. FIG. 2 shows the same apparatus 100 shown in FIG. 1 in another scenario, namely with a different relative displacement of the laser beam 101 with respect to the nozzle unit 102, i.e. with a different point of incidence 109 of the laser beam 101 on the nozzle unit 102. In the scenario of FIG. 2, the laser beam 101 is aligned with the nozzle aperture 102a. Thus, it is not directly reflected from the surface 102b of the nozzle unit 102 towards and onto the sensing unit 105. Nevertheless, also in this scenario the sensing unit 105 may detect reflected laser light, which is back-reflected/back-scattered from the fluid for forming the fluid jet within the aperture 102b.

[0078] In any case, the sensing signal 107 produced by the sensing unit 105 changes when the point of incidence 109 is changed on the nozzle unit 102, and particularly when the laser beam 101 suddenly overlaps partially and/or fully with the nozzle aperture 102a. Accordingly, the sensing signal 107 exhibits at least one characteristic sensing pattern depending on the alignment or misalignment of the laser beam 101 and the aperture 102a.

[0079] Therefore, the control unit 104 is configured to evaluate the sensing signal 107 and to determine a defined sensing pattern in the sensing signal 107 indicative of the laser beam 101 being fully and/or partially aligned with the aperture 102a. The sensing pattern may be predefined or learned by the control unit 104. Thus, the control unit 104 is configured to determine that the laser beam 101 is at least partially aligned with the nozzle aperture 102a based on the sensing signal 107.

[0080] For instance, the control unit 104 may control (by means of a control signal 108) the optical unit 103 and/or control (by means of a control signal 110) the nozzle unit 102 to continuously and/or stepwise change the point of incidence 109 of the laser beam 101 on the nozzle unit 102, i.e. to scan the nozzle unit surface 102b, according to a determined movement pattern. Thereby, the control unit 104 may continuously and/or repeatedly evaluate the sensing signal 107, for instance, for one or more defined sensing patterns. If it detects the sensing pattern in the sensing signal 107, it may interrupt the control (by means of the control signals 108 and/or 110) of the optical unit 103 and/or nozzle unit 102 to stop changing the point of incidence 109 of the laser beam 101 on the nozzle unit 102, and thus complete the automatic laser-nozzle alignment procedure.

[0081] FIG. 3 shows an apparatus 100 according to an embodiment of the present invention, which builds on the apparatus 100 shown in FIG. 1. Identical elements in FIG. 3 and FIG. 1 are labeled with the same reference signs and function likewise. Accordingly, the apparatus 100 of FIG. 3 also comprises the laser unit 101a, the nozzle unit 102, the optical unit 103, the control unit 104, and the sensing unit 105.

[0082] FIG. 3 shows specifically that the reflected laser light 106 may pass through at least a part of the optical unit 103 and/or may be provided or directed by the at least a part of the optical unit 103 to the sensing unit 105. That is, the optical unit 103 may be both configured to provide or direct the laser beam 101 from the laser unit 101a to the nozzle unit 102, and to provide the reflected laser light 106 to the sensing unit 105. For instance, the optical unit 103 can be realized by at least one movable deflection element, like a mirror. However, it can also include further optical elements. In addition, the nozzle unit 102 and/or sensing unit 105 may be movable to ensure that for a certain control setting of the optical unit 103, the laser beam 101 impinges on the nozzle unit 102, and the reflected light 106 reaches the sensing unit 105. By means of such an optical unit 103 as shown in FIG. 3, the apparatus 100 can be built particularly compact.

[0083] FIG. 4 shows an apparatus 100 according to an embodiment of the present invention, which builds on the apparatus 100 shown in FIG. 1. Identical elements in FIG. 4 and FIG. 1 are labeled with the same reference signs and function likewise. Accordingly, the apparatus 100 of FIG. 4 also comprises the laser unit 101a, the nozzle unit 102, the optical unit 103, the control unit 104, and the sensing unit 105.

[0084] Specifically, the optical unit 103 in FIG. 4 includes a first deflection element 401 and a second deflection element 402. The first deflection element 401 is configured to guide the laser beam 101 from the laser unit 101a to the second deflection element 402, and the second deflection element 402 is configured to guide the laser beam 101 from the first deflection element 401 onto the nozzle unit 102. Both deflection elements 401 and/or 402 may be realized by mirrors, and may be movable and/or rotatable. In particular, the first deflection element 401 and/or the second deflection element 402 may be rotatable, in order to produce a change of the point of incidence 109 of the laser beam 101 on the nozzle unit 102. The control unit 104 may control (by means of control signals 108a and/or 108b) one or both deflection elements 401 and/or 402. The control unit 104 may particularly control a sweep of an inclination angle of one or both of the deflection elements 401 and/or 402, in order to scan at least a part of the surface 102b of the nozzle unit 102 with the laser beam 101. In other words, the control unit 104 may continuously and/or stepwise change the point of incidence 109 of the laser beam 101 on the nozzle unit 102. The scan is preferably realized according to a determined movement pattern, like a spiral pattern. The control unit 104 may also control the sensing unit 105 to continuously and/or repeatedly evaluate the sensing signal 107 during the movement pattern.

[0085] FIG. 5 shows an apparatus 100 according to an embodiment of the present invention, which builds on the apparatus 100 shown in FIG. 1. Identical elements in FIG. 5 and FIG. 1 are labeled with the same reference signs and function likewise. Accordingly, the apparatus 100 of FIG. 5 also comprises the laser unit 101a, the nozzle unit 102, the optical unit 103, the control unit 104, and the sensing unit 105.

[0086] FIG. 5 shows specifically that the apparatus 100 can include one or more optical elements, for instance, three optical elements 501, 502 and 502, e.g. realized by three lenses. The one or more optical elements 501, 502 and 503 may comprise a first optical element 501 for directing the laser beam 101 from the laser unit 101a to the optical unit 103, and a second optical element 502 for directing the laser beam 101 from the optical unit 103 to the nozzle unit 102. By means of the first optical element 501 and/or the second optical element 502, the apparatus 100 may be configured to focus the laser beam 101 onto the nozzle unit 102. To this end, the first optical element 501 and/or the second optical element 502 may be movable, in particular along the propagation direction of the laser beam 101 they respectively receive and/or output. Focusing the laser beam 101 on the nozzle unit 102 may change a size and/or brightness of a laser spot on the surface 102b, and may accordingly change a size and/or brightness of an image of the reflected light spot on the sensing unit 105.

[0087] The third optical element 503 may be used to adjust the image of the reflected laser light 106 on the sensing unit 105, e.g. to make it brighter and/or smaller or make it darker and/or wider. To this end, it may be moved along the propagation direction of the laser beam 101 it receives and/or outputs.

[0088] FIG. 6 shows a method 600 according to an embodiment of the present invention for aligning the laser beam 101 and the nozzle aperture 102a. Accordingly, the method 600 may be carried out by the apparatus 100, as shown in either one of the FIGS. 1-5.

[0089] The method 600 comprises a step 601 of providing the laser beam, a step 602 of providing the laser beam 101 to a nozzle unit 102, a step 603 of changing a point of incidence 109 of the laser beam 101 on the nozzle unit 102, a step 604 of sensing laser light 106 reflected from a surface 102b of the nozzle unit 102 to produce a sensing signal 107 based on the sensed reflected laser light 106, and a step 605 of evaluating the sensing signal 107 to determine a single defined sensing pattern or a number of defined sensing patterns in the sensing signal 107 indicative of the laser beam 101 being aligned with the aperture 102a. The arrows in FIG. 6 do not necessarily indicate an order of the steps. In particular, the steps 601-605 may be carried out simultaneously.

[0090] FIG. 7 shows a method 600 according to an embodiment of the present invention, which builds on the method 600 shown in FIG. 6. FIG. 7 shows specifically details of the steps 602, 603 and 604 shown in FIG. 6. FIG. 8 is used to illustrate the method 600 carried out according to FIG. 7. In particular, FIG. 8 shows schematically an image 802 of the reflected laser light 106 on the sensing unit 105, which moves according to a movement pattern used for changing the point of incidence 109 of the laser beam 101 on the nozzle unit 102.

[0091] The provided laser beam 101 may be focused (e.g. as part of step 602) onto the surface 102b of the nozzle unit 102. This can, for instance, be achieved by controlling at least one optical element, e.g. one or both of the optical elements 501 and 502 as shown in FIG. 5. Then, (e.g. as part of the step 603) the point of incidence 109 of the laser beam 101 may be selected 701 such that the image 802 (see FIG. 8) of the reflected laser light 106 is initially centered on a sensing unit 105 (and accordingly appears centered on e.g. a display unit connected to the sensing unit 105 in a camera or the like). Then, the point of incidence 109 of the laser beam 101 on the nozzle unit 102 is changed 702 (e.g. as part of the step 603) according to a determined movement pattern, whereby an image 801 (see FIG. 8) of that movement pattern is generated on the sensing unit 105. The movement of the point of incidence 109 may be stopped 704 (e.g. as part of the step 604), when the sensing pattern is determined in the sensing signal 107.

[0092] FIG. 8 shows an example of the image 802 of the reflected light 106 on the sensing unit 105, which represents the movement pattern of changing the point of incidence 109 of the laser beam 101 on the nozzle unit 102. In particular, as shown in FIG. 8, the movement pattern may be a spiral pattern that causes also the image 802 of the reflected laser light 106 to move along a spiral 801. The movement pattern may also be a zigzag pattern and/or a reciprocal scanning pattern, optionally combined with a spiral pattern. At some point, the image 802 may fully or partially overlap (laterally) with an image 803 of the aperture 102a, when the point of incidence 109 is moved along the movement pattern. In this case, the sensing signal 107 may show the sensing pattern indicative of the laser beam 101 being (partially and/or fully) aligned with the aperture 102a. For instance, the sensing pattern may result from a change of the image 802 of the reflected laser light 106 on the sensing unit 105 from a smaller and/or brighter spot against a dark background—when the focused laser beam 101 is reflected from the nozzle unit surface 102b—to a larger and/or darker spot against the darker background—when the laser beam 101 enters the nozzle aperture 102a and is reflected by e.g. the fluid of the fluid jet. The image 802 may also vanish in case that the laser beam 101 goes through the aperture 102a without being scattered and/or reflected (e.g. without fluid jet).

[0093] The present invention has been described in conjunction with various embodiments as examples as well as implementation forms. However, other variations can be understood and effected by those persons skilled in the art and practicing the claimed invention, from the studies of the drawings, the description and the independent claims. In the claims as well as in the description the word “comprising” does not exclude other elements or steps and the indefinite article “a” or “an” does not exclude a plurality. A single element or other unit may fulfill the functions of several entities or items recited in the claims. The mere fact that certain measures are recited in the mutual different dependent claims does not indicate that a combination of these measures cannot be used in an advantageous implementation.