USING LASERS TO REDUCE REFLECTION OF TRANSPARENT SOLIDS, COATINGS AND DEVICES EMPLOYING TRANSPARENT SOLIDS

Abstract

Method and devices using lasers to reduce reflection of transparent solids in the optical spectrum, coatings and devices employing transparent solids are disclosed. The lasers are used to shape surfaces of the transparent solid materials by raising the temperature of the material to around the melting temperature, and thereby generate desired target nanostructure two-dimensional antireflection flection pattern arrays on the surfaces. The laser fluence value, wavelength, repetition rate, pulse duraction and number of consecutive laser pulses per focus spot are selected, and a desired focus spot distribution on the surface of the transparent solid material is identified. The transparent solid material is relatively translated to generate the desired nanostructure two-dimensional pattern array.

Claims

1-24. (canceled)

25. A method of shaping a surface of a visibly transparent solid material to reduce reflection in the optical spectrum, comprising: providing the visibly transparent solid material on a holder; identifying a desired target nanostructure two-dimensional antireflection pattern array on the surface of the visibly transparent solid material; identifying a desired focus spot distribution on the surface of the visibly transparent solid material identifying melting temperature of the visibly transparent solid material; selecting a laser fluence value in a range of laser fluence values from 1.47 J/cm.sup.2 to 3.8 J/cm.sup.2; selecting a wavelength, a repetition rate, and a pulse duration of a laser pulse from a range of wavelengths, a range of repetition rates from 1 kHz to 1 MHz, and a range of pulse durations, respectively; selecting a number of consecutive laser pulses applied per focus spot on the surface with a pulse separation in time from 1 μs to 1 ms; exposing the surface of the visibly transparent solid material in air to only circularly polarized laser radiation focused on the surface with the selected wavelength, pulse repetition rate pulse duration and number of consecutive laser pulses cooperating to raise the temperature of the visibly transparent solid material to around the melting temperature of the visibly transparent solid material to shape at least a part of the surface and generate at least part of the desired target nanostructure two-dimensional pattern array; and relatively translating the visibly transparent solid material to generate the desired nanostructure two-dimensional pattern array to form a self-assembled pseudo-periodic surface structure that is anti-reflective in all plane directions, wherein the visibly transparent solid material is transparent to visible light.

26. The method according to claim 25, wherein identifying a desired focus spot distribution on the surface of the visibly transparent solid material comprises identifying an overlap by a preselected percentage of neighboring focus spots.

27. The method according to claim 26, wherein the preselected percentage is 89% or lower.

28. The method of shaping according to claim 25, further comprising: scanning and/or rastering the laser beam on a stationary visibly transparent solid material.

29. The method of shaping according claim 25, wherein the visibly transparent solid material comprises at least a glass piece.

30. The method of shaping according to claim 25, wherein shaping the visibly transparent solid material comprises shaping a glass piece on an electronic device, the electronic device including a solar cell (SC), a display, a screen, a light emitting diode (LED) and a sensor.

31. The method of shaping according claim 25, wherein the wavelength is selected from a range of 200 nm to 1100 nm.

32. The method of shaping according claim 25, wherein the pulse duration is selected up to 10 ps.

33. A manufacturing configuration to shape a surface of a visibly transparent solid material to reduce reflection in the optical spectrum, comprising: an irradiation module having a pulsed laser source and an optical system for focusing a laser beam from the pulsed laser source; a holder configured to hold the visibly transparent solid material in air, wherein the visibly transparent solid material is transparent to visible light; a controller enabled for setting a laser fluence value in range of laser fluence values from 1.47 J/cm.sup.2 to 3.8 J/cm.sup.2; said controller further enabled for setting a laser pulse wavelength, a laser pulse repetition rate, and a laser pulse duration from a range of laser pulse wavelengths, repetition rates from 1 kHz to 1 MHz, and durations, respectively; said controller further enabled for setting a number of consecutive laser pulses applied per focus point spot on the surface with a pulse separation in time from 1 μs to 1 ms; said controller utilizing the cooperation of the laser fluence value in the specified range, the laser pulse wavelength, the laser pulse repetition rate in the specified range, the laser pulse duration, and the number of consecutive laser pulses applied per focus point spot on the surface with the pulse separation time in the specified range, and only circularly polarized laser radiation from the pulsed laser source focused on the surface to raise the temperature of the visibly transparent solid material to around the melting temperature to shape at least a part of the surface and to generate a desired nanostructure two-dimensional antireflection pattern array that is a self-assembled pseudo-periodic surface structure that is anti-reflective to the optical spectrum yet also transparent to visible light in all planar directions to said desired nanostructure two-dimensional antireflection pattern array.

34. The manufacturing configuration according to claim 33, wherein the optical system comprises at least a mirror to direct the laser beam from the pulsed laser source to the visibly transparent solid material and at least a lens to focus the laser beam on the transparent solid material.

35. The manufacturing configuration according claim 33, wherein the pulsed laser source is a picosecond or a femtosecond laser source.

36. The manufacturing configuration according to claim 33, wherein the controller comprises a translation module and wherein the translation module is configured to displace the visibly transparent solid material holder while the irradiation module remains stationary.

37. The manufacturing configuration according claim 33, wherein the optical system is configured to displace the laser beam while the visibly transparent solid material holder remains stationary.

38. The manufacturing configuration according to claim 33, wherein the controller comprises a translation module and wherein the translation module is configured to displace the irradiation module while the visibly transparent solid material holder remains stationary.

39. A system for shaping a surface of a visibly transparent solid material to reduce reflection in the optical spectrum of a surface of the visibly transparent solid material, comprising: means for providing the visibly transparent solid material on a holder in air, wherein the visibly transparent solid material is transparent to visible light; means for identifying a desired target nanostructure two-dimensional antireflection pattern array on the surface of the visibly transparent solid material; means for identifying a desired focus spot distribution on the surface of the visibly transparent solid material; means for identifying a melting temperature of the visibly transparent solid material; means for setting a laser fluence value in a range of laser fluence values from 1.47 J/cm.sup.2 to 3.8 J/cm.sup.2; means for setting a wavelength, a repetition rate, and a pulse duration of a laser pulse from a range of wavelengths, repetition rates from 1 kHz to 1 MHz, and pulse durations, respectively; means for setting a number of consecutive laser pulses applied per focus spot on the surface with a pulse separation in time from 1 μs to 1 ms; means for exposing the surface of the transparent solid material in air to exclusively circularly polarized laser radiation focused on the surface with the selected wavelength, pulse repetition rate, pulse duration and number of consecutive laser pulses to raise the temperature of the visibly transparent visibly material to around the melting temperature to shape at least a part of the surface and generate at least part of the desired target nanostructure two-dimensional pattern array; means for relatively translating the visibly transparent solid material to generate the desired nanostructure two-dimensional pattern array that is a self-assembled pseudo-periodic surface structure that is anti-reflective in the optical spectrum in all plane directions.

40. An anti-reflection structure, comprising: a visibly transparent solid material having a shaped surface, wherein the visibly transparent solid material is transparent to visible light, wherein the shape comprises a desired focus spot distribution on the surface and nano-spikes formed in all directions from each focus spot, and wherein the shaped surface is a self-assembled pseudo-periodic surface structure having nano-spikes that reduces reflection in the optical spectrum and is anti-reflective in the optical spectrum in all plane directions.

41. A shaped-surface material, comprising: a visibly transparent solid material having a shaped surface, wherein the shape comprises a desired focus spot distribution on the surface and nano-spikes formed in all directions from each focus spot, and wherein the shaped surface is a self-assembled pseudo-periodic surface structure having nano-spikes.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Non-limiting examples of the present disclosure will be described in the following, with reference to the appended drawings, in which:

[0029] FIG. 1 schematically illustrates an evolution of nano-spike formation after multiple scans, according to an example.

[0030] FIG. 2 is a flow diagram of a method of shaping a surface of a transparent solid material to reduce reflection in the optical spectrum, according to an example

[0031] FIG. 3A schematically illustrates an scan-electron-microscope image on a shaped fused silica surface;

[0032] FIG. 3B schematically illustrates a pixel intensity for a cross-section of the surface of FIG. 3A.

[0033] FIG. 4 schematically illustrates a representation of an area scan with Gaussian shape ultrafast laser pulses where the shaded areas are indicating an overlapping of spots;

[0034] FIG. 5 schematically illustrates an antireflection transparent solid material shaped using a method of shaping, according to an example.

[0035] FIGS. 6A and 6B schematically illustrate transmittance and reflectance spectrum of Flat Fused silica and nanostructured Fused Silica surface.

[0036] FIG. 7 schematically illustrates a manufacturing configuration according to an example.

DETAILED DESCRIPTION OF EXAMPLES

[0037] FIG. 1 schematically illustrates an evolution of nano-spike formation after multiple scans, according to an example. During a first scan A ultrafast laser pulses irradiate a transparent solid. During that first pass the temperature of the solid may rise but may not reach a melting point. So no change of phase of the solid's surface may yet take place and no nanostructures may yet be formed. During a further scan B, the already hot surface may melt when the laser pulses are targeting a particular spot and resolidify as the laser beam moves away from the spot creating a very small surface roughness without any structural formation. Continuing in a next scan C the surface may be irradiated again where the roughness previously formed favours the primary formation of nano-spikes. As the scans continue, the nano-spikes may be gradually formed to their desired shape and size to provide antireflection properties to the surface. The same procedure is followed multiple times until the surface is fully and homogenously structured as shown in scan D.

[0038] FIG. 2 is a flow diagram of a method of shaping a surface of a transparent solid material to reduce reflection in the optical spectrum, according to an example. In block 205, the transparent solid material is provided on a holder.

[0039] In block 210, a desired target nanostructure two-dimensional antireflection pattern array is identified on the surface of the transparent solid material. In block 215, a desired focus spot distribution on the surface of the transparent solid material is identified. In block 220, a melting temperature of the transparent solid material is identified. In block 225 a laser fluence value is selected from a range of laser fluence values. In block 230, a wavelength, a repetition rate and a pulse duration of a laser pulse are selected from a range of wavelengths, repetition rates and pulse durations, respectively. In block 235, a number of consecutive laser pulses applied per focus spot on the laser surface are selected. In block 240, the surface of the transparent solid material is exposed to a focused laser radiation with the selected wavelength, repetition rate, pulse duration and number of consecutive laser pulses to raise the temperature of the transparent material to around the melting temperature to shape at least a part of the surface and generate at least part of the desired target nanostructure two-dimensional pattern array. In block 245, the transparent solid material is relatively translated to generate the desired nanostructure two-dimensional pattern array.

[0040] FIG. 3A schematically illustrates an scan-electron-microscope image on a shaped fused silica surface. In the example of FIG. 3A the surface is the product after irradiation at 1026 nm and 60 kHz repetition rate with linear polarization (the white double-ended arrow indicates the laser beam polarization direction), with fluence Fl=3.4 J/cm.sup.2, number of pulses NP=15 and pulse duration PD=170 fs. This process results to the formation of self-assembly Laser Induced Periodic Surface Structures (LIPSS) as shown in FIG. 3A. FIG. 3B schematically illustrates a pixel intensity along a cross-section of the surface of FIG. 3A.

[0041] The periodicity of those structures is defined as the distance between two or more consecutive structures as shown in FIG. 3B. The formation of LIPSS can be described by the inhomogeneous energy absorption of a rough surface coupled with hydrodynamics accounting for the fluid motion of the molten material during and immediately after irradiation.

[0042] In nature, surface structures with size in the sub-micrometer regime can produce efficient anti-reflection properties in the visible spectrum, due to the gradual spatial increment of the refractive index, while at the same time the material remains transparent. A remarkable example is the anti-reflection of the butterfly's Greta Oto wings, where their surface is decorated with nanopillars at sub-micrometer size.

[0043] The key parameter for the production of anti-reflection nano-structures is the polarization state of the incident beam. By irradiating transparent solids with Gaussian shaped linear polarized ultrafast laser pulses, nano-ripples are formed on the surface, as previously described, where the direction of those structures is perpendicular to the incident electric field direction. Using circular polarization, nano-ripples are formed in all directions along the Gaussian spot which eventually leads to nano-spike formation on the treated surface. Nano-spike structures are pseudo-periodic and randomly distributed along the surface. The advantage of pseudo-periodic structures is that they present anti-reflection properties in all plane directions unlike nano-ripples which tend to exhibit anti-reflection properties when the plane of incident is perpendicular to the direction of nano-ripple orientation.

[0044] The size and the periodicity of nano-spikes can be controlled by the laser parameters. The fluence and the number of pulses have a small influence however, the size and periodicity of nano-spikes are strongly dependent on the wavelength of the incident beam. The size and periodicity of nano-spikes can eventually determine the spectral range that the structured surface will exhibit antireflective behavior. Thus, depending on the application this technique shows high versatility as the antireflective spectral range can be properly tuned.

[0045] For the production of nano-spikes on a large surface area the transparent solid is placed, fixed and leveled on a motorized x-y-z stage in order to scan the sample in lines. Alternatively a Galvo system can be used instead of a motorized stages for faster processing time. The incident beam is focused on the surface, the fluence is set near to the ablation threshold of the material and the surfaces is irradiated in lines. In the case where the focus point is below or above the surface then self-focusing condition from surface impurities may significantly damage the surface. By the term damaged surface, we refer to the case where pieces of material are detached from the surface, which leads to crater formations. Those craters increase local absorption and light scattering which eventually leads to the increment of the surface roughness and reduction of transmittance.

[0046] Processing large surface areas introduce parameters which are important for the production of a smooth and clean nanostructured surfaces. FIG. 4 schematically illustrates a representation of an area scan with Gaussian shape ultrafast laser pulses where the shaded areas are indicating an overlapping of sports. Scanning speed is the speed where the stage move along an axis. Depending on the scanning speed, the distance d between the centers of two pulses is variable and defined as:

[00001]$\begin{array}{cc}d=2.Math.\frac{v}{\mathrm{RR}}& \mathrm{Eq}.1\end{array}$

[0047] where v is scanning speed and RR the laser repetition rate. So the distance is proportionate to the scanning speed which leads to different overlapping as shown in FIG. 4. Another parameter is the step describing the distance between the irradiated lines as shown in FIG. 4. The step can be less than the spot diameter.

[0048] For three or higher number of pulses per spot area, nano-spikes are formed. Although due to the high overlap (between consecutive laser pulses) and therefore temperature is rising above the melting point on the surface, damage is likely to occur on small regions. Less than three number of pulses can be employed to minimize the damage areas. But for less than three pulses no structures are formed due to the lower pulse overlapping. Small number of pulses combined with multiple scans is the solution for this problem where the step is set near to spot diameter.

[0049] Anti-reflection surfaces in the visible spectrum can be produced using this technique as shown in FIG. 5 and FIG. 6A-6B. FIG. 5 schematically illustrates an antireflection transparent solid material shaped using a method of shaping, according to an example. FIG. 6A and FIG. 6B schematically illustrate transmittance and reflectance spectrum, respectively, of Flat Fused silica and nanostructured Fused Silica surface. The reflective untreated flat frame of the transparent solid is demonstrated in FIG. 5 (A) while (B) shows the anti-reflective laser processed area where the material is placed under a white light source. FIG. 5 (C)-(E) are SEM images of an example fused silica surface with nanostructures (nano-spikes). The characteristics of nano-spikes formed on the surfaces are 200-400 nm periodicity, 60-100 nm radius and 200-300 nm height for three scan. In the first scan the height of the nano-spikes formed were 32±5% compared to the third scan and for the second scan their height was 85±10% compared to the third scan. Furthermore optical analysis shows that the material presents anti-reflection properties in the visible and near IR spectrum as shown in FIG. 6. Indeed, as shown in FIG. 6B, the anti-reflections properties are improved compared to the properties of the untreated surface as shown in FIG. 6A and this is accomplished by reducing the material reflectance in the spectral range from 250-1200 nm. At the same time the transmittance increases by 2-3% in the spectral range of 500-1200 nm, while in the UV region the transmittance decreases.

[0050] s FIG. 7 schematically illustrates a manufacturing configuration to shape a surface of a transparent solid material to reduce reflection in the optical spectrum according to an example. Manufacturing configuration 700 may comprise an irradiation module 705. The irradiation module 705 may include a pulsed laser source 710 to generate a laser beam and an optical system 715 for focusing a laser beam or pulse 712 from the pulsed laser source 710. The manufacturing configuration 700 may further comprise a holder 720 configured to hold the transparent solid material 725. A controller 730 may be coupled to the irradiation module 705 and to the holder 720. The controller 730 may comprise a memory 735 and a processor 740. The controller 730 may set a laser fluence value of the irradiation module 705 from a range of laser fluence values stored in the memory 735 and associated with the transparent solid material 725. Furthermore, the controller may set a laser pulse wavelength, a laser pulse repetition rate and a laser pulse duration from a range of laser pulse wavelengths, repetition rates and durations, respectively, similarly stored in the memory 735 and associated with the transparent solid material 725 as well as set a number of consecutive laser pulses applied per focus point spot on the laser surface based on the nanostructure pattern to be formed on the transparent solid material 725. Finally, the controller 730 may set a relative translation sequence of the transparent solid material, by e.g. controlling movement of the holder 720, during a laser exposure with a laser beam from the pulsed laser source 710 to generate a desired nanostructure two-dimensional antireflection pattern array on the surface of the transparent solid material 725.

[0051] Although only a number of examples have been disclosed herein, other alternatives, modifications, uses and/or equivalents thereof are possible. Furthermore, all possible combinations of the described examples are also covered. Thus, the scope of the present disclosure should not be limited by particular examples, but should be determined only by a fair reading of the claims that follow. If reference signs related to drawings are placed in parentheses in a claim, they are solely for attempting to increase the intelligibility of the claim, and shall not be construed as limiting the scope of the claim.

[0052] Further, although the examples described with reference to the drawings comprise computing apparatus/systems and processes performed in computing apparatus/systems, the invention also extends to computer programs, particularly computer programs on or in a carrier, adapted for putting the system into practice.