Mass spectrometer
10985004 · 2021-04-20
Assignee
Inventors
Cpc classification
H01J49/04
ELECTRICITY
International classification
Abstract
A mass spectrometer (10) includes a housing (19) that houses a plurality of devices including a mass analyzer (110) including an ionization unit, a mass separation unit, and an ion detection unit, a first heat generation device (11), and a second heat generation device (12) which has an allowable maximum temperature lower than that of the first heat generation device (11) or an allowable temperature variation amount smaller than that of the first heat generation device (11), an intake port (14) of the housing (19) which is provided at a position closer to the second heat generation device (12) with respect to the first heat generation device (11), and an exhaust fan (15) of the housing (19) which is provided at a position farther from the second heat generation device (12) with respect to the first heat generation device (11).
Claims
1. A mass spectrometer comprising: a housing configured to house a plurality of devices including a mass analyzer including an ionization unit, a mass separation unit, and an ion detection unit; a first heat generation device which is one of the devices; a second heat generation device which is one of the devices, the second heat generation device having an allowable maximum temperature lower than an allowable maximum temperature of the first heat generation device or an allowable temperature variation amount smaller than an allowable temperature variation amount of the first heat generation device and being disposed at a position higher than a position of the first heat generation device; an intake port, of the housing provided at a position closer to the second heat generation device with respect to the first heat generation device and disposed at a position lower than a position of the second heat generation device; and an exhaust fan, of the housing provided at a position farther from the second heat generation device with respect to the first heat generation device and disposed at a position higher than the position of the second heat generation device.
2. The mass spectrometer according to claim 1, wherein the second heat generation device does not include a fan for local cooling.
3. The mass spectrometer according to claim 1, wherein an opening area of the intake port is 0.3 to 7 times an opening area of the exhaust fan.
4. The mass spectrometer according to claim 1, wherein the mass spectrometer includes a plurality of the intake ports, and a second heat generation device is disposed, for each of the plurality of the intake ports, at a position, in the housing, closer to the intake port with respect to the first heat generation device.
5. The mass spectrometer according to claim 4, wherein a sum of opening areas of the plurality of intake ports is 0.3 to 7 times an opening area of the exhaust fan.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
DESCRIPTION OF EMBODIMENTS
(6) Embodiments of a mass spectrometer according to the present invention will be described with reference to
(7) As shown in
(8) As shown in
(9) As shown in
(10) Usually, a commercially available turbo molecular pump is provided with a fan for cooling itself. However, the turbo molecular pump 121 used in the mass spectrometer 10 of the first embodiment is not provided with a fan, and it is cooled only by the cooling mechanism that combines the intake port 14 and the exhaust fans 15 provided in the housing 19.
(11) The exhaust fans 15, the power supply 122, the turbo molecular pump 121, a device other than the turbo molecular pump 121 and the power supply 122 (a first heat generation device 11 described later), the intake port 14 are arranged from top to bottom with respect to the height direction.
(12) The mass spectrometer 10 of the first embodiment operates the exhaust fans 15 to have a negative pressure inside of the housing 19, whereby external air is introduced into the housing 19 from the intake port 14. The cooling mechanism that combines the intake port 14 and the exhaust fans 15 generates air flow in the housing 19 more easily than the cooling mechanism that combines the intake fan and the exhaust port, and cools the interior of the housing 19 evenly.
(13) The turbo molecular pump 121 and the power supply 122 correspond to a heat generation device whose allowable maximum temperature is lower than that of another device (the first heat generation device 11) in the mass spectrometer 10 of the first embodiment or that is sensitive to ambient temperature variations, that is, the above second heat generation device. Hereinafter, the turbo molecular pump 121 and the power supply 122 are collectively referred to as a “second heat generation device 12”. The intake port 14 is provided at a position closer to the second heat generation device 12 with respect to the first heat generation device 11, and the exhaust fans 15 is provided at a position farther from the second heat generation device 12 with respect to the first heat generation device 11. Therefore, the air introduced into the housing 19 from the intake port 14 passes through the second heat generation device 12 at a wind speed faster than that at the position of the first heat generation device 11, so that the second heat generation device 12 can be efficiently cooled.
(14) In the mass spectrometer 10 of the first embodiment, the second heat generation device 12 is disposed at a position higher than positions of the intake port 14 and the first heat generation device 11, and further, the exhaust fans 15 is disposed at a position higher than positions of the first heat generation device 11 and the second heat generation device 12, so that air that has been warmed and lightened by cooling the second heat generation device 12 passes above the first heat generation device 11 and is discharged from the exhaust fans 15 to the outside of the housing 19. Therefore, the first heat generation device 11 is not exposed to the air warmed by the second heat generation device 12, and the temperature rise of the first heat generation device 11 can be more effectively prevented. The first heat generation device 11 is cooled by the passage of air that has been introduced from the intake port 14 and has passed below the second heat generation device 12.
(15) For the mass spectrometer 10 of the first embodiment, the temperature distribution and the air flow velocity distribution in the housing 19 were calculated. For the results,
(16) A second embodiment of the mass spectrometer according to the present invention will be described with reference to
(17) The area of the first intake port 141 is larger than the area of the second intake port 142. The sum of the areas of the first intake port 141 and the second intake port 142 is preferably 0.3 to 7 times the opening area of the exhaust fans 15, and is the same as the opening area of the exhaust fans 15 in this embodiment.
(18) In the mass spectrometer 10A of the second embodiment, the first intake port 141 is provided at a position closer to the turbo molecular pump 121 with respect to the first heat generation device 11, and the second intake port 142 is provided at a position closer to the power supply 122 with respect to the first heat generation device 11. For this reason, the air introduced into the housing 19 from the first intake port 141 passes through the turbo molecular pump 121 at a wind speed faster than that at the position of the first heat generation device 11, and the air introduced into the housing 19 from the second intake port 142 passes through the power supply 122 at a wind speed faster than that at the position of the first heat generation device 11, so that the turbo molecular pump 121 and the power supply 122 that are the second heat generation device 12 can be efficiently cooled. In addition, since the first intake port 141 has a larger area than the second intake port 142, the turbo molecular pump 121 having a larger heat value than the power supply 122 is supplied with a larger amount of air, thereby being more efficiently cooled.
(19) Needless to say, the present invention is not limited to the above-described embodiments, and various modifications are possible.
REFERENCE SIGNS LIST
(20) 10, 10A . . . Mass Spectrometer 11 . . . First Heat Generation Device 110 . . . Mass Analyzer 111 . . . Ion Source 112 . . . Quadrupole Mass Filter 113 . . . Collision Cell 1131 . . . Ion Guide 114 . . . Ion Trap 1141 . . . Ring Electrode 1142 . . . End Cap Electrode 115 . . . Time-Of-Flight Mass Separator 1151 . . . Expulsion Electrode 1152 . . . Grid Electrode 116 . . . Ion Detector 117 . . . Vacuum Chamber 12 . . . Second Heat Generation Device 121 . . . Turbo Molecular Pump 122 . . . Power Supply 14 . . . Intake Port 141 . . . First Intake Port 142 . . . Second Intake Port 15 . . . Exhaust Fan 19, 19A . . . Housing 191, 191A . . . Intake Port Installation Face 192, 192A . . . Exhaust Fan Installation Face 192A . . . Exhaust Fan Installation Face