Magnetoresistive element and magnetic memory

Abstract

A magnetoresistance effect element is provided, which can, even in a region where the element size of the magnetoresistance effect element is small, implement stable record holding at higher temperatures, and moreover which has higher thermal stability. The magnetoresistance effect element has a configuration including reference layer (B1)/first non-magnetic layer (1)/first magnetic layer (21)/first non-magnetic insertion layer (31)/second magnetic layer (22). A magnetostatic coupling is established between the first magnetic layer (21) and the second magnetic layer (22) due to magnetostatic interaction becoming dominant.

Claims

1. A magnetoresistance effect element, comprising: a reference layer; a first non-magnetic layer disposed adjacent to the reference layer; a first magnetic layer disposed adjacent to the first non-magnetic layer on an opposite side thereof to the reference layer; a first non-magnetic insertion layer disposed adjacent to the first magnetic layer on an opposite side thereof to the first non-magnetic layer; and a second magnetic layer disposed adjacent to the first non-magnetic insertion layer on an opposite side thereof to the first magnetic layer, wherein the first magnetic layer, the first non-magnetic insertion layer, and the second magnetic layer configure a recording layer, the magnetoresistance effect element further comprising a second nonmagnetic layer adjacent to the recording layer on an opposite side thereof to the first non-magnetic layer, and wherein the first non-magnetic layer and the second non-magnetic layer include oxygen, the first non-magnetic insertion layer is configured of a material including oxygen, and has a film thickness of 0.7 nm or more and 1.1 nm or less, the recording layer has an element size of 50 nm or less, and a magnetostatic coupling is established between the first magnetic layer and the second magnetic layer due to a magnetostatic interaction becoming dominant.

2. The magnetoresistance effect element according to claim 1, wherein the recording layer has a structure in which n (n≥3) magnetic layers and n−1 non-magnetic insertion layers are laminated alternately to be adjacent to one another, and a first magnetic layer is disposed adjacent to the first non-magnetic layer, and a magnetostatic coupling is established between an m-th (1≤m≤n−1) magnetic layer and an m+1-th magnetic layer each adjacent to the m-th non-magnetic insertion layer due to a magnetostatic interaction becoming dominant.

3. The magnetoresistance effect element according to claim 1, wherein a material of the non-magnetic insertion layer is selected from MgO, Al—O, Ta—O, W—O, or Hf—O.

4. The magnetoresistance effect element according to claim 1, wherein a film thickness of each of the magnetic layers is 0.3 nm or more and 2.3 nm or less.

5. The magnetoresistance effect element according to claim 1, wherein the material of the magnetic layer includes at least Fe or Co.

6. The magnetoresistance effect element according to claim 1, wherein each of the magnetic layers includes a non-magnetic sub-insertion layer in the magnetic layer.

7. A magnetoresistance effect element, comprising: a reference layer; a first non-magnetic layer disposed adjacent to the reference layer; a recording layer disposed adjacent to the first non-magnetic layer on an opposite side thereof to the reference layer; and a second non-magnetic layer disposed adjacent to the recording layer on an opposite side thereof to the first non-magnetic layer, wherein the first non-magnetic layer and the second non-magnetic layer include oxygen, the recording layer has an element size of 50 nm or less, and has a structure in which n (n≥2) magnetic layers and n−1 non-magnetic insertion layers are laminated alternately to be adjacent to one another, and a first magnetic layer is disposed adjacent to the first non-magnetic layer, and the non-magnetic insertion layer is configured of a material including oxygen, and has a film thickness of 0.7 nm or more and 1.1 nm or less.

8. A magnetic memory comprising the magnetoresistance effect element according to claim 1.

9. The magnetoresistance effect element according to claim 2, wherein a material of the non-magnetic insertion layer is selected from MgO, Al—O, Ta—O, W—O, or Hf—O.

10. The magnetoresistance effect element according to claim 2, wherein a film thickness of each of the magnetic layers is 0.5 nm or more and 2.5 nm or less.

11. The magnetoresistance effect element according to claim 3, wherein a film thickness of each of the magnetic layers is 0.5 nm or more and 2.5 nm or less.

12. The magnetoresistance effect element according to claim 2, wherein the material of the magnetic layer includes at least Fe or Co.

13. The magnetoresistance effect element according to claim 3, wherein the material of the magnetic layer includes at least Fe or Co.

14. The magnetoresistance effect element according to claim 4, wherein the material of the magnetic layer includes at least Fe or Co.

15. The magnetoresistance effect element according to claim 2, wherein each of the magnetic layers includes a non-magnetic sub-insertion layer in the magnetic layer.

16. The magnetoresistance effect element according to claim 3, wherein each of the magnetic layers includes a non-magnetic sub-insertion layer in the magnetic layer.

17. The magnetoresistance effect element according to claim 4, wherein each of the magnetic layers includes a non-magnetic sub-insertion layer in the magnetic layer.

18. The magnetoresistance effect element according to claim 5, wherein each of the magnetic layers includes a non-magnetic sub-insertion layer in the magnetic layer.

19. A magnetic memory comprising the magnetoresistance effect element according to claim 7.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1(a) and FIG. 1(b) show a longitudinal section view of one example of a configuration of a magnetoresistance effect element of the present invention.

(2) FIG. 2(a) and FIG. 2(b) show a longitudinal sect ion view of another example of a configuration of the magnetoresistance effect element of the present invention.

(3) FIG. 3(a) and FIG. 3(b) show a longitudinal section view of a still other example of a configuration of the magnetoresistance effect element of the present invention.

(4) FIG. 4 shows a longitudinal section view of a still farther example of a configuration of the magnetoresistance effect element of the present invention.

(5) FIG. 5 shows a longitudinal section view of a furthermore example of a configuration of the magnetoresistance effect element of the present invention.

(6) FIG. 6 shows a longitudinal section view of a still other example of a configuration of the magnetoresistance effect element of the present invention.

(7) FIG. 7 shows a longitudinal section view of a still further example of a configuration of the magnetoresistance effect element of the present invention.

(8) FIG. 8 shows a longitudinal section view of a further example of a configuration of the magnetoresistance effect element of the present invention.

(9) FIG. 9 is one example of a block view of a magnetic memory including a plurality of magnetoresistance effect elements of the present invention arranged therein.

(10) FIG. 10 shows a longitudinal section view of a configuration of a conventional magnetoresistance effect element.

(11) FIG. 11(a) is a view for illustrating the exchange coupling action (exchange coupling) between the magnetic layers, and FIG. 11 (b) is a view for illustrating the magnetostatic interaction (magnetostatic coupling) between the magnetic layers.

(12) FIG. 12 is a view for illustrating the magnetic field around a nanomagnet. FIG. 12(a) shows the case where the diameter is 10 nm, FIG. 12(b) shows the case where the diameter is 20 run, and FIG. 12(c) shows the case where the diameter is 50 nm.

(13) FIG. 13 is a graph showing the element size dependency of the magnetostatic field.

(14) FIG. 14 is a graph showing the relationship between the element size and the laminated layer count, and the thermal stability index.

(15) FIG. 15 is a graph showing the relationship between the element size and the coercivity.

DESCRIPTION OF EMBODIMENTS

(16) Below, referring to the accompanying drawings, a magnetoresistance effect element and a magnetic memory of the present invention will be described in detail.

(17) Incidentally, each drawing is merely an example, and is given a reference numeral and sign, but does not restrict the present invention at all.

Embodiment 1

(18) FIG. 1(a) shows a basic configuration of Embodiment 1 of the present invention. The basic configuration of the magnetoresistance effect element includes reference layer (B1)/first non-magnetic layer (1)/first magnetic layer (21)/first non-magnetic insertion layer (31)/second magnetic layer (22) arranged sequentially and adjacent to one another. The first magnetic layer (21)/first non-magnetic insertion layer (31)/second magnetic layer (22) configure a recording layer (A1).

(19) At least the interface of the first non-magnetic layer (1)/first magnetic layer (21) has interfacial magnetic anisotropy in a perpendicular direction. Further, between the first magnetic layer (21) and the second magnetic layer (22), a magnetostatic interaction described later becomes dominant, resulting in a ferromagnetic coupling therebetween via magnetostatic coupling.

(20) FIG. 1(b) shows a configuration example in which a second non-magnetic layer (4) is further provided adjacent to the second magnetic layer (22) of Embodiment 1. The materials and the film thickness are desirably adjusted so that the interface of the second magnetic layer (22)/second non-magnetic layer (4) also has perpendicular magnetic anisotropy.

(21) In FIG. 1(b), the reference layer (B1) is adjacent to the first non-magnetic layer (1) side, and hence the first non-magnetic layer (1) serves as a barrier layer (tunnel junction layer including an insulating layer). Although not shown, when a reference layer is further adjacent to the second non-magnetic layer (4) side, the second non-magnetic layer (4) also serves as a barrier layer.

(22) The reference layer (B1) is a magnetic layer with the magnetization direction fixed. Examples thereof may include [Co/Pt]/Ru/[Co/Pt]/Ta/CoFeB. [Co/Pt] denotes an alternate laminated layer of Co/Pt. [Co/Pd], [Co/Ni], or the like can also be used. In place of Ru, Ir or the like is also acceptable, and Ta may be W, Mo, Hf, or the like. Further, CoFeB may be FeB, or the like.

(23) For the first non-magnetic layer (1) and the second non-magnetic layer (4), a material including O (oxygen) is used. When the first non-magnetic layer (1), and the second non-magnetic layer (4) each become a barrier layer (tunnel junction layer including an insulating layer) of the magnetoresistance effect element, an insulator including oxygen such as MgO, Al.sub.2O.sub.3, SiO.sub.3, TiO, or Hf.sub.2O is used so that the magnetic resistance change rate is largely expressed according to the combination of the materials of the two end faces to be joined. MgO is preferably used.

(24) When the first non-magnetic layer (1) and the second non-magnetic layer (4) each serve as a barrier layer of the magnetoresistance effect element, the film thickness thereof is preferably 0.5 ran or more, and more preferably 0.8 nm or more in order to increase the TMR ratio. Further, the film thickness is preferably 2.0 nm or less, and more preferably 1.5 nm or less in order to cause magnetization reversal with a small writing current I.sub.C. Accordingly, the film thickness is adjusted within the range of 0.5 to 2.0 nm, and more preferably within the range of 0.8 to 1.5 nm.

(25) On the other hand, when the second non-magnetic layer (4) does not become a barrier layer of the magnetoresistance effect element, and when provided as a cap layer, an insulator including oxygen such as MgO, Al.sub.2O.sub.3, SiO.sub.2, TiO, Hf.sub.2O, Ta—O, or W—O is used. Preferably, MgO is used.

(26) The first magnetic layer (21) and the second magnetic layer (22) include at least any of Co or Fe, and may further include a 3d ferromagnetic transition metal such as Ni.

(27) Further, the first magnetic layer (21) and the second magnetic layer (22) may further include a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these, B or V is also preferable because of the ease of handling. The non-magnetic elements can reduce the saturation magnetization (M.sub.s) of the magnetic layer.

(28) Specific examples thereof may include but are not limited to Co, CoFe, CoB, Fe, FeB, and CoFeB. Any material is acceptable so long as it makes a magnetostatic interaction described later dominant, and establishes a ferromagnetic coupling between the first magnetic layer (21) and the second magnetic layer (22), and has interfacial magnetic anisotropy in a direction perpendicular to a film surface.

(29) Each film thickness of the first magnetic layer (21) and the second magnetic layer (22) preferably (hits within the range of 0.3 nm to 3.0 nm, and more preferably falls within the range of 0.5 nm to 2.5 nm. This is due to the following. When the film thickness becomes smaller, stable ferromagnetism cannot be obtained. On the other hand, when the film thickness becomes larger, and when MgO or the like is used for the first magnetic layer (1) and the second non magnetic layer (4), easily-magnetized axis in an in-plane direction is caused.

(30) The first non-magnetic insertion layer (31) is configured of a material including at least oxygen, and includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these, for the first non-magnetic insertion layer (31), a material causes larger interfacial magnetic anisotropy at both the interfaces with the adjacent first magnetic layer (21) and second magnetic layer (22) is preferable. MgO, Al—O, Ta—O, W—O, Hf—O, or the like is more preferable.

(31) The film thickness of the first non-magnetic insertion layer (31) is adjusted to the thickness causing interfacial magnetic anisotropy in a direction perpendicular to a film surface at the interface with the adjacent magnetic layer, and to such a thinness as to be capable of providing a sufficient TMR ratio. The former requirement determines the lower limit, and the film thickness is about 0.5 nm. Further, with a film thickness equal to or larger than this film thickness, the adjacent ferromagnetic layers are ferromagnetically coupled with each other by a magnetostatic interaction. Whereas, the latter requirement determines the upper limit, and the film thickness is about 2.0 nm. Namely, the film thickness of the first non-magnetic insertion layer (31) is preferably within the range of 0.5 nm to 2.0 nm, and more preferably within the range of 0.6 nm to 1.5 nm. The film thickness is further preferably 0.7 nm to 1.1 nm.

(32) The element size of the recording layer (A1) is 50 nm or less in terms of the minor axis. As described above, the element size of the magnetoresistance effect element in the present application is the short side or the minor axis of the element shape. The element size denotes a diameter when the element shape is a circle; a minor axis for an ellipse; and the short side for a rectangle.

(33) For the magnetic layers configuring the recording layer (A1), when the magnetization direction is reversed as a magnetoresistance effect element, a magnetostatic interaction becomes dominant, thereby causing magnetostatic coupling therebetween. For this reason, the magnetic layers are substantially integrated to undergo magnetization reversal.

(34) Respective layers are desirably laminated by sputtering. Each film thickness is adjusted by the sputtering conditions such as the sputtering time.

(35) Below, the evaluation and study supporting the configuration of Embodiment 1 will be described.

(36) <Comparison Between Conventional Double Interfacial MTJ and Magnetostatic Coupling MTJ of Present Invention>

(37) FIG. 10 shows a configuration of a conventional double interfacial MTJ (magnetic tunnel junction). Reference layer (B1)/first non-magnetic layer (1)/first magnetic layer (2a)/non-magnetic sub-insertion layer (6)/second magnetic layer (2b)/second non-magnetic layer (4) are sequentially arranged adjacent to one another. The first magnetic layer (2a)/non-magnetic insertion layer (6)/second magnetic layer (2b) configure the recording layer (A1).

(38) The first non-magnetic layer (1) and the second non-magnetic layer (4) include a non-magnetic element including oxygen. MgO or the like is preferably used.

(39) The first magnetic layer (2a) and the second magnetic layer (2b) each include at least any of Co or Fe. Specific examples thereof may include Co, CoFe, CoB, Fe, FeB, and CoFeB.

(40) The non-magnetic sub-insertion layer (6) includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. As more preferable elements, W, Ta, and the like are exemplified. The non-magnetic sub-insertion layer (6) has a role of promoting absorption and crystallization of B when B is present in the adjacent magnetic layer, and is required to ferromagnetically couple the adjacent first magnetic layer (2a) and second magnetic layer (2b) via exchange coupling described later. For this reason, the film thickness of the non-magnetic sub-insertion layer (6) is adjusted to a sufficiently small thickness, for example, about 0.2 nm to 0.7 nm.

(41) With the layer configuration described up to this point, perpendicular magnetic anisotropy is possessed at the two interfaces (double interfaces) of the interface between the first non-magnetic layer (1) and the first magnetic layer (2a), and the interface between the second magnetic layer (2b) and the second non magnetic layer (4). As a result, the area S of the interface of the recording layer is doubled to enhance the contribution of the first term in the equation of Math. 1, thereby improving the thermal stability index Δ.

(42) On the other hand, the example of the magnetostatic coupling MTJ of the present invention is shown in FIG. 1(a) or FIG. 1(b). As described previously, other than at the interface of first non magnetic layer (1)/first magnetic layer (21), at the interface of first magnetic layer (21)/first non-magnetic insertion layer (31), the interface of first non-magnetic insertion layer (31)/second magnetic layer (22), and the interface of second magnetic layer (22)/second non-magnetic layer (4) when the second non-magnetic layer (4) is included, interfacial magnetic anisotropy in a direction perpendicular to the film surface is possessed.

(43) Further, when the element size of the recording layer (A1) is 50 nm or less, a ferromagnetic coupling is established between the first magnetic layer (21) and the second magnetic layer (22) via magnetostatic coupling.

(44) From the layer configuration described up to this point, at three or four interfaces, interfacial magnetic anisotropy in a direction perpendicular to a film surface is possessed. As a result, the area S of the interface of the recording layer is trebled or quadrupled, thereby to enhance the contribution of the first term in the equation of Math. 1, which can improve the thermal stability index Δ.

(45) Herein, exchange coupling will be described.

(46) As shown in an image in FIG. 11(a), an exchange coupling is based on the quantum-mechanical interaction acting when two atoms approach each other to the extent that the electron orbits of the two atoms overlap. The exchange coupling is caused such that when two atoms approach each other, an energy difference is caused between the case where the spins of two electrons are in parallel with each other and the case where the spins are in antiparallel with each other. For this reason, the electrons on one atom also come and go to the electron orbit of the other atom so as to become stable in terms of energy. Further, the electron spin coupling caused via free electrons or the like is also a kind of exchange coupling. In other words, the exchange coupling based on the exchange interaction is caused only at a short range to the extent that the orbits overlap each other.

(47) Then, a magnetostatic coupling will be described.

(48) As shown in an image in FIG. 11(b), a magnetostatic coupling is based on the classical electromagnetic interaction acting by the line of magnetic force discharged from each magnet on two magnets placed closed to each other. The two magnets are coupled ferromagnetically or antiferromagnetically according to the mutual locations. Accordingly, the magnetostatic coupling based on the magnetostatic interaction acts even at a relatively long range.

(49) Further, the interval distribution of the magnetostatic energy is determined by the shape and the size of the magnetic substance.

(50) FIG. 12 shows the results of the study on the magnetic held (magnetostatic field) formed in the periphery when the element size (diameter of the circle) is (a) 10 nm, (b) 20 nm, and (c) 50 nm for a nanomagnet with a film thickness of 2 nm, and magnetized in a direction perpendicular to a film surface with a saturation magnetization of 1.5 T. The X axis indicates the diameter direction of the element, and the Z axis indicates the film thickness direction of the element, and the numerical value inside the drawing is the value of the magnetic field (mT). A positive value of the magnetic field indicates that the magnetic field points upward, and a negative value indicates that the magnetic field points downward. Further, the region with a magnetic field of 200 mT or more or −200 mT or less is surrounded by a mesh, and the region with a magnetic field of 100 mT or more or −100 mT or less is surrounded by a solid line for expression.

(51) The magnetic field distribution of each X-Z cross section of FIG. 12(a), FIG. (b), and FIG. (c) indicates as follows: an upward magnetic field spreads in an arc from the region from the X axis end to the −X axis end of the X-Y plane of the nanomagnet (i.e., the inside of the plane of the nanomagnet) in the Z axial direction and the −Z axial direction; and in other spaces, a downward magnetic field spreads.

(52) It is indicated as follows. As in FIG. 12(a), when the diameter is small, a large magnetic field is generated over a relatively wide region in the periphery of the nanomagnet. It can be said that the large magnetic, field causes a large magnetostatic coupling to act on the overlying and underlying magnetic layers.

(53) On the other hand, as in FIG. 12(b) and FIG. 12(c), an increase in diameter results in a relative decrease in the region where a large magnetic field is generated at the center of the nanomagnet. For this reason, it can be said that the magnetostatic coupling acting on the overlying and underlying magnetic layers is weakened as compared with the case of FIG. 12(a).

(54) FIG. 13 shows the results of the study on the relationship between the magnetostatic field and the element size. For comparison, the effective magnetic field derived from the exchange coupling is also shown together.

(55) As also studied in FIG. 12, a decrease in element size results in an increase in magnetostatic field, and an increase in element size results in a decrease in magnetostatic field. On the other hand, although the effective magnetic field derived from the exchange coupling strongly depends upon the material and the film thickness, the effective magnetic field is generated by the atomic level approach as shown in FIG. 11(a), and does not depend upon the element size.

(56) From the characteristics of the magnetostatic field and the effective magnetic field derived from the exchange coupling described up to this point, it is indicated that with an element size of the magnetoresistance effect element of roughly 50 nm or less, a magnetostatic coupling becomes dominant.

Embodiment 2

(57) FIG. 2(a) shows a configuration of Embodiment 2 of the present invention. The configuration of the magnetoresistance effect element includes reference layer (B1)/first non-magnetic layer (1)/first magnetic layer (21)/first non-magnetic insertion layer (31)/second magnetic layer (22)/second non magnetic insertion layer (32)/third magnetic layer (23) sequentially arranged adjacent to one another. The first magnetic layer (21)/first non-magnetic insertion layer (31)/second magnetic layer (22)/second non-magnetic insertion layer (32)/third magnetic layer (23) configure the recording layer (A1).

(58) At least, the interface of the first non-magnetic layer (1)/first magnetic layer (21) has interfacial magnetic anisotropy in a perpendicular direction. Further, a magnetostatic interaction becomes dominant between the first magnetic layer (21) and the second magnetic layer (22), and between the second magnetic layer (22) and the third magnetic layer (23), and a ferromagnetic coupling is established via magnetostatic coupling therebetween.

(59) FIG. 2(b) show's a configuration example in which a second non-magnetic layer (4) is further provided adjacent, to the third magnetic layer (23) of the Embodiment 2. The material and the film thickness are desirably adjusted so that the interlace of the third magnetic layer (23)/second non-magnetic layer (4) also has perpendicular magnetic anisotropy.

(60) The details of Embodiment 2 are the same as those of Embodiment 1 except for the following description.

(61) The third magnetic layer (23) includes, at least any of Co or Fe, and may further include a 3d ferromagnetic transition metal such as Ni.

(62) Further, the third magnetic layer (23) may further include a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Fd, or Pt. Out of these, B or V is preferable from the viewpoint of ease of handling. The non-magnetic elements can reduce the saturation magnetization (M.sub.s) of the magnetic layer.

(63) Specific examples thereof may include but are not limited to Co, CoFe, CoB, Fe, FeB, and CoFeB. Any material is acceptable so long as it causes the magnetostatic interaction to become dominant, and establishes a ferromagnetic coupling between the second magnetic layer (22) and the third magnetic layer (23) via magnetostatic coupling, and has interfacial magnetic anisotropy in u direction perpendicular to a film surface.

(64) The film thickness of the third magnetic layer (23) preferably falls within the range of 0.3 nm to 3.0 nm, and more preferably falls within the range of 0.5 nm to 2.5 nm. This is due to the following. When the film thickness becomes smaller, stable ferromagnetism cannot be obtained. On the other hand, when the film thickness becomes larger, easily-magnetized axis in an in-plane direction is caused when MgO or the like is used for the first nonmagnetic layer (1) and the second non-magnetic layer (4).

(65) The second non-magnetic insertion layer (32) is configured of a material including at least oxygen, and includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these, for the second non-magnetic insertion layer (32), a material causing larger interfacial magnetic anisotropy at both the interlaces with the adjacent second magnetic layer (22) and third magnetic layer (23) is preferable. MgO, Al—O, Ta—O, W—O, Hf—O. or the like is more preferable.

(66) The film thickness of the second non-magnetic insertion layer (32) is adjusted to the thickness causing interfacial magnetic anisotropy in a direction perpendicular to a film surface at the interface with the adjacent magnetic layer, and to such a thinness as to be capable of providing a sufficient TMR ratio. The former requirement determines the lower limit, and the film thickness is about 0.5 nm. Further, with a film thickness equal to or larger than this film thickness, the adjacent ferromagnetic layers are ferromagnetically coupled with each other by a magnetostatic interaction. Whereas, the latter requirement determines the upper limit, and the film thickness is about 2.0 nm. Namely, the film thickness of the second non-magnetic insertion layer (32) is preferably within the range of 0.5 nm to 2.0 nm, and more preferably within the range of 0.6 nm to 1.5 nm. The film thickness is further preferably 0.7 nm to 1.1 nm.

(67) Specific examples of the laminated layer structure of the recording layer in Embodiment 2 may include FeB (2.0 nm)/MgO (0.9 nm)/FeB (2.0 nm)/MgO (0.9 nm)/FeB (2.0 nm).

Embodiment 3

(68) FIG. 3(a) shows a configuration of Embodiment 3 of the present invention, in the recording layer in Embodiment 1, the magnetoresistance effect element includes magnetic layers and non magnetic insertion layers laminated alternately and adjacent to each other n times and (n−1) times, respectively (n≥2). Namely, the reference layer (B1)/first non-magnetic layer (1)/first magnetic layer (21)/first non-magnetic insertion layer (31)/ . . . /(n−1)-th magnetic layer (2(n−1))/(n−1)-th non-magnetic insertion layer (3(n−1))/n-th magnetic layer (2n) are sequentially arranged adjacent to one another. The first magnetic layer (21)/first non-magnetic insertion layer (31)/ . . . / (n−1)-th magnetic layer (2(n−1))/(n−1)-th non-magnetic insertion layer (3(n−1))/n-th magnetic, layer (2n) configure the recording layer (A1).

(69) At least the interface of the first non-magnetic layer (1)/first magnetic layer (21) has interfacial magnetic anisotropy in a perpendicular direction. Further, a magnetostatic interaction becomes dominant, and a ferromagnetic coupling is established via magnetostatic coupling between an m-th magnetic layer and a m+1-th magnetic layer adjacent to an m-th (1≤m≤n−1) non-magnetic insertion layer counted from the first non-magnetic layer (1) side.

(70) FIG. 3(b) shows a configuration example in which a second non-magnetic layer (4) is further provided adjacent, to the n-th magnetic layer (2n) of the Embodiment 3. The material and the film thickness are desirably adjusted so that the interlace of the n-th magnetic layer (2n)/second non-magnetic layer (1) also has perpendicular magnetic anisotropy.

(71) Incidentally, in Embodiment 3, n=2 results in Embodiment 1, and n=3 results in Embodiment 2.

(72) The details of Embodiment 3 are the same us those of Embodiment 1 except for the following description.

(73) The m-th (1≤m≤n) magnetic layer includes at least any of Co or Fe, and may further include a 3d ferromagnetic transition metal such as Ni.

(74) Further, the m-th magnetic layer may further include a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these. B and V are also preferable from the viewpoint of the ease of handling. The non-magnetic element can reduce the saturation magnetization (M.sub.s) of the magnetic layer.

(75) Specific examples thereof may include but are not limited to Co, CoFe, CoB, Fe, FeB, and CoFeB. Any material is acceptable so long as it causes the magnetostatic interaction to become dominant, and establishes a ferromagnetic coupling between the m-th magnetic layer and the m+1-th magnetic layer via magnetostatic coupling, and has interfacial magnetic anisotropy in a direction perpendicular to a film surface.

(76) The film thickness of the m-th magnetic layer preferably falls within the range of 0.3 nm to 3.0 nm, and more preferably falls within the range of 0.5 nm to 2.5 nm. This is due to the following. When the film thickness becomes smaller, stable ferromagnetism cannot be obtained. On the other hand, when the film thickness becomes larger, easily-magnetized axis in an in-plane direction is caused when MgO or the like is used for the first non-magnetic layer (1) and the second non-magnetic layer (4).

(77) The m-th (1≤m≤n−1) non-magnetic insertion layer is configured of a material including at least oxygen, and includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these, for the m-th non magnetic insertion layer, a material causing larger interfacial magnetic anisotropy at both the interfaces with the adjacent m-th magnetic layer and m+1-th magnetic layer is preferable. MgO, Al—O, Ta— O, W—O, Hf—O, or the like is more preferable.

(78) The film thickness of the m-th nonmagnetic insertion layer is adjusted to the thickness causing interfacial magnetic anisotropy in a direction perpendicular to a film surface at the interface with the adjacent magnetic layer, and to such a thinness as to be capable of providing a sufficient TMR ratio. The former requirement determines the lower limit, and the film thickness is about 0.5 nm. Further, with a film thickness equal to or larger than this film thickness, the adjacent ferromagnetic layers are ferromagnetically coupled with each other by a magnetostatic interaction. Whereas, the latter requirement determines the upper limit, and the film thickness is about 2.0 nm. Namely, each film thickness of the non-magnetic insertion layers is preferably within the range of 0.5 nm to 2.0 nm, and more preferably within the range of 0.6 nm to 1.5 nm. The film thickness is further preferably 0.7 nm to 1.1 nm.

(79) FIG. 14 shows the results of a study on how the thermal stability index Δ is increased by laminating the magnetic layers and the non-magnetic layers alternately and adjacent to one another in Embodiment 3.

(80) An element of Embodiment 3 was manufactured so as to have an element size of 50 nm or less, and was measured for the thermal stability index Δ. This indicates us follows. In the region with an element size of 50 nm or less, as compared with the example of a conventional double interface not including a non-magnetic insertion layer, the thermal stability index Δ is approximately doubled when n=2; approximately trebled when n=3; and approximately quadrupled when n=4.

(81) Incidentally, it is generally assumed that a magnetoresistance effect element has a large error in element manufacturing. Even in consideration of this point, it has been indicated that the thermal stability index Δ is substantially increased.

(82) FIG. 15 shows the results of a study on the range of the proper element size of the recording layer of the magnetoresistance effect element in Embodiment 3.

(83) The element (the one including four magnetic layers and three non-magnetic insertion layers laminated alternately) of Embodiment 3 was manufactured such that the element has an element size of about 100 nm or less, and was measured for the coercivity R of the index roughly proportional to the thermal stability index Δ. The plot denotes the average of the measured values of a large number of elements, and the error bar denotes the standard deviation thereof.

(84) FIG. 15 indicates as follows. An element size equal to or smaller than 50 nm can provide a coercivity IT as very large as about 200 mT. Whereas, an element size of more than 50 nm reduces the coercivity IT. In other words, it is indicated as follows. When the element size exceeds 50 nm, magnetostatic coupling based on the magnetostatic interaction ceases to sufficiently act, resulting in the reduction of the coercivity R, namely, the thermal stability index Δ.

Embodiment 4

(85) FIG. 4 shows a configuration of Embodiment 4 of the present invention. The configuration is of a two-terminal type for performing writing of information using spin transfer torque magnetization reversal, and includes base layer (E1)/reference layer (B1) f first non-magnetic layer (1)/recording layer (A1)/second non-magnetic layer (4) arranged sequentially adjacent to one another. The base layer (E1) is provided with a first terminal (T1), and the second non-magnetic layer (4) is provided with a second terminal (T2). The recording layer (A1) has the same configuration as that of Embodiment 3.

(86) Embodiment 4 is the same as Embodiment 3 except for the following description.

(87) The reference layer (B1) is a magnetic layer with the magnetization direction fixed. Examples thereof may include [Co/Pt]/Ru/[Co/Pt]/Ta/CoFeB. [Co/Pt] denotes an alternate laminated layer film of Co/Pt. [Co/Pd], [Co/Ni], or the like can be used. In place of Ru, Ir or the like is also acceptable. Ta may be W, Mo, Hf, or the like. Further, CoFeB may be FeB or the like.

(88) The first non-magnetic layer (1) sandwiched between and adjacent to the recording layer (A1) and the reference layer (B1) becomes a barrier layer (tunnel junction layer including an insulating layer). For this reason, an insulator including oxygen such as MgO, Al.sub.2O.sub.3, SiO.sub.2, TiO, or Hf.sub.2O is used so that the magnetic resistance change rate is largely expressed according to the combination of the materials of the two end laces to be joined. MgO is preferably used.

(89) The film thickness of the first non-magnetic layer (1) serving as a barrier layer is preferably 0.5 nm or more, and more preferably 0.8 nm or more in order to increase the TMR ratio. Further, the film thickness is preferably 2.0 nm or less, and more preferably 1.5 nm in order to undergo magnetization reversal with a small write voltage V.sub.C. Accordingly, the film thickness is adjusted to the range of 0.5 to 2.0 nm, and more preferably within the range of 0.8 to 1.5 nm.

Embodiment 5

(90) FIG. 5 shows a configuration of Embodiment 5 of the present invention. The configuration is of a two-terminal type for performing writing of information using spin transfer torque magnetization reversal, and includes base layer (E1)/first non-magnetic layer (1)/recording layer (A1)/second non-magnetic layer (4)/reference layer (B1)/third non-magnetic layer (5) arranged sequentially adjacent to one another. The base layer (E1) is provided with a first terminal (T1), and the third non-magnetic layer (5) is provided with a second terminal (T2). The recording layer (A1) has the same configuration as that of Embodiment 3.

(91) The details of Embodiment 5 are the same us those of Embodiment 3 and Embodiment 4 except for the following description.

(92) The second magnetic layer (4) sandwiched between and adjacent to the recording layer (A1) and the reference layer (B1) becomes a barrier layer (tunnel junction layer including an insulating layer). For this reason, an insulator including oxygen such as MgO, Al.sub.2O.sub.3, SiO.sub.2, TiO, or Hf.sub.2O is used so that the magnetic resistance change rate is largely expressed according to the combination of the materials of the two end faces to be joined. MgO is preferably used.

(93) The film thickness of the second non-magnetic layer (4) serving as a barrier layer is preferably 0.5 nm or more, and more preferably 0.8 nm or more in order to increase the TMR ratio. Further, the film thickness is preferably 2.0 nm or less, and more preferably 1.5 nm in order to undergo magnetization reversal with a small write voltage V.sub.C. Accordingly, the film thickness is adjusted to the range of 0.5 to 2.0 nm, and more preferably within the range of 0.8 to 1.5 nm.

(94) For the third non-magnetic layer (5), a metal such as Ta, W, or Ru is used as a cap layer.

Embodiment 6

(95) FIG. 6 shows a configuration of Embodiment 6 of the present invention. The configuration is of a three-terminal type for performing writing of information using spin transfer torque magnetization reversal, and includes base layer (E1)/recording layer (A1)/first non-magnetic layer (1)/reference layer (B1)/third non-magnetic layer (5) arranged sequentially adjacent to one another. The base layer (E1) is provided with a first terminal (T1) and a third terminal (T3), and the third non-magnetic layer (5) is provided with the second terminal (T2). The recording layer (A1) has the same configuration as that of the recording layer of Embodiment 3 (in the drawing, the configuration is vertically inverted).

(96) The details of Embodiment 6 are the same as those of Embodiments 1 to 5 except tor the following description.

(97) The base layer (E1) of Embodiment 6 may only be a material having characteristics just to generate a spin orbit torque enough to reverse the recording layer (A1) of magnetic tunnel junction as a channel layer, and desirably have especially a heavy metal. When a writing current I.sub.write is introduced to the base layer (E1), a spin orbit torque is generated. As a result, writing to the magnetoresistance effect element is performed. For this reason, the material is desirably configured of a heavy metal having a large spin/orbit interaction, for example, Ta, W, Hf, Re, Os, Ir, Pt, or Pd, or an alloy thereof. A material obtained by appropriately adding a transition metal to the heavy metal layer is also acceptable, or a material obtained by doping a conductive material or the like with a heavy metal is also acceptable. Further, for the purpose of improvement of the electric material characteristics, or other purposes, B, C, N, O, Al, Si, P, Ga, Go, or the like may be added. Further, Co—Ga or the like also becomes un option.

(98) The shape of the base layer (E1) has no particular restriction so long as it is the shape allowing the writing current I.sub.write to pass therethrough, and efficiently causing magnetization reversal with respect to the recording layer (A1), and is desirably a planar shape extended in the direction of the writing current I.sub.write.

(99) The magnetoresistance effect element of a three terminal type may be in any direction of axis of easy magnetization of Z type, Y type, and X type.

Embodiment 7

(100) FIG. 7 shows a configuration of Embodiment 7 of the present invention. The configuration of the magnetoresistance effect element includes reference layer (B1) first non-magnetic layer (1)/magnetic layer (21a)/non-magnetic sub-insertion layer (61)/magnetic layer (21b)/first non-magnetic insertion layer (31)/magnetic layer (22a)/non-magnetic sub-insertion layer (62)/magnetic layer (22b) sequentially arranged adjacent to one another. The magnetic layer (21a)/non-magnetic sub-insertion layer (61)/magnetic layer (21b)/first non-magnetic insertion layer (31)/magnetic layer (22a)/non-magnetic sub-insertion layer (62)/magnetic layer (22b) configure the recording layer (A1).

(101) At least the interface of the first non-magnetic layer (1)/magnetic layer (21a) has interfacial magnetic anisotropy in a perpendicular direction. Further, a magnetostatic interaction becomes dominant between the magnetic layer (21b) and the magnetic layer (22a), and a ferromagnetic coupling is established therebetween via magnetostatic coupling.

(102) The details of Embodiment 7 are the same as those of Embodiment 1 except for the following description.

(103) The non-magnetic sub-insertion layer (61 or 62) includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pi. The non-magnetic sub-insertion layer also has a role of absorbing B or the like in the magnetic layer adjacent to the interface thereof, and inducing the interfacial magnetic anisotropy in a direction perpendicular to a film surface. For this reason, preferable is an element of a bcc (body-centered cubic lattice) structure, having a large atomic radius, and a relatively larger lattice slicing. Out of these, W, Ta, Hf, Zr, Nb, Mo, Ti, V, or the like of bcc is preferable, and W or Ta is more preferable.

(104) Each film thickness of the non-magnetic sub-insertion layers (61 and 62) is adjusted to the range of a thickness that absorbs B or the like in the magnetic layer adjacent to the interface, and causes perpendicular magnetic anisotropy, and a thinness that causes exchange coupling to act between the two magnetic layers. For example, the film thickness is more preferably adjusted within the range of 0.2 nm to 0.7 nm.

(105) Incidentally, when either film thickness of the nonmagnetic sub-insertion layers (61 and 62) becomes about 0.2 nm or less, the sputtering time is adjusted, to manufacture a layer with a film thickness equivalent to around the atom size, or smaller. For this reason, either the one including continuous layers or the one including discontinuous layers are included. Even in the case of discontinuous layers, it is possible to have easily-magnetized axis in a perpendicular direction so long as the lattice has a space that absorbs B or the like in the magnetic layer.

(106) The magnetic layer (21a, 21b, 22a, or 22b) includes at least any of Co or Fe, and may farther include a 3d ferromagnetic transition metal such as Nt.

(107) Further, the magnetic layer (21a, 21b, 22a, or 22b) may farther include a non-magnetic element such as W, Ta, Hf, Zr, Nib, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. Out of these, B and V are also preferable from the viewpoint of ease of handling. The non-magnetic elements can reduce the saturation magnetization (M.sub.s) of the magnetic layer.

(108) Specific examples thereof may include but are not limited to Co, CoFe, CoB, Fe, FeB, and CoFeB. Any material is acceptable so long as it makes magnetostatic interaction dominant, and establishes a ferromagnetic coupling between the magnetic layers (21b and 22a), and has interfacial magnetic anisotropy in a direction perpendicular to a film surface.

(109) The total of the film thicknesses of the magnetic layer s (21a and 21b), and the total of the film thicknesses of the magnetic layers (22a and 22b) each preferably fall within the range of 0.3 nm to 3.0 nm, and more preferably fall within the range of 0.5 nm to 2.5 nm.

Embodiment 8

(110) FIG. 8 shows a configuration of Embodiment 8 of the present invention. The configuration of the magnetoresistance effect element includes reference layer (B1)/first non-magnetic layer (1)/magnetic layer (21a)/non-magnetic sub-insertion layer (61)/magnetic layer (21b)/first non-magnetic insertion layer (31)/magnetic layer (22a)/non-magnetic sub-insertion layer (62)/magnetic layer (22b)/second non-magnetic insertion layer (32)/magnetic layer (23a)/non-magnetic sub-insertion layer (63)/magnetic layer (23b) arranged sequentially adjacent to one another. The magnetic layer (21a)/non-magnetic sub-insertion layer (61)/magnetic layer (21b)/first non-magnetic insertion layer (31)/magnetic layer (22a)/non-magnetic sub-insertion layer (62)/magnetic layer (22b)/second non-magnetic insertion layer (32)/magnetic layer (23a)/non-magnetic sub-insertion layer (63)/magnetic layer (23b) configure the recording layer (A1).

(111) At least the interface of the first non-magnetic layer (1)/magnetic layer (21a) has interfacial magnetic anisotropy in a perpendicular direction. Further, a magnetostatic interaction becomes dominant between the magnetic layer (21b) and the magnetic layer (22a), and between the magnetic layer (22b) and the magnetic layer (23a), and a ferromagnetic coupling is established therebetween via magnetostatic coupling.

(112) The details of Embodiment 8 are the same as those of Embodiment 2 and Embodiment 7 except for the following description.

(113) The non-magnetic sub-insertion layer (63) includes a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr, Si, Al, B, Pd, or Pt. The non-magnetic sub-insertion layer also has a role of absorbing B or the like in the magnetic layer adjacent to the interface thereof, and inducing the interfacial magnetic anisotropy in a direction perpendicular to a film surface. For this reason, preferable is an element of a bcc (body-centered cubic lattice) structure, having a large atomic radius, and a relatively larger lattice spacing. Out of these. W, Ta, Hf, Zr, Nb, Mo, Ti, V, or the like of bcc is preferable, and W or Ta is more preferable.

(114) The film thickness of the non-magnetic sub-insertion layer (63) is adjusted to the range of a thickness that absorbs B or the like in the magnetic layer adjacent to the interface, and cause perpendicular magnetic anisotropy, and a thinness that causes exchange coupling to act between the two magnetic layers. For example, the film thickness is more preferably adjusted within the range of 0.2 nm to 0.7 nm.

(115) The magnetic layer (23a or 23b) includes at least any of Co or Fe, and may further include a 3d ferromagnetic transition metal such as Ni.

(116) Further, the magnetic layer (23a or 23b) may further include a non-magnetic element such as W, Ta, Hf, Zr, Nb, Mo, Ti, V, Cr. Si, Al, B, Pd, or Pt. Out of these, B and V are also preferable from the viewpoint of ease of handling. The non-magnetic elements can reduce the saturation magnetisation (M.sub.s) of the magnetic layer.

(117) Specific examples thereof may include but are not limited to Co, CoFe, CoB, Fe, FeB, and CoFeB. Any material is acceptable so long as it makes magnetostatic interaction dominant, and establishes a ferromagnetic coupling between the magnetic layers (22b and 23a), and has interfacial magnetic anisotropy in a direction perpendicular to a film surface.

(118) The total of the film thicknesses of the magnetic layers (23a and 23b) preferably fells within the range of 0.3 nm to 3.0 nm, and more preferably fall within the range of 0.5 nm to 2.5 nm.

Embodiment 9

(119) FIG. 9 shows one example a magnetic memory including a plurality of magnetic memory cells hating each configuration of Embodiments 1 to 8 as Embodiment 9.

(120) The magnetic memory includes a memory cell array, an X driver, a Y driver, and a controller. The memory cell array has magnetic memory cells arranged in an array. The X driver is connected to a plurality of word lines (WL), and the Y driver is connected to a plurality of bit lines (BL), functioning as reading means and writing means, respectively.

REFERENCE SIGNS LIST

(121) 1 First non-magnetic layer 21, 22, 23, . . . , 2n Magnetic layer 2a, 2b, 21a, 21b, 22a, 22b, 23a, 23b Magnetic layer 31, 32, . . . , 3(n−1) Non-magnetic insertion layer 4 Second nonmagnetic layer 5 Third non-magnetic layer 6, 61, 62, 63 Nan-magnetic sub-insertion layer A1 Recording layer B1 Reference layer BL1 First bit line BL2 Second bit line GND Ground line T1 First terminal T2 Second terminal T3 Third terminal Tr1 First transistor Tr2 Second transistor WL Word line