Microfabricated ion trap chip with an integrated microwave antenna

Abstract

An ion trap chip, which may be used for quantum information processing and the like, includes an integrated microwave antenna. The antenna is formed as a radiator connected by one of its ends to the center trace of a microwave transmission line and connected by its other end to a current return path through a ground trace of the microwave transmission line. The radiator includes several parallel, coplanar radiator traces connected in series. The radiator traces are connected such that they all carry electric current in the same direction, so that collectively, they simulate a single, unidirectionally flowing sheet of current. In embodiments, induced currents in underlying metallization planes are suppressed by parallel slots that extend in a direction perpendicular to the radiator traces.

Claims

1. Apparatus comprising an ion trap chip, wherein: the ion trap chip comprises a substrate, a top metallization layer formed over the substrate, and at least one further metallization layer formed between the substrate and the top metallization layer; a microwave antenna is integrated on the ion trap chip; the microwave antenna comprises a plurality of parallel radiator traces formed in the top metallization layer; and the plurality of radiator traces is connected in series such that the direction of current flow is the same in each radiator trace.

2. The apparatus of claim 1, wherein the series connection between each radiator trace and at least one neighboring radiator trace is made through vertical paths to and from a metallization layer lower than the top metallization layer, and through a horizontal loop-back path in the said lower metallization layer.

3. The apparatus of claim 2, wherein: the at least one further metallization layer formed between the substrate and the top metallization layer comprises at least a metallization layer nearest the top metallization layer and a metallization layer next-nearest the top metallization layer; said nearest layer and said next-nearest layer each are fenestrated by a pattern of parallel slots; the slots are perpendicular to the radiator traces; and the slots in the nearest layer are offset from the slots in the next-nearest layer so that there is no overlap between slots in the respective said nearest and next-nearest layers.

4. The apparatus of claim 3, wherein each of the radiator traces comprises an air bridge over each slot that it crosses in the next-nearest metallization layer.

5. The apparatus of claim 4, wherein a total of six metallization layers are formed over the substrate, said metallization layers respectfully denominated M1, M2, M3, M4, M5, and M6, M6 being the top metallization layer, and wherein: the radiator traces are formed in M6; M5 and M4 are respectfully the said nearest and next-nearest metallization layers; and the horizontal loop-back paths are formed in M3 and M2.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a partial plan view of an example ion trap chip. The figure notionally shows two trap structures. A microwave antenna of the kind described here is shown centered between the two trap structures.

(2) FIG. 2 illustrates numerical modeling results for the magnitude and orientation of the magnetic field vector over the trap location in an ion trap chip such as the ion trap chip of FIG. 1.

(3) FIG. 3 is a more detailed view of the ion trap chip of FIG. 1.

(4) FIG. 4 is a cartoon drawing of a partial cross-section of the microwave antenna of FIG. 3.

(5) FIG. 5 is a detail of FIG. 3, showing in plan view how the north end of the microwave antenna is laid out.

(6) FIG. 6 is a plan view showing details of intermediate metallization layers in an implementation of an example ion trap chip.

(7) FIG. 7 is a simplified layout, in plan view, of an entire trap chip.

(8) FIG. 8 is a plot of numerically modeled loss for a microwave antenna of the kind described here.

(9) FIGS. 9 and 10 are perspective views of an example microwave antenna of the kind described here.

DETAILED DESCRIPTION

(10) Our new microwave antenna is formed on the surface of the ion trap chip. It is designed to provide an out-of-plane microwave magnetic field at the location adjacent to the trap and above the trap surface. The antenna is fabricated using the upper metal layers of the trap structure for the routing of the microwave current.

(11) The metal layers below the antenna include two or more slotted ground planes. These ground planes shield the antenna from the silicon substrate, which would otherwise attenuate the microwave signal. The slots in the ground planes suppress induced currents so that a greater magnetic field can be achieved at the trap than would be realized if a solid ground plane were used. The slots in at least one pair of adjacent ground planes are staggered, i.e., the slots in one plane are offset by, e.g., one-half period relative to the slots in the other plane in order to present the equivalent of a continuous shielding surface.

(12) In embodiments, a useful antenna can be deposited directly onto an intermetal dielectric. However, the antenna in our example embodiment is suspended by air bridges over the slots in the underlying ground plane. This is advantageous because it helps to reduce the parasitic capacitance between the antenna and the ground plane. The air bridges are formed with a wet etch that selectively removes the intermetal dielectric material, for example silicon dioxide. Such an approach is described, for example, in D. Stick (2010), which was cited above.

(13) In an example process to be described below, supporting structures in the intermetal dielectric are protected from the wet etch by vertically deposited tungsten barriers. We refer to these barriers as etch-stop vias because we deposit them using a conventional CMOS technology for forming tungsten vias. Chemical-mechanical polishing (CMP) is used in our example process to planarize the intermetal dielectric, and again to planarize the tungsten after it is deposited. Thus, CMP is useful in forming the etch-stop vias and also for effectuating planarity of the fabricated antennas.

(14) In our example embodiment, five parallel side-by-side antenna traces conduct current all in the same direction, which we refer to as north to south for convenience only and without loss of generality. In this manner, the five traces collectively simulate a single broad sheet of current. Loopback traces using lower metal layers are used to recycle the current from the south end of each trace and feed it forward onto the north end of the next adjacent trace. Because lower metal layers are used, we refer to these as buried loopback traces.

(15) It is of interest in this regard that an earlier implementation of an ion trap with an integrated microwave antenna was described in C. Highstrete et al., Technology for On-Chip Qubit Control with Microfabricated Surface Ion Traps, SAND2013-9513, Sandia National Laboratories (2013). In that implementation, buried microwave lines were used to feed surface coils that produced the microwave magnetic field. The above-cited patent application Ser. No. 15/424,158 also describes an approach in which microwave lines are buried beneath other metal structures in the trap, and in which the microwave energy is coupled up through slots in the overlying metal layers.

(16) Our new approach differs from these earlier implementations, not least, by placing the microwave traces on the uppermost level and by situating the antenna to the side of the ion-trapping location.

(17) The purpose of the microwave antenna is to generate microwave-frequency magnetic fields that excite hyperfine qubit transitions of the trapped ions. This is an alternative to optical, e.g. laser-based, approaches. The target ion resides in the near-field region of the antenna.

(18) As those skilled in the art will understand, ions of any of various elements can be trapped in ion traps of the kind described here and they can be used as host systems for storing quantum information in the form of qubits. By way of illustration, a microwave antenna with a tuned frequency response in the range 1.2-1.3 GHz is useful for driving the pertinent atomic transitions of beryllium ions.

(19) In an example, the antenna is driven by an off-chip source, with 50 impedance, connected through an off-chip matching network.

(20) FIG. 1 is a partial plan view of an example ion trap chip. The figure shows two trap structures 100, 105, with the microwave antenna 110 centered between them. Also shown in the figure is a set of coordinate axes. As shown, the x-axis is the width axis of the antenna, the y-axis is the length axis of the antenna, and the z-axis is perpendicular to the substrate and to the plane of the antenna. As represented in FIG. 1, the positive direction of the z-axis is toward the observer who is looking downward at the top surface of the chip. The x-axis is parallel to the line connecting the centers of the respective trap structures.

(21) In the example of FIG. 1, the traps are 750 m apart; thus, a trapped ion in either trap will lie 375 m from the center of the chip and the center of the antenna. The layout for the underlying interconnections and the traps left room for an area of about 300 m800 m for the antenna.

(22) In our example chip, the antenna was oriented so that the in-plane component of the microwave-frequency magnetic field was aligned with the x-axis of the trap. This orientation was dictated, in part, by the geometrical constraints of our design. More generally, the device performance is optimized by maximizing the component of the magnetic field that is parallel to the principal axis of the trapped ions.

(23) The antenna is essentially a shorted microwave transmission line. Shorting the far end of the transmission line produces the maximum amount of current for a given amount of microwave input power. The wavelength at 1.25 GHz is 240 mm in air and about 120 mm in silicon dioxide dielectric. As the antenna is only of millimeter scale or less, wavelength-scale variations in current are negligible along the length of the antenna.

(24) The current at the end of the transmission line can be calculated as a function of delivered power P.sub.del. For a short-circuited transmission line and a source impedance of Z.sub.0, this current is calculated as 2(P.sub.del/Z.sub.0).sup.0.5. Using a resonant matching network can decrease the equivalent source impedance and increase the current at the antenna.

(25) A key challenge of integrated antennas is the presence of conducting layers underneath the transmission line antenna. These conducting layers produce induced currents that flow in the direction opposite to the currents on the trace. Because they are reversed in sign, the induced currents generate magnetic fields that tend to cancel the desired magnetic field outside of the volume between the trace and the underlying metal plane. In particular, these image fields significantly reduce the desired magnetic field in the space above the trace.

(26) By way of example, we simulated a single-trace antenna on top of the interconnect stack over a ground plane. We calculated that the generated magnetic field at the location of the ion (in microtesla per ampere of microwave-frequency electric current) would be less than 20 T/A. For the same trace without a ground plane, by contrast, the simulation predicted a magnetic field of 300 T/A.

(27) Our simulations also predicted that at the ion location (i.e., about 300 m from the microwave trace), the magnetic field of an isolated horizontal trace would be nearly vertical, but with a ground plane, the field would be oriented only 10 from the surface of the substrate. This difference is attributable to attenuation of the vertical field component by the upper ground plane.

(28) However, the reduction in magnetic field due to the presence of a ground plane can be mitigated by slotting the ground plane in the direction perpendicular to the flow of current along the microwave trace. This suppresses the long-range flow of induced current in the ground plane that would otherwise cancel the field of the intended microwave current.

(29) We simulated a design with a slotted ground plane and five parallel microwave antenna traces as shown in FIG. 1. The predicted magnetic field at the trapped ion location was 570 T/A.

(30) We also calculated the magnitude and orientation of the magnetic field vector over the trap location. FIG. 2 shows our results. The field values are normalized to the magnitude of the field at the center of the trap. As seen in the figure, the outline 200 of a hexagonal footprint represents the trap. The figure includes a schematic representation 205 of the antenna structure.

(31) The three numbers shown at the center of the hexagon and at each of its corners are, respectively, the normalized magnitude of the field, the out-of-plane angle of the field (measured as the elevation above the plane of the trapping structure), and the in-plane azimuthal angle from the trap axis (i.e., from the axis that passes through the centers of both traps, and that corresponds to the x-axis of FIG. 1). Schematic perspective view 210 in the figure illustrates the and .

(32) It will be seen that the magnetic field is oriented at about 10 relative to the surface of the trap. As explained above, this is due to the metal ground plane on top of the die. In our design, there was a limited range for the possible relative orientations of the magnetic field. This range was limited because we needed to leave the ground plane in place to shield it from surfaces that could collect stray charge and expose the trapped ion to the resulting electrostatic fields.

(33) FIG. 3 repeats the view of FIG. 1 in greater detail. Like elements of the two figures are called out by like reference numerals. What is shown is a partial view of the top metal layer, i.e. the M6 layer, in a six-metal implementation of the example ion trap chip. (In our nomenclature, the six metallization layers are denominated, in sequence starting from the bottom layer, as M1, M2, M3, M4, M5, and M6.) The five parallel microwave traces 111-115 are visible in the figure. These traces are connected in series, so that the microwave current is reused five times in the antenna.

(34) The parallel arrangement of traces mimics a current sheet, but it has lower current crowding, and presents a higher impedance to the driving circuit, than a single broad sheet of current.

(35) FIG. 4 is a cartoon drawing of a partial cross section of the antenna of FIG. 3. Parts of three metallization layers (M4, M5, and M6) are visible in the figure. The view is taken along a line of sight that is parallel to the substrate, perpendicular to the long axis of the microwave traces in M6, and parallel to the slots in M5 (and underlying layers). It will be apparent from the figure that the antenna trace 400 in M6 is supported at intervals by silicon dioxide columns 405, and that between the columns, the antenna trace forms an air bridge 410 over a gap 415 that extends down to M4. It will also be apparent that each slot in M5 overlies a metal strip in M4 with some overlap 420, so that there is no direct line-of-sight from above the antenna to any exposed dielectric.

(36) In the view of FIG. 4, the tungsten etch-stop vias 425 have been left in place. As shown, they are protecting the silicon dioxide columns from the wet etch that will remove undesired intermetal dielectric. The etch-stop vias will subsequently be removed using a selective etchant for tungsten.

(37) FIG. 5 is a detail of FIG. 3, showing in plan view how the north end 500 of the antenna is laid out. The five microwave traces 505 on M6 are visible in the figure. The figure also shows the slots 510 in M5. The view of the microwave traces includes the airbridge sections 515 over the slots in M5. The figure also shows the metal strips 520 in the M5 ground plane, the etch-stop vias 525 between M5 and M6 that protect the oxide pillars (i.e., the pillars that support the antenna traces), and the etch-stop vias 530 between M4 and M5.

(38) The microwave current is introduced to the north end 500 of the right-most trace, flows to the southern end of the trace, and then is returned to the northern end of the next trace by a buried trace on underlying metal. After the current exits the south end of the second trace, the same process is repeated three more times, so that the current is fed into all five traces. All return paths are routed at the periphery of the layout and beneath a ground shield to avoid magnetic field cancellation.

(39) We performed 3D electromagnetic simulations to calculate the input impedance where the current is introduced to the antenna. Our result was 12+3j at 1.2 GHz frequency. The real part of the antenna impedance is due to the metal losses in the antenna structure; it would vary with metal resistivity, hence also with temperature. The imaginary part of the impedance is due to the inductance and capacitance of the antenna; it would vary with frequency.

(40) The total physical length of the microwave current path is about 6 mm, which corresponds to an electrical length of /20 (18 of phase delay) for the antenna structure. Thus, the current variation along the length of the line due to the standing wave ratio is expected to be less than 1/20, i.e., less than 5%.

(41) The microwave traces are on M6. The ground planes on all lower metal levels, M1-M5, are cut through with slots oriented perpendicular to the direction of current flow in the five top-level antenna traces. (Thus, in our nomenclature, the slots are oriented in the east-west direction.)

(42) The M4 and M5 slots are staggered by positioning them with an offset that in our example implementation is one-half period. This stagger shields the substrate from the antenna and from the trapped ion, and it blocks the line of sight between the trapped ion and any dielectric surface. In our example implementation, the slots in the lower metallization levels M1, M2, and M3 are in register with the slots in M4.

(43) M4 and M5 are grounded at their edges. Avoiding ground connections in the region beneath the top-level antenna traces helps to suppress undesired induced currents.

(44) As explained above, the top-level antenna traces are formed in M6. These traces are attached to M5 with anchors of silicon dioxide (as the intermetal dielectric), and they airbridge across the slots in M5. All of the silicon dioxide is removed from the exposed surfaces of M5 (i.e., the surfaces not directly underneath the M6 traces) and from the slot openings in M5 that overlie M4.

(45) FIG. 6 shows details of the underlying M3 and M2 layers. The pattern of slots on M4 is replicated on M3 and M2, as well as on M1. The lower metals M3 and M2, as well as M1, are connected to M4 with tungsten-filled vias. Among other things, this helps to improve heatsinking of the antenna structure to the substrate.

(46) In M3 and M2, the south-to-north in-plane return paths for the microwave antenna current are routed along the outer edge of the antenna; they are obscured from the upper surface of the trap by ground planes on M4-M6. The magnetic field generated by these buried return traces is shielded from the region above the trap by the upper metal layers, so that the resulting magnetic field in the region above the antenna is predominantly generated by the currents that all flow in the same north-to-south direction along the upper traces.

(47) Turning again to FIG. 6, it will be seen that:

(48) the return path 600 from antenna trace 1 is routed along the right-hand side of M3 (as viewed in the figure) and then passed vertically to the north end of trace 2;

(49) the return path 605 from trace 2 is routed along the right-hand side of M2 and then passed vertically to the north end of trace 3;

(50) the return path 610 from trace 3 is routed along the left-hand side of M2 and then passed vertically to trace 4; and

(51) the return path 615 from trace 4 is routed along the left-hand side of M3 and then passed vertically to trace 5.

(52) FIG. 7 provides a simplified layout of the entire trap chip, including the routing of the microwave signal from the edge of the die to the antenna. As shown in the figure, a grounded coplanar waveguide (GCPW) transmission line delivers the microwave signal to the antenna. The GCPW line runs from a bond pad at the upper right corner of the die to the antenna, as shown.

(53) The coplanar waveguide is constituted by a trace in the uppermost metal (M6) layer over a ground plane defined in M1. M6 is attached to M1 by slot vias that are situated along the edges of the ground plane and that pass through all of the intervening metal layers.

(54) An example GCPW line has a 20-m-wide center trace and 5-m gap between the trace and ground. Those dimensions are calculated to yield a 50 line with 0.2 dB/mm of loss at room temperature (for a frequency of 1.2 GHz) and an electrical length of 15.

(55) From electromagnetic modeling combined with circuit models, we estimated the room-temperature input impedance of the antenna to be 27+23j at 1.2 GHz. Without any additional impedance matching, the return loss of the antenna at the chip input is estimated to be 7 dB due to the high resistance of the structure at room temperature. With a simple shunt matching network, however, the return loss is improved to 30 dB. Loss calculations are plotted in FIG. 8.

(56) Flexibility in the design of the off-chip matching network is desirable because the antenna impedance will be sensitive to temperature, and because it might also be sensitive to subtle manufacturing variations in the properties of the ion trap die.

(57) FIG. 9 is a perspective view, based on a scanning electron micrograph, of the completed microwave antenna. Portions of the two trap structures are also visible in the figure. The suspension of the five M6 antenna traces over M5 is visible in the figure.

(58) FIG. 10 is a perspective view looking down onto the top of the antenna from a slight angle. The figure is based on a focused ion-beam scanning electron micrograph. Portions of three antenna traces are visible in the figure. Three slots in M5 can be seen, together with M6 airbridges over those slots. Portions of M4 can be seen through the M5 slots, where the silicon dioxide dielectric has been removed. Vias connecting an M6 microwave trace to a loopback trace on M3 can also be seen in the figure.

(59) Process Description

(60) Our example device was made using techniques of deposition, patterning, and etching that are known from back-end-of-line (BEOL) CMOS fabrication technology. A useful reference in this regard is R. Jacob Baker, CMOS Circuit Design, Layout, and Simulation, Revised Third Edition, John Wiley & Sons (2008), Volume 1, Chapter 7, CMOS Fabrication by Jeff Jessing, pp. 161-212, particularly at pages 206-211.

(61) Another useful reference is U.S. Pat. No. 6,893,578, issued to P. J. Clews et al. on May 17, 2005 under the title, Selective Etchant for Oxide Sacrificial Material in Semiconductor Device Fabrication, which is commonly owned herewith, and which is hereby incorporated herein in its entirety.

(62) U.S. Pat. No. 6,893,578 describes a method of wet etching for semiconductor device fabrication that is useful in the present context. As described there, oxide sacrificial material is removed using an etching solution comprising a mixture of hydrofluoric acid (HF) and sulfuric acid (H.sub.2SO.sub.4). The hydrofluoric acid concentration according to the above-cited patent is generally in the range of 40-50% by weight HF, and the sulfuric acid concentration is generally at least 90% by weight H.sub.2SO.sub.4.

(63) The hydrofluoric acid and sulfuric acid in the etching solution can be provided in a ratio HF:HSO that ranges from 1:3 to 3:1 or more, and preferably in the range of 1:1 to 3:1. These ratios in the range of 1:3 to 3:1 provide an etch selectivity greater than 100 for the oxide sacrificial material relative to a metal layer that comprises aluminum, such as an aluminum-5% copper metal layer. Etching can be performed with the etching solution at a temperature anywhere in the range of 5-70 C.

(64) The principle of selective etching to create dielectric support pillars is described, for example, in D. Stick (2010), which was cited above.

(65) In our example implementation, the intermetallic dielectric layers were grown on a silicon wafer in multiple stages of plasma-enhanced chemical vapor deposition (PECVD) of silicon dioxide. The six metallization layers M1-M6 were vapor-deposited aluminum-5% copper. The electrical vias and the etch-stop vias were vapor-deposited tungsten.

(66) Each level of intermetal dielectric was polished flat by CMP prior to the tungsten deposition, and then subjected to a tungsten CMP after the vias were deposited.

(67) The support pillars for the M6 microwave antenna traces were defined by annular tungsten etch-stop vias. Vertical return paths were provided for antenna current to pass between layers at the periphery of the antenna, as described above. These return paths passed through tungsten vias embedded within oxide support columns situated at the northern and southern edges of the antenna. Thus, each of these peripheral support columns was protected by an annular tungsten etch-stop via (which was subsequently removed), and also contained a tungsten electrical via that remained in place.

(68) We found that it was important in this regard to avoid excessive exposure to the HF etchant: If the etch-stop via were breached and the etchant penetrated into the pillar material, the electrical vias could be damaged in the subsequent step of removing the tungsten etch stops.

(69) After forming the metal features on M6, we performed the HF etch to remove all of the sacrificial oxide in a single step. We then removed the tungsten etch stops using a conventional hydrogen peroxide wet etch.