MULTILAYER SYSTEM, COMPONENT, AND METHOD FOR PRODUCING SUCH A MULTILAYER SYSTEM OR COMPONENT

Abstract

A multilayer system having at least one anticorrosion layer and a wear protection layer, wherein the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further includes at least one rare earth metal, and the wear protection layer is formed by at least one diamond-like metal-free carbon layer. A component having such a multilayer system and a method for producing the multilayer system or the component are also provided.

Claims

1. A multilayer system comprising, at least one anticorrosion layer and a wear protection layer; the anticorrosion layer is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as a metal; the metal nitride or the metal carbonitride further comprises at least one rare earth metal; and the wear protection layer is formed by at least one diamond-like metal-free carbon layer.

2. The multilayer system according to claim 1, wherein the metal nitride or the metal carbonitride is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, or hafnium.

3. The multilayer system according to claim 1, wherein the at least one rare earth metal comprises at least one of gadolinium, cerium, or lanthanum.

4. The multilayer system according to claim 1, wherein the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.

5. The multilayer system according to claim 1, wherein the anticorrosion layer is adjacent to a metallic adhesion-promoting layer on a side thereof facing away from the wear protection layer.

6. The multilayer system according to claim 5, wherein the metallic adhesion-promoting layer is formed of at least one of chromium, titanium, zirconium, magnesium, or gadolinium.

7. The multilayer system according to claim 1, wherein the anticorrosion layer is adjacent to an intermediate layer on a side thereof facing the wear protection layer, the intermediate layer is formed of a silicon-doped metal nitride or a silicon-doped metal carbonitride.

8. The multilayer system according to claim 1, wherein the wear protection layer comprises at least one diamond-like metal-free carbon layer of a type a-C or a-C:H or ta-C or ta-C:Si or ta-C:H:O:Si or a-C:H:Si or a-C:H:O:Si or a-C:H:N or a combination of at least two of these types.

9. The multilayer system according to claim 1, wherein the anticorrosion layer has a thickness in a range from 0.5 to 10 m.

10. A component comprising a metallic substrate with a surface the multilayer system is according to claim 1 formed at least partially on the surface such that the wear protection layer forms a cover layer facing away from the metallic substrate.

11. The component according to claim 10, wherein the component comprises a rolling bearing component or a sliding bearing component or a component used in a tribological contact and further in contact with a corrosive medium.

12. A method for producing a multilayer system, the method comprising: depositing at least one anticorrosion layer formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as a metal using at least one of a PVD or a PACVD process, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal; and depositing a wear protection layer formed by at least one diamond-like metal-free carbon layer by at least one of a PVD process or a PACVD process.

13. The method of claim 12, wherein the metal nitride or the metal carbonitride is further formed comprising at least one metal selected from the group consisting of aluminum, chromium, zirconium, or hafnium.

14. The method of claim 12, wherein the at least one rare earth metal comprises at least one of gadolinium, cerium, or lanthanum.

15. The method of claim 12, wherein the anticorrosion layer is formed comprising TiMgGdN or TiMgGdCN or TiMgCeN or TiMgCeCN or TiMgLaN or TiMgLaCN.

16. The method of claim 12, further comprising depositing to a metallic adhesion-promoting layer on a side of the anticorrosion layer facing away from the wear protection layer.

17. The method of claim 12, further comprising depositing an intermediate layer between the anticorrosion layer and the wear protection layer, the intermediate layer comprising a silicon-doped metal nitride or a silicon-doped metal carbonitride.

18. The method of claim 12, wherein the anticorrosion layer is deposited on a surface of a metallic substrate.

19. The multilayer system of claim 1, wherein the wear protection layer has a thickness in the range from 0.1 to 10 m.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0102] FIGS. 1 to 6 are intended to explain the disclosure by way of example. In the figures:

[0103] FIG. 1 shows a first multilayer system comprising an anticorrosion layer and a wear protection layer;

[0104] FIG. 2 shows a second multilayer system comprising an anti-corrosion layer, an intermediate layer and a wear protection layer;

[0105] FIG. 3 shows a third multilayer system comprising an adhesion-promoting layer, an anticorrosion layer, an intermediate layer, and a wear protection layer

[0106] FIG. 4 shows a fourth multilayer system comprising an adhesion-promoting layer, an anticorrosion layer and a wear protection layer;

[0107] FIG. 5 shows a component with a multilayer system according to FIG. 3; and

[0108] FIG. 6 shows a component in the form of a rolling bearing ring.

DETAILED DESCRIPTION

[0109] FIG. 1 shows a first multilayer system 1 in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC).

[0110] FIG. 2 shows a second multilayer system 1 in a sectional view perpendicular to the layer plane comprising an anticorrosion layer 2, an intermediate layer 4 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride.

[0111] FIG. 3 shows a third multilayer system 1 in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5, an anticorrosion layer 2, an intermediate layer 4 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The intermediate layer 4 is formed of a silicon-doped metal nitride or a metal carbonitride, in particular a silicon-doped metal carbonitride. The metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals. In particular, the adhesion-promoting layer 5 is formed of TiMg here.

[0112] FIG. 4 shows a fourth multilayer system 1 in a sectional view perpendicular to the layer plane comprising an adhesion-promoting layer 5, an anticorrosion layer 2 and a wear protection layer 3. The anticorrosion layer 2 is formed by a metal nitride or a metal carbonitride which contains at least titanium and magnesium as the metal, wherein the metal nitride or the metal carbonitride further comprises at least one rare earth metal. The wear protection layer 3 is formed by at least one diamond-like metal-free carbon layer (DLC). The metallic adhesion-promoting layer 5 is preferably formed of chromium or titanium or zirconium or magnesium or gadolinium or a mixture of two or three of said metals.

[0113] FIG. 5 shows a component 8 in a sectional view perpendicular to the layer plane of the multilayer system comprising a metallic substrate 6 with a surface 6a and the third multilayer system 1 according to FIG. 3, wherein the third multilayer system 1 is formed partially on the surface 6a of the substrate 6 in such a manner that the wear protection layer 3 forms a cover layer 7 facing away from the substrate 6.

[0114] FIG. 6 shows a component 8 in the form of a rolling bearing ring in a three-dimensional view. The component 8 comprises an annular metallic substrate 6, which is covered on its cylindrical lateral surface and its end faces with a multilayer system 1 according to FIG. 1. Alternatively, of course, other multilayer systems according to the disclosure can also be used in this regard.

[0115] Furthermore, the multilayer system can cover a substrate completely or only superficially in certain regions, depending on the corrosive attack present and the specific wear conditions.

LIST OF REFERENCE SYMBOLS

[0116] 1, 1, 1, 1 Multilayer system [0117] 2 Anticorrosion layer [0118] 3 Wear protection layer [0119] 4 Intermediate layer [0120] 5 Adhesion-promoting layer [0121] 6 Substrate [0122] 6a Surface [0123] 7 Cover layer [0124] 8 Component