Method for forming complex electronic circuits by interconnecting groups of printed devices
10964665 ยท 2021-03-30
Assignee
Inventors
- William Johnstone Ray (Fountain Hills, AZ, US)
- Richard Austin Blanchard (Los Altos, CA, US)
- Mark David Lowenthal (Vancouver, WA, US)
- Bradley Steven Oraw (Chandler, AZ, US)
Cpc classification
H01L24/95
ELECTRICITY
H01L25/18
ELECTRICITY
H01L2224/95143
ELECTRICITY
H01L2224/82143
ELECTRICITY
H01L2221/68381
ELECTRICITY
H01L25/50
ELECTRICITY
H01L24/82
ELECTRICITY
Y10T29/49169
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L24/25
ELECTRICITY
H01L2924/13091
ELECTRICITY
H01L2224/24137
ELECTRICITY
H01L21/563
ELECTRICITY
H01L2224/32225
ELECTRICITY
H05K1/029
ELECTRICITY
H01L33/20
ELECTRICITY
H05K1/0296
ELECTRICITY
H05K3/12
ELECTRICITY
H01L2224/92244
ELECTRICITY
International classification
H01L25/18
ELECTRICITY
H01L25/07
ELECTRICITY
H05K3/12
ELECTRICITY
H01L25/00
ELECTRICITY
Abstract
A programmable circuit includes an array of printed groups of microscopic transistors or diodes. The devices are pre-formed and printed as an ink and cured. The devices in each group are connected in parallel so that each group acts as a single device. In one embodiment, about 10 devices are contained in each group so the redundancy makes each group very reliable. Each group has at least one electrical lead that terminates in a patch area on the substrate. An interconnection conductor pattern interconnects at least some of the leads of the groups in the patch area to create logic circuits for a customized application of the generic circuit. The groups may also be interconnected to be logic gates, and the gate leads terminate in the patch area. The interconnection conductor pattern then interconnects the gates for form complex logic circuits.
Claims
1. A method for forming a circuit comprising: providing an ink containing a plurality of pre-formed, semiconductor electrical devices mixed in a solvent, wherein the devices formed on a wafer and then singulated into individual pre-formed devices, the devices comprising individual transistors; printing the ink, on a substrate, to form a plurality of separate groups of the pre-formed, semiconductor electrical devices, each group containing a plurality of substantially identical electrical devices forming a random two-dimensional arrangement of the electrical devices on the substrate; forming at least one conductor layer to connect the electrical devices in each group in parallel; interconnecting at least some of the groups, using an interconnection pattern, to achieve a specified electrical function; forming at least one input terminal connected to the interconnection pattern for receiving input signals for transformation by the specified electrical function to generate electrical output signals; and forming at least one output terminal connected to the interconnection pattern for receiving the electrical output signals.
2. The method of claim 1 wherein the step of interconnecting at least some of the groups comprises interconnecting at least some of the groups to create logic gates.
3. The method of claim 1 wherein the step of interconnecting at least some of the groups comprises interconnecting the groups in a designated patch area.
4. The method of claim 1 wherein the step of interconnecting at least some of the groups comprises interconnecting the groups using a first interconnection pattern to form logic gates and then interconnecting the logic gates in a designated patch area using a second interconnection pattern.
5. The method of claim 1 wherein the circuit is formed using a roll-to-roll process to form flexible circuits.
6. The method of claim 1 wherein the electrical devices have largest dimensions between 10-200 microns.
7. The method of claim 1 wherein the circuit forms a programmable gate array.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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(19) Elements that are similar or identical in the various figures are labeled with the same numeral.
DETAILED DESCRIPTION
(20) The printed programmable circuits of the present invention may use any combination of passive devices (e.g., capacitors, resistors), 2-terminal inorganic semiconductor devices (e.g., diodes), and 3-terminal inorganic semiconductor devices (e.g., transistors). The most complex device to print and electrically connect to is a 3-terminal device. In some cases, a 3-terminal device, such a bipolar transistor, may be used as a diode by only using two of the terminals or connecting two terminals to the same conductor.
(21) The 3-terminal devices used in embodiments of the present invention may be less than the diameter of a human hair, rendering them essentially invisible to the naked eye when the devices are sparsely spread across a substrate. The sizes of the devices may range from about 10-200 microns across. The number of micro-devices per unit area may be freely adjusted when applying the micro-devices to the substrate. The devices may be printed as an ink using flexography, screen printing, or other forms of printing. Conventional designs for 3-terminal devices may be easily adapted for forming the micro-devices of the present invention. The precision of photolithography is well within the precision needed to form the micro-devices. Since many of the micro-devices will be operating in parallel, the efficiency of each micro-device is not critical.
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(23) The devices 40 are completely formed on a semiconductor wafer, including the electrode metallizations, by using one or more carrier wafers during the processing to gain access to both surfaces for metallization. Although the growth wafer may be silicon, the carrier wafer may be any material. The silicon wafer is affixed to the carrier wafer using an adhesive or other suitable material. The shape of each device 40 is defined by masking and etching. Various layers or regions may be doped using masked implantation or by doping the layers while being epitaxially grown. After the devices are formed on the wafer, trenches are photolithographically defined and etched in the front surface of the wafer around each device 40 down to the adhesive layer. A preferred shape of each device 40 is hexagonal. The trench etch exposes the underlying wafer bonding adhesive. The adhesive is then dissolved in a solution to release the devices 40 from the carrier wafer. Singulation may instead be performed by thinning the back surface of the carrier wafer until the devices 40 are singulated. The microscopic devices 40 are then uniformly infused in a solvent, including a viscosity-modifying polymer resin, to form an ink for printing, such as screen printing or flexographic printing.
(24) A similar technique may be used to form 2-terminal devices, such as a vertical diode, with one electrode on top and another electrode on the bottom. The diode may have a shape similar to that shown in
(25) Details regarding shaping vertical LEDs (2-terminal devices) in a wafer and then singulating the LEDs for printing as an ink are described in US application publication US 2012/0164796, entitled, Method of Manufacturing a Printable Composition of Liquid or Gel Suspension of Diodes, assigned to the present assignee and incorporated herein by reference. One skilled in the art may adapt such processes for forming the 3-terminal device 40 and non-LED diodes.
(26) The device 40 has two sections: a lower section 42 (or base portion) and an upper section 44. The upper section 44 is made relatively tall and narrow so that the devices 40 are rotated in the solvent, by fluid pressure, as they settle on the substrate surface. The devices 40 rotate to an orientation of least resistance. Over 90% like orientation has been achieved, although satisfactory performance may be achieved with over 75% of the devices 40 being in the same orientation.
(27) The lower section 42 should be shaped so that the device 40 sits flat on the substrate after the ink is cured.
(28) The device 40 includes a metal top electrode 46, a metal intermediate electrode 48, and a metal bottom electrode (not shown in
(29) The intermediate electrode 48 should be offset with respect to the middle of the device 40 so that an improper orientation of the device 40 after printing results in the intermediate electrode 48 not electrically contacting the intermediate conductor layer. In the example, the intermediate electrode 48 is below the middle of the device 40 (i.e., H2< H1).
(30) In
(31) If the substrate 50 does not already have metal traces formed on it as a flex-circuit, a conductor layer 52 (e.g., silver, aluminum, copper) is deposited on the substrate 50 such as by printing. Conductive vias 54 through the substrate 50 may be used to couple the conductor layer 52 to a metal layer 56 formed on the bottom surface of the substrate 50. In the various examples, the conductor layer 52 is printed as an array of circular spots on the substrate 50 (see
(32) The devices 40 are then printed on the conductor layer 52 such as by flexography or by screen printing with a suitable mesh to allow the devices 40 to pass through and control the thickness of the layer. Because of the comparatively low concentration, the devices 40 will be printed as a loose monolayer and be fairly uniformly distributed over the conductor layer 52. The printed locations of the devices 40 align with the locations of the printed spots of the conductor layer 52.
(33) The solvent is then evaporated by heat using, for example, an infrared oven. After curing, the devices 40 remain attached to the underlying conductor layer 52 with a small amount of residual resin that was dissolved in the ink as a viscosity modifier. The adhesive properties of the resin and the decrease in volume of resin underneath the devices 40 during curing press the bottom electrode 58 against the underlying conductor layer 52, making ohmic contact with it.
(34) A thin dielectric layer 60 is then printed to cover the conductor layer 52 and further secure the devices 40 in position. The dielectric layer 60 is designed to self-planarize during curing, by surface tension, so as to pull off of or de-wet the top electrode 46 and the intermediate electrode 48. Therefore, etching the dielectric layer 60 is not required. If the dielectric layer 60 covers the electrodes 46/48, then a blanket etch may be used to expose the electrodes 46/48.
(35) An intermediate conductor layer 62, aligned with the spots of the conductive layer 52, is then printed over the dielectric layer 60 to electrically contact the intermediate electrode 48 and is cured in an oven appropriate for the type of conductor being used. The various conductor layers may be metal (or contain metal) or be any other type of printable conductor layer.
(36) Another thin dielectric layer 64 is printed over the intermediate conductor layer 62 so as not to cover the top electrode 46.
(37) A top conductor layer 66, aligned with the spots of the intermediate conductor layer 62, is then printed over the dielectric layer 64 to electrically contact the top electrode 46 and is cured in an oven appropriate for the type of conductor being used.
(38) A thicker metal layer 68 may then be printed over the conductor layer 66 for improving electrical conductivity and/or heat conduction. The intermediate conductor layer 62 extends out from the edge of the spot to form a terminal of the group of the devices 40.
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(41) The printed devices 40 are connected in parallel by the conductor layers. Suitable operating voltages and control voltages are applied to the conductor layers to operate the devices 40. In the example of
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(44) If the devices 40 are to be connected as diodes, only conductor layers 62 and 52 or 66 and 62 may be used. Accordingly, the effective polarity of the diode may be selected by which two conductor layers are used to contact the diodes. Alternatively, two conducting layers may be connected remotely to form a diode.
(45) Any number of the devices 40 may be connected in parallel in a group for handling a wide range of currents. In one embodiment, about 10 devices 40 are located in each group. The groups of the devices 40 are printed as a 2-dimensional array of groups, such as by using a pattern on a roller in a flexography print process or by using a mask on a screen print mesh, and the various conductor layers may be similarly patterned so that the devices 40 in each group are connected in parallel, but each group is electrically isolated from one another. Therefore, each group forms a separate component. The groups may then be selectively interconnected using programming conductor traces on the substrate 50 to form more complex circuits, such as logic circuits. A metal flex-circuit pattern on the substrate 50 may be used to interconnect the groups of devices 40 for form the logic circuits. In one embodiment, since each group may be as small as a millimeter per side or a millimeter in diameter, a 2-dimensional array of such groups may exceed several thousand groups. Groups within a small area may be interconnected to form logic gates, and the terminals of the gates may be interconnected during programming to perform any logic function.
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(50) Resistors r1 and r2 are shown connected between the input terminals 80/82 and the bases for current control. Due to the simplicity of resistors, the resistive material may be directly patterned on the substrate with a patterned roller using flexography or a mask on a screen mesh used to print the resistive material. Either the shape of the resistive material may determine the resistance or the position of the connector along its length may determine the resistance. A resistor may also be included on each device 40. Capacitors may also be formed by printing the layers of the capacitors.
(51) The substrate 50 may contain hundreds or thousands of such AND gates, or other gates, and the gates may be interconnected to form more complex functions. In such a case, the gates are equivalent to a programmable gate array. For a more flexible circuit, the groups may be initially unconnected, and the programming mask for the interconnections may determine the final circuit. Three-dimensional programming may be used to allow the crossing over of traces. Any combination of gates and other logic circuitry may be created. Some groups may include transistors and other groups may contain other devices, such as diodes. Analog circuits may also be formed by interconnecting the various groups.
(52) Due to the random but substantially uniform distribution of the devices 40 in the ink, each group of the same area will have approximately the same number of devices 40. Minor differences in the number of devices 40 in a group will not affect the performance of a logic circuit. In one embodiment, there may be about 10 identical devices in each group due to the low currents required. The cost of the devices 40 in a single group, representing a single transistor, is about 0.143 cents. So the resulting circuit board may be made relatively inexpensively.
(53) As shown in
(54) In the example of
(55) In another embodiment, the groups of devices 40 may be initially interconnected proximate to the groups to form separate logic gates, such as AND, NAND, NOR gates, and the leads for each gate terminate in the patch area 86 for later programming to customize the substrate for a particular customer. Accordingly, the generic circuit forms a programmable gate array.
(56) A plurality of spaced patch areas may be provided on the circuit board 87 to simplify routing of the interconnections. In one embodiment, the terminals for all the input signals are provided on one level in a patch area, and the output terminals are provided on another level.
(57) If the programming of the interconnections is complex, directly printing the interconnections in an X-Y plane on the substrate 50 may be insufficient. Direct printing of conductors on the substrate is limiting, since a minimum spacing between conductors is about 30 microns to avoid cross-bridging, and thin conductors have a tendency to break up by surface tension.
(58) In situations where it is not desired for the conductor lines to be directly printed, a mask layer is first formed on the substrate followed by the deposition of the conductor ink over the mask layer as follows.
(59) One approach to pattern the interconnection traces, or to pattern any other traces on the circuit board 87, or to pattern the groups of devices 40, is to form hydrophobic masks. The masks may be deposited by printing (e.g., using a patterned roller or screen printing) or may be patterned by a photolithographic process (if printing cannot achieve the desired precision). One suitable masking substance is thoroughly cleaned diatomaceous earth particles infused in a solution as an ink. The ink is printed in a pattern that is negative to the desired wiring/device pattern. After curing, the resultant film is activated via a fluorination process, yielding a super-hydrophobic surface (i.e., it will not wet by the conductor ink or the device ink). The area of the substrate that is exposed by the film will be either mildly hydrophilic or super-hydrophilic (i.e., it will wet by the conductor ink or the device ink).
(60) For forming the traces, a hydrophilic conductive ink is prepared and deposited over the hydrophobic mask. The exposed substrate areas will be covered by the ink, and the conductive ink that has been deposited on the hydrophobic mask surface will pile up in the exposed areas. This yields a greater cross-sectional area of the conductive ink (for good conductivity and mechanical strength) and prevents cross-bridges.
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(62) After curing the conductive ink, a dielectric ink is then deposited over the same mask, where the dielectric ink contains sufficient surfactant to cover the mask surface and the conductors and neutralize the hydrophobic effects of the mask. Additional mask and trace layers may be formed to create a 3-dimensional matrix of interconnections. Vertical vias may be used for interconnections between conductor layers.
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(64) This general masking process may also be used for patterning the groups of devices 40 and conductor layers. Groups of the same or different devices may be stacked to allow the formation of very complex circuits.
(65) The programming process may be inexpensively performed in a roll-to-roll process on a large number of the flexible circuit boards 87 after the standard features of the circuit boards 87 have been formed. After the final programming, the circuit boards 87 may be singulated from the roll. As seen, no vacuum processing or dangerous materials are used to fabricate the circuit board 87 and program it.
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(68) Instead of vias, a wrap-around connector can be used.
(69) Since the substrate 108 may be a very thin and flexible film (like a flex-circuit), the resulting circuit board 106 may be folded to reduce its size. Flexible conductors formed by inks are commercially available. There may be special areas on the substrate 108 that define where the circuit board 106 may be folded without damage to the circuitry.
(70) To improve reliability and flexibility in the usage of the circuit boards, a base circuit board 120 (
(71) In the embodiment of
(72) In one embodiment, the circuit boards 122/124 are formed in a roll-to-roll process and, after testing, the adhesives are applied at the final station. The circuit boards 122/124 may have test tabs that are cut during singulation. After singulation, the circuit boards 122/124 are adhered to the base circuit board 120. As an arbitrary example, one circuit board 122 may be an A/D converter and the other one may be a D/A converter.
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(74) This technique can also be used with the double-sided circuit board of
(75) Using massively redundant arrays of devices (e.g., devices 40 in
(76) For higher densities of the groups of the devices, multiple insulated layers of the groups may be printed to form a 3-dimensional structure. Vertical vias may be used to gain access to the various layers. Groups of the devices may be connected in series using vertically aligned groups.
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(78) The various directional attributes used herein, such as bottom, top, and vertical, are not to be construed to convey absolute directions relative to the Earth's surface but are used to convey orientations relative to the enclosed figures when the drawing sheets are held upright. In an actual embodiment, such terms still apply to the product regardless of the absolute orientation of the product relative to the Earth's surface.
(79) While particular embodiments of the present invention have been shown and described, it will be obvious to those skilled in the art that changes and modifications may be made without departing from this invention in its broader aspects and, therefore, the appended claims are to encompass within their scope all such changes and modifications as fall within the true spirit and scope of this invention.