POWER ELECTRONICS MODULE

Abstract

A power electronics module includes a substrate with a substrate metallization layer, which is separated into conducting areas for providing conducting paths for the power electronics module; a semiconductor switch chip bonded with a first power electrode to a first conducting area of the substrate metallization layer; a conductor plate bonded to a second power electrode of the semiconductor switch chip opposite to the first power electrode.

Claims

1-15. (canceled)

16. A power electronics module, comprising: a substrate with a substrate metallization layer, which is separated into conducting areas for providing conducting paths for the power electronics module; a semiconductor switch chip bonded with a first power electrode to a first conducting area of the substrate metallization layer; a conductor plate bonded to a second power electrode of the semiconductor switch chip opposite to the first power electrode; a gate conductor bonded to a gate electrode of the semiconductor switch chip besides the second power electrode; wherein the conductor plate extends to a second conducting area of the substrate metallization layer and the gate conductor runs through an opening in the conductor plate arranged above the gate electrode; wherein the gate conductor comprises a bond wire; wherein the conductor plate is a metal clip; wherein a bonding preform is bonded onto the metal clip; and wherein a second semiconductor chip is bonded with a first power electrode onto the bonding preform.

17. The power electronics module of claim 16, wherein the opening in the conductor plate is a through-hole.

18. The power electronics module of claim 16, wherein the gate conductor extends over the conductor plate.

19. The power electronics module of claim 16, wherein the metal clip is bonded with a first end to the second power electrode and the metal clip is bonded with a second end to the second conducting area of the substrate metallization layer; and wherein a gate conductor substrate is attached onto the second end of the metal clip, which gate conductor substrate has a gate metallization layer to which the bond wire is bonded.

20. The power electronics module of claim 16, wherein the bonding preform is a sintering preform with a core of a metal material and two outer layers of sintering material, adapted for sintering the metal clip and the second semiconductor chip to the bonding preform.

21. The power electronics module of claim 16, wherein a second metal clip is bonded to a second power electrode of the second semiconductor chip opposite to the first power electrode; and wherein the second metal clip is bonded to the first conducting area of the substrate metallization layer.

22. The power electronics module of claim 21, wherein a top substrate with a metallization layer is attached to the second metal clip above the second semiconductor chip; and wherein at least one of an electric component and electronics component is attached to at least one of the second metal clip and the top substrate.

23. The power electronics module of claim 17, wherein the gate conductor extends over the conductor plate.

24. The power electronics module of claim 17, wherein the metal clip is bonded with a first end to the second power electrode and the metal clip is bonded with a second end to the second conducting area of the substrate metallization layer; and wherein a gate conductor substrate is attached onto the second end of the metal clip, which gate conductor substrate has a gate metallization layer to which the bond wire is bonded.

25. The power electronics module of claim 18, wherein the metal clip is bonded with a first end to the second power electrode and the metal clip is bonded with a second end to the second conducting area of the substrate metallization layer; and wherein a gate conductor substrate is attached onto the second end of the metal clip, which gate conductor substrate has a gate metallization layer to which the bond wire is bonded.

26. The power electronics module of claim 17, wherein the bonding preform is a sintering preform with a core of a metal material and two outer layers of sintering material, adapted for sintering the metal clip and the second semiconductor chip to the bonding preform.

27. The power electronics module of claim 18, wherein the bonding preform is a sintering preform with a core of a metal material and two outer layers of sintering material, adapted for sintering the metal clip and the second semiconductor chip to the bonding preform.

28. The power electronics module of claim 19, wherein the bonding preform is a sintering preform with a core of a metal material and two outer layers of sintering material, adapted for sintering the metal clip and the second semiconductor chip to the bonding preform.

29. The power electronics module of claim 17, wherein a second metal clip is bonded to a second power electrode of the second semiconductor chip opposite to the first power electrode; and wherein the second metal clip is bonded to the first conducting area of the substrate metallization layer.

30. The power electronics module of claim 18, wherein a second metal clip is bonded to a second power electrode of the second semiconductor chip opposite to the first power electrode; and wherein the second metal clip is bonded to the first conducting area of the substrate metallization layer.

31. The power electronics module of claim 19, wherein a second metal clip is bonded to a second power electrode of the second semiconductor chip opposite to the first power electrode; and wherein the second metal clip is bonded to the first conducting area of the substrate metallization layer.

32. The power electronics module of claim 20, wherein a second metal clip is bonded to a second power electrode of the second semiconductor chip opposite to the first power electrode; and wherein the second metal clip is bonded to the first conducting area of the substrate metallization layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0054] The subject-matter of the invention will be explained in more detail in the following text with reference to exemplary embodiments which are illustrated in the attached drawings.

[0055] FIG. 1 schematically shows a cross-sectional view of a power electronics module according to an embodiment of the invention.

[0056] FIG. 2 schematically shows a cross-sectional view of a power electronics module according to a further embodiment of the invention.

[0057] FIG. 3 schematically shows a cross-sectional view of a power electronics module according to a further embodiment of the invention.

[0058] FIG. 4 schematically shows a cross-sectional view of a power electronics module according to a further embodiment of the invention.

[0059] FIG. 5 schematically shows a cross-sectional view of a power electronics module according to a further embodiment of the invention.

[0060] FIG. 6 schematically shows a cross-sectional view of a power electronics module according to a further embodiment of the invention.

[0061] FIG. 7 schematically shows a top view of a power electronics module according to a further embodiment of the invention.

[0062] The reference symbols used in the drawings, and their meanings, are listed in summary form in the list of reference symbols. In principle, identical parts are provided with the same reference symbols in the figures.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[0063] FIG. 1 shows a power electronics module 10, which comprises a substrate 12, for example a ceramics substrate, with a metallization layer 14 on a top side. The metallization layer 14, which may be a copper layer, may be intersected into several conducting areas 16, 18. The conducting area 16 may be connected with a DC terminal 20 or AC terminal 22 of the power electronics module (see FIG. 7). The conducting area 18 may be connected with an AC terminal 22 or DC+ terminal 24.

[0064] On the conducting area 16, a semiconductor switch chip 26 is bonded with a first, bottom electrode 28. The semiconductor switch chip 26 may be based on SiC and/or may provide an IGBT or MOSFET. On the other, upper side, the semiconductor switch chip 28 comprises a second, upper power electrode 30 and besides the power electrode 30, a gate electrode 32. The semiconductor switch chip 26 may have a substantially planar body and/or the electrodes 28, 30 32 may be substantially planar metal layers.

[0065] The power electrode 30 is bonded with a first end of a metal clip 34, which may be seen as a conductor plate 34, which is bonded with a second end to the conducting area 16. The metal clip may be made from a copper plate or sheet. The metal clip 34 is folded, such that its ends are on the level of the power electrode 30 and the conducting area 16 and such that a middle part 36 is elevated with respect to the power electrode 30. In the middle part 36, the metal clip 34 comprises an opening 38, which is situated above the gate electrode 30. Indicated by the dashed line, the parts of the metal clip 34 are interconnected with each other outside of the opening 38. As shown in FIG. 7, the opening 38 may be a through-hole, which may be centered in the metal clip 34.

[0066] Returning to FIG. 1, a gate conductor 40 in the form of a bond wire 40 is guided through the opening 38 and bonded with one end to the gate electrode 32. With the other end, the bond wire 40 is bonded to a gate conductor substrate 42, which may comprise an electrically isolating middle layer 44 and two outer electrically conducting layers 46, 48. With the layer 46, the gate conductor substrate 42 may be bonded onto an upper side of the end of the metal clip 34, which is bonded to the conducting area 16. The bond wire 40 is bonded to a gate conductor layer 48. The gate conductor substrate 42 may be a printed circuit board or a direct bonded copper ceramics substrate.

[0067] As shown in FIG. 7, the gate conductor substrate 42 may be designed like a stripline that is guided via several metal clips 34.

[0068] The bond wire 40 extends in the same direction as the metal clip 34. Due to the opening 38 in the metal clip 34, the bond wire 40 runs above the metal clip 34 and together with the gate conductor substrate 42 on the metal clip 34, the stray inductance of the gate-emitter loop is reduced.

[0069] Furthermore, the arrangement of the components of the power electronics module 10 is compact and the power density may be enhanced.

[0070] FIG. 2 shows that a second semiconductor chip 50 may be stacked with the semiconductor chip 18. The semiconductor chip 50 is bonded with a bottom electrode 52 via a bonding preform 54 to an upper side of the end of the metal clip 34, which is bonded to the semiconductor chip 18.

[0071] The bonding preform 54 may be made of a metal core 56 to which two layers 58 of sinter material are attached. For example, the core 56 may be made of Ag or Cu and/or the sinter layers 58 may be made of Ag particles, such as nano Ag particles. The core 56 of the bonding preform 54 may be adjusted so that a sufficient gap distance is provided to insulate an edge termination of the second semiconductor chip 50. For example, the gap distance may be 150 m to isolate 1.2 kV rated chips 26, 50.

[0072] An upper electrode 60 of the second semiconductor chip 50 may be connected with bond wires 61 with the first conducting area 18. The second semiconductor chip 50 may provide a diode, which is connected antiparallel to the switch of the first semiconductor chip 26 in this way.

[0073] FIG. 3 shows that alternatively the upper electrode 60 of the second semiconductor chip 50 may be connected with a further metal clip 62, which may be made of copper, with the first conducting area 18. Like the metal clip 34, the metal clip 62 may be folded to compensate the level difference between the electrode 60 and the conducting area 18.

[0074] As shown in FIG. 7, the second metal clip 62 may be oriented in a different direction as the metal clip 34. The end of the second metal clip 62, which is connected to the metallization layer 14, may extend in a different direction from the stack of semiconductor chips 26, 50 as the end of the first metal clip 34. In FIG. 7, the metal clips 34, 62 are oriented orthogonal with respect to each other.

[0075] Returning to FIG. 3, on top of the end of the metal clip 62, which is bonded to the upper electrode 60 of the semiconductor chip 50, a component 64 of the power electronics module 10 may be attached. Such a component 64 may be a terminal, which protrudes directly above the stack of semiconductor chips 26, 50 from the power electronics module 10. The component 64 also may be a temperature sensor or other sensor.

[0076] As shown in FIG. 4, on top of the end of the metal clip 62, which is bonded to the upper electrode 60 of the semiconductor chip 50, a further substrate 66 may be bonded, which may carry such a component 64. The further substrate 66 may comprise an electrical isolating core 68 and two outer electrically conducting layers 70. For example, the further substrate may be a printed circuit board or a direct bonded copper substrate.

[0077] The manufacturing of the power electronics module 10 may be performed in the following way:

[0078] In a first step, the semiconductor switch chip 26 may be bonded to the substrate 12 and the metal clip 34 may be bonded to the semiconductor switch chip 26 and the conducting area 16.

[0079] In a second step, the second semiconductor chip 50 may be bonded to the metal clip 62. Alternatively, the bond wires 61 may be bonded after the next, third step.

[0080] In the third step, the sintering preform 54 is placed on the semiconductor switch chip 26 and the semiconductor chip 50 optionally together with the metal clip 62 is bonded to the semiconductor switch chip 26 via a sintering process.

[0081] All bonding processes between bonding interfaces of the power electronics module may be realized by Ag sintering. To allow for good manufacturability, the metal clips 34, 62 may have pre-applied sinter paste at the bonding interfaces.

[0082] FIGS. 5 and 6 show alternative embodiments, in which the second semiconductor chip 50 is embedded into a printed circuit board 72, which is attached on top of the first semiconductor chip 26.

[0083] The printed circuit board 72 has several metallization layers 34, 74, 76, 78, 80. The metallization layer 34, which is provided on the bottom side of the a plastics body of the printed circuit board 72, is bonded at one end to the upper power electrode 30 of semiconductor switch chip 26 and may be seen as conducting plate 34. On the other end, the metallization layer 34 is bonded to an electrically conducting spacer 82, which may be made of a copper block and/or which is bonded to the conducting area 16.

[0084] The metallization layer 34 has an opening 38, in which the metallization layer 76 is arranged, which is also provided on the bottom side of the printed circuit board 72. The metallization layer 76 is interconnected with a via with the metallization layer 74, which together with the metallization layer 76 forms a gate conductor 40. The metallization layer 76 is bonded to the gate electrode of the semiconductor chip 26.

[0085] The metallization layer 80 is also provided on the bottom side of the printed circuit board 72 and is bonded to a further electrically conducting spacer 84, which may be made of a copper block and/or which is bonded to the conducting area 18. The semiconductor switch chip 50 is interconnected via the metallization layer 78 and vias with the metallization layer 34 and the metallization layer 80.

[0086] FIG. 6 shows that also the plastics body of the printed circuit board 72 may have an opening 86 that is arranged above the opening 38. Through both openings 38, 86, a bond wire 88, which is bonded to the gate electrode 32, may be guided, which on its other end may be bonded to a top side of the printed circuit board. There, the bond wire 88 may be interconnected with the metallization layer 76, for example with a via. In this case, the gate conductor 40 also may comprise the bond wire 88.

[0087] FIG. 7 shows a power electronics module 10 with two pairs of stacks of two semiconductor chips 26, 50, which may be designed like shown in FIGS. 3 and 4. Each pair of stacks is connected in parallel and forms an arm of a half-bridge. The DC- terminals 20, the AC terminals 22 and the DC+terminals 24 provide interconnections to this half-bridge. Furthermore, the power electronics module 10 provides gate terminals 90 and auxiliary emitter terminals 92, which are arranged side by side for each pair of paralleled stacks.

[0088] The gate terminals 90 are connected via wire bonds with the gate conductor substrates 42 and the gate signals are conducted via the striplines provided by the gate conductor substrates 42 above the conducting areas 16 and the ends of the metal clips 34 after that the gate signals are conducted by the wire bonds 40, which run above the metal clips 34 and into the openings 38. This results in a low inductance, low coupling and a low footprint.

[0089] While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive; the invention is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art and practising the claimed invention, from a study of the drawings, the disclosure, and the appended claims. In the claims, the word comprising does not exclude other elements or steps, and the indefinite article a or an does not exclude a plurality. A single processor or controller or other unit may fulfil the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.

LIST OF REFERENCE SYMBOLS

[0090] 10 power electronics module [0091] 12 substrate [0092] 14 metallization layer [0093] 16 conducting area [0094] 18 conducting area [0095] 20 DC terminal [0096] 22 AC terminal [0097] 24 DC+ terminal [0098] 26 semiconductor switch chip [0099] 28 power electrode [0100] 30 power electrode [0101] 32 gate electrode [0102] 34 metal clip [0103] 36 middle part [0104] 38 opening [0105] 40 gate conductor, bond wire [0106] 42 gate conductor substrate [0107] 44 isolating middle layer [0108] 46 electrically conducting layers [0109] 48 gate conductor layer [0110] 50 semiconductor chip [0111] 52 power electrode [0112] 54 bonding preform [0113] 56 metal core [0114] 58 bonding layer [0115] 60 power electrode [0116] 61 bond wire [0117] 62 metal clip [0118] 64 electric/electronic component [0119] 66 further substrate [0120] 68 electrical isolating core [0121] 70 electrically conducting layer [0122] 72 printed circuit board [0123] 34 conductor plate, metallization layer [0124] 40 gate conductor [0125] 74 metallization layer [0126] 76 metallization layer [0127] 78 metallization layer [0128] 80 metallization layer [0129] 82 electrically conducting spacer [0130] 84 electrically conducting spacer [0131] 86 opening [0132] 88 bond wire [0133] 90 gate terminal [0134] 92 auxiliary emitter terminal