Tool head and glass or glass ceramic article producible using the tool head

Abstract

A tool head capable of introducing deep recesses into hard and brittle material such as glass and glass ceramics is provided. The tool head includes a hollow cylindrical abrasive body merging into a hollow shank. The hollow cylindrical abrasive body has an end face with a central abrasive area at the location of a cylinder axis. The central abrasive area is connected with the inner wall surface of the hollow cylindrical abrasive body by at least one web. The end face of the abrasive body, the web, and at least a portion of the outer wall surface of the abrasive body are covered with abrasive. The hollow shank has at least one opening to the interior between the at least one web and the inner wall surface of the abrasive body.

Claims

1. A glass or glass ceramic element, comprising: a block of glass or glass ceramic having a top surface and a bottom surface; and a blind hole ground into the block of glass or glass ceramic rectilinearly from the top surface to a location near the bottom surface to define an open end at the top surface and a closed end in an interior of the block of glass or glass ceramic near the bottom surface, wherein the blind hole has a depth that is at least five times as great as a diameter thereof, and wherein the blind hole has a lateral wall surface with a minimum radius of at least 6 millimeters.

2. The glass or glass ceramic element as in claim 1, wherein the block of glass or glass ceramic is configured as a mirror support for telescopes.

3. The glass or glass ceramic element as in claim 1, wherein the block of glass or glass ceramic is configured as semiconductor manufacturing support.

4. The glass or glass ceramic element as in claim 1, wherein the blind hole has a ratio of the depth of the blind hole to the minimum radius is greater than 10:1.

5. The glass or glass ceramic element as in claim 1, wherein the closed end of the blind hole has a planar bottom.

6. The glass or glass ceramic element as in claim 1, wherein the lateral wall surface has a mean roughness value of smaller than 6 m.

7. The glass or glass ceramic element as in claim 1, further comprising a plurality of blind holes that extend side-by-side and having a minimum distance between wall surfaces of adjacent blind holes that is not more than 15 mm.

8. The glass or glass ceramic element as in claim 7, wherein the minimum distance is not more than 10 millimeters.

9. The glass or glass ceramic element as in claim 1, wherein the blind hole has a cross-sectional along a longitudinal extension defined from the top surface to the bottom surface that is uniform.

10. The glass or glass ceramic element as in claim 1, wherein the blind hole has a cross section along a longitudinal extension defined from the top surface to the bottom surface that is circular.

11. The glass or glass ceramic element as in claim 1, wherein the blind hole has a cross section along a longitudinal extension defined from the top surface to the bottom surface that is square or rectangular with rounded corners.

12. The glass or glass ceramic element as in claim 1, wherein the blind hole has a cross section along a longitudinal extension defined from the top surface to the bottom surface that comprises rectilinear wall sections interconnected by circularly curved wall sections.

13. The glass or glass ceramic element as in claim 1, wherein the depth is at least ten times as great as the diameter.

14. The glass or glass ceramic element as in claim 1, wherein the block of glass or glass ceramic has an outer surface, the lateral wall surface has a minimum distance to the outer surface that is not more than 15 mm.

15. The glass or glass ceramic element as in claim 14, wherein the minimum distance is not more than 10 millimeters.

16. The glass or glass ceramic element as in claim 1, wherein the lateral wall surface and the closed end of the blind hole are ground surfaces.

17. The glass or glass ceramic element as in claim 1, further comprising: a second blind hole ground into the block of glass or glass ceramic rectilinearly from the top surface to a second closed end in the interior of the block of glass or glass ceramic near the bottom surface; and a lateral channel ground into the block of glass or glass ceramic from the blind hole to the second blind hole in the interior of the block of glass or glass ceramic near the bottom surface.

18. The glass or glass ceramic element as in claim 17, wherein the second blind hole has a depth that is at least five times as great as a diameter thereof.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The invention will now be explained in more detail by way of exemplary embodiments and with reference to the accompanying drawings. In the drawings the same reference numerals designate the same or equivalent elements. In the drawings:

(2) FIG. 1 is a schematic view of a tool head;

(3) FIGS. 2 to 4 are plan views of the end face of the tool head;

(4) FIGS. 5 and 6 are plan views of a recess while the recess is being produced using a tool head;

(5) FIG. 7 is a cross-sectional view of a glass or glass ceramic element;

(6) FIG. 8 illustrates the cross-sectional shape of a recess; and

(7) FIG. 9 is a photograph of a glass ceramic block including a recess.

DETAILED DESCRIPTION

(8) FIG. 1 shows a perspective view of an exemplary embodiment of a tool head 1 according to the invention.

(9) Tool head 1 comprises an abrasive body 10 which has the basic shape of a hollow cylinder. Abrasive body 10 merges into a shank 7. That means, the abrasive body 10 may be attached to the shank, or shank and abrasive body 10 are integrally formed, for example turned from a tube of a suitable diameter. Shank 7 also has the shape of a hollow cylinder. Without being limited to the specific embodiment shown in FIG. 1, shank 7 preferably has a smaller diameter than abrasive body 10, in order to facilitate the milling and/or drilling of recesses of a depth greater than the axial length of the abrasive body 10. Generally, without being limited to the specific example shown in FIG. 1, the abrasive body 10 is integrally formed according to one embodiment, in particular as a molded body. To this end, abrasive body 10 including the one or more web(s) may be milled from a metal body, for example, or may be produced in a casting process. Furthermore, it is possible that the webs are welded to a hollow cylindrical base body of the abrasive body.

(10) The shank serves to clamp the tool head in the chuck of a drilling and/or milling device. Recesses are then introduced by rotating the tool head 1 around its cylinder axis 13 and axially and/or radially advancing tool head 1.

(11) The abrasive body 10 is covered with an abrasive 25 which causes the removal of material when introducing a recess into a hard and brittle material. The surfaces of the abrasive body provided with abrasive 25 are marked with a dotted shading.

(12) As can be seen from FIG. 1, abrasive 25 is also provided in the center of the tool, or at the location of cylinder axis 13. To this end, two webs 17, 18 are provided in this embodiment, which extend from opposite locations at the inner wall surface 20 of abrasive body 10 and meet at the location of cylinder axis 13 and which are covered with abrasives 25. In this manner, a central abrasive area 15 is defined at and around the area of cylinder axis 13 at the end face 12 of the abrasive body. The specific configuration of the illustrated example may also be interpreted as a single web 17 extending through the center of the tool or the intersection point of the imaginary cylinder axis with the plane of end face 12. Accordingly, a central abrasive area 15 is arranged at the location of cylinder axis 13 of abrasive body 10, which is connected by at least one web 17, 18 to the inner wall surface 20 of hollow cylindrical abrasive body 10. The end face 12 of abrasive body 10, the one or more web(s) 17, 18 with central abrasive area 15, and at least a portion of the outer wall surface 22 of abrasive body 10 are covered with abrasive 25.

(13) Without being limited to the specific example illustrated, the at least one web is preferably covered with abrasive throughout its radial extension, in particular with abrasive grits. That means, it is preferred to not just provide individual, radially spaced grinding tools or grinding elements on the one or more webs. A continuous coating with abrasive on the one or more webs 17, 18, as shown in FIG. 1 and as it is generally preferred provides for a high material removal rate on the one hand, and at the same time for smooth running of the tool head. It is particularly preferred that the central abrasive area and the end face of the hollow cylindrical basic body are likewise continuously covered with abrasive, which means the entire end face.

(14) The smooth running achieved by virtue of the geometry of tool head 1 makes it possible to use very long tools. According to one embodiment of the invention it is therefore contemplated that the diameter of shank 7 is not more than 1:10, preferably not more than 1:15 of the length of the tool head measured from end face 12 of abrasive body 10 until the end of shank 7. According to yet another embodiment of the invention, the length of the tool head 1 as defined above is more than 60 mm, preferably more than 120 mm. Optionally, a multi-part shank 7 may be provided, with abutted axial shank portions in order to obtain a long tool head 1 for drilling or milling deep recesses.

(15) The abrasive 25 on the outer wall surface 22 provides for removal of material when radially advancing the tool head, the abrasive 25 on the end face and the webs 17, 18 which as well form the central abrasive area 15 provides for removal of material when axially advancing the tool head.

(16) Generally, without being limited to the illustrated exemplary embodiment, at least one opening 27 to the interior of abrasive body 10 and hollow shank 7 remains between webs 17, 18 and the inner wall surface 20 of abrasive body 10. In the embodiment shown in FIG. 1, two openings 27 are defined due to the webs 17, 18 joint to each other, or the continuous web.

(17) Because of the at least one opening, the end face is not closed. Opening 27 in particular serves to receive removed material, and optionally to supply coolant and/or lubricant.

(18) Preferably, without being limited to the particular embodiment of FIG. 1, the end face 12 of the hollow cylinder of the abrasive body and the other abrasive elements at the end face are arranged in a single plane. This makes it possible, inter alia, to produce recesses with a flat bottom. Moreover, such a planar configuration has proved suitable to prevent vibrations of the tool head 1. Therefore, according to one embodiment of the invention, without being limited to the exemplary embodiment of FIG. 1, it is contemplated that the central abrasive area 15 and the at least one web 17, 18 are at the same level as the end face 12, so that the end face 12, the at least one web 17, 18, 19, and the central abrasive area 15 form an abrasive surface in a plane defined by end face 12 and interrupted by the at least one opening 27.

(19) Generally, the abrasive 25 particularly preferably comprises abrasive grits, preferably diamond abrasive grits, which are embedded in a matrix. Besides diamond, for example corundum, silicon carbide, or another hard material is conceivable as an abrasive.

(20) Also, particularly preferred are abrasive grits sintered into a metal matrix. A metal matrix with embedded abrasive grits may also be produced by galvanic deposition. A metal matrix is preferred because of the good heat dissipation into the abrasive body 10. A plastic matrix or a ceramic including abrasives would optionally also be conceivable.

(21) FIGS. 2 to 4 are plan views of the end face of abrasive body 10, illustrating several other embodiments of the arrangement and configuration of webs.

(22) In the exemplary embodiment shown in FIG. 2, a single web 17 is connected to the inner wall surface 20 of abrasive body 10 at one end thereof. The free end of web 17 forms a central abrasive area 15 at the location of cylinder axis 13 and the area surrounding cylinder axis 13. Accordingly, only a single opening 27 is provided.

(23) The embodiment of FIG. 3 is particularly preferred. Here, three webs 17, 18, 19 are provided which extend from inner wall surface 20 and meet in the center of the tool. The region at which webs 17, 18, 19 meet forms the central abrasive area 15 at cylinder axis 13 and surrounding cylinder axis 13. Accordingly, there are three openings 27 resulting in this embodiment, between webs 17, 18, 19 and inner wall surface 20. The configuration with three webs 17, 18, 19 is particularly preferred in terms of mechanical stability. There may as well be more than three webs, for example four, five, or six webs, or spokes. On the other hand this would increase production costs and the total area of openings 27 would be reduced.

(24) FIG. 4 shows a variation of the configuration with two webs 17, 18 shown in FIG. 1. In contrast to the embodiment shown in FIG. 1, the two spokes or webs 17, 18 are formed with a curved shape in the example shown in FIG. 4.

(25) For mechanical stability it is generally favorable to provide a plurality of webs 17, 18, 19, which are arranged in rotationally symmetric manner with respect to the cylinder axis 13 of abrasive body 10 for connecting the central abrasive area 15 with the inner wall surface 20 of hollow cylindrical abrasive body 10. This is the case in the embodiments of FIG. 1, FIG. 3, and FIG. 4.

(26) It is generally preferred that the total surface area of the one or more web(s) 17, 18, 19 and the central abrasive area 15 together is less than the total area of the one or more opening(s) 27 interrupting the abrasive face. This turns out to be advantageous for smooth running and to prevent vibrations of tool head 1. The aforementioned condition is satisfied in all the exemplary embodiments of FIGS. 1 to 4.

(27) Referring to FIGS. 5 and 6, it will be explained why a tool head 1 according to the invention permits to introduce recesses that are very deep in relation to their cross-sectional area and have very smooth walls, into hard and brittle materials such as in particular glass or glass ceramics.

(28) FIG. 5 shows a plan view of a recess 33 in a hard and brittle material 5 while the recess is being produced using a tool head 1. The tool head shown in FIG. 5 is a conventional tool with an annular head. In order to introduce a recess of circular cross section having a diameter of 40 millimeters, such as in the example shown, the diameter of tool head 1 is 22 millimeters. The diameter cannot be chosen larger, since otherwise material would remain in the center 330 of recess 33, which might break out at an effective length or might stop the axial advance of tool head 1. This example shows that the diameter of the tool head must always be much smaller than the diameter or, more generally, the cross-sectional dimension of the recess. However, in case of a great depth of the recess this quickly leads to instabilities of the tool, so that it is not possible to produce smooth walls.

(29) For comparison, FIG. 6 shows a tool head 1 of the invention while introducing a recess 33 of the same dimensions. By way of example, tool head 1 is of the configuration as shown in FIG. 3, having three ribs 17, 18, 19 arranged in rotationally symmetrical manner. Due to the abrasive provided at the webs and at the central abrasive area 15, the center 330 of recess 33 is processed even when the outer rim or the end face 12 of the hollow cylindrical abrasive body always rests away from center 330. Therefore, it is possible to use an abrasive body 10 with a larger diameter in relation to the cross-sectional area of recess 33. In the example shown, abrasive body 10 has a diameter of 34 millimeters. Thus, for the same transverse dimension of recess 33, a larger abrasive body 10 can be used, when compared to a tool as shown in FIG. 5, which significantly improves smooth running of tool head 1. The deeper a recess is introduced, the more critical is smooth running.

(30) The minimum diameter of a recess 33 is of course dependent on the diameter of tool head 1. Without being limited to the exemplary embodiments shown in the figures, an abrasive body 10 is preferred that has a diameter of at least 5 millimeters. Particularly suitable are diameters of the abrasive body 10 from 5 to 60 millimeters.

(31) In this manner, the invention permits to produce novel glass and glass ceramic articles. The method of the invention for processing a glass or glass ceramic article is based on the steps of providing a glass or glass ceramic element; and grinding therein a recess using a tool head according to the invention, which preferably has a radius of at least 6 millimeters, the recess preferably extending rectilinearly into the glass or glass ceramic element from an open end at the surface of the glass or glass ceramic element, by driving the tool head 1 to rotate around its cylinder axis; and while being rotated, axially advancing the tool head into the glass or glass ceramic element, incrementally or continuously, thereby removing the material of the glass or glass ceramic element by means of the abrasive body of the tool head. The resulting abraded material may be removed through the hollow abrasive body 10, in particular using a cooling fluid supplied through the hollow shank.

(32) Elements made of glass or glass ceramic material with low thermal expansion are processed particularly preferably. Low expansion glass ceramics that can be used in particular include lithium aluminosilicate glass ceramics. For example, suitable glass ceramics are available under the name of Zerodur from Schott AG, or under the name of Clearceram from Ohara Inc. According to one embodiment of the invention, the composition of preferred low expansion glass ceramic elements comprises components Li.sub.2O, Al.sub.2O.sub.3, and SiO.sub.2 in the following amounts, in percent by weight (on oxide basis):

(33) Li.sub.2O: 2-5.5 wt %

(34) Al.sub.2O.sub.3: 17-32 wt %

(35) SiO.sub.2: 50-70 wt %, preferably at most 62 wt %

(36) P.sub.2O.sub.5: 3-12 wt %

(37) ZrO.sub.2: 0-5 wt %, preferably at least 1 wt %

(38) TiO.sub.2: 1-5 wt %.

(39) Another suitable low expansion material is titanium-doped quartz glass. Such a glass is available, for example, under the name of ULE from Corning Incorporated.

(40) A glass or glass ceramic material of low thermal expansion in particular refers to a material exhibiting a median coefficient of thermal expansion, e.g. specified for a temperature interval from 0 C. to 50 C. (Coefficient of Thermal Expansion CTE(0;50)) in a range from 0100 ppb/K, preferably in a range from 050 ppb/K, more preferably in a range from 020 ppb/K, most preferably in a range from 010 ppb/K.

(41) FIG. 7 shows a schematic cross section through such a glass or glass ceramic element 30 that can be produced by processing using a tool head 1 according to the invention. Glass or glass ceramic element 30 has at least one ground-in recess 33. In the example shown in FIG. 7, a plurality of recesses 33 have been introduced, here specifically three, which extend in parallel to each other. Further, recesses 33 extend rectilinearly from their open end 36 at surface 31 of the glass or glass ceramic element 30 to bottom 331 of the respective recess 33.

(42) Recesses 33 have a ratio of depth or length of the recess 33 to a minimum radius thereof of greater than 10:1. In case of a circular cross section of the recess 33, without limitation to the illustrated exemplary embodiment, this will generally result in a ratio of the depth of recess 33, i.e. its longitudinal dimension as measured from open end 36 to bottom 331, to the diameter of at least 10:1. In the example shown in FIG. 7, this ratio is about 15:1, which is identifiable from the length and height of recesses 33.

(43) According to another exemplary embodiment, a recess of a depth of 320 millimeters was produced in a glass ceramic using a tool head with a diameter of 34 millimeters. Thus, the ratio of the depth to the minimum radius of the cross-sectional area is 18.8:1. In case of a circular cross section, the ratio of depth to diameter is 9.4:1. Such recesses are easily produced with the tool head 1 according to the invention.

(44) As already mentioned above, tool head 1 is distinguished by smooth running which in turn allows to obtain very smooth walls. Without being limited to the exemplary embodiments, it is contemplated according to one embodiment of the invention that the mean roughness of the lateral wall surface 332 of recess 33 has a value of R.sub.a of smaller than 6 m. If, for example, the recess in the glass or glass ceramic material is stepped from an incremental advancement of the tool head and milling a range in height, the above value is true for surface areas except for the steps. Even an average roughness from 0.1 m to 5 m may be achieved. Typical values are in a range from 0.5 to 3.5 m. Therefore, the roughness is preferably not more than 5 m, more preferably not more than 3.5 m.

(45) The smoothest walls may be produced when drilling recesses 33. In contrast to milling, during drilling the tool head 1 is only axially advanced into the glass or glass ceramic material. Generally it is surprising here that the central abrasive area 15 allows for drilling within an appropriate time at all, as the circumferential speed of the abrasive 25 at the location of the cylinder axis is equal to zero.

(46) As likewise schematically illustrated by the example of FIG. 7, even very thin-walled structures may be produced in glass or glass ceramics, since due to the smooth running of tool head 1 damage can be avoided when introducing recess 33, in particular cracks in wall surface 332. Also, drifting of tool head 1 is avoided. Therefore, the minimum distance between the wall surface 332 of a recess 33 and a surface of the glass or glass ceramic element 30 may be not more than 15 mm, preferably not more than 10 mm. This distance may for example be the distance to an external surface of the glass or glass ceramic element 30, such as e.g. the distance from the wall surface 332 of the lowermost recess 33 in FIG. 7 to the lateral surface 333 of the glass or glass ceramic element 30.

(47) Thin walls may also be produced between two adjacent recesses 33, which is likewise schematically illustrated FIG. 7 by way of example. According to one embodiment of the invention, without being limited to the exemplary embodiment, it is therefore contemplated that a plurality of recesses 33 are provided, which preferably extend side by side, wherein a minimum distance between the wall surfaces 332 of two adjacent recesses is not more than 15 millimeters, preferably not more than 10 millimeters. In a practical exemplary embodiment, a wall thickness of merely 5 millimeters was verified in a ZERODUR glass ceramic block, with a depth of the recesses 33 of 320 millimeters.

(48) Due to the preferred design of the end face of tool head 1, according to which the central abrasive area 15, the end face of the hollow cylindrical portion of the abrasive body and the abrasive areas at the one or more web(s) are in a single plane, the recess 33 preferably has a flat bottom 331, as in the illustrated example.

(49) FIG. 8 shows an exemplary embodiment of a typical cross-sectional shape of a recess 33. The cross section has the shape of a square or rectangle with rounded corners.

(50) Wall surface 332 of recess 33 comprises short rectilinear wall sections 335 which are interconnected by circularly curved wall sections 336. In a practical exemplary embodiment, a recess 33 was produced with a radius of the curved wall sections 336 of 19 millimeters and rectilinear wall sections of a width of 5 millimeters. This cross-sectional shape corresponds to the shape in FIG. 8. With a depth of the recess 33 of 320 millimeters, a resulting ratio of depth to minimum radius is 320/19=16.8.

(51) FIG. 9 shows a photograph of an inventive glass or glass ceramic element 30. Specifically, this is a ZERODUR glass ceramic block. A recess 33 has been introduced into this block. In order to make the recess 33 visible in the glass ceramic block, lateral surface 333 has been coated with oil in the region of recess 33.

(52) The surface region provided with oil is now clearly translucent. Recess 33 has a cross sectional shape corresponding to the exemplary embodiment shown in FIG. 8. At the end of recess 33 near bottom 331, two lateral channels 38 were introduced. These lateral channels 38 were likewise introduced using the tool head according to the invention, specifically not by milling, but by drilling.

(53) Accordingly, it is generally also possible to produce intercommunicating recesses which meet in the interior of the glass or glass ceramic element.

(54) The invention is not only limited to the exemplary embodiments of the invention, rather it may be varied in many ways within the scope of the subject matter of the appended claims. In particular, features of individual exemplary embodiments may be combined. The invention will find application, inter alia, for producing light-weight stable supports, in particular from glass or glass ceramics. Such supports may be used in semiconductor manufacturing for the exposure of semiconductor wafers, or as a mirror support for telescopes. Accordingly, the invention also relates to a support, in particular a glass or glass ceramic support including at least one recess according to the invention.

LIST OF REFERENCE NUMERALS

(55) 1 Tool head 3 Recess 5 Hard and brittle material 7 Shank 10 Hollow cylindrical abrasive body 12 End face 13 Cylinder axis 15 Central abrasive area 17, 18, 19 Web 20 Inner wall surface of 10 22 Outer wall surface 25 Abrasive 27 Opening 30 Glass or glass ceramic element 31 Surface of 30 33 Recess 36 Open end of 33 38 Lateral channel 331 Bottom 330 Center of 33 332 Wall surface of 33 333 Lateral surface of 30 335 Rectilinear wall section of 332 336 Curved wall section of 332