Projection lens
10942294 ยท 2021-03-09
Assignee
Inventors
Cpc classification
C03C17/3423
CHEMISTRY; METALLURGY
G02B13/16
PHYSICS
International classification
Abstract
A projection lens for projecting an image onto a projection plane includes: a lens substrate; and an antireflective film disposed on a surface of the lens substrate. The antireflective film includes, in order starting from an air side of the antireflective film, a first layer, second layer, third layer, fourth layer, fifth layer, sixth layer, seventh layer, and eighth layer. The first layer is formed of MgF.sub.2. Each of the second layer, the fourth layer, the sixth layer, and the eighth layer has a refractive index of 2.0 to 2.3. Each of the third layer, the fifth layer, and the seventh layer is formed of SiO.sub.2.
Claims
1. A projection lens for projecting an image onto a projection plane, comprising: a lens substrate; and an antireflective film disposed on a surface of the lens substrate, wherein: the antireflective film comprises, in order starting from an air side of the antireflective film, a first layer, second layer, third layer, fourth layer, fifth layer, sixth layer, seventh layer, and eighth layer, the first layer of the antireflective film is formed of MgF.sub.2, each of the second layer, the fourth layer, the sixth layer, and the eighth layer has a refractive index of 2.0 to 2.3, each of the third layer, the fifth layer, and the seventh layer is formed of SiO.sub.2, quarter wave optical thicknesses of the first layer to the eighth layer satisfy formulas (1) to (8) below:
Q.sub.1=0.05n.sub.s+A1(0.79A10.91);(1)
Q.sub.2=0.09n.sub.s+A2(1.64A21.79);(2)
Q.sub.3=0.10n.sub.s+A3(1.65A31.90);(3)
Q.sub.4=0.31n.sub.s+A4(1.01A41.23);(4)
Q.sub.5=A5(0.10A50.35);(5)
Q.sub.6=0.79n.sub.s+A6(1.64A60.01);(6)
Q.sub.7=0.64n.sub.s+A7(1.26A71.55); and(7)
Q.sub.8=0.32n.sub.s+A8(0.38A80.19),(8) where Q.sub.1 to Q.sub.8 are quarter wave optical thicknesses of the first layer to the eighth layer, respectively, and n.sub.s is a refractive index of the lens substrate at a wavelength of .sub.0=550 nm, and a maximum reflectance of the antireflective film is less than or equal to 0.2% in a wavelength range of 430 nm to 670 nm.
2. The projection lens according to claim 1, wherein each of the second layer, the fourth layer, the sixth layer, and the eighth layer is formed of any one of Ta.sub.2O.sub.5, LaTiO.sub.3, a mixture of Ti.sub.2O.sub.3 and ZrO.sub.2, or a mixture of ZrTiO.sub.4 and ZrO.sub.2.
3. The projection lens according to claim 2, wherein the lens substrate comprises three glass materials among glass materials satisfying formulas (9) to (13) below:
1.45n.sub.s9<1.55;(9)
1.55n.sub.s10<1.65;(10)
1.65n.sub.s11<1.75;(11)
1.75n.sub.s12<1.85; and(12)
1.85n.sub.s13<1.95,(13) where n.sub.s9 to n.sub.s13 are refractive indices of the glass materials satisfying formulas (9) to (13), respectively.
4. The projection lens according to claim 1, wherein the lens substrate comprises three glass materials among glass materials satisfying formulas (9) to (13) below:
1.45n.sub.s9<1.55;(9)
1.55n.sub.s10<1.65;(10)
1.65<n.sub.s11<1.75;(11)
1.75<n.sub.s12<1.85; and(12)
1.85<n.sub.s13<1.95,(13) where n.sub.s9 to n.sub.s13 are refractive indices of the glass materials satisfying formulas (9) to (13), respectively.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
DETAILED DESCRIPTION
(10) Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(11) First, the configuration of a projection lens according to one or more embodiments of the present invention will be described with reference to
(12) The projection lens LN is constituted by, for example, 30 lens components as a whole as illustrated in
(13) Next, the detailed configuration of a single lens used for the projection lens LN will be described with reference to
(14) A lens 1 used for the projection lens LN includes a lens substrate 10 and an antireflective film 20 illustrated in
(15) The antireflective film 20 includes, in order from an air side, a first layer 21, a second layer 22, a third layer 23, a fourth layer 24, a fifth layer 25, a sixth layer 26, a seventh layer 27, and an eighth layer 28. The first layer 21 is formed of MgF.sub.2. Each of the second layer 22, the fourth layer 24, the sixth layer 26, and the eighth layer 28 is formed of a so-called high refractive index material having a refractive index of 2.0 to 2.3. Each of the third layer 23, the fifth layer 25, and the seventh layer 27 is formed of SiO.sub.2.
(16) The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8).
Q.sub.1=0.05n.sub.s+A1(0.79A10.91)Formula(1)
Q.sub.2=0.09n.sub.s+A2(1.64A21.79)Formula (2)
Q.sub.3=0.10n.sub.s+A3(1.65A31.90)Formula (3)
Q.sub.4=0.31n.sub.s+A4(1.01A41.23)Formula (4)
Q.sub.5=A5(0.10A50.35)Formula (5)
Q.sub.6=0.79n.sub.s+A6(1.64A60.01)Formula (6)
Q.sub.7=0.64n.sub.s+A7(1.26A71.55)Formula (7)
Q.sub.8=0.32n.sub.s+A8(0.38A80.19)Formula (8)
(17) Each of the layers of the antireflective film 20 is formed by a vacuum deposition method under heating, for example, at 300 C. Particularly, the second layer 22 to the eighth layer 28 are formed by a vacuum deposition method using ion assist. Ion-assisted vapor deposition may be used in order to reduce a change in film density of the antireflective film 20 and the roughness of a film surface due to variation of the degree of vacuum and the like in the vacuum deposition method. This makes it possible to suppress occurrence of color unevenness and deterioration of characteristic reproducibility caused by a change in film density, that is, a change in refractive index of a film. When ion-assisted vapor deposition is used for forming the antireflective film 20, it is possible to use a high refractive index material which has been relatively difficult to use conventionally for the layers constituting the antireflective film 20.
(18) According to the above configuration, the antireflective film 20 has a maximum reflectance of 0.2% or less in a wavelength range of 430 nm to 670 nm.
(19) Note that each of the second layer 22, the fourth layer 24, the sixth layer 26, and the eighth layer 28 in the antireflective film 20 may be formed of any one of Ta.sub.2O.sub.5, LaTiO.sub.3, a mixture of Ti.sub.2O.sub.3 and ZrO.sub.2, and a mixture of ZrTiO.sub.4 and ZrO.sub.2.
(20) In each of the 30 lenses of the projection lens LN, three or more types of glass materials having different refractive indexes n.sub.s are used as the lens substrate 10. Specifically, three or more types of glass materials among glass materials classified into five types satisfying the following formulas (9) to (13) regarding a refractive index n.sub.s are used as the lens substrate 10.
1.45n.sub.s<1.55Formula (9)
1.55n.sub.s<1.65Formula (10)
1.65n.sub.s<1.75Formula (11)
1.75n.sub.s<1.85Formula (12)
1.85n.sub.s<1.95Formula (13)
EXAMPLES
(21) Subsequently, in one or more embodiments, evaluation of light reflectance of a lens substrate and an antireflective film in each of Examples and a lens substrate and an antireflective film in Comparative Example will be described with reference to
(22) Conditions of a glass substrate and an antireflective film in Comparative Example are illustrated in Table 1. In Comparative Example, a general antireflective film constituted by four layers was formed on a surface of a glass lens substrate having a refractive index n.sub.s=1.52 at a design main wavelength of .sub.0=550 nm. Each layer of the antireflective film was formed by a vacuum deposition method under heating at 300 C.
(23) TABLE-US-00001 TABLE 1 Comparative Example Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 0.93 Second layer LaTiO.sub.3 1.86 Third layer AL.sub.2O.sub.3 1.09 Fourth layer MgF.sub.2 0.41 Lens substrate Refractive index n.sub.s: 1.52
(24) According to
(25) Conditions of the glass substrate 10 and the antireflective film 20 in Example 1 are illustrated in Table 2. In Example 1, the antireflective film 20 constituted by eight layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.52 at a design main wavelength of .sub.0=550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.52 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(26) TABLE-US-00002 TABLE 2 Example 1 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.94 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.89 Third layer SiO.sub.2 Q.sub.3 2.01 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.67 Fifth layer SiO.sub.2 Q.sub.5 0.19 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 0.85 Seventh layer SiO.sub.2 Q.sub.7 0.43 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.22 Lens substrate Refractive index n.sub.s: 1.52
(27) According to
(28) Conditions of the glass substrate 10 and the antireflective film 20 in Example 2 are illustrated in Table 3. In Example 2, the antireflective film 20 constituted by eight layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.62 at a design main wavelength of .sub.0=550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.62 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(29) [Table 3]
(30) TABLE-US-00003 TABLE 3 Example 2 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.95 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.89 Third layer SiO.sub.2 Q.sub.3 1.99 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.66 Fifth layer SiO.sub.2 Q.sub.5 0.13 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 1.07 Seventh layer SiO.sub.2 Q.sub.7 0.33 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.26 Lens substrate Refractive index n.sub.s: 1.62
(31) According to
(32) Conditions of the glass substrate 10 and the antireflective film 20 in Example 3 are illustrated in Table 4. In Example 3, the antireflective film 20 constituted by eight layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.72 at a design main wavelength of .sub.0=550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.72 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(33) TABLE-US-00004 TABLE 4 Example 3 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.95 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.90 Third layer SiO.sub.2 Q.sub.3 1.99 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.63 Fifth layer SiO.sub.2 Q.sub.5 0.13 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 1.14 Seventh layer SiO.sub.2 Q.sub.7 0.27 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.29 Lens substrate Refractive index n.sub.s: 1.72
(34) According to
(35) Conditions of the glass substrate 10 and the antireflective film 20 in Example 4 are illustrated in Table 5. In Example 4, the antireflective film 20 constituted by eight layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.82 at a design main wavelength of .sub.0=550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.82 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(36) TABLE-US-00005 TABLE 5 Example 4 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.95 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.90 Third layer SiO.sub.2 Q.sub.3 1.99 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.60 Fifth layer SiO.sub.2 Q.sub.5 0.13 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 1.23 Seventh layer SiO.sub.2 Q.sub.7 0.22 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.32 Lens substrate Refractive index n.sub.s: 1.82
(37) According to
(38) Conditions of the glass substrate 10 and the antireflective film 20 in Example 5 are illustrated in Table 6. In Example 5, the antireflective film 20 constituted by eight layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.92 at a design main wavelength of =550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.92 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(39) TABLE-US-00006 TABLE 6 Example 5 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.95 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.90 Third layer SiO.sub.2 Q.sub.3 1.99 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.57 Fifth layer SiO.sub.2 Q.sub.5 0.13 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 1.32 Seventh layer SiO.sub.2 Q.sub.7 0.17 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.34 Lens substrate Refractive index n.sub.s: 1.92
(40) According to
(41) Conditions of the glass substrate 10 and the antireflective film 20 in Example 6 are illustrated in Table 7. In Example 6, the antireflective film 20 constituted by nine layers was formed on a surface of the glass lens substrate 10 having a refractive index n.sub.s=1.62 at a design main wavelength of .sub.0=550 nm. The quarter wave optical thicknesses (QWOT) Q.sub.1 to Q.sub.8 of the first layer 21 to the eighth layer 28 with respect to a refractive index n.sub.s=1.62 of the lens substrate 10 at a design main wavelength of .sub.0=550 nm satisfy the following formulas (1) to (8). Each layer of the antireflective film 20 was formed by a vacuum deposition method under heating at 300 C. Particularly, the second layer 22 to the eighth layer 28 were formed by a vacuum deposition method using ion assist.
(42) TABLE-US-00007 TABLE 7 Example 6 Design main wavelength .sub.0 = 550 [nm] Material for layer QWOT First layer MgF.sub.2 Q.sub.1 0.94 Second layer Ta.sub.2O.sub.5 Q.sub.2 1.89 Third layer SiO.sub.2 Q.sub.3 1.98 Fourth layer Ta.sub.2O.sub.5 Q.sub.4 0.67 Fifth layer SiO.sub.2 Q.sub.5 0.13 Sixth layer Ta.sub.2O.sub.5 Q.sub.6 1.07 Seventh layer SiO.sub.2 Q.sub.7 0.33 Eighth layer Ta.sub.2O.sub.5 Q.sub.8 0.26 Ninth layer Al.sub.2O.sub.3 Q.sub.9 0.14 Lens substrate Refractive index n.sub.s: 1.62
(43) According to
(44) In this way, according to the configuration of one or more embodiments, it is possible to form the antireflective film 20 with a low reflectance and a small loss of light corresponding to the lens substrates 10 having various refractive indices. That is, it is possible to form the antireflective film 20 using a high refractive index material which has been relatively difficult to use conventionally, and it is possible to expand the degree of freedom of the configuration of the projection lens LN. As a result, it is possible to effectively suppress a decrease in the transmittance of the whole system of the projection lens LN, and it is possible to flexibly cope with an increase in the number of constituent lenses.
(45) Furthermore, in the antireflective film 20, each of the second layer 22, the fourth layer 24, the sixth layer 26, and the eighth layer 28 is formed of any one of Ta.sub.2O.sub.5, LaTiO.sub.3, a mixture of Ti.sub.2O.sub.3 and ZrO.sub.2, and a mixture of ZrTiO.sub.4 and ZrO.sub.2. Therefore, it is possible to form the antireflective film 20 with a small loss of light by a vacuum deposition method under a relatively high temperature environment of, for example, 300 C. There is a risk that practical strength may be lowered in a case where MgF.sub.2 used in the first layer 21 is formed in a low temperature environment. Therefore, according to the configuration of one or more embodiments, it is possible to increase the strength of the first layer 21.
(46) The antireflective film 20 may have a maximum reflectance of 0.2% or less in a wavelength range of 430 nm to 670 nm. This makes it possible to obtain the antireflective film 20 sufficient for application to a recent increase in the number of pixels of an image in the projection lens LN.
(47) In addition, three or more types of glass materials among glass materials classified into five types satisfying the above formulas (9) to (13) regarding a refractive index n.sub.s are used as the lens substrate 10. Therefore, even with the projection lens LN obtained by combining the lens substrates 10 formed of various glass materials for thirty lenses, it is possible to form the antireflective film 20 with a low reflectance and a small loss of light. This makes it possible to further widen the degree of freedom of the configuration of the projection lens LN.
(48) Although the disclosure has been described with respect to only a limited number of embodiments, those skilled in the art, having benefit of this disclosure, will appreciate that various other embodiments may be devised without departing from the scope of the present invention. Accordingly, the scope of the invention should be limited only by the attached claims.
INDUSTRIAL APPLICABILITY
(49) The present invention can be used in a projection lens.
REFERENCE SIGNS LIST
(50) 1 Glass 10 Glass substrate 20 Antireflective film 21 First layer 22 Second layer 23 Third layer 24 Fourth layer Fifth layer 26 Sixth layer 27 Seventh layer 28 Eighth layer LN Projection lens