Pressure sensor and pressure measuring method

Abstract

The invention provides a pressure sensor (10) that can be produced at low cost, operates more accurately and resists to high burst pressures. The pressure sensor (10) comprises at least one membrane (12) and a magneto-elastic detection device (14) for magneto-elastically detecting mechanical stress caused by pressurization.

Claims

1. A pressure sensor (10), comprising at least one membrane (12) to be loaded with a pressure to be measured, and a magneto-elastic stress detection device (14) for magneto-elastically detecting a mechanical stress caused by this pressurization, wherein the magneto-elastic stress detection device (14) comprises a central excitation coil (24) and a first measuring coil (A1) connected by a first yoke connection (30a) to the excitation coil (24) for generating and measuring a first magnetic field flux (50a) passing through a region (48) mechanically loaded when a pressure is to be measured, and a second measuring coil (B1) connected by a second yoke connection (30b) to the excitation coil (24) for generating and measuring a second magnetic field flux (50b) passing through the region (48) mechanically loaded when the pressure is to be measured, and wherein the first and the second magnetic field fluxes (50a, 50b) form an angle in the range between 5 and 175 to each other in the region loaded with pressure.

2. The pressure sensor (10) according to claim 1, characterized in that the at least one membrane (12) is at least partially formed from a ferromagnetic material and the magneto-elastic stress detection device (14) is designed for magneto-elastically detecting a mechanical stress in the membrane (12).

3. The pressure sensor (10) according to claim 1 or 2, characterized by one, several or all of the following features: that the magneto-elastic stress detection device (14) relies on active magnetization; that the magneto-elastic stress detection device (14) is designed for detecting a direction or change of direction of magnetic field lines of a magnetic field induced into the membrane (12) or into an element coupled to the membrane (12) to detect a mechanical stress in the membrane (12) or in the element coupled the membrane (12) from the detected direction or change of direction; that the magneto-elastic stress detection device (14) at least comprises a magnetic field generating device (20) for generating a magnetic field flux (50) passing through a region that is mechanically loaded due to the pressure to be measured, and a magnetic field flux detection device (22) for detecting a magnetic field flux in the mechanically loaded region (48); that the magnetic field generating device (20) comprises at least one excitation coil (24) and an excitation coil core (26) and that the magnetic field flux detection device (22) comprises at least one measuring coil (28) and a measuring coil core (30); that the magnetic field detection device (22) comprises several measuring coils (28, A1, A2, B1, B2), preferably in such a manner that the same are sensitive to different magnetic field flux line directions.

4. The pressure sensor (10) according to claim 1, wherein the region (48) mechanically loaded corresponds to the membrane (12).

5. A pressure sensor (10), comprising at least one membrane (12) to be loaded with a pressure to be measured, and a magneto-elastic stress detection device (14) for magneto-elastically detecting a mechanical stress caused by this pressurization, characterized in that the magneto elastic stress detection device (14) comprises an excitation coil (24) and a measuring coil (28), wherein the coils (24, 28) of the magneto-elastic stress detection device (14) are designed as planar coils (32) in printed circuit board technology.

6. The pressure sensor (10) according to claims 1 or 5, characterized in that the at least one membrane (12) terminates a first pressure chamber (84a) on a first side to be loaded with a first pressure and a second pressure chamber (84b) on an opposite side to be loaded with a second pressure, wherein the magneto-elastic stress detection device (14) detects the mechanical stress in the membrane (12) through one of the pressure chambers (84b).

7. A pressure sensor (10), comprising at least one membrane (12) to be loaded with a pressure to be measured, and a magneto-elastic stress detection device (14) for magneto-elastically detecting a mechanical stress caused by this pressurization, characterized in that the at least one membrane (12) terminates a first pressure chamber (84a) on a first side to be loaded with a first pressure and a second pressure chamber (84b) on an opposite side to be loaded with a second pressure, wherein the magneto-elastic stress detection device (14) detects the mechanical stress in the membrane (12) through one of the pressure chambers (84b), wherein the first pressure chamber (84a) is in fluid communication with a first pressure channel (44) for applying a first pressure to be measured and the second pressure chamber (84b) is in fluid connection with a second pressure channel (80) for applying a second pressure to be measured to measure a differential pressure between the first pressure and the second pressure by means of the magneto-elastic stress detection device (14), or the second pressure chamber (84b) creates a reference pressure volume (72) with a predetermined reference pressure to determine the pressure in the first pressure chamber by a comparison with the reference pressure as an absolute pressure by means of the magneto-electric detection device (14).

8. The pressure sensor (10) according to claims 1, 5, or 7, characterized in that a first membrane (12) for detecting a first pressure and a second membrane (16) for detecting a second pressure and/or for providing a reference measurement value are provided.

9. The pressure sensor (10) according to claim 8, characterized in that a first magneto-elastic stress detection device (14) for detecting a mechanical load on the first membrane (12) and a second magneto-elastic stress detection device (18) for detecting a mechanical load on the second membrane (16), and an evaluation device (54) for determining a differential value from the outputs of the first and the second magneto-elastic stress detection devices (14, 18) are provided.

10. A method for measuring a pressure, comprising: a) loading a membrane (12) with a pressure to be measured and b) generating a magnetic flux (50) in a region (48) mechanically loaded by pressurization and c) measuring a mechanical stress caused by pressure-loading the membrane (12) using the magneto-elastic effect by detecting the change of direction of magnetic field lines of the magnetic flux, wherein an absolute pressure is detected by loading a first side of the membrane (12) with the pressure to be measured and by loading the opposite second side of the membrane (12) with a predetermined reference pressure and determining the absolute pressure by determining the difference between the pressure to be measured and the reference pressure.

11. The method according to claim 10, characterized in that step b) comprises generating the magnetic flux (50) in a region (48) of the membrane (12) at least partially formed from a ferromagnetic material mechanically loaded by pressurization and that step c) comprises measuring the mechanical stress at the membrane (12) by detecting a change of the magnetic field lines in the membrane (12).

12. The method according to claims 10 or 11, characterized by: detecting a differential pressure between a first pressure and a second pressure by loading the membrane (12) with the first pressure on a first side and with the second pressure on an opposite second side.

13. A method for measuring a pressure, comprising: a) loading a membrane (12) with a pressure to be measured and b) generating a magnetic flux (50) in a region (48) mechanically loaded by pressurization and c) measuring a mechanical stress caused by pressure-loading the membrane (12) using the magneto-elastic effect by detecting the change of direction of magnetic field lines of the magnetic flux, characterized by providing a reference membrane (16) not loaded with the pressure and magneto-elastically detecting a mechanical stress at the reference membrane (16) to obtain a reference value, wherein a measuring signal is obtained in a differential manner by comparing a value obtained by a magneto-elastic detection of a mechanical stress at the pressure-loaded membrane (12) with the reference value.

Description

(1) Embodiments of the present invention will now be described with reference to the attached drawings of which

(2) FIG. 1 shows a schematic sectional view of a first embodiment of a pressure sensor having a first membrane to be loaded with a pressure to be measured, and a first magneto-elastic stress detection device for detecting stresses in the first membrane and designed as an absolute pressure sensor;

(3) FIG. 2 shows a schematic lateral view of the first magneto-elastic stress detection device;

(4) FIG. 3 shows a schematic representation in a top view looking from inside the center of FIG. 1 to the left and at the first membrane so that the first membrane and the magneto-elastic stress detection device are shown;

(5) FIG. 4 shows a schematic sectional view of a second embodiment of a pressure sensor having a first membrane to be loaded with a pressure to be measured and a first magneto-elastic stress detection device for detecting stresses in the first membrane, in a further design as an absolute pressure sensor with a reference plate;

(6) FIG. 5 shows a schematic sectional view of a third embodiment of a pressure sensor having a first membrane to be loaded with a pressure to be measured, and a first magneto-elastic stress detection device for detecting stresses in the first membrane and designed as a differential pressure sensor;

(7) FIG. 6 shows a schematic sectional view of a first membrane suitable for use in one of the embodiments of the FIGS. 1 to 5 and being an integral part of a pressure body, wherein regions of the stresses to be detected by the first magneto-elastic stress detection device are shown;

(8) FIG. 7 shows a schematic sectional view of a fourth embodiment of the pressure sensor having a first membrane integrated with a pressure body, a first magneto-electric stress detection device, a second membrane and a second magneto-electric stress detection device;

(9) FIG. 8 shows a schematic sectional view of a pressure body provided with an integrated membrane of the prior art in a known pressure sensor according to one of the documents D1 to D6;

(10) FIG. 9 shows a schematic sectional view of a pressure body for a pressure sensor designed in accordance with the present invention in comparison with the known pressure body of FIG. 8;

(11) FIG. 10 shows a schematic sectional view similar to that of the FIGS. 8 and 9 of a further pressure body for the practical implementation of the embodiment variant of FIG. 4 having a membrane and a reference plate;

(12) FIG. 11 shows a schematic circuit diagram for connecting coils of the magneto-electric detection device.

(13) The FIGS. 1, 4, 5 and 7 show different embodiments of a pressure sensor 10 having at least one membrane, here in the form of a first membrane 12, which is to be loaded with a pressure, and a magneto-electric stress detection device, here in the form of a first magneto-elastic stress detection device 14, for magneto-elastically detecting a mechanical stress caused by pressurization. In the illustrated embodiments, a magneto-elastic stress detection device is provided which relies on active magnetization.

(14) In the illustrated embodiments, the membrane to be loaded with a pressure is a first membrane, wherein the mechanical stress caused by loading the first membrane with pressure are detected by a first magneto-elastic stress detection device 14.

(15) Further, a second membrane is provided, wherein a second magneto-elastic stress detection device 18 is associated with the second membrane 16 similarly to the first magneto-elastic stress detection device 14 associated with the first membrane 12.

(16) In the illustrated embodiments, the at least one membrane 12, 16 is at least partially formed from a ferromagnetic material, and the respectively associated magneto-elastic stress detection device 14, 18 is configured for detecting mechanical stresses in the associated membrane 12, 16.

(17) The first and the second magneto-elastic stress detection devices 14, 18 have similar structures, wherein only the structure of the first magneto-elastic stress detection device 14 will be described in more detail with reference to FIG. 2 and FIG. 3.

(18) The magneto-elastic stress detection device 14, 18 comprises at least one magnetic field generating device 20 for generating a magnetic field flux passing through the region in which stresses are to be detected. Further, the magneto-elastic stress detection device 14, 18 comprises a magnetic field flux detection device 22 for detecting a magnetic field flux in the region in which mechanical stresses are to be detected.

(19) Changes of mechanical stresses on a surface of a body that is particularly formed from a soft magnetic material, lead to changes of permeability as a result of the magneto-elastic effect and thus to changes of a magnetic field flux induced into the surface. The illustrated pressure sensors exploit this effect to directly detect stresses in the membrane loaded with pressure. These stresses are a measure of the pressure acting upon the membrane.

(20) Accordingly, the magnetic field generating device 20 is designed for generating a magnetic flux passing through the region of the associated membrane 12, 16 in which stresses are to be detected, and the magnetic field flux detection device 22 is designed for detecting changes of the magnetic field flux caused by mechanical stresses such as, in particular, changes in the direction of the magnetic flux lines.

(21) The magnetic field generating device 20 comprises an excitation coil 24 and an excitation coil core 26. The magnetic field flux detection device 22 comprises at least one measuring coil 28 and a measuring coil core 30.

(22) A less complex configuration (not further illustrated) of the magneto-elastic stress detection device comprises two magnetically insulated yokes arranged crossing each other at an angle (of preferably 70-110), preferably 90), one of these yokes carrying the excitation coil and the other one the measuring coil. In the illustrated preferred configuration of the magneto-elastic stress detection device 14, 18, four yokes are combined into an x-shape in plan view, wherein the excitation coil core 26 with the excitation coil 24 is provided in a central region and wherein pole arms of said yokes form first to fourth measuring coil cores 30 with first to fourth measuring coils 28, A1, A2, B1, B2. The principle of such measuring heads for inducing a magnetic flux field and for measuring changes in the magnetic field flux is known in the field of torque sensors for the measurement of torque in shafts, see for example WO2016119931A1, WO2016198658A1 and EP 3 064 919 A1 as well as U.S. Pat. No. 2,912,642 A and EP 0 046 417 A1.

(23) In the illustrated configuration of the magneto-elastic stress detection devices 14, 18, the excitation coil cores 26, the measuring coil cores 30 and the yokes are designed as ferrite cores 34 and a ferrite layer 36, wherein the excitation coil 24 and the measuring coils 28, A1, A2, B1, B2 are designed as planar coils 32 in printed circuit board technology. For this purpose, helical conductor tracks on individual printed circuit board planes are connected to the respective coil through multiple layers of such printed circuit board planes and by through-connections, wherein the respective ferrite core 34 extends in the center. For further details concerning the structure of the magneto-elastic stress detection device 14, 18, reference is made to German patent application 10 2016 122 172.4 (not previously published).

(24) FIG. 3 shows the first membrane together with the first magneto-elastic stress detection device 14 in an x-shaped configuration with a central excitation coil 24 and outer measuring coils 28, A1, A2, B1, B2. The membrane 12 is made from a steel material. Especially suitable are steels 1.4542, steels 1.4435, corrosion-resistant steels, duplex steels, e.g. 1.4462.

(25) FIG. 11 shows an exemplary circuit diagram for the connection of the coils 28, 24. According to this example, the measuring coils can be connected in series so that a measuring signal is obtained by the addition of A1+A2+B1+B2. Such a signal indicates the total of the mechanical stress.

(26) FIG. 1 shows a first embodiment of a pressure sensor 10 in the form of an absolute pressure sensor. The first membrane 12 is a measuring membrane accommodated in a housing 40 and subjected to a pressure to be measured via a first pressure channel 42. In a modification, which is not illustrated, the first membrane 12 is mounted front-flush with the housing so that no pressure channel leads through the housing and the first membrane 12 is directly loaded with pressure.

(27) In the housing 40, the first magneto-elastic stress detection device 14 is arranged in such a manner that the measuring coils 28 are disposed close to those surfaces of the first membrane 12 which are especially mechanically loaded when subject to pressure. For example, as shown in FIG. 6, the first membrane 12 forms an integral part of a pot-shaped pressure body 44 and is centrally provided with a thickened portion 46 so that mechanical stresses concentrate at the transition to this thickened portion. The reference numbers 48 in FIG. 6 denote the mechanically stressed regions in which the stress is detected in a magneto-elastic manner.

(28) As shown in FIG. 1, the magnetic field generating device 20 generates a magnetic flux 50 through these regions 48 which are stressed as a result of pressurization. In particular, changes of permeability in the surfaces are caused by these stresses that lead to changes of the magnetic flux, which are detected by the magnetic field flux detection device 22 by forming a total from the measuring coils A1, A2, B1, B2.

(29) Referring again to FIG. 1 it can be seen that the pressure sensor 10 comprises the second membrane 16 serving as a reference membrane in the interior of the housing 40. Preferably, this membrane 16 has a structure similar to that of the first membrane 12, in particular the same material and the same dimensions. The second stress detection device 18 measures stresses at the second membrane 16 in the same manner as the first stress detection device 14 measures stresses in the first membrane 12. Accordingly, the magnetic field generating device 20 of the second stress generating device 18 generates a further magnetic flux 52 in the second membrane 16 provided as a reference membrane; and changes of the magnetic flux are detected by the magnetic field detection device 22 of the second stress generating device 18.

(30) As shown, the structure built of the second membrane 16 and the second stress detection device 18 can be a mirror image of the structure built of the first membrane 12 and the first stress detection device 14. The stress detection devices 14, 18 can also be combined to one component with a shared ferrite layer 36.

(31) The magnetic field detection devices 22 of the first and the second stress detection devices 14, 18 are connected to each other in such a manner that a differential signal is produced, which is a signal for the pressure on the first membrane 12.

(32) Further, an evaluation device 54 is provided which in the present case is formed by populated electronics 56 that may also be accommodated in the housing 40. The signal from the magnetic field detection device 22 of the second stress detection device 18 is deducted from the signal of the magnetic field detection device 22 of the first voltage detection device 14. This differential signal is evaluated by the evaluation device 54 and a corresponding pressure signal for the absolute pressure is output based on this evaluation.

(33) FIG. 1 shows an embodiment which is particularly preferred in production terms and in which the populated electronics 56 and also the planar coils 32 of the second stress detection device 18 and the planar coils of the first stress detection device are collectively formed with the corresponding connecting lines made from conductor tracks on a printed circuit board 58, wherein a semi-flex or flex-rigid first connector 60 is formed between a first board area 62, on or in which the planar coils 32 of the first stress detection device 14 are formed, and a second board area 64, on or in which the planar coils 32 of the second stress detection device 18 are formed, and a semi-flex or flex-rigid second connector 66 is formed between the second board area 64 and a third board area 68 forming the electronics 56. In other configurations, only two of these board areas 62, 64, 68 are collectively formed or only two of these board areas 62, 64, 68 are connected by a preferably semi-flex or flex-rigid connector 60, 66.

(34) In the following, the operation of the pressure sensor 10 of FIG. 1 will be described in more detail.

(35) Prior art (see D1 to D6) for pressure measurement is that the change in a membrane is measured by strain gages (DMS=German abbreviation of Dehnmessstreifen). The fabrication of the DMS cell is relatively complex and increases the manufacturing costs.

(36) In the pressure sensor 10 according to FIG. 1, there is not measured the deflection of a membrane but rather a mechanical stress in said membrane by means of a magneto-elastic stress detection device 14 that relies on active magnetization. In this manner, the mechanical stress produced as a result of a change of pressure can be measuredthe measurement of mechanical stress being clearly more sensitive than the measurement using DMS. Moreover, the membrane needs not be micro-machined. A corresponding structure enables the implementation of a differential measurement that can be used to re-calibrate the pressure sensor 10 in the field.

(37) The pressure sensor 10 has a sensor membrane with a sensor arrangement for stress measurement at a planar surface of the membrane 12. As with magneto-elastic torque sensors, the stress detection device 14 can be implemented using four measuring coils or X-coils disposed around the generator coil.

(38) The lateral view in FIG. 1 shows the structure of the sensor with a reference plate for differential measurement. The two coil pairs for the measuring membranefirst membrane 12and for the reference membranesecond membrane 16can be configured as planar coils 32 and produced in a panel allowing small manufacturing tolerances. The ferrite in the center can be configured from one component or from two components. In one embodiment, which is not illustrated, a ferrite may be omitted if the yield is sufficiently high, and the coil arrangement can be configured from a planar coil. The generator coilsexcitation coils 24for the measuring membrane 12 and for the reference membrane 16 can be connected in series and driven by a single source.

(39) Using planar coils 32 instead of wound coils brings significant benefits in manufacturing terms. The planar coils 32 can be fabricated two-dimensionally and can be three-dimensionally processed by appropriate processing technologies. In particular, the manufacture takes place employing the printed circuit board technology.

(40) By the arrangement comprising a measuring membranefirst membrane 12and a reference membranesecond membrane 16, a differential measurement can be made.

(41) Drifts in the excitation coil 24 caused by aging or temperature can thus be minimized.

(42) These measuring methods allow a measurement clearly more sensitive than direct DMS on a membrane. It is thus possible to use thicker membranes and to achieve an increased overpressure resistance.

(43) The measuring signal essentially is the result of stress in the metal which causes a change of permeability.

(44) This technology can also be used for flat membranes, in particular for front-flush membranes.

(45) FIG. 4 shows a further configuration of the pressure sensor 10, which is the same as the configuration of the pressure sensor 10 in the embodiment of FIG. 1, except for the following differences. Elements similar to those in FIG. 1 are identified by the same reference numbers and their detailed description will not be repeated in the following. Reference is instead made to the foregoing description.

(46) FIG. 4 also shows a pressure sensor 10 configured as an absolute pressure sensor for measuring an absolute pressure. As magnetic fields enable measurements right through the material, an absolute pressure sensor may be configured which measures directly relative to a reference volume.

(47) While the configuration according to FIG. 1 measures a pressure relative to the ambient pressure or can be designed as an absolute pressure sensor by the second membrane 16 terminating a reference volume with a defined pressure (e.g. vacuum), the configuration according to FIG. 4 provides a reference volume (e.g. with vacuum) directly adjacent to the first membrane 12.

(48) For this purpose, a wall 70 from a ferromagnetic material (e.g. ceramics or duplex steel) is provided between the first membrane 12 and the first stress detection device 14 in such a manner that a hermetically sealed reference volume 72 for absolute pressure measurement (particularly evacuatedvacuum) is created between the first membrane 12 and the wall 70.

(49) A practical execution example of the first membrane 12 having the wall 70 is shown in FIG. 10. Here, as previously explained with reference to FIG. 1 and FIG. 6, the first membrane forms an integral part of the pressure body 44. For the magneto-elastic detection of surface stresses, the pressure body 44 is made from a suitable ferromagnetic materialsee aboveand provided with an encapsulation by a ceramic plate 74 as a wall 74 and with a jointing region 76.

(50) When integrated into the structure described with reference to FIG. 1, an absolute pressure sensor can be created that is correspondingly encapsulated at the side which is remote from pressure so that the pressure sensor 10 measures relative to a vacuum or sealed gage (a correspondingly set reference volume 72). For example, due to the non-contacting method, the pressure sensor 10 can now measure right through a cover plate 74 formed from aluminum ceramics (Al.sub.2O.sub.3). Preferably, the cover plate 74 is applied to the membrane using a glass frit 78 having a low melting point (e.g. 350 C.).

(51) FIG. 5 shows a further embodiment of the pressure sensor 10 configured as a differential pressure sensor. In this case too, the basic structure is comparable to that of FIG. 1, wherein similar parts are identified by the same reference numbers and will not be described in detail any further.

(52) Instead of only the first pressure channel 42, through which only the first membrane 12 is loaded with a pressure to be measured, the pressure sensor 10 in the configuration according to FIG. 5 has a first pressure channel 42, through which the first membrane can be loaded with a first pressure on its first side, and a second pressure channel 80, through which the first membrane 12 can be loaded with a second pressure on its second side.

(53) Accordingly, when a differential pressure occurs between the first pressure and the second pressure, the first membrane is mechanically loaded, and the corresponding stresses are detected similarly to the manner described in the first embodiment.

(54) Instead of using a configuration as shown in FIG. 5, in a modification of FIG. 1, a differential pressure sensor can also be achieved by the first membrane 12 being loaded with the first pressure and the second membrane 15 being loaded with the second pressure. In this modification, the second pressure channel 80 opens into a measuring chamber defined by the second membrane 16. Due to the option of a differential measurement relative to a reference membrane, the configuration according to FIG. 5 is however preferred as a configuration of the differential pressure sensor.

(55) The function of the configuration according to FIG. 5 will be described in more detail in the following.

(56) Known differential pressure sensors relying on a measurement of the deflection of the membrane always require that the sensitive structures are mounted on the membrane and an electrical connection of this structures is made. This fact considerably adds to the cost of the structure of a differential pressure sensor with a steel membrane.

(57) With the magneto-elastic stress detection device 14 that preferably relies on active magnetization, stress in a steel membrane can be measured in a non-contacting manner. A suitable structure allows the implementation of a very small system that can also be designed for very high temperatures and a very high overpressure (burst pressure).

(58) The use of planar coils 32 in place of wound coils is highly beneficial for inexpensive production. The planar coils 32 can be produced two-dimensionally and can then be processed three-dimensionally using corresponding processing techniques.

(59) The measuring membranefirst membrane 12can consist of steel. In particular, the measuring membranefirst membrane 12can be welded onto a carrier 82 or can be overmolded with a carrier. A one-piece production of the membrane 12 with the carrier 82 is also possible, analogously to the pressure body 44.

(60) The measuring range and the overpressure range can be defined through the thickness of the first membrane 12.

(61) The measuring coils 28 are capable of measuring right through the carrier 82 or the housing 40, provided the same consists of a diamagnetic or paramagnetic material.

(62) The measuring signal is the mechanical stress in the membrane 12 that leads to a change of permeability.

(63) The pressure sensor 10 can be designed for very high absolute pressures by using a steel housing, or can be produced at rather low cost if the steel membrane is overmolded.

(64) Depending on the structure and the dimension, the sensor element may not require a magnetic flux conductor, i.e. no ferrite in the coil structure will be needed in this case.

(65) The coils 24, 28 can be produced in one production batch employing the planar technology and are thus subject to relatively small production tolerances.

(66) The excitation coils 24 for the measuring membranefirst membrane 12and those for the reference membranesecond membrane 16can be series connected to compensate aging factors.

(67) Influences on the measuring or excitation circuits due to aging and temperature can be eliminated by a differential measurement.

(68) FIG. 7 shows a schematic arrangement of the magneto-elastic pressure sensor 10 with a ferrite core 34, 36, the planar coils 32 embedded in the printed circuit boardboard areas 62, 64 opposite the ferromagnetic measuring bodyand the pressure body 44 integrally provided with the measuring membranefirst membrane 12. When pressure is applied to the first membrane, tensile stresses 96 and compressive stresses 88 occur at the surface.

(69) These surface stresses 86, 88 are then detected by the first stress detection device 14 in a differential manner relative to the second stress detection device 18 that is correspondingly coupled to the reference membranesecond membrane 16. Especially surface stresses can be measured particularly well utilizing the magneto-elastic effect.

(70) In the FIGS. 8, 9 and 10 there are compared a conventional compressive deformation body 90 of a conventional pressure sensor according to prior art and two embodiments of pressure bodies 44 for pressure sensors 10 in accordance with the invention. Since in conventional pressure sensors the deflection of a membrane is measured, the membrane must be designed for a detectable deflection even at correspondingly small pressures to be measured. For this reason, at comparable pressures, the membrane 92 of the conventional compressive deformation body must be very thin.

(71) FIG. 9 shows the pressure body 44 for the same pressure for use in a pressure sensor 10 relying on the principle according to the present invention. Since there are mainly detected stresses and not deflections, the membrane 12 for the magneto-elastic detection of the compressive and tensile surface stresses 86, 88 can be much thicker. Corresponding complementary tensile and compressive stresses 88, 86 occur at the bottom side. The region of neutral zero-stresses in the pressure body 44 is indicated at pos. 94.

(72) The invention relates to the measurement of pressure by means of at least one separate membrane 12. In contrary to pressure measurements in which deflections in tubular housings or similar pressure containers are directly measured, a specially provided separate membrane allows pressures being predetermined more exactly. It is possible to pre-fabricate the membrane in a manner defined for the pressures to be measured such that prevailing pressures can be exactly inferred from occurring stresses. Especially the surface of a membrane is precisely pre-defined, and the membrane can be optimized regarding an advantageous deformation behavior.

(73) The above-described embodiments show the preferred measurement of mechanical stresses directly at the membrane 12. In modifications, however, it is also possible to couple an element such as a force-measuring bar to the membrane 12 so that stresses at the membrane 12 lead to stresses in said element which are then detected in a magneto-elastic manner.

LIST OF REFERENCE NUMBERS

(74) 10 pressure sensor

(75) 121 first membrane

(76) 14 first magneto-elastic stress detection device

(77) 16 second membrane

(78) 18 second magneto-elastic stress detection device

(79) 20 magnetic field generating device

(80) 22 magnetic field flux detection device

(81) 24 excitation coil

(82) 26 excitation coil core

(83) 28 measuring coil

(84) 30 measuring coil core

(85) 30a first yoke connection

(86) 30b second yoke connection

(87) 32 planar coil

(88) 34 ferrite core

(89) 36 ferrite layer

(90) 40 housing

(91) 42 first pressure channel

(92) 44 pressure body

(93) 46 thickened portion

(94) 48 region in which stress is to be detected

(95) 50 magnetic flux

(96) 50a first magnetic field flux

(97) 50b second magnetic field flux

(98) 52 second magnetic flux

(99) 54 evaluation device

(100) 56 electronics

(101) 58 printed circuit board

(102) 60 first connector

(103) 62 first board area (first stress detection device)

(104) 64 second board area (second stress detection device)

(105) 66 second connector

(106) 68 third board area (electronics 56)

(107) 70 wall

(108) 72 reference volume

(109) 74 cover plate, e.g. from ceramics

(110) 76 jointing location

(111) 78 glass frit

(112) 80 second pressure channel

(113) 82 carrier

(114) 84a first pressure chamber

(115) 84b second pressure chamber

(116) 86 tensile stress

(117) 88 compressive stress

(118) 90 conventional compressive deformation body

(119) 92 membrane (prior art)

(120) A1 first measuring coil

(121) A2 second measuring coil

(122) B1 third measuring coil

(123) B2 fourth measuring coil

(124) UE voltage of the measuring coils (measuring signal)

(125) UG supply voltage of the excitation coil (especially high-frequency, range: MHz)