Method for producing transparent optical film and method for producing transparent multilayer film

Abstract

This method for producing a transparent optical film includes a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer formed of a high standard electrode potential metal having a higher standard electrode potential than that of silver by vacuum deposition, and an alloying step of forming a silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower.

Claims

1. A method for producing a transparent optical film including a silver alloy layer, the method comprising: a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less, by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer, which is a layer formed of a high standard electrode potential metal that is gold, palladium or platinum, by vacuum deposition; and an alloying step of forming the silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower, wherein: the film formation step includes an anchor metal deposition step of forming an anchor metal layer, formed of an anchor metal having a lower surface energy than silver at a side closer to the substrate than the silver layer, by vacuum deposition, the anchor metal deposition step, the high standard electrode potential metal deposition step, and the silver deposition step are performed in this order, and an oxidation step of oxidizing at least a part of the anchor metal is performed simultaneously with forming the silver alloy layer by performing the alloying step under an oxygen-containing atmosphere after the anchor metal layer, the silver layer, and the high standard electrode potential metal layer are formed and laminated through the anchor metal deposition step, the silver deposition step, and the high standard electrode potential metal deposition step.

2. The method for producing a transparent optical film according to claim 1, wherein an amount of the high standard electrode potential metal to be deposited in the high standard electrode potential metal deposition step is 10% by atom or less with respect to an amount of silver constituting the silver layer.

3. The method for producing a transparent optical film according to claim 1, wherein germanium is used as the anchor metal.

4. The method for producing a transparent optical film according to claim 1, wherein gold is used as the high standard electrode potential metal.

5. A method for producing a transparent multilayer film, the method comprising: forming a first dielectric layer on a substrate by vacuum deposition; forming a transparent optical film on the first dielectric layer using the method for producing a transparent optical film according to claim 1; and forming a second dielectric layer on the transparent optical film by vacuum deposition to produce a transparent multilayer film.

6. The method for producing a transparent multilayer film according to claim 5, wherein: as the first dielectric layer, a layer of high refractive index having a relatively high refractive index and a layer of low refractive index having a relatively low refractive index are alternately formed by vacuum deposition, and an antireflection film having an antireflection function is produced as the transparent multilayer film.

7. A method for producing a transparent optical film including a silver alloy layer, the method comprising: a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less, by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer, which is a layer formed of a high standard electrode potential metal that is gold, palladium or platinum, by vacuum deposition; and an alloying step of forming the silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower, wherein: the film formation step includes an anchor metal deposition step of forming an anchor metal layer, formed of an anchor metal having a lower surface energy than silver at a side closer to the substrate than the silver layer, by vacuum deposition, the high standard electrode potential metal deposition step, the anchor metal deposition step, and the silver deposition step are performed in this order, and an oxidation step of oxidizing at least a part of the anchor metal is performed simultaneously with forming the silver alloy layer by performing the alloying step under an oxygen-containing atmosphere after the anchor metal layer, the silver layer, and the high standard electrode potential metal layer are formed and laminated through the anchor metal deposition step, the silver deposition step, and the high standard electrode potential metal deposition step.

8. The method for producing a transparent optical film according to claim 7, wherein an amount of the high standard electrode potential metal to be deposited in the high standard electrode potential metal deposition step is 10% by atom or less with respect to an amount of silver constituting the silver layer.

9. The method for producing a transparent optical film according to claim 7, wherein germanium is used as the anchor metal.

10. The method for producing a transparent optical film according to claim 7, wherein gold is used as the high standard electrode potential metal.

11. A method for producing a transparent multilayer film, the method comprising: forming a first dielectric layer on a substrate by vacuum deposition; forming a transparent optical film on the first dielectric layer using the method for producing a transparent optical film according to claim 7; and forming a second dielectric layer on the transparent optical film by vacuum deposition to produce a transparent multilayer film.

12. The method for producing a transparent multilayer film according to claim 11, wherein: as the first dielectric layer, a layer of high refractive index having a relatively high refractive index and a layer of low refractive index having a relatively low refractive index are alternately formed by vacuum deposition, and an antireflection film having an antireflection function is produced as the transparent multilayer film.

13. A method for producing a transparent optical film including a silver alloy layer, the method comprising: a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less, by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer, which is a layer formed of a high standard electrode potential metal that is gold, palladium or platinum, by vacuum deposition; and an alloying step of forming the silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower, wherein: the film formation step includes an anchor metal deposition step of forming an anchor metal layer, formed of an anchor metal having a lower surface energy than silver at a side closer to the substrate than the silver layer, by vacuum deposition, an oxidation step of oxidizing at least a part of the anchor metal by performing a heating treatment under an oxygen-containing atmosphere is performed after the anchor metal layer and the silver layer are laminated on the substrate in this order by performing the anchor metal deposition step and the silver deposition step in this order, and after the oxidation step, the high standard electrode potential metal deposition step is performed.

14. The method for producing a transparent optical film according to claim 13, wherein the alloying step is performed simultaneously with the high standard electrode potential metal deposition step.

15. The method for producing a transparent optical film according to claim 13, wherein an amount of the high standard electrode potential metal to be deposited in the high standard electrode potential metal deposition step is 10% by atom or less with respect to an amount of silver constituting the silver layer.

16. The method for producing a transparent optical film according to claim 13, wherein germanium is used as the anchor metal.

17. The method for producing a transparent optical film according to claim 13, wherein gold is used as the high standard electrode potential metal.

18. A method for producing a transparent multilayer film, the method comprising: forming a first dielectric layer on a substrate by vacuum deposition; forming a transparent optical film on the first dielectric layer using the method for producing a transparent optical film according to claim 13; and forming a second dielectric layer on the transparent optical film by vacuum deposition to produce a transparent multilayer film.

19. The method for producing a transparent multilayer film according to claim 18, wherein: as the first dielectric layer, a layer of high refractive index having a relatively high refractive index and a layer of low refractive index having a relatively low refractive index are alternately formed by vacuum deposition, and an antireflection film having an antireflection function is produced as the transparent multilayer film.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a cross-sectional schematic view showing a laminated structure a transparent multilayer film including a transparent optical film prepared by a production method according to the embodiment.

(2) FIG. 2 is a view showing flows of production methods according to first to third embodiments of the present invention.

(3) FIG. 3 is a schematic cross-sectional view showing laminated structures in processes of the production methods according to the first to third embodiments of the present invention.

(4) FIG. 4 is a view showing flows of production methods according to fourth and fifth embodiments of the present invention.

(5) FIG. 5 is a schematic cross-sectional view showing laminated structures in processes of the production methods according to the fourth and fifth embodiments of the present invention.

(6) FIG. 6 is a view showing an Au diffusion state to an Ag layer having a thickness of 4 nm before and after a heating treatment.

(7) FIG. 7 is a view showing an Au diffusion state to an Ag layer having a thickness of 40 nm before and after a heating treatment.

(8) FIG. 8 is a view showing a production step of a transparent multilayer film for durability and absorptivity measurement.

(9) FIG. 9 is a side view showing a laminated structure of an optical member including an antireflection film on a substrate.

(10) FIG. 10 is a view showing the wavelength dependence of reflectance obtained from the simulation of the optical member in FIG. 9.

(11) FIG. 11 is a view showing the wavelength dependence of transmittance obtained from the simulation of the optical member in FIG. 9.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

(12) Hereinafter, embodiments of a method for producing a transparent optical film of the present invention will be described with reference to the drawings.

(13) The cross-sectional schematic view of an example of a transparent multilayer film produced by the method for a transparent multilayer film using the method for producing a transparent optical film according to the embodiment of the present invention is shown in FIG. 1.

(14) In a transparent multilayer film 10 shown in FIG. 1, a first dielectric layer 3, a silver alloy layer 4, and a second dielectric layer 5 are formed to be laminated on a substrate 2 in order from the substrate 2 side. The transparent multilayer film 10 includes an anchor region 8 including an oxide of an anchor metal between the first dielectric layer 3 and the silver alloy layer 4, and a cap region 9 including an oxide of an anchor metal between the silver alloy layer 4 and the second dielectric layer 5.

(15) The silver alloy layer 4 is constituted of an alloy of silver (Ag) and a high standard electrode potential metal which is a metal having a higher standard electrode potential than that of silver. The silver alloy layer 4 has high durability compared to a silver layer formed of only silver since the silver alloy layer contains the high standard electrode potential metal.

(16) The anchor metal is a metal having surface energy less than the surface energy of silver. The anchor metal has a function of suppressing granulation of the silver alloy layer 4 and contributes to the formation of a flat silver alloy layer 4.

(17) In the specification, the expression transparent means that the internal transmittance with respect to light in a wavelength range of 400 nm to 800 nm (visible light) is 10% or more.

(18) The transparent multilayer film 10 shown in FIG. 1 can be formed and prepared by forming the first dielectric layer 3 on the substrate 2 by vacuum deposition, forming a transparent optical film 1 including the silver alloy layer 4 on the first dielectric layer 3, and further forming the second dielectric layer 5 on the silver alloy layer 4 by vacuum deposition.

(19) In FIG. 1, the anchor region 8, the silver alloy layer 4, and the cap region 9 constitutes the transparent optical film 1 produced by the method for producing a transparent optical film according to the embodiment of the present invention. The transparent optical film 1 prepared in the method for producing a transparent optical film according to the embodiment of the present invention may not include the anchor region 8 and the cap region 9.

(20) The method for producing a transparent optical film according to the embodiment of the present invention includes a film formation step forming at least a silver layer and a high standard electrode potential metal layer to be laminated on a substrate, the film formation step including a silver deposition step B of forming the silver layer having a thickness of 6 nm or less by vacuum deposition, and a high standard electrode potential metal deposition step C of forming the high standard electrode potential metal layer which is a layer formed of a high standard electrode potential metal which is a metal having a higher standard electrode potential than that of silver by vacuum deposition, and an alloying step D.sub.1 of forming a silver alloy layer by diffusing the high standard electrode potential metal in the silver layer by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower (refer to FIGS. 2 and 4).

(21) As the high standard electrode potential metal to be deposited in the high standard electrode potential metal deposition step, gold (Au), palladium (Pd), and platinum (Pt) may be used. Among these metals, Au has the highest standard electrode potential and is suitable for corrosion prevention. In addition, from the viewpoint of the refractive index and the extinction coefficient, Au is preferable. Since the refractive index of Au is as small as the refractive index of Ag, the influence on antireflective performance is small. On the other hand, since the extinction coefficient (absorbance) is large compared to Ag, the transmittance tends to decrease as the amount of Au increases.

(22) The effect of corrosion prevention can be obtained as long as the high standard electrode potential metal is contained in a small amount, and the durability is improved as the amount thereof increases. On the other hand, there is a correlation between the amount of the high standard electrode potential metal (hereinafter, referred to as amount of the metal added) and the light absorption amount, and as the amount of the metal added increases, the transmittance decreases. Therefore, from the viewpoint of the transmittance, as the amount of the metal added decreases, the transparency is improved. Assuming that an optical thin film is used as an antireflection film, the absorbance at a wavelength of 550 nm is desirably 10% or less. From the viewpoint of achieving both corrosion resistance and transparency, the amount of the metal added is preferably 10% by atom or less and more preferably 5% by atom or less and 1% by atom or more with respect to the amount of silver.

(23) The temperature of the heating treatment in the alloying step may be 50 C. or higher and 400 C. or lower, and is preferably 200 C. or higher and 400 C. or lower, more preferably 250 C. or higher and 350 C. or lower, and particularly preferably 300 C. as the temperature for not aggregation of Ag and not causing damage to each layer.

(24) Although the heating time is not particularly limited, it is preferable that a heating treatment is performed until the high standard electrode potential metal is uniformly mixed in the silver layer. For example, in a case where heating is performed at 300 C. for 5 minutes, the high standard electrode potential metal can be sufficiently uniformly mixed. The diffusion state and the mixed state of the high standard electrode potential metal in the silver alloy layer can be confirmed by depth direction elemental analysis by X-ray photoelectron spectroscopy (XPS or electron spectroscopy for chemical analysis (ESC)). In the mixed state, the depth profiles of the high standard electrode potential metal and Ag by XPS are almost matched. A case where the depth profiles are matched means that the depth direction positions indicating the concentration peak are matched and the behaviors of the density change are matched but does not mean that the density values are matched.

(25) It is preferable that the film formation step includes the anchor metal deposition step of forming an anchor metal layer formed of an anchor metal having surface energy less than the surface energy of Ag on a side closer to the substrate than to the silver layer by vacuum deposition. Then, in a case where the film formation step includes the anchor metal deposition step, after the anchor metal deposition step and the silver deposition step, an oxidation step of oxidizing at least a part of the anchor metal by performing a heating treatment under an oxygen-containing atmosphere is performed.

(26) The anchor metal is a metal having surface energy less than the surface energy of the silver layer. In the specification, the surface energy (surface tension) is defined as surface energy calculated using =.sub.0+(tt.sub.0)(d/dt) from Metals Data Book, Nippon Kinzoku Gakkai, 4th revised edition, p. 16.

(27) Hereinafter, the surface energy of various metal elements at room temperature calculated by the above method is listed.

(28) TABLE-US-00001 TABLE 1 Surface Surface energy energy Surface energy Element (mN/m) Element (mN/m) Element (mN/m) Bi 395.22 Si 1045.05 Ti 2081.6 Pb 507.26 Ag 1052.712 Cr 2292 Sn 558.49 Al 1136.25 Ir 2317.983 In 567.844 Mn 1333.2 Ni 2321.02 Mg 778.1 Cu 1422.54 Co 2592.32 Nd 778.91 Au 1679.76 Fe 2612.39 Zn 848.98 Pd 1835.94 Ta 2888 Ge 857.34 Hf 2032.78 Mo 3024.6 Ga 718 W 3472.08

(29) According to the above table, the surface energy of the silver layer is 1053 mN/m.

(30) Therefore, in a case where an ultrathin silver film having large surface energy (6 nm or less) is directed formed on an oxide or nitride film having small surface energy, the silver grain growth is promoted and a smooth ultrathin film is not easily formed. This is because silver is more stable in bonding with each other than by bonding with oxide or nitride. In order to obtain a smooth ultrathin silver film (or silver alloy), during the investigations conducted by the present inventors, the present inventors have found that it is effective to provide an anchor metal layer on the substrate or dielectric layer to be a film forming surface.

(31) As the anchor metal, among the metal elements shown in Table 1, bismuth (Bi), lead (Pb), tin (Sn), indium (In), magnesium (Mg), zinc (Zn), gallium (Ga), germanium (Ge), and silicon (Si), of which the surface energy roughly satisfies a range of more than 200 mN/m and less than 1053 mN/m, are preferable. Pb, Sn, In, Mg, Zn, Ga, and Ge are more preferable. In, Ga, and Ge are even more preferable and particularly preferable is Ge.

(32) In the film formation of the anchor metal layer, the anchor metal layer may be formed as an alloy layer formed of two or more metals or at the time of film formation of the anchor metal layer, a plurality of layers each formed of a single metal may be laminated.

(33) The thickness of the anchor metal layer is preferably 0.2 nm to 2 nm. In a case where the thickness of the anchor metal layer is 0.2 nm or more, granulation of the metal layer to be formed thereon can be sufficiently suppressed. In addition, in a case where the thickness of the anchor metal layer is 2 nm or less, absorption of incident light by the anchor metal layer itself can be suppressed and thus a decrease in the transmittance of the transparent optical film can be suppressed. As the anchor metal, a single metal may be used or two or more metals may be used. At this time, in the anchor metal deposition step, the anchor metal layer may be formed as an alloy layer formed of two or more metals and a plurality of layers each formed of a single metal may be laminated.

(34) The oxygen-containing atmosphere under which a heating treatment is performed in the oxidation step of oxidizing at least a part of the anchor metal is, for example, the atmosphere. The higher the concentration of oxygen is, the more preferable it is. The oxygen partial pressure is preferably 0.01 Pa or more. The temperature of the heating treatment at this time is preferably about 300 C. Since at least a part of the anchor metal can be oxidized by this oxidation step, the transmittance can be improved. In this oxidation step, the diffusion of the anchor metal also occurs at the same time.

(35) The oxidation step can be performed simultaneously with the alloying step by performing the heating treatment under the oxygen-containing atmosphere after all of the anchor metal layer, the silver layer, and the high standard electrode potential metal layer are laminated. In addition, after the anchor metal layer and the silver layer are laminated and before the potential metal layer is laminated, by performing the heating treatment under the oxygen-containing atmosphere, separately from the alloying step, the oxidation step can be performed in the stage before the alloying step.

(36) Hereinafter, as the method for producing the transparent optical film 1 including the anchor region 8, the silver alloy layer 4, and the cap region 9 in the transparent multilayer film 10 shown in FIG. 1, the production methods according to first to fifth embodiments will be described. FIG. 2 is a view showing flows I, II, and III of the production methods according to the first to third embodiments, and FIG. 3 is a view showing layer constitutions in the production processes by the flows I, II, and III. In addition, FIG. 4 is a view showing flows IV and V in the production methods according to the fourth and fifth embodiments, and FIG. 5 is a view showing layer constitutions in the production processes by the flows IV and V.

Production Methods According to First to Third Embodiments

(37) In any of the production methods according to the first to third embodiments, after the film formation step is completed, at least one heating treatment is performed.

(38) In the production method according to the first embodiment, as shown in the flow I in FIGS. 2 and 3, first, an anchor metal layer 42 is formed on a substrate 21 by vacuum deposition as the anchor metal (anchor metal deposition step A), a silver layer 44 having a thickness of 6 nm is formed on the anchor metal layer 42 by vacuum deposition (silver deposition step B), and a high standard electrode potential metal layer 46 which is formed of a high standard electrode potential metal which is a metal having a higher standard electrode potential than that of silver is formed on the silver layer 44 by vacuum deposition (high standard electrode potential metal deposition step C). Here, the substrate 21 is formed such that the first dielectric layer 3 is provided on the substrate 2 itself shown in FIG. 1 or on the substrate 2 shown in FIG. 1.

(39) It is necessary that the anchor metal layer 42 is provided on a side closer to the substrate 21 than to the silver layer 44. However, the lamination order of the high standard electrode potential metal layer 46 is not limited. Accordingly, as the method for producing a transparent optical film according to the second embodiment, as shown in the flow II in FIGS. 2 and 3, the anchor metal deposition step A, the high standard electrode potential metal deposition step C, and the silver deposition step B may be performed in order and the anchor metal layer 42, the high standard electrode potential metal layer 46, and the silver layer 44 may be formed to be laminated in order from the substrate 21 side.

(40) In addition, as the production method according to the third embodiment, as shown in the flow III in FIGS. 2 and 3, the high standard electrode potential metal deposition step C, the anchor metal deposition step A, and the silver deposition step B may be performed in order and the high standard electrode potential metal layer 46, the anchor metal layer 42, and the silver layer 44 may be formed to be laminated in order from the substrate 21 side.

(41) In the production methods according to the first to third embodiments, after the three layers are formed sequentially (after the film formation step), by performing a heating treatment at a temperature of about 300 C. under an oxygen-containing atmosphere, the alloying step D.sub.1 and the oxidation step D.sub.2 are performed at the same time. By this heating treatment, the high standard electrode potential metal constituting the high standard electrode potential metal layer 46 is diffused in the silver layer 44 to form a silver alloy layer 4 of silver and the high standard electrode potential metal.

(42) In addition, by performing this heating treatment under an oxygen-containing atmosphere, the anchor metal of the anchor metal layer 42 moves to the substrate 21 side and the surface side of the silver alloy layer 4, and the anchor metal moved to the surface side and the anchor metal on the substrate 21 side are partially oxidized. In addition, a very small amount of the anchor metal may remain in the silver alloy layer 4.

(43) As a result, on the substrate 21 shown in the lower drawing in FIG. 3, the transparent optical film I including the anchor region 8 including the anchor metal and an anchor metal oxide and the cap region 9 including the silver alloy layer 4 of silver and the high standard electrode potential metal and an anchor metal oxide is formed.

(44) According to the production method, since a heating treatment may be performed once and this heating treatment performed once serves as the alloying step D.sub.1 and the oxidation step D.sub.2 of oxidizing the anchor metal, the production is easy.

(45) The anchor region 8 is a region formed by changing the anchor metal layer 42 provided for smoothly forming this silver layer 44 before laminating the silver layer 44 in the production process, and is an interface region between the substrate 21 and the silver alloy layer 4. The cap region 9 is an interface region on the surface side of the silver alloy layer 4 including an anchor metal oxide oxidized at the surface of the silver alloy layer 4 by oxygen in the atmosphere after allowing the anchor metal constituting the anchor metal layer 42 to pass through the silver alloy layer 4 in the production process.

(46) In the anchor region 8, in addition to the anchor metal and the oxide thereof, atoms present in the silver alloy layer 4 and the substrate 21 are mixed and in the cap region 9, in addition to the anchor metal oxide, atoms present in the silver alloy layer 4 are mixed.

(47) In the anchor region 8, an oxidized anchor metal (anchor metal oxide) and an unoxidized anchor metal may be mixed. However, it is desirable that the content of the anchor metal oxide is larger than the content of the unoxidized anchor metal, and it is particularly preferable that the whole anchor metal included in the anchor region 8 is oxidized.

(48) On the other hand, it is preferable that the whole anchor metal included in the cap region 9 is oxidized to form an anchor metal oxide.

(49) The anchor region 8 and the cap region 9 are considered to have the effect of suppressing aggregation of silver into particles. In the production process, at the stage in which the anchor metal layer and the silver layer are formed sequentially, the anchor metal moves. It is considered that since the anchor metal becomes an oxide, the anchor metal is stable, movement of silver is suppressed to achieve aggregation suppression, and the cap performance such as long-term stability, water resistance, and moisture resistance is improved. By heating under the presence of oxygen, most of the anchor metal in the cap region becomes an oxide. At this time, it is preferable that 80% or more of the anchor metal included in the cap region is oxidized and it is more preferable that the whole anchor metal is oxidized to form an anchor metal oxide.

(50) By providing the anchor region and the cap region as described above, it is possible to obtain a transparent optical film having an ultrathin silver alloy layer 4 in which flatness and transparency are compatible.

Production Methods According to Fourth and Fifth Embodiments

(51) In the production methods according to the fourth and fifth embodiments, the oxidation step D.sub.2 and the alloying step D.sub.1 are separately performed.

(52) In the production methods according to the fourth and fifth embodiments, as shown in the flows IV and V in FIGS. 4 and 5, first, the anchor metal layer 42 is formed on the substrate 21 by vacuum deposition as the anchor metal (anchor metal deposition step A), and the silver layer 44 having a thickness of 6 nm or less is formed on the anchor metal layer 42 by vacuum deposition (silver deposition step B).

(53) Thereafter, after the anchor metal layer 42 and the silver layer 44 are sequentially formed, by performing a heating treatment at about 300 C. under an oxygen-containing atmosphere, the oxidation step D.sub.2 of oxidizing the anchor metal is performed. By this heating treatment, the anchor metal of the anchor metal layer 42 moves to the substrate 21 side and the surface side of the silver layer 44 the anchor metal moved to the surface side and the anchor metal on the substrate 21 side are partially oxidized. Thus, a laminated structure of the anchor region 8 including the anchor metal and the anchor metal oxide and the cap region 9 including the silver layer 44 and the anchor metal oxide is formed on the substrate 21. In addition, a very small amount of the anchor metal may remain in the silver layer 44.

(54) The above steps are common to the production methods of the fourth and fifth embodiments.

(55) In the production method according to the fourth embodiment, as shown in the flow IV, after the oxidation step D.sub.2, the high standard electrode potential metal is vacuum-deposited on the cap region 9 (high standard electrode potential metal deposition step C). By setting the substrate temperature at the time of deposition to 50 C. or higher and 400 C. or lower, the high standard electrode potential metal deposition step C and the heating treatment as the alloying step D.sub.1 are performed at the same time. Thus, the high standard electrode potential metal passes through the cap region 9 while being laminated, and is diffused in the silver layer 44 to form the silver alloy layer 4 of silver and the high standard electrode potential metal.

(56) In the production method according to the fourth embodiment, by the above steps, the transparent optical film 1 including the anchor region 8 including the anchor metal and the anchor metal oxide and the cap region 9 including the silver alloy layer 4 of silver and the high standard electrode potential metal and the anchor metal oxide is formed on the substrate 21.

(57) In the production method according to the fifth embodiment, as shown in the flow V, after the oxidation step D.sub.2, the high standard electrode potential metal is vacuum-deposited on the cap region 9 (high standard electrode potential metal deposition step C). Here, by performing the step C while setting the substrate temperature to room temperature, the high standard electrode potential metal layer 46 is formed on the surface of the cap region 9.

(58) Thereafter, by performing a heating treatment at a temperature of 50 C. or higher and 400 C. or lower on a laminate in which the anchor region 8, the silver layer 44, the cap region 9, and the high standard electrode potential metal layer 46 are laminated in order on the substrate 21, the alloying step D.sub.1 is performed. The atmosphere of the heating treatment is not particularly limited and may be in vacuum. In the alloying step D.sub.1, the high standard electrode potential metal passes through the cap region 9 and diffused in the silver layer 44 to form the silver alloy layer 4 of silver and the high standard electrode potential metal.

(59) In the production method according to the fifth embodiment, by the above steps, the transparent optical film 1 including the anchor region 8 including the anchor metal and the anchor metal oxide and the cap region 9 including the silver alloy layer 4 of silver and the high standard electrode potential metal and the anchor metal oxide is formed on the substrate 21.

(60) As described above, the same transparent optical films I can be prepared by the production methods of the first to fifth embodiments.

(61) The transparent optical film according to the embodiment of the present invention can be applied to a transparent conductive film or an antireflection film.

(62) In the method for producing a transparent optical film according to the embodiment of the present invention, the shape of the substrate 2 on which the transparent optical film is formed is not particularly limited and the substrate is a transparent optical member that is mainly used in an optical device, such as a flat plate, a concave lens, or a convex lens, or a flexible transparent film. As the material for the substrate, glass, plastic, and the like can be used.

(63) The refractive index of the substrate 2 is not particularly limited and is preferably 1.45 or more. The refractive index of the substrate 2 may be 1.61 or more and 1.74 or more and further 1.84 or more. For example, the substrate 2 may be a high power lens such as a first lens of a group lens of a camera or the like. In the present specification, all the refractive indices are refractive indices with respect to light having a wavelength of 500 nm.

(64) In the method for producing a transparent multilayer film according to the embodiment of the present invention, the first dielectric layer and the second dielectric layer to be formed by vacuum deposition are basically formed of a material transparent to visible light.

(65) In a case where an antireflection film is prepared as a transparent multilayer film, the first dielectric layer 3 may be constituted of a single layer having a refractive index different from the refractive index of the substrate 2, and may be constituted of a plurality of layers formed by alternately laminating a layer of high refractive index 11 and a layer of low refractive index 12 as shown in (a) and (b) of FIG. 1. At this time, as shown in (a) of FIG. 1, the layer of low refractive index 12, the layer of high refractive index 11 may be laminated in order from the substrate 2 side and as shown in (b) of FIG. 1, the layer of high refractive index 11 and the layer of low refractive index 12 may be laminated in order from the substrate 2 side. Although the number of the first dielectric layers 3 is not limited, the number of the first dielectric layers is preferably 16 or less from the viewpoint of cost suppression.

(66) The layer of high refractive index 11 may have a high refractive index compared to the refractive index of the layer of low refractive index 12, and the layer of low refractive index 12 may have a low refractive index compared to the refractive index of the layer of high refractive index 11. It is more preferable that the refractive index layer of high refractive index 11 is higher than the refractive index of the substrate 2, and the refractive index of the layer of low refractive index 12 is lower than the refractive index of the substrate 2.

(67) The layers of high refractive index 11 or the layers of low refractive index 12 may not have the same refractive index and a case where the refractive index layers are formed of the same material and have the same refractive index is preferable from the viewpoint of suppressing material cost, film formation cost and the like.

(68) Examples of the material for forming the layer of low refractive index 12 include silicon oxide (SiO.sub.2), silicon oxynitride (SiON), gallium oxide (Ga.sub.2O.sub.3), aluminum oxide (Al.sub.2O.sub.3), lanthanum oxide (La.sub.2O.sub.3), lanthanum fluoride (LaF.sub.3), magnesium fluoride (MgF.sub.2), and sodium aluminum fluoride (Na.sub.3AlF.sub.6).

(69) Examples of the material for forming the layer of high refractive index 11 include niobium pentoxide (Nb.sub.2O.sub.5), titanium oxide (TiO.sub.2), zirconium oxide (ZrO.sub.2), tantalum pentoxide (Ta.sub.2O.sub.5), silicon oxynitride (SiON), silicon nitride (Si.sub.3N.sub.4), silicon niobium oxide (SiNbO), and Substance H4 (manufactured by Merck Group).

(70) The refractive index can be changed to some extent by controlling any of these compounds to have the constitutional element ratio which is shifted from the compositional ratio of the stoichiometric ratio or by forming a film by controlling the film formation density. The materials constituting the low refractive index layer and the high refractive index layer are not limited to the above compounds as long as the materials satisfy the above-mentioned refractive index condition. In addition, unavoidable impurities may be included.

(71) The second dielectric layer may be formed of a single layer or a plurality of layers. Examples of the material constituting the second dielectric layer include SiO.sub.2, SiON, MgF.sub.2, and Na.sub.3AlF.sub.6, and particularly preferable is SiO.sub.2 or MgF.sub.2. It is particularly preferable to provide a SiO.sub.2 layer and a fluorocarbon layer which is provided as a self-assembled film on the SiO.sub.2. In a case where the second dielectric layer is formed of a plurality of layers, the refractive index of each layer is preferably 1.35 or more and 1.51 or less. However, the dielectric layer may be provided with a very thin layer having a high refractive index (for example, less than 1 nm). The refractive index can be changed to some extent by controlling any of these compounds to have the constitutional element ratio which is shifted from the compositional ratio of the stoichiometric ratio or by forming a film by controlling the film formation density.

(72) In a case where the transparent multilayer film is an antireflection film, the thickness (total thickness) of the second dielectric layer is preferably about /4n in a case in which a target wavelength is and the refractive index of the second dielectric layer is n. Specifically, the thickness of the second dielectric layer is about 70 nm to 100 nm.

(73) In the method for producing a transparent multilayer film according to the embodiment of the present invention, since all of the first dielectric layer, the transparent optical film, and the second dielectric layer are formed by a deposition method and are formed in a single layer, in a case where film formation by a sputtering apparatus is used in combination, the control is not complicated as in co-deposition, the configuration of the production apparatus is simple, and the production cost can be suppressed.

EXAMPLES

(74) Hereinafter, the results of the verification of the method for producing a transparent optical film according to the embodiment of the present invention will be described.

Thermal Diffusion of High Standard Electrode Potential Metal into Silver (Ag) Layer

(75) As a high standard electrode potential metal, Au was used.

(76) Layers of Ge, Ag, and Au were formed on a glass substrate by vacuum deposition in this order. The film formation temperature was set to room temperature. At this time, a sample 1 in which the film thickness of the Ge layer was 1 nm and the film thickness of the Au layer was 0.4 nm in common, and the film thickness of the Ag layer was 4 nm and a sample 2 in which the film thickness of the Ag layer was 40 nm were prepared.

(77) Before and after a heat treatment was performed at 300 C. for 5 minutes, the samples 1 and 2 were subjected to XPS measurement to measure the elemental distribution in the depth direction. The results of XPS are shown in FIG. 6 and FIG. 7. FIG. 6 shows data regarding the sample 1 with the Ag layer having a film thickness of 4 nm, and FIG. 7 shows a data regarding the sample 2 with the Ag layer having a film thickness of 40 nm. In FIGS. 6 and 7, the left drawing shows a state before heating and the right drawing shows a state after heating. In addition, the horizontal axis represents cutting time (minute) and means the thickness direction depth. The vertical axis shows the amount of each element in arbitrary unit.

(78) As shown in FIG. 6, it is found that in the sample 1 in which the film thickness of the Ag layer is 4 nm, the Au depth profile and the Ag depth profile are almost matched in the data after heating, and Au is diffused over the entire region in the thickness direction of the Ag layer. On the other hand, as shown in FIG. 7, it is found that in the sample 2 in which the film thickness of the Ag layer is 40 nm, in the data after heating, the Au peak is present on the surface side of the Ag layer, and Au is not diffused to the deep position exceeding 10 nm in the film thickness direction of the Ag layer.

(79) In the production method according to the embodiment of the present invention, it is considered that since the film thickness at the time of film formation of the Ag layer is 6 nm or less and is very thin, Au is diffused over the entire region in the film thickness direction of the Ag layer, good alloying (mixing of Ag and Au) can be achieved.

Evaluation of Durability and Absorbance

(80) Each of transparent multilayer films 60 of Examples 1 to 13 and Comparative Examples 1 to 4 was produced on a glass substrate, and the durability and absorption were evaluated.

Preparation Method

(81) FIG. 8 is a view showing production steps in Examples and Comparative Examples.

(82) As a glass substrate 62, Eagle-XG (manufactured by Corning Incorporated) was used. The glass substrate was used after being washed.

(83) On the glass substrate 62, a Ge layer 63, an Ag layer 64, and an Au layer 65 were respectively formed by vacuum deposition such that the Ge layer 63 as an anchor metal layer was formed at a film thickness of 1 nm and the Ag layer 64 was formed at each film thickness shown in Table 2 described later, and the Au layer 65 as a high standard electrode potential metal layer was formed at each film thickness shown in Table 2. EBX-1000 (manufactured by ULVAC, Inc.) was used as a vacuum apparatus.

(84) Then, using a hot plate, a heating treatment was performed for 5 minutes at each temperature shown in Table 2 in the atmosphere, which is one mode of an oxygen-containing atmosphere, to perform alloying of Ag and Au and oxidize Ge. Thus, the Ge layer 63, the Ag layer 64, and the Au layer 65 became a Ge/GeO.sub.2 anchor region 68, an AgAu layer (silver alloy layer) 67, and a GeO.sub.2 cap region 69.

(85) Then, a dielectric layer 70 of each material and film thickness described in Table 2 was formed. A film of MgF.sub.2 and SiO.sub.2 fluorine coat (F coat: Surf Clear100 (manufactured by Canon Optron Co., Ltd.)) was formed by vacuum deposition. The substrate temperature at the time of film formation was set to room temperature.

(86) The tests for the durability of the transparent multilayer films 60 of Examples and Comparative Examples obtained by the above procedure and the absorbance of the transparent optical film formed of the anchor region 68, the silver alloy layer 67, and the cap region 69 in each transparent multilayer film 60 was performed.

Durability

(87) Each transparent multilayer film was immersed in 5% by mass saline solution and the abnormality occurrence time was visually measured to evaluate the durability. Since silver turns yellow in a case where silver is oxidized by saline solution, the time taken from immersion in saline solution to yellowing was examined and evaluated according to the following standards. The evaluation results are shown in Table 2 shown below.

(88) A: 48 hours or longer

(89) B: 24 hours or longer and shorter than 48 hours

(90) C: 12 hours or longer and shorter than 24 hours

(91) D: 5 minutes or longer and shorter than 12 hours

(92) E: Shorter than 5 minutes

Absorbance

(93) The transmittance and reflectance were measured for the transparent multilayer film of each Example and Comparative Example, and the absorbance was calculated. A U-4000 spectrophotometer (manufactured by Hitachi High-Technologies Corporation) was used for the measurement of the transmittance and reflectance. Further, by subtracting the absorbance of the substrate and the dielectric layer, the absorbance of the transparent optical film was substantially obtained. Here, the absorbance at a wavelength of 550 nm was evaluated based on the following standards. The evaluation results are shown in Table 2 shown below. In the transparent optical films, generally, the thicker the film thickness of silver, the larger the absorption of visible light. On the other hand, in a case where the film thickness of silver is excessively thin to cause granulation, plasmon absorption appears and the absorbance of visible light increases. That is, this means that as the absorbance becomes smaller, the smoother and thinner silver alloy layer is obtained.

(94) A: 4% or less

(95) B: More than 4% and 6% or less

(96) C: More than 6% and 8% or less

(97) D: More than 8% and 10% or less

(98) E: More than 10%

(99) TABLE-US-00002 TABLE 2 Ge Ag Au Film Film Film Heating thickness thickness thickness temperature (nm) (nm) (nm) ( C.) Dielectric layer Durability Absorbance Comparative 1 4 MgF.sub.2 80 nm E E Example 1 Comparative 1 4 300 MgF.sub.2 80 nm E A Example 2 Comparative 1 4 300 MgF.sub.2 69 nm D A Example 3 SiO.sub.2 5 nm F coat 16 nm Comparative 1 4 0.4 MgF.sub.2 80 nm B E Example 4 Example 1 1 4 0.4 50 MgF.sub.2 80 nm B D Example 2 1 4 0.4 100 MgF.sub.2 80 nm B D Example 3 1 4 0.4 200 MgF.sub.2 80 nm B C Example 4 1 4 0.4 300 MgF.sub.2 80 nm B B Example 5 1 4 0.4 400 MgF.sub.2 80 nm B C Example 6 1 4 0.4 300 MgF.sub.2 80 nm C A Example 7 1 4 0.4 300 MgF.sub.2 80 nm C A Example 8 1 4 0.4 300 MgF.sub.2 80 nm B B Example 9 1 2 0.4 300 MgF.sub.2 80 nm B C Example 10 1 3 0.4 300 MgF.sub.2 80 nm B B Example 11 1 5 0.4 300 MgF.sub.2 80 nm B C Example 12 1 6 0.4 300 MgF.sub.2 80 nm B D Example 13 1 4 0.4 300 MgF.sub.2 69 nm A B SiO.sub.2 5 nm F coat 16 nm

(100) As shown in Table 2, in Examples 1 to 13 of the present invention, the evaluation of durability was C or higher, the evaluation of absorbance was D or higher, and the transparent multilayer films were practically preferable. On the other hand, in Comparative Examples 1 to 4, the evaluation of durability was D or lower or the evaluation of absorbance was E or lower, and the transparent multilayer films were not suitable for practical use.

(101) Examples 1 to 5 have the same conditions except for the heating temperature. While the durability was equivalent in Examples 1 to 5, the absorbance was smallest in Example 4 n which the heating temperature was 300 C., and the absorbance was large in Examples 1 and 2 in which the temperature was 100 C. or lower. It is considered that this is because alloying progresses and the oxidation of Ge progresses due to the diffusion of Au into Ag.

(102) In Examples 4 and 6 to 8, the transparent multilayer films were prepared under the same conditions except for the film thickness of the Au layer. The smaller the film thickness of the Au layer, the smaller the absorption, which is preferable. However, the poorer the durability, the smaller the film thickness of the Au layer. It was found that the effect of corrosion prevention by a high standard electrode potential metal such as Au is in a trade-off relationship with an increase in absorbance.

(103) In Examples 9 to 12, the amount of Au is common, but the film thickness of the Ag layer is different. Basically, as the film thickness of the Ag layer becomes larger, the absorption increases. On the other hand, in Example 9, the increase in absorbance is considered to be due to the fact that since the film thickness of the Ag layer is too thin, planarization is more difficult, the growth of some grains occurs, and plasmon absorption appears.

(104) From the comparison between Example 13 and Comparative Example 3, the effect of improving the durability by forming the transparent optical film including the silver alloy layer formed of AgAu by forming the Au layer is apparent. In addition, by using the F coat and film formation of the Au layer in combination, particularly preferable durability is obtained.

Antireflection Film

(105) The antireflection performance in an optical member including the antireflection film constituted of the first dielectric layer, the transparent optical film, and the second dielectric layer on the substrate was investigated. Here, an optical member 80 having a laminated structure shown in FIG. 9 was investigated.

(106) The optical member 80 has a structure in which a first dielectric layer 83 constituted of a total of four layers in which layers of SiO.sub.2 and TiO.sub.2 are alternately laminated, an anchor region 88 including Ge, which is an anchor metal, and GeO.sub.2, a silver alloy layer (AgAu layer) 84 formed of AgAu, a cap region 89 including GeO.sub.2, and a second dielectric layer 85 formed of MgF.sub.2 are laminated on a substrate 82 formed of SNBH 5 (manufactured by Ohara Inc.; refractive index: 1.66393). The antireflection film formed of the multilayer film laminated on the substrate 82 can be prepared by the method for producing a transparent multilayer film using the method for producing a transparent optical film according to the embodiment of the present invention.

(107) In Table 3 shown below, the film thickness obtained by optimizing the film thickness using the layer constitution of the antireflection film used in the simulation and Essential Macleod (manufactured by Thin Film Center Inc.) is shown. In the simulation, the refractive index of SiO.sub.2 was 1.462, the refractive index of TiO.sub.2 was 2.291, and the refractive index of MgF.sub.2 was 1.385. The amount of Au in the AgAu layer 84 was 10% by atom and the refractive index thereof was 0.2047. The refractive index of the AgAu layer was calculated based on the literature values of Ag and Au (Appl. Opt. 37, 5271-5283 (1998)) according to the method described in Optical Materials Springer P. 35. It was assumed that the region containing Ge is so thin that the region hardly affects the simulation results.

(108) TABLE-US-00003 TABLE 3 Laminated structure Film thickness (nm) MgF.sub.2 83.0 AgAu (10%) 5.5 TiO.sub.2 16.9 SiO.sub.2 75.6 TiO.sub.2 6.2 SiO.sub.2 49.5 Substrate S-NBH 5

(109) FIGS. 10 and 11 respectively show wavelength dependence of reflectance and transmittance in a case where light is incident into the optical member from the antireflection film side. From FIG. 10, it is found that a reflectance of 0.1% or less can be realized over a very wide range of visible light. In addition, from FIG. 11, a transmittance of 93% or more can be realized over a very wide range of visible light at a wavelength of 400 nm to 800 nm.

EXPLANATION OF REFERENCES

(110) 1: transparent optical film 2: substrate 3: first dielectric layer 4: silver alloy layer 5: second dielectric layer 8: anchor region 9: cap region 10: transparent multilayer film 11: layer of high refractive index 12: layer of low refractive index 21: substrate 42: anchor metal layer 44: silver layer 46: high standard electrode potential metal layer 60: transparent multilayer film 62: glass substrate 63: Ge layer 64: Ag layer 65: Au layer 67: AgAu layer (silver alloy layer) 68: GeO.sub.2 anchor region 69: GeO.sub.2 cap region 70: dielectric layer 80: optical member 82: substrate 83: first dielectric layer 84: AgAu layer (silver alloy layer) 85: second dielectric layer 88: anchor region 89: cap region